CS149456B2 - - Google Patents
Info
- Publication number
- CS149456B2 CS149456B2 CS4725A CS472571A CS149456B2 CS 149456 B2 CS149456 B2 CS 149456B2 CS 4725 A CS4725 A CS 4725A CS 472571 A CS472571 A CS 472571A CS 149456 B2 CS149456 B2 CS 149456B2
- Authority
- CS
- Czechoslovakia
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S118/00—Coating apparatus
- Y10S118/90—Semiconductor vapor doping
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2033444A DE2033444C3 (de) | 1970-07-06 | 1970-07-06 | Vorrichtung zum Eindiffundieren von Dotierstoffen in Scheiben aus Halbleitermaterial |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CS149456B2 true CS149456B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-07-05 |
Family
ID=5775931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CS4725A CS149456B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1970-07-06 | 1971-06-25 |
Country Status (12)
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2324365C3 (de) * | 1973-05-14 | 1978-05-11 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Reaktionsgefäß zum Abscheiden von Halbleitermaterial auf erhitzte Trägerkörper |
| BE817066R (fr) * | 1973-11-29 | 1974-10-16 | Enceinte de reaction pour le depot de matiere semi-concuctrice sur des corps de support chauffes | |
| JPS51119592A (en) * | 1975-04-12 | 1976-10-20 | Hitachi Zosen Corp | Polishing-sweeping head |
| JPS51119591A (en) * | 1975-04-12 | 1976-10-20 | Hitachi Zosen Corp | Device of injecting polishing-sweeping material |
| DE2518853C3 (de) * | 1975-04-28 | 1979-03-22 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Vorrichtung zum Abscheiden von elementarem Silicium aus einem Reaktionsgas |
| US4018184A (en) * | 1975-07-28 | 1977-04-19 | Mitsubishi Denki Kabushiki Kaisha | Apparatus for treatment of semiconductor wafer |
| EP0077408A1 (en) * | 1981-10-16 | 1983-04-27 | Helmut Seier GmbH | A method and apparatus for the heat treatment of semiconductor articles |
| FR2670219B1 (fr) * | 1990-12-07 | 1993-03-19 | Europ Propulsion | Appareil et creuset pour depot en phase vapeur. |
| KR930008872B1 (ko) * | 1991-02-18 | 1993-09-16 | 삼성전자 주식회사 | Open-Tube형 불순물 확산장치 |
| JP3971810B2 (ja) * | 1995-11-30 | 2007-09-05 | 三星電子株式会社 | 縦型拡散炉 |
| CN1142598C (zh) | 1997-07-25 | 2004-03-17 | 日亚化学工业株式会社 | 氮化物半导体发光器件 |
| JP3770014B2 (ja) | 1999-02-09 | 2006-04-26 | 日亜化学工業株式会社 | 窒化物半導体素子 |
| ATE452445T1 (de) | 1999-03-04 | 2010-01-15 | Nichia Corp | Nitridhalbleiterlaserelement |
| JP4301564B2 (ja) * | 2004-04-27 | 2009-07-22 | 株式会社山寿セラミックス | 圧電性酸化物単結晶の帯電抑制処理方法、および帯電抑制処理装置 |
| TWI362769B (en) | 2008-05-09 | 2012-04-21 | Univ Nat Chiao Tung | Light emitting device and fabrication method therefor |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3202485A (en) * | 1962-05-01 | 1965-08-24 | Alton F Armington | Sublimation apparatus |
| US3367303A (en) * | 1963-05-29 | 1968-02-06 | Monsanto Co | Chemical equipment |
| DE1244733B (de) * | 1963-11-05 | 1967-07-20 | Siemens Ag | Vorrichtung zum Aufwachsen einkristalliner Halbleitermaterialschichten auf einkristallinen Grundkoerpern |
| DE1262244B (de) * | 1964-12-23 | 1968-03-07 | Siemens Ag | Verfahren zum epitaktischen Abscheiden einer kristallinen Schicht, insbesondere aus Halbleitermaterial |
| DE1297086B (de) * | 1965-01-29 | 1969-06-12 | Siemens Ag | Verfahren zum Herstellen einer Schicht von einkristallinem Halbleitermaterial |
| US3394390A (en) * | 1965-03-31 | 1968-07-23 | Texas Instruments Inc | Method for making compond semiconductor materials |
| US3371995A (en) * | 1965-07-09 | 1968-03-05 | Corning Glass Works | Method of making macroscopic silicon carbide fibers with a silica sheath |
| DE1521494B1 (de) * | 1966-02-25 | 1970-11-26 | Siemens Ag | Vorrichtung zum Eindiffundieren von Fremdstoffen in Halbleiterkoerper |
-
1970
- 1970-07-06 DE DE2033444A patent/DE2033444C3/de not_active Expired
- 1970-10-21 JP JP45092103A patent/JPS4910190B1/ja active Pending
-
1971
- 1971-01-22 US US108700A patent/US3705567A/en not_active Expired - Lifetime
- 1971-03-19 BE BE764513A patent/BE764513A/xx unknown
- 1971-05-18 CH CH726671A patent/CH524252A/de not_active IP Right Cessation
- 1971-06-02 GB GB1861671*[A patent/GB1302993A/en not_active Expired
- 1971-06-18 AT AT528771A patent/AT336679B/de active
- 1971-06-25 CS CS4725A patent/CS149456B2/cs unknown
- 1971-07-05 FR FR7124419A patent/FR2100223A5/fr not_active Expired
- 1971-07-06 CA CA117,471A patent/CA944869A/en not_active Expired
- 1971-07-06 NL NL7109322A patent/NL7109322A/xx unknown
- 1971-07-06 SE SE7108749A patent/SE377286B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CA944869A (en) | 1974-04-02 |
| BE764513A (fr) | 1971-08-16 |
| US3705567A (en) | 1972-12-12 |
| GB1302993A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-01-10 |
| DE2033444B2 (de) | 1978-06-22 |
| JPS4910190B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-03-08 |
| CH524252A (de) | 1972-06-15 |
| SE377286B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1975-06-30 |
| FR2100223A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-03-17 |
| DE2033444C3 (de) | 1979-02-15 |
| AT336679B (de) | 1977-05-25 |
| NL7109322A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-01-10 |
| ATA528771A (de) | 1976-09-15 |
| DE2033444A1 (de) | 1972-01-20 |