CS240416B1 - Method of coating application on electrically insulation substrates by means of ions and device for performance of this method - Google Patents
Method of coating application on electrically insulation substrates by means of ions and device for performance of this method Download PDFInfo
- Publication number
- CS240416B1 CS240416B1 CS817535A CS753581A CS240416B1 CS 240416 B1 CS240416 B1 CS 240416B1 CS 817535 A CS817535 A CS 817535A CS 753581 A CS753581 A CS 753581A CS 240416 B1 CS240416 B1 CS 240416B1
- Authority
- CS
- Czechoslovakia
- Prior art keywords
- ions
- anode
- performance
- voltage
- coating application
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims 4
- 239000011248 coating agent Substances 0.000 title claims 2
- 238000000576 coating method Methods 0.000 title claims 2
- 150000002500 ions Chemical class 0.000 title claims 2
- 239000000758 substrate Substances 0.000 title claims 2
- 238000009413 insulation Methods 0.000 title 1
- 239000003990 capacitor Substances 0.000 claims 1
- 238000010791 quenching Methods 0.000 claims 1
- 230000000171 quenching effect Effects 0.000 claims 1
- 241000168096 Glareolidae Species 0.000 description 1
- 101100366940 Mus musculus Stom gene Proteins 0.000 description 1
- 101000798993 Pseudomonas putida (strain ATCC 700007 / DSM 6899 / BCRC 17059 / F1) 2-hydroxy-6-oxo-2,4-heptadienoate hydrolase Proteins 0.000 description 1
- 240000007313 Tilia cordata Species 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3435—Applying energy to the substrate during sputtering
- C23C14/345—Applying energy to the substrate during sputtering using substrate bias
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Securing Of Glass Panes Or The Like (AREA)
- Heat Sensitive Colour Forming Recording (AREA)
Description
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Cnocod H yCTpOÍÍCTBO JUIH ΗΒΗθΟΘΗΗΗ ΠΟΚΡΗΤΗΗ Ha ΒΛβΚΤρΗΗβΟΚΗH30jinpyiouine cydcTpaTH c πομοιφε>κ> hohob
OKIAGTL· ΠΡΜΜΕΗΕΗΗΗ H30EPETEHHH M3odpeTeHne xacaeTcn cnocoda h ycTpoiícTBa,c πομοπγβϊο κοτορκχB BaKyyMe ΠΟΛ B03fleĚCTBHeM hohob MoryT ηηηοοητοη ποκρητηη bOCOdeHHOCTH, Ha ΘΛβΚΤρΗΗβΟΚΗ ΗθΠρΟΒΟΛΗϋξΗβ HJIH ΜΗΛΟΠρΟΒΟΛΗΙΙξΗβMaTepnanu. Tewi chmhm nocTHrayTHe jma θπθκτρηηθοκη npoBojynuHxcydcTpaTOB npeHMyujecTBa HaHeceHHH ποκρητηη c πομοππ,β hohob,irpewe Bcero, xopomaa προπΗοοτΒ cneiuieHHH HaHeceHHoro ποκρητηηC OCHOBO0, CTaHOBHTCH OCymeCTBHMHMH H JUIH ΘΠΘΚΤρΗΗβΟΚΗ H30JEH-pyioinHX cydcTpaTOB. XAPAKTEPMCTHKA H3BECTHHX TEXHMHECKHX PEHIEHMU .
