JP2672690B2 - Semiconductor device testing method - Google Patents
Semiconductor device testing methodInfo
- Publication number
- JP2672690B2 JP2672690B2 JP2133525A JP13352590A JP2672690B2 JP 2672690 B2 JP2672690 B2 JP 2672690B2 JP 2133525 A JP2133525 A JP 2133525A JP 13352590 A JP13352590 A JP 13352590A JP 2672690 B2 JP2672690 B2 JP 2672690B2
- Authority
- JP
- Japan
- Prior art keywords
- output signal
- control
- output
- signal
- control signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Testing Electric Properties And Detecting Electric Faults (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Complex Calculations (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、出力端子および出力制御端子を有する半
導体デバイスの試験方法に関するものである。The present invention relates to a method for testing a semiconductor device having an output terminal and an output control terminal.
出力制御端子を有する半導体デバイス回路の試験にお
いて、その試験内容によっては、出力信号を所定の値に
一致させてから試験を実施するものがある。In the test of a semiconductor device circuit having an output control terminal, depending on the test content, the test may be performed after the output signal is made to match a predetermined value.
第１図に、その一例として、制御電圧によりその増幅
度が変わる半導体デバイスの回路構成図を示す。このよ
うな回路で、出力振幅を自動調整によって所定の値に一
致させる場合、従来は第３図に示すように、まず、制御
電圧の調整範囲を等間隔にｎ分割（第３図ではｎ＝10）
し、各々の制御電圧に対する出力振幅を測定し、所定の
値y0を間に含む出力振幅y4,y5を与える制御電圧x4,x5を
求める。これにより制御電圧の調整範囲の1/n（第３図
ではｎ＝10）の分解能で所定の出力振幅を与える制御電
圧を求めることができる。FIG. 1 shows, as an example thereof, a circuit configuration diagram of a semiconductor device whose amplification degree changes depending on a control voltage. In such a circuit, when the output amplitude is adjusted to a predetermined value by automatic adjustment, conventionally, as shown in FIG. 3, the adjustment range of the control voltage is first divided into n equal intervals (n = 3 in FIG. 3). Ten)
Then, the output amplitude for each control voltage is measured, and the control voltages x 4 and x 5 that give the output amplitudes y 4 and y 5 including the predetermined value y 0 are obtained. As a result, the control voltage that gives a predetermined output amplitude can be obtained with a resolution of 1 / n (n = 10 in FIG. 3) of the control voltage adjustment range.
さらに、制御電圧x4と制御電圧x5の間をｎ分割し、上
記と同様のことを行えば、制御電圧の調整範囲の1/n2の
分解能で所定の出力振幅を与える制御電圧を求めること
ができる。Furthermore, if the control voltage x 4 and the control voltage x 5 are divided into n and the same operation as above is performed, a control voltage that gives a predetermined output amplitude is obtained with a resolution of 1 / n 2 of the control voltage adjustment range. be able to.
このように、ｍ回同様のことを繰り返すことにより、
制御電圧の調整範囲の1/nmの分解能となる。要求される
調整精度に応じてｎおよびｍを選択すればよい。通常
は、ｎ＝10の場合、ｍは２〜３で十分である。In this way, by repeating the same thing m times,
The resolution is 1 / n m of the control voltage adjustment range. It suffices to select n and m according to the required adjustment accuracy. Usually, for n = 10, m of 2-3 is sufficient.
しかしながら上記従来の方法によれば、出力振幅を所
定の値y0に一致させる場合、それに必要とする時間は、
ほぼ１回の測定時間×測定点数で表され、測定点数が20
〜30となるため、自動調整が完了するのに時間がかかっ
た。However, according to the above conventional method, when the output amplitude is made to match the predetermined value y 0 , the time required for it is
The number of measurement points is 20
Since it was ~ 30, it took time to complete the automatic adjustment.
この発明の目的は、調整精度を落とすことなく、測定
点数を減らし調整時間を短縮できる半導体デバイスの試
験方法を提供することである。An object of the present invention is to provide a semiconductor device testing method capable of reducing the number of measurement points and shortening the adjustment time without lowering the adjustment accuracy.
この発明の半導体デバイスの試験方法は、つぎの過程
を含むものである。The semiconductor device testing method of the present invention includes the following steps.
まず、第１の過程で、制御範囲の最小および最大の制
御信号を半導体デバイスに与え、それに対応する出力信
号を測定する。First, in the first step, the minimum and maximum control signals of the control range are given to the semiconductor device, and the output signals corresponding to them are measured.
