CS219588B1 - Double three-side mirror system of optical instruments mainly double-light interferometers - Google Patents

Description

The invention provides a double triangular mirror assembly, also called a double mirror corner reflector, used to accurately reflect the light rays in optical instruments, in particular in double-beam interferometers designed to accurately measure lengths.

Triangular, optically reflecting assemblies formed from three mutually perpendicular mirror surfaces in the form of prisms in which the light rays pass through an optically transparent material, called prismatic corner reflectors, are known, and triangular reflectors assembled from three to one another are known perpendicular planar mirrors, called mirror corner reflectors.

The use of prism and mirror pole reflectors as sliding optical parts, especially in double-beam interferometers, enables, inter alia, accurate measurement of the lengths without sacrificing the perfect straightness or flatness of the guide of the sliding part.

However, the disadvantage of these pole reflectors is the difficulty of producing and checking the requirement of exact mutual perpendicularity of all three functional planar mirror surfaces, in particular for mirror pole reflectors with planar mirrors mounted on, a particular embodiment and checking the perpendicularity of the bearing surfaces for mirrors is difficult to manufacture. The geometric inaccuracy of the pole reflector produced during manufacture limits the accuracy of interference measurement. In prismatic spherical reflectors, where light rays pass through an optically transparent material, insufficient homogeneity and undesirable material stress also limit the accuracy of the interferential measurement.

The above drawbacks are eliminated by the mirror dimension reflector according to the invention, in which the principle of the solution is that the mirror reflector is formed of three identical, rectangular, parallelepiped rectangular prisms with edges a, and, height v = 2a having their two longitudinal, adjacent, perpendicular planar mirror surfaces, through which surfaces they are adhesively bonded to form a double, opposing array of three mutually perpendicular mirror planes, called a double, mirror, corner reflector.

This solution has the advantage over the known solutions in that it does not require up to three mutually perpendicular reflecting planar surfaces on the optical part from one piece of material, as in the production of prismatic corner reflectors, or a separate planar mirror carrier with bearing surfaces ensuring their perpendicularity in three planes, as in the production of mirror reflectors.

It is known that the production of two exactly perpendicular planar surfaces is less difficult than the production of three exactly perpendicular planar surfaces. In addition, such small angular errors that do not yet prevent the three prisms from adhering to one another are compensated symmetrically, thereby improving the overall geometric accuracy of the baffle. Another advantage of the solution according to the invention is that it replaces the second corner reflector in such optical systems, in particular in two-beam interferometers, where the two reflectors are located on one optical axis in the reflection function in two opposite directions.

An exemplary embodiment of the invention is illustrated in the accompanying drawing, in which: FIG. 1 shows a double, mirror, corner reflector, and FIG. 2 is a schematic illustration of an example of the use of the invention in the function of a sliding, double, mirror, stake reflector in a two-beam interferometer. for accurate length measurement.

In FIG. 1 is shown a double, mirror, fillet reflector comprises three identical, rectangular, rectangular štvorbohranolov (1, ^£ 1, 1 ') of the edges (a, a), of lice = 2, which are svojiml zrkadliacimi, the functional surfaces of the adhesively joined according 3, 2 ', 2', which are temporary or permanently locked in this position.

In FIG. 2 shows a two-ray interferometer! the light of the source Q, preceded by the semipermeable optical splitter S, is divided into two branches which are further deflected by mirrors Z, Z 'on two opposite sides in the X-Y direction of the sliding, double, mirror, dimension reflector R from which they are reflected into an optical, semipermeable splitter S, on which these rays interfere and are captured as light signals by detector D for further evaluation, the function of the double, mirror, dimension reflector R shown in FIG. 1 is a precise reflection of the rays of both branches in the same directions in which they hit it, without their angular deflection.

The use of the invention is not limited to the above example, but can also be applied where prior art corner reflectors have been used. Furthermore, in the embodiment of a transparent material without reflective layers, it can be used as a tactile angle gauge in the manufacture of, for example, a mirror carrier for a mirror reflector of known design or for checking the perpendicularity of X, Y, Z axes of three-dimensional, coordinating mechanical

219 588 systems. Depending on the manner of attachment of the edge of the dysfunctional angles of the corner reflector prisms, they may be chamfered or rounded.

Claims (2)

A double, triangular, mirror system of optical instruments, in particular a two-beam interferometroiv for accurate length measurement, characterized in that it is formed of three identical, rectangular, parallelepiped prisms (1, 1 ', 1 ”) with edges (a, a) height (v = 2a) of a material suitable for making two mirror, planar surfaces, at right angles to each other, by which surfaces these prisms (1, 1 ', 1 ”) are adhesively bonded to one another so that two opposing surfaces are formed triangular mirror systems. 2. A double, triangular, mirror-like system according to claim 1, characterized in that the reflector-bonded prisms (1, 1 ") of the reflector are secured in this position, for example, by spring clips (2, 2 ', 2 ").