CnocodH BaicyyMHoro HaHeceHHH ποκρητηη Ha θηθκτρηηθοκη H30JiHpyio-mne cydcTpaTH c πομοιφιο hohob ηβληθτοη Η3βθοτηημ. Πρπ θτομΘΛβΚΤρΗΗΘΟΚΗ 3apfl»eHHHe naCTHUH IUia3MH, nOjmepXHBaeMOft c no— MOIllLD ΗΗθρΤΗΟΓΟ π/HJIH ρβΗΚΠΗΟΗΗΟΓΟ ra3a, HOHH3HpyiOT naCTHMaTepnajiaHaHocHMorOjKOTopKe pa3roHHK)TCH Ha οτρηπητθλβηο sapHaceHHHe
cydcTpaTH η τθμ ocaswaioTCH. C B03pacTaiomefl nponojisn-TeJILHOCTBIO HaHeceHHH ΠΟΚΡΗΤΗΗ H3OHHpyi0niHe cydcTpaTH npOHBJIHKJTnojiOKHTeHBHH# 3apHS, nocKOjihKy 3apHSH nocTynawK hohob He mo-ryT ÓHTB yHHHTOKSHH, ΤΗΚ ΉΤΟ ΠρΗΤΟΚ HOHOB Η ΗΗΗΓ(ΗΗρθΒ8ΗΗΗΘ B 240416 -3- pe3yjii>TaTe θτογο Ha noBepxHOCTH cydcTpaTOB η βηγοαηηθ julhCUeiDieHJiH CJIOH Βφφθκτυ Ηθ MOryT ΟΤΗΤΒ ΛθίίΟΤΒΘΗΗ. 3ΤΚΧ ΟΤρΗΙφΤΘΛΒΗΗΧ Β03ΛθΗ0ΤΒΗβ MOJKHO H3ÓeacaTB nOCpejtCTBOMnpejuioxeiiHoii ycTaHOBKH ( dwp 74 998) pacnojroxeHHoro BoxpyrcydcTpaTOB ηοτοηηηκη 3JieKTpoHOB. B pe3yjihTaTe θτοζ hoctohhhoííÓOMÓapjmpOBKH SJíeKTpOHaMH IIOBepXHOCTH 3apfl£H, nOJiyHaeM&e ΠΟΛ B03-ΑθΗΟΤΒΗΘΜ HOHOB MaTepHSJía JULH ΠΟΚρΗΤΚΗ H ρθΗΚΤΗΒΗΟβ EUia3MH, Ηθ2-TpanH3HpyiczrcH. EecnpemiTCTBeHHyio doMdapjuípoBKy ηοηβμη ποΒθρχΗοοτΗ3JieKTpmecKH H30jinpyTomnx cydcTpaTOB mosho HajieacHO rapaHTHpoBaTBnpH npaBIUIBHOM BUdope pa3MepOB HCTOHHHKO1 JJieKTpOHOB. npaB.ua,KOHCTpyKTHBHoe HcnojiHeHne hctohhhkob ΘΛβκτροποΒ Bcer.ua cjiejiyeTcoraacoBUBaTB c cytícTpaTaMH h oho TpedyeT ηθμβληχ λοποληητθλβηηχ3aTpaT.
Jlajiee, npn Bcex Η3μθηθηηηχ προΒθΛθΗΜ cnocoda, κοτορκβ qacTO du-BaioT HeodxoflHMHMH npn τθχηολογηηθοκη cjiojkhhx npoueccax, Kawfipa3 HeodxojuíMO ηοβοθ corjiacoBaHHe ΒΛθκτροΗΗοίί smhcchh c hohhhmtokom. JUa 3Τ0Γ0 cjiejiyeT npejycMOTpeTB odmupHae yperyjuipoBaHHHjwx opraHH3auHH HcnpaBHOg cooTBeTCTByjonjefi padora ycTpoflcTBa.