つぎに、第２の過程では、第１の過程で測定した測定
値に基づき制御信号と出力信号の関係を直線近似し、演
算により所定の出力信号に対応する制御信号の近似値を
求める。Next, in the second step, the relationship between the control signal and the output signal is linearly approximated based on the measurement value measured in the first step, and the approximate value of the control signal corresponding to the predetermined output signal is calculated.
第３の過程では、近似値である制御信号を半導体デバ
イスに与え、それに対応する出力信号を測定し、この出
力信号と所定の出力信号との誤差を調べる。In the third step, an approximate control signal is applied to the semiconductor device, the corresponding output signal is measured, and the error between this output signal and a predetermined output signal is examined.
第４の過程では、誤差が許容範囲内であるときは近似
値である制御信号を求める値とし、誤差が許容範囲を超
えたときは第３の過程で測定した出力信号と制御範囲の
最小もしくは最大時の出力信号との間に所定の出力信号
を含むように、近似値である制御信号および第３の過程
で測定した出力信号と制御範囲の最大もしくは最小時の
制御信号および出力信号との間で再度制御信号と出力信
号の関係を直線近似し、演算により所定の出力信号に対
応する制御信号の近似値を求める。In the fourth step, when the error is within the allowable range, the control signal that is an approximate value is used as a value to be obtained, and when the error exceeds the allowable range, the output signal measured in the third step and the minimum of the control range or The control signal that is an approximate value and the output signal measured in the third process and the control signal and the output signal at the maximum or minimum of the control range are included so as to include a predetermined output signal between the maximum output signal and the maximum output signal. The relationship between the control signal and the output signal is linearly approximated again between them, and the approximate value of the control signal corresponding to the predetermined output signal is calculated.
そして、第３の過程および第４の過程を近似値である
制御信号に対応する出力信号と所定の出力信号との誤差
が許容範囲内になるまで繰り返す。Then, the third process and the fourth process are repeated until the error between the output signal corresponding to the control signal that is an approximate value and the predetermined output signal falls within the allowable range.
この発明の構成によれば、制御信号と出力信号の関係
を直線近似して、近似値である制御信号に対応する出力
信号と所定の出力信号との誤差が許容範囲内になるまで
繰り返すことにより、調整精度を落とすことなく、自動
調整に必要な測定点数を大幅に減らすことができ、調整
時間の大幅な短縮が可能となる。According to the configuration of the present invention, by linearly approximating the relationship between the control signal and the output signal, and repeating until the error between the output signal corresponding to the control signal that is an approximate value and the predetermined output signal falls within the allowable range. The number of measurement points required for automatic adjustment can be greatly reduced without lowering the adjustment accuracy, and the adjustment time can be greatly reduced.
この発明の一実施例を第１図および第２図を参照しな
がら説明する。An embodiment of the present invention will be described with reference to FIGS. 1 and 2.
第１図において、信号発生器１は、ICなどの半導体デ
バイス２の入力端子５に接続され、半導体デバイス２の
入力信号を発生する。電圧源３は、半導体デバイス２の
増幅度を制御する制御電圧を発生し、出力制御端子６に
接続される。出力端子７より出力される信号は、電圧計
４によりその出力振幅が測定される。In FIG. 1, a signal generator 1 is connected to an input terminal 5 of a semiconductor device 2 such as an IC and generates an input signal of the semiconductor device 2. The voltage source 3 generates a control voltage for controlling the amplification degree of the semiconductor device 2 and is connected to the output control terminal 6. The output amplitude of the signal output from the output terminal 7 is measured by the voltmeter 4.
第２図は、第１図に示す回路において、制御電圧によ
りその出力振幅が逓増する場合の制御電圧ｘと出力振幅
ｙの関係を示す図である。FIG. 2 is a diagram showing a relationship between the control voltage x and the output amplitude y in the case where the output amplitude is gradually increased by the control voltage in the circuit shown in FIG.
第２図（ａ）に示すように、まず、制御電圧調整範囲
の最小および最大の２点であるx1およびx2の制御電圧を
与え、それに対応するy1およびy2の出力振幅を測定す
る。制御電圧ｘと出力振幅ｙの関係を直線（一次関数）
と仮定すると出力振幅ｙは、 の式で表される。As shown in FIG. 2 (a), first, given the minimum and maximum control voltage of x 1 and x 2 are two points of the control voltage adjustment range, the output amplitude of y 1 and y 2 corresponding thereto To do. The relationship between the control voltage x and the output amplitude y is a straight line (linear function)
Assuming that the output amplitude y is It is represented by the following equation.
