CS260079B1 - Cyclic code's decoder connection for electron-optical instrument's electron beam's control electronics - Google Patents

Abstract

The wiring relates to electron optical instruments. The essence of the connection is the connection a cyclic code encoder using an address bus and data buses to the control site device data paths, that is to block slow deflection, block of rapid deflection, block size and block exposure values. Data path minimally must not be corrected for the time of data transmission control data due to random external states or during the testing period data flow repeatability must be ensured.

Description

The invention discloses the connection of a cyclic code encoder in the electron beam control electronics of an electron optical device.

At present, electron optical instruments - electron lithographs and test microscopes are not equipped for computer testing. Errors are analyzed by evaluating exposures and raster images. If a data transmission error is suspected, the error analysis is performed on simpler - test images. The procedure of analysis is then given by the individual abilities and method of the worker.

These prior art problems are overcome by the connection of the cyclic code encoder to the electron beam control electronics of an electron optical device, which consists in that it consists of an electronic beam function control block connected by an auxiliary bus to the cyclic code encoder block and both connected to the address bus and data bus. the parallel deflection block, the rapid deflection block, the beam dimension block, the exposure value block, the output buses of which are connected to the digital analogue converters of the electronic system of the optical device.

The main advantage of the circuit according to the invention is that by comparing the values of the calculated cyclic code at a given point of the data path with a known code value for the test data and the given point of the path, the error of the entire data path - bus - from source to test point real time. However, it is necessary to avoid correction of data due to random external environment conditions during the inspection period, or the repeatability of the data flow must be ensured during the inspection period.

The invention will be explained in more detail by the attached block diagram of an electron beam lithograph.

The slow deflection bus 101 forms the input of the slow deflection block 2 with the first output bus 201 connected to the D / A converter in the electronic system T of the optical apparatus. The rapid deflection bus 102 forms the input of the rapid deflection block 2 with the second output bus 202 coupled to the D / A converter in the optical system electronic system.

The electron beam dimension bus 103 forms the input of the beam dimension block 2 with the third output bus 203 connected to the D / A converter in the electronic system T of the optical apparatus.

The exposure value bus 104 forms the input of the exposure value block 2 with a fourth output bus 204 coupled to the D / A converter in the electronic system T. of the optical device. Further, a parallel connection is made to the address bus 108 and the data bus 109 of the slow deflection block 1, the rapid deflection block 2, the electron beam size block 2, the exposure value block 2, the function control block 5 and the cyclic code encoder block 2. The cyclic code encoder block 2 is still connected by the auxiliary bus 106 to the function control block 2 with the function command input bus 105 from the computer.

In normal operation, I enter information - data - through the slow deflection buses 101,

102 rapid deflection, 103 electron beam size, 104 exposure value to slow deflection blocks 2, 2 rapid deflection, 2 electron beam size, 2 exposure values. On their first, second, third and fourth output buses 201, 202, 203, 204, they generate the necessary data for the D / A converters and analog amplifier deflection octupoles in the electronic system 2 of the optical device. During testing, before the test data is transferred with the function command bus 105 from the computer, the address of the test path of the data path is communicated to the function control block 2, which resets the internal registers 106 of the cyclic code encoder block 2. One of the blocks 2 of the slow deflection, 2 of the fast deflection, 2 of the electron beam size, 2 of the exposure value, which knows the reserved address, attaches the data path point to the data bus 109. After this phase test data transmission is started maximum transmission frequency. The cyclic code block 2 generates cyclic code synchronously with the data stream. Upon completion of the transfer of test data, the computer via function command bus 105 reads the generated cyclic code from block 2 of the cyclic code encoder via function control block 2.

Based on the comparison of the read value of the cyclic code with the expected value, the further procedure of operation is then chosen. '

The connection of the cyclic code encoder can be used in all electron lithographs, electron microscopes and electron test microscopes.

Claims (1)

Connection of a cyclic code encoder to the electron beam control electronics of an electron-optical device, characterized in that the electronics control block (5) is connected by an auxiliary bus (106) to the cyclic code encoder block (6) connected to the address bus (108). ) and a data bus (109) to which the slow deflection block (1), the rapid deflection block (2), the electron beam dimension block (3), the exposure values block (4) whose first, second, third and fourth are the output buses (201, 202, 203, 204) are connected to the digital-to-analog converters of the electronic system (7) of the optical device.