Tarase λοβολβηο λββηο η3βθοτηο ycTpaHeHne θλθκτρηήθοκογο 3apaaaH30^HpyWCX cydcTpaTOB πρπ τθχηηκθ ΗΗΗΘΟΘΗΗΗ ΠΟΚΡΗΤΗΗ C ΠΟΜΟΠίΒΚHOHOB nOCpejICTBOM íipHJIOSCSHHH - BHCOKOHaCTOTHOrO ΠβρβΜβΗΗΟΓΟ HairpHaceHHH. 9tot MeTos, HeoflHOKpaTHO HcnojiB3yeMučí b ϊθχηηκθ pac-πηλθηηη, odecnenHBaeT yHKUToxeHHe 3apa£0B h rapaHTHpyeT Hanex-tfirií npopecc ηθηθοθηηη ποκρυτκΗ. 3το npejmojiaraeT, οληηκο, 3HauH—τθλβηηθ 3aTpaTH Ha annapaTypy, nocKOJiBKy Hapaay c BucoKonpoHS-ΒΟΛΗΤ&ΠΒΗΗΜ TeHepaTOpOM BHCOKOÍI UaCTOTH TpedyiOTCH ΟΟΟΤΒβΤΟΤ-Bywre coraacywie π noffiBOjumíHe ολθμθητη k cydcTpaTaM c caMH-mh pa3jiHHHiara ληθλθκτρηηθοκημη napaMerpaMH η γθομ6τρηήθοκημηpa3MepaMH. W Μ30ΒΡΕΤΕΗΉΗ
IlejiLio H3odpeTeHHH ηβληθτοη τβχΗΗΉβοκΗ π TexHOJionraecKH npoc-TOe ΠρΟΒΘΛθΗΗΘ ΗΒΗβΟβΗΗΗ ΠΟΚρυΤΗΗ C ΠΟΜΟΙφόΚ) HOHOB, ΕφΗ 3TOMcjieuyeT H3desaTB bhcokhx 3aTpaT Ha annapaTypy. 240416
H3MEEIME CWOCTM M30EPETEHHH B ocnoBy Η3οόρθτθΗΐΐΗ nojioaeHa 3ajiana cosjjaTB cnocod hycTpoiícTBO, no3BojiíronjHe de3ynpenHo ηβηοοητβ ποκρΗΤίιη HasjíeKTpinecKH H3ojnipyjomjie cydcTpaTu πρπ πρημθηθηηη BOSjjeflcT-bhíí hohob hjih mia3MH πρπ οοχρβηθηηη npeHMymecTB sthx τθχηολο-rnfí η πρπ npejjoTBpameHHH πρημθηθηηη cnenjiajiBHHX coímacywixH nOJXBOJUmHX 3ΛΘΜΘΗΤ0Β K CyOCTpaTSM.
CoraacHo Η3θόρθτεΗΗΐο sajjana/^einaeTcn τθμ, hto b jihhhh hojjbo-jia aHojmoro HanpnsceHHn csmo no cetíe Η3βθοτηογο njia3MeHHoroHCTOHHHKa, cocTonmero H3 HaKanuBaeMoro icaTOjja η ποΛοχπτβηΒΗΟβaHOjmoíí pemeTKH, pacnonojseHM jjodaBonHoe οοπροτΗΒηβΗΗβ, a MeamyaHOjjoM h KaTojjoM - KoímeHcaTop, pa3wepH κοτορυχ onpejjejimoTcn3ajiaHHUM padonuM λθβλθηηθμ b pemrnneHTe. PacnojioxeHHe mia3-ΜΘΗΗΟΓΟ HCTOHHHKa B03M0KH0 KaK B KGHljeHTpHHHOM, ΤΒΚ Η B IUOCKOMηοποληθηηη, npuraeM iuocKoe pačnojioseHHe, b 3aBHCHM0CTH ot npo-BOJUMOBO cnocoóa, Π03Β0ΛΗΘΤ yCTaHOBKy ÓOJiee ΗΘΜ OJJHOrO IDia3MeH-ΗΟΓΟ EOTOHHHKa.
Cnocod oTJiiPiaeTCH τθμ, ψγο njia3MeHHnň hctohhhk, HeotíxojUMHiijun nanecΘΗΚΗ ποκρητηη c πομοπιέκ hohob, sKCiuyaTHpyeTCH nepeMenHO. Πρκ 3T0M B ΠΟΟΤΟΗΗΗΟϋ HOCJiejJOBaTeJIBHOCTH ΜΘΗΗΙΟΤΟΗ $a3HH0HH3ajJHH Η HeftTpaJIH3ayHH 3apHJJ0B, ΗβΚΟΠΛΘΗΗΗΧ Ha CyóCTpaTaX3apnjjoB, b το βρθμη Kax aneKTpoHHan bmhcchh τθρμηηθοκογο κβτο-jja nojuepxHBaeTCH CTadOLHOií. Πρπ caMocTonTeuiBHOM pa3pnue, T.e.πρπ ΟΤΗΟΟΗΤΘΛΒΗΟ BHOOKOM JUBJíeHHH ra3a ΟΚΟΛΟ I ...’lQ Pa, KaTOJlcjiyraT b icanecTBe ποοτηβιπηκβ θλθκτροηοβ, HeodxojUMHX jun xeVt-TpajiH3auHH HaKaiuHBaeMoro Ha cydcTpaTax πολοχητθλβηογο 3apnjjaB TOT nepHOJl ΒρθΜΘΗΗ, KOrjia, COrjtaCHO Η30όρβΤΘΗΗΙΟ, npepuBa-ΘΤΟΗ npOH3BOJJCTBO EUa3MiI Η, ΤΘΜ CaMHM, HOHOB. ΠρΗ JiaBJíeHHHHHxe I Pa npHtíji. jjo I0~2 Pa θλθκτροηη cuy&aT λοποληητθλβηοjun nojuepacaHHH pa3pnjja, tbk Ha3HBaeMoro ηθοημοοτοητθλβηογοra3OBoro pa3pnjja.