出力振幅の調整目標である所定の値をy0、直線近似し
た場合の演算による制御電圧をxAdjとすると、出力振幅
が所定の値y0になるであろう制御電圧xAdjは、 の式で表される。Y 0 a predetermined value is an adjustment target output amplitude, when the control voltage by the operational in the case of linear approximation to x Adj, control voltage x Adj output amplitude will become the predetermined value y 0 is It is represented by the following equation.
つぎに、演算で求めた制御電圧xAdjを与え、それに対
応する出力振幅yAdjを測定する。この出力振幅yAdjと所
定の値y0との誤差は、直線近似を行っているためであ
る。この誤差が許容範囲内である場合には制御電圧xAdj
を求める値、すなわち、所定の値y0の出力振幅を得るた
めの制御電圧をxAdjとし、この誤差が許容範囲内でない
場合に、y1＜yAdj＜y0のときは、xAdj,yAdjをそれぞれx
1,y1と置き換え、また、y0＜yAdj＜y2のときは、xAdj,y
Adjをそれぞれx2,y2と置き換えて再度直線近似を行い、
出力振幅が所定の値y0になるであろう制御電圧xAdjを演
算により求め、それに対応する出力振幅yAdjを測定す
る。そして、この出力振幅yAdjと所定の値y0との誤差を
求め、この誤差が許容範囲内になるまで前述と同様の処
理を繰り返す。この実施例では、１回目でy0＜yAdj＜y2
となり（第２図（ａ））、xAdj,yAdjをそれぞれx2,y2と
置き換えて２回目の直線近似を行っている（第２図
（ｂ））。当然２回目の方が誤差は小さくなり、回数を
多くするほど調整精度は上がる。通常は、２〜３回繰り
返せば十分な調整精度が得られる。Next, the control voltage x Adj calculated is given, and the corresponding output amplitude y Adj is measured. The error between the output amplitude y Adj and the predetermined value y 0 is due to the linear approximation. If this error is within the allowable range, the control voltage x Adj
X Adj is a control voltage for obtaining an output amplitude of a predetermined value y 0 , and when this error is not within the allowable range, when y 1 <y Adj <y 0 , x Adj , y for each Adj x
1 , y 1 is replaced, and when y 0 <y Adj <y 2 , x Adj , y
Replace Adj with x 2 and y 2 respectively and perform linear approximation again,
The control voltage x Adj that will cause the output amplitude to become a predetermined value y 0 is calculated, and the output amplitude y Adj corresponding to the control voltage x Adj is measured. Then, the error between the output amplitude y Adj and the predetermined value y 0 is obtained, and the same processing as described above is repeated until the error falls within the allowable range. In this embodiment, the first time y 0 <y Adj <y 2
Then (Fig. 2 (a)), x Adj and y Adj are replaced with x 2 and y 2 , respectively, and the second linear approximation is performed (Fig. 2 (b)). As a matter of course, the error becomes smaller in the second time, and the higher the number of times, the higher the adjustment accuracy. Usually, a sufficient adjustment accuracy can be obtained by repeating the operation a few times.
なお、上記実施例では、出力信号として出力振幅を用
いたが出力周波数を用いる場合もある。また、制御信号
として制御電圧を用いたが制御電流を用いる場合もあ
る。また、出力信号が制御信号により逓増する場合につ
いて説明したが、出力信号が制御信号により逓減する場
合も同様であることは言うまでもない。Although the output amplitude is used as the output signal in the above embodiment, the output frequency may be used in some cases. Further, although the control voltage is used as the control signal, the control current may be used in some cases. Further, although the case where the output signal is gradually increased by the control signal has been described, it goes without saying that the same is true when the output signal is gradually decreased by the control signal.
この発明の半導体デバイスの試験方法は、調整精度を
落とすことなく、自動調整に必要な測定点数を大幅に減
らすことができ、調整時間の大幅な短縮が可能となる。According to the semiconductor device testing method of the present invention, the number of measurement points required for automatic adjustment can be greatly reduced without lowering the adjustment accuracy, and the adjustment time can be greatly shortened.
