CN85107585A - 用于真空沉积镀层的方法和装置 - Google Patents
用于真空沉积镀层的方法和装置 Download PDFInfo
- Publication number
- CN85107585A CN85107585A CN198585107585A CN85107585A CN85107585A CN 85107585 A CN85107585 A CN 85107585A CN 198585107585 A CN198585107585 A CN 198585107585A CN 85107585 A CN85107585 A CN 85107585A CN 85107585 A CN85107585 A CN 85107585A
- Authority
- CN
- China
- Prior art keywords
- chamber
- inactive gas
- mentioned
- vacuum
- deposition coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 60
- 239000011248 coating agent Substances 0.000 title claims abstract description 56
- 230000008021 deposition Effects 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims abstract description 25
- 239000007789 gas Substances 0.000 claims abstract description 88
- 239000001257 hydrogen Substances 0.000 claims abstract description 55
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 55
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 51
- 238000006073 displacement reaction Methods 0.000 claims abstract description 42
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 35
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 32
- 239000001301 oxygen Substances 0.000 claims abstract description 32
- 238000000746 purification Methods 0.000 claims abstract description 19
- 238000000137 annealing Methods 0.000 claims description 58
- 239000012298 atmosphere Substances 0.000 claims description 31
- 238000005253 cladding Methods 0.000 abstract description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 219
- 229910052757 nitrogen Inorganic materials 0.000 description 115
- 229910000831 Steel Inorganic materials 0.000 description 51
- 239000010959 steel Substances 0.000 description 51
- 238000000151 deposition Methods 0.000 description 31
- 238000001771 vacuum deposition Methods 0.000 description 13
- 238000005246 galvanizing Methods 0.000 description 8
- 238000007789 sealing Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 238000005452 bending Methods 0.000 description 6
- 230000009467 reduction Effects 0.000 description 6
- 150000002431 hydrogen Chemical class 0.000 description 4
- 238000005086 pumping Methods 0.000 description 4
- 230000002829 reductive effect Effects 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 238000002156 mixing Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 238000005422 blasting Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- -1 this Chemical compound 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- QGZKDVFQNNGYKY-AKLPVKDBSA-N Ammonia-N17 Chemical compound [17NH3] QGZKDVFQNNGYKY-AKLPVKDBSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Coating With Molten Metal (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5114184A JPS60197876A (ja) | 1984-03-19 | 1984-03-19 | 真空蒸着装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN85107585A true CN85107585A (zh) | 1987-05-06 |
Family
ID=12878540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN198585107585A Pending CN85107585A (zh) | 1984-03-19 | 1985-10-14 | 用于真空沉积镀层的方法和装置 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS60197876A (cg-RX-API-DMAC10.html) |
| CN (1) | CN85107585A (cg-RX-API-DMAC10.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111270209A (zh) * | 2018-12-05 | 2020-06-12 | 领凡新能源科技(北京)有限公司 | 一种蒸汽溅射装置及控制系统、控制方法 |
| CN113755797A (zh) * | 2020-06-02 | 2021-12-07 | 宝山钢铁股份有限公司 | 一种移动加热并在带钢表面涂覆Zn层的系统及方法 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0696767B2 (ja) * | 1986-06-11 | 1994-11-30 | 住友重機械工業株式会社 | 連続真空蒸着装置 |
| JPH0745712B2 (ja) * | 1988-01-18 | 1995-05-17 | 三菱重工業株式会社 | 真空蒸着装置 |
| DE102020214293B4 (de) * | 2020-11-13 | 2022-09-15 | Thyssenkrupp Steel Europe Ag | Stahlflachprodukt mit verbesserter Zinkbeschichtung |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5938382A (ja) * | 1982-08-26 | 1984-03-02 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
-
1984
- 1984-03-19 JP JP5114184A patent/JPS60197876A/ja active Granted
-
1985
- 1985-10-14 CN CN198585107585A patent/CN85107585A/zh active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111270209A (zh) * | 2018-12-05 | 2020-06-12 | 领凡新能源科技(北京)有限公司 | 一种蒸汽溅射装置及控制系统、控制方法 |
| CN111270209B (zh) * | 2018-12-05 | 2023-12-12 | 东君新能源有限公司 | 一种蒸汽溅射装置及控制系统、控制方法 |
| CN113755797A (zh) * | 2020-06-02 | 2021-12-07 | 宝山钢铁股份有限公司 | 一种移动加热并在带钢表面涂覆Zn层的系统及方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60197876A (ja) | 1985-10-07 |
| JPS6353262B2 (cg-RX-API-DMAC10.html) | 1988-10-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| RJ01 | Rejection of invention patent application after publication |