Padonan nacTOTa cnocoda, T.e. ποοτοηηηηη CMeHa $a3, λθηητnpeHMymecTaeHHOB jwana30He ot ΗβοκοΛΒΚΗΧ kHz jjo ηθοκολβκηχ οοτθη kHz h nonynaeTcn H3 Budopa HanpnxeHun 3a&nraHHH HrameHHH pa3pnjja 240416 -5- πρκ irpejiBapHTejibHO 38Λ3ηηομ sasjíeHira pa3pHaa b pemnmeHTe htgxhkthgckhx aaHHHX pesncTopa h KOH^eHcaTopano IÍPH 3T0M UQ HBXHGTCH ΜΒΚΟΗΜΘΛΒΗΗΜ ΗΗΠΌΗΧθΗϊϊθΜ, EMGWMCH BpacnOpfl»eHHH y ΠΛΗ3ΜΘΗΗ0Γ0 HCTOHHHKa.
CjiejiyeT Kparao ποηοηητβ πρηηηηπ χθηοτβηη ycTpoficTBa comacHOH3oópeTemro.
IlOCJie BKJHOHGHHH ΠΗΤΗΗΗΗ HanpHKGHHGM «JIH ΙΜΗ3ΜΘΗΗ0Γ0 HCTOHHHKaHaKajiHBaeMHH KaTox HarpeBaeTCH jto TeMnepaTypH smhschh h 3apn-staeTca nepes jiodaBOHHoe οοπροτεγβλθηηθ κοηλθηοητορ, pacnojioxeHhh3 napaoe^BHo paspHKHOMy npoMexyTicy. ílocne λοοτηχοηιϊη iianpajkghhh 3aOTraHna Uz 3amraeTCH paspjyu ΠοοκοπΒκγ npa θτομnpoTeKamie Toxa nepes pa3pwmii npoMeacyTOK óoju>me9 ηθμ odyc-ΠΟΒΛΘΗΗΗϋ XOdaBOHHHM ΟΟΠρΟΤΗΒΛβΗΗΘΜ 3apXAHtíří TOK ΧΟΗΛβΗΟΗΤΟρΗOH pa3praaeTca h HanpBxenHe Ha aHoxe οτβηοβητοη μθηβιπθ HanpH-κθηηη rameHHH UL , tsk hto paspnji b BaxyyMHOÉ xaMepe npe-puBaeTCH. B θτομ cjiynae KOHxeHcaTop cHOBa sapasaeTca «ο TexΠΟρ, npKa ΗΘ CMOJKGT CHOBa 3a&IíraTBCH paspím Η ΗΘ yCTaHOBHTCHTax HapuBaeMoe pejiaxcauHOHHoe KOjiedaHne. Bo BpeMH (Jasu ropě-hhh pa3pH.ua πολοχητθλβηηθ hohh, nojiyneHnue b npopecce pa3pajxapasroHHKTCH b HanpaBJíeHHií OTpmiaTejiBHO ομθιιιθηηογο xepKaTejwcydcTpaTOB, npn θτομ οηη βηθηβηιοτ sapnu pacnojioxeHHHX τθμΘΗθκτρκΗθοκΗ H3ontfpywix cydcTpaTOB. B nocjiexyioinefl $a3e ra-IIIGHiíH 3TH MeBJampie 3apHflH yCTpaHfllOTCH nOCpejlCTBOM HOCTOHHHOΒΗΧΟΑΗΐφίχ H3 HaxajnraaeMoro xaTOjxa θηθκτροηοβ, χοτορπθ pas-tohhiotch nocpexcTBOM χοτΗ η yMeHLiueHHoro b pe3yjiBTaTe HanpH-xghhh raineHHH, ho HMeioinerocH xax h npexne aHojxHoro HanpnaceniiHh nonajiaioT na cydcTpara.