第１図はこの発明を説明するための半導体デバイスの試
験回路図、第２図は第１図の試験回路の制御電圧と出力
振幅の関係を示し、合わせてこの発明を説明するための
図、第３図は第１図の制御電圧と出力振幅の関係を示
し、合わせて従来例を説明するための図である。 １……信号発生器、２……半導体デバイス、３……電圧
源、４……電圧計FIG. 1 is a test circuit diagram of a semiconductor device for explaining the present invention, FIG. 2 shows a relationship between a control voltage and an output amplitude of the test circuit of FIG. 1, and a diagram for explaining the present invention. FIG. 3 shows the relationship between the control voltage and the output amplitude shown in FIG. 1, and is a diagram for explaining the conventional example together. 1 ... Signal generator, 2 ... Semiconductor device, 3 ... Voltage source, 4 ... Voltmeter
Claims (1)
信号である出力振幅または出力周波数が制御信号である
制御電圧または制御電流により逓増もしくは逓減する半
導体デバイスに、制御範囲の最小および最大の制御信号
を与え、それに対応する出力信号を測定する第１の過程
と、 前記第１の過程で測定した測定値に基づき制御信号と出
力信号の関係を直接近似し、演算により所定の出力信号
に対応する制御信号の近似値を求める第２の過程と、 前記近似値である制御信号を前記半導体デバイスに与
え、それに対応する出力信号を測定し、この出力信号と
前記所定の出力信号との誤差を調べる第３の過程と、 前記誤差が許容範囲内であるときは前記近似値である制
御信号を求める値とし、前記誤差が許容範囲を超えたと
きは前記第３の過程で測定した出力信号と前記制御範囲
の最小もしくは最大時の出力信号との間に前記所定の出
力信号を含むように、前記近似値である制御信号および
前記第３の過程で測定した出力信号と前記制御範囲の最
大もしくは最小時の制御信号および出力信号との間で再
度制御信号と出力信号の関係を直線近似し、演算により
前記所定の出力信号に対応する制御信号の近似値を求め
る第４の過程とを含み、 前記近似値である制御信号に対応する出力信号と前記所
定の出力信号との誤差が許容範囲内になるまで前記第３
の過程および第４の過程を繰り返す半導体デバイスの試
験方法。1. A semiconductor device having an output terminal and an output control terminal, wherein an output amplitude or an output frequency which is an output signal is increased or decreased by a control voltage or a control current which is a control signal. A first step of applying a control signal and measuring an output signal corresponding to the control signal, and directly approximating the relationship between the control signal and the output signal based on the measurement value measured in the first step, and obtaining a predetermined output signal by calculation. A second step of obtaining an approximate value of a corresponding control signal, a control signal having the approximate value is given to the semiconductor device, an output signal corresponding thereto is measured, and an error between the output signal and the predetermined output signal is measured. And a third step of investigating the above, and when the error is within the permissible range, the control signal that is the approximate value is obtained, and when the error exceeds the permissible range, the third overrun And the output signal measured in the third step so that the predetermined output signal is included between the output signal measured in (1) and the output signal at the minimum or maximum of the control range. A fourth method of linearly approximating the relationship between the control signal and the output signal again between the control signal and the output signal at the maximum or minimum of the control range, and calculating an approximate value of the control signal corresponding to the predetermined output signal. And the third output until the error between the output signal corresponding to the control signal that is the approximate value and the predetermined output signal falls within an allowable range.
A method for testing a semiconductor device, which repeats the above step and the fourth step.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2133525A JP2672690B2 (en) | 1990-05-22 | 1990-05-22 | Semiconductor device testing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2133525A JP2672690B2 (en) | 1990-05-22 | 1990-05-22 | Semiconductor device testing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0427133A JPH0427133A (en) | 1992-01-30 |
| JP2672690B2 true JP2672690B2 (en) | 1997-11-05 |
Family
ID=15106831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2133525A Expired - Fee Related JP2672690B2 (en) | 1990-05-22 | 1990-05-22 | Semiconductor device testing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2672690B2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63285619A (en) * | 1987-05-18 | 1988-11-22 | Mitsubishi Electric Corp | Data processor |
| JPH0664118B2 (en) * | 1987-08-10 | 1994-08-22 | 日本電気株式会社 | Transistor characteristics measurement circuit |
-
1990
- 1990-05-22 JP JP2133525A patent/JP2672690B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0427133A (en) | 1992-01-30 |
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