CN85102523B - X-ray generator - Google Patents

X-ray generator

Info

Publication number
CN85102523B
CN85102523B CN85102523A CN85102523A CN85102523B CN 85102523 B CN85102523 B CN 85102523B CN 85102523 A CN85102523 A CN 85102523A CN 85102523 A CN85102523 A CN 85102523A CN 85102523 B CN85102523 B CN 85102523B
Authority
CN
China
Prior art keywords
target
window
ray generator
target body
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CN85102523A
Other languages
Chinese (zh)
Other versions
CN85102523A (en
Inventor
郁向荣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BEIJING CENTER FOR PHYSICAL AND CHEMICAL ANALYSIS
Original Assignee
BEIJING CENTER FOR PHYSICAL AND CHEMICAL ANALYSIS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BEIJING CENTER FOR PHYSICAL AND CHEMICAL ANALYSIS filed Critical BEIJING CENTER FOR PHYSICAL AND CHEMICAL ANALYSIS
Priority to CN85102523A priority Critical patent/CN85102523B/en
Publication of CN85102523A publication Critical patent/CN85102523A/en
Priority to GB08608765A priority patent/GB2175739A/en
Publication of CN85102523B publication Critical patent/CN85102523B/en
Expired legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1204—Cooling of the anode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1262—Circulating fluids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1291—Thermal conductivity

Abstract

The present invention relates to an X-ray generator. A target body and a window can be replaced under the condition of not destroying the vacuum of a work system; the target surfaces can be cleaned at the inner part of the system, and the present invention can work in a high power state; each anode surface of the target body has no cross interference; the quantitative analysis result of high repeatability can be obtained. The X-ray generator comprises the main parts, such as a vacuum working chamber, a gun body, a cleaning chamber, an ultrahigh vacuum valve, a heat dissipation device, etc., wherein the heat dissipation device adopts a low temperature conduction method to replace the conventional water cooling technology; the gun body adopts the design