MaTepHazt juh hokphthh μοχθτ πρπ θτομ bhochtbch b peumnieHTb pacmtíieHHOM ra HcnapeHHOM, a Taxxe ra3oodpa3HOM bhxg,
B ΠΗΗ3ΜβΗΗ0Μ HCTOHHHKe B pe3yHBTaTe ΒΟ3£Θ0ΟΤΒΗΗ HOHOB 240416 -6- ΟΟΟΤΒΟΤΟΤΒΘΗΗΟ paCKieiUIÍieTCH H HaCTHHHO HOHH3HpOBaHO Η B BH£eBjjcoKOKaHCCTBomioro ποκρΗΤΗΗ ocajiwaeTca Ha cydcTpaTax. Πρκpa3MemeHHii dojiee neM ojmoro iuia3MeHHoro ηοτοηηηκη B03M0«HaKaic cHHxpoHHan, Tax h nonepeMeHHaa paóOTa Bcex πμθκμιιηχοηima3M6HHUx hctohhkkob. Bo3MOKna Taiace Kaic ojiHOBpeMeHHaH patíoTaIUia3MeHHUX HCTOHHHKOB, HO C pa3JUFíH0g padOHeĚ HaCTOTOň; T3Kh nyjiLcnpyiomaa π c pa3jnriHoií patíonefi nacTOTOfi.
ΠΡΗΜΕΡ OCWCTBJÍEHHH H30BPETEHHH
H3odpeTeiine cjie^yeT odMciraTt nospotínee Ha οοηοβθ KByx npn-McpoB ocymecTBJíeHjCTH n3otípeTeHHH. Ha cooTBeTCTByiomeM nepTesejceMOHCTpiipyíOT cnzr. I: BapnaHT οοοτβθτοτβυϊοπιθγο H3odpeTeHiro ycT-poňcTBa c iuiockhm pacnojioaceHiíeM θλθκτροεοβ $ηγ. 2: KOHneHTpHHHoe pacnojioxeHHe coÓTBeTCTByiomeroH30dpeTeH™ ycrpoiicTBa jjjia mpoBezeima coot-BeTCTByToqero H3odpeTeHiro cnocotía. Φηγ. I jxeMOHCTpřrpyeT Kawepy ηβηθοθηκη ποκρητιΐΗ I c chctomoíínpoií3BOjíCTBa BaxyyMa 2 η οηοτθμοη Bnycna ra3a 3. B Kawepe Ha-HeceHKH ποκρκτΗΗ I ηηχολητοη HaKazníBaeMtm kot ok 4, coctowt8H3 TaiITaJIOBOií IIpOBOJIOKH 0,3 mm Η ΗΗΟΛ 5, 03 IÍHJHíH^pHHeCKH ·eiepnyTot BOJiL$paMOBO0 προΒθκοκ-u.' 0,1 mm , pacnojioseHHtrti HapaccTOHHiíií 100 mm ot HaxajiHBaeMoro KaTO.ua 4. ILia3MeHHu0 hc-tohhhk, coctohiuhíí H3 HaKaziHBaeMoro KaT0.ua 4 h aHo^a 5, coejm-ηθη c nHTaraieM Hanpn^eHHeM 6. B aHOKHO0 pěnu HaxojpiTCH npn3T0M pe3HCTop 7 b 100 Ohm π napajuiejitHO κ pa3pH£H0My npo-Mesyray icoimeHcaTop 8 b 47 /uf c KOCTaTonnofi sjíeKTpiraecKofiΠρΟΗΗΟΟΤΒΚ). íajiee, b KaÍMepe HaHeceHun ποκρητηη X ηθχοκητοβ ycTpoiícTBoHaHeceHHíi ποκρκτΗΗ 9 η HanpoTHB ηθγο κθΡ^τθΛΒ cytícTpaTOB 10,οοΘΛΗΗβΗΗΗΖ c djioKOM πητηηηη ηηπρ^κκθηηθμ II, 'ciiadxaiomero eroKOCTaTOHHHM OTpimaTeJIBHHM HanpOTeHHeM.
CiíCTGMa. npon3BOjicTBa BHKyyMa 2, οηοτθμη BnycKa ra3a 3 h ycT-pofícTBo HaHeceHHH ποκριιτΜ 9 BudpaHii coraacHO anynaio npiiMe-ΗθΗΐϊΗ. jjjih paiíKOHajiBHoro οφοροβΗΗΗ cnocoda npn 3tom npEMepe ocymecT-BJieiiHH H30dpeTeHna b KanecTBe ycTpogcTBa jwn HaHeceHHH no- 240416 -7- κρυτΗΗ 9 npejiycMOTpeH ΒυποΛΗβΗΗυίί nonepenno ajieKTpoHHOJiyneBofiHcnapHTejit. nocpejxcTBOM BnycKa aproHa Teneps ycTaHaBJíHBaeT-ca padonee λοβλθημθ 10“^ Pa. HaKazniBaeMHíí khtoji 4 CHadxaeTcntokom iranana npudJi. 30 A, a anoa - πολοχητθλβηημ no οτηοηιθηη©κ KaTozty HanpnaeHHeM 250 v . lípu τηκηχ padonux napaMOTpaxnoaynaeTca ,κοοτητοηηβη sjteKTpoHHan smhcchh, πρη otom sjioktoo-hh Kojieó&HTca BOKpyr pemeTnaToro aHo.ua 5 n HOHH3HpyioT ' npH3T0M padonníí ra3, npeMe ηθμ ohií dynyT paaornaHK Ha lísojuipy»-iiíne h 3apHxeHHHe nocpeacTBOM πολοηητ&ηβηηχ ηοηοβ cydcTpaTH 12,HaxojvmiHecH na jiepscaTeae cytícTpaTOB 10. OKCTparapoBaHHUíi H3IUia3MIJ HOHHUfl TOK ΟΟΟΤΘΒΛΗΘΤ npH 3T0M 4 Am-2> npH ΠροΟΧθΙΙ-hom ycKopmouioM HanpnaeiiHH -800 v, τοκθ njiaswoj 1,5 A H padonežnacTOTO 150 kiiz.
Ha čnr. 2 npencTaBjíeHO κοηκοηολβηοθ pacnoaoateHne, κοτοροό naxoflHT ΠρίίΜΘΗθΗΗΘ B OCOdeHHOCTH ITpH HCII0JIB30BaHHH ra300dpa3HHXMaTepiíajioB juih ηηηθοθηηη ποκρητηη. ΗθητρηηβηηΒ HaKajimaeMiriíκητολ 4, cocTOwrií H3 BOjiL^paíztosoíí προΒΟΗΟκιτ 0,5 mm , oKpyaceHπρη 3T0M Ha paCCTÓHHHH 150 mm Η3ΓΟΤΟΒΗΘΗΗΗΜ H3 BOJlBČpaMO-Bofi npoBOjioKH 0,1 mm ρθπιθτηητημ aHOHOM 5. JlepstaTejiL cydcTpa-tob Ι0,βηποληθηηηηΗ3 μθληογο jmcTa, pacnojio&eH Ha paccTOHHHH190 mm ot KaTO.ua 4.
Padonee αηβλθηηθ duno BadpaHO b pa3Mepe I Pa, npn 3tom npnτοκθ HaKajia KaTO.ua 55 A η πρπ προο«θΗΗ0»Γ κ θλθκτροππτβηηκ) 6HanpHKenHH +200 v η npa ycKopmomeM ηηπρηκθηηη -600 v Ha.nepacaTejie cydcTpaŤOB 10 no^ynaioTCH tok mra3MH 0,8 A h padonannacTOTa 320 kHz . JUHpe3HCTopa 7 dnno BHdpaHO IOOOohm , ajuih KonjieHcaTopa 8 - 100 nP. ΠγτβΜ Bnycna deH30Jia κ 3arpy3on-Howy ycTpoiicTBy 13 npn yKa3aHHHX ycHOBiwx H30Jiíípywre cytícTpa-th MoryT duTB ποκρυτΗ TBepjiřiMH npo3paHHHMH cjiohmh yrjiepojca. 240416 -8- ΦΟΡΜΥΛΑ Η30ΕΡΕΤΕΗΗΗ I. Gnocod ΗΗΗβΟΘΗΚΗ ΠΟΚρΗΓΗΗ Ha ©ΛΘΚΓρΗΗβΟΚΗ HSCWDipyWíecyócTpaTH c noMom&io hohob, npn McnojiL3OBamní oa3Memioro
Kcro^ffiiKa, cocroamero H3 HaKaJursaeMoro Karoso a aHO.uaOTjiírtiaHiuH#cH τθμ, hto πλη3μθηηη^ hctohhhk sKcrmyarapyeTcanepeweHHO, npa stok aHojpioe Ranp-qxeíwe c aacToro^ oř ne-CKOHBKHX Kil ΛΟ ΗΘΟΚΟΛΒΚΗΧ ΟΟΤΘΗ KH HOCTOHHHO ΚΟΛθόΛβΤΟΗMeawy HenpflCKeHaeM 3aanraHiui h HanpHaceHaeM rameHíia ,ahto HaKJiaBaewH* κβτο,ρ; HanynaeT πρκ stom ποοτοηηηο paBHOMepHoΘΛΘΚΤρΟΗΗ. 2. ycTpoí:c?3O μη ocymc-cTBJíeHHH oToro cnocoóa no nyHKTy I,οτΛΠίαιοίξΰοοΗ το;.’., hto b anoAUOíí pěna pacnojioateHu pe3HCT0p (7) a KOHasHcaTop (8), napajuiejiBHirií nena pa3pHjmoro τοκα. 240416
Severografia, n. p., MOST
Cena 2,40 Kčs -9~
AHIIOTAW
Cnocod h ycTpoíicTBo juih HaHeceHHff ποκρητηη Ha θτίθκτριτϊβοιαϊH30JiHpywr€ cydcTpara c πομοπιβκ hohob Μ3ο0ρθτθηηθ KacaeTCH cnocoda h ycTpoíícTBa jm ηηηθοθηηη ποκρυ-Tiitf Ha sjíeracpiraecKH HenpoBojLHinjie on hhidl HesHaHHTSJíBHO irpoBO-ffHupie MaTepnajiH c nompinBio hohob. y HSBeCTHUX £0 HaCTOHmerO ΒρθΜΘΗΗ CnOGOÓOB H yCTpOÍiCTB npH Ha-HeceHHii ποκρυτΗΗ B03HHKaJi 3apra sjíeKTpmecKH H30jiHpywíxcyócTpaTOB, κοτορυζ dra HefiTpajiroosaH raz ymíHTOxen nocpejicTBOMycTanoBKH λοποληητθλβηηχ, pacnojiOKeHHux b&ih3H cytícTpaTOBZCTOHHHKOB SJíeKTpOHOB HHH HOCpejICTBOM BHCOKOHaCTOTHHXΠθρθΜΘΗΗΗΧ HanpHXeHHň. B OCHOBy Ι13ΟόρθΤΘΗΗΗ ÓU7IH ΠΟΛΟΚΘΗΗ ΗΘΛΒ H Sajjaza HCKJIKHHTBBucoKiie TexHHqecKHe H3£epsKH nyTeM ynpomeHHH upoBe^enra cno-coda.
Coraacno κ3θόρθτΘΗζω sto pemaeTcn τθμ, hto b Henu paspannorotokh iuia3MeHHoro HCTOHHiíKa pacnojioseHH pe3ncT0p h naparaejiB-ho pa3pHHH0My npoMesyTKy KonneHcaTop, no3BOJtHBimie nepeMennoeHaHeceirae ποκρητΗΗ c nacTOTOfi οτ ηθοκολβκηχ kHz ao ηθοκοηβκηχcot6H kHz . B pe3yjiBTaTe θτογο HaKanjiHBawrecH sapran TOTnacse HeKTpajiii3yioTCH ran yHHZToxařOTCH de3 πρημθηθηηη μηογοηηολθη-HHX H CJIOKHHX βΟΠΟΛΗΗΤΘΛΒΗΗΧ yCTpO&CTB. 240416
Claims (2)
- 240416 10 pSedmEt vynalezu1. Způsob nanášení povlaku na elektricky izolující substráty pomocí iontů s použitímplazmatického zdroje, skládajícího se ze žhavicí katody a anody, vyznačující se tím, že plazmatický zdroj se používá střídavě, přitom anodové napětí o kmitočtu od několikakHz do několika set kH nepřetržitě osciluje mezi zápalným napětím a zhášecím napětíma že žhavená katoda přitom vyzařuje stále rovnoměrně elektrony.
- 2. Zařízení k provádění způsobu podle bodu 1, vyznačující se tím, že v anodovém ob-vodu je umístěn odpor (7) a kondenzátor (6) paralelně ke zdroji výboje. Uznáno vynálezem na základě výsledků expertizy, provedené Úřadem pro vynálezectví apatentnictví, Berlín, DL. 2 výkresy Severografia, n. p., MOST Cena 2,40 Kčs
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD80225718A DD161137A3 (de) | 1980-12-04 | 1980-12-04 | Verfahren und einrichtung zur ionengestuetzten beschichtung elektrisch isolierender substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CS240416B1 true CS240416B1 (en) | 1986-02-13 |
Family
ID=5527616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CS817535A CS240416B1 (en) | 1980-12-04 | 1981-10-14 | Method of coating application on electrically insulation substrates by means of ions and device for performance of this method |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4419380A (cs) |
| JP (1) | JPS6014100B2 (cs) |
| AT (1) | AT375408B (cs) |
| CH (1) | CH648356A5 (cs) |
| CS (1) | CS240416B1 (cs) |
| DD (1) | DD161137A3 (cs) |
| DE (1) | DE3142900A1 (cs) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB8713986D0 (en) * | 1987-06-16 | 1987-07-22 | Shell Int Research | Apparatus for plasma surface treating |
| CH689767A5 (de) * | 1992-03-24 | 1999-10-15 | Balzers Hochvakuum | Verfahren zur Werkstueckbehandlung in einer Vakuumatmosphaere und Vakuumbehandlungsanlage. |
| DE4412906C1 (de) * | 1994-04-14 | 1995-07-13 | Fraunhofer Ges Forschung | Verfahren und Einrichtung für die ionengestützte Vakuumbeschichtung |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3010314C2 (de) * | 1980-03-18 | 1982-01-07 | Beerwald, Hans, Dr.Rer.Nat., 5370 Kall | Verfahren zur innenbeschichtung von elektrisch nicht leitfähigen Rohren mittels Gasentladungen |
-
1980
- 1980-12-04 DD DD80225718A patent/DD161137A3/de not_active IP Right Cessation
-
1981
- 1981-09-08 AT AT0388581A patent/AT375408B/de not_active IP Right Cessation
- 1981-10-14 CS CS817535A patent/CS240416B1/cs unknown
- 1981-10-29 DE DE19813142900 patent/DE3142900A1/de active Granted
- 1981-11-03 US US06/317,817 patent/US4419380A/en not_active Expired - Fee Related
- 1981-12-03 CH CH7745/81A patent/CH648356A5/de not_active IP Right Cessation
- 1981-12-04 JP JP56194626A patent/JPS6014100B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CH648356A5 (de) | 1985-03-15 |
| AT375408B (de) | 1984-08-10 |
| ATA388581A (de) | 1983-12-15 |
| DE3142900A1 (de) | 1982-08-05 |
| US4419380A (en) | 1983-12-06 |
| DD161137A3 (de) | 1985-02-20 |
| DE3142900C2 (cs) | 1987-10-01 |
| JPS57120666A (en) | 1982-07-27 |
| JPS6014100B2 (ja) | 1985-04-11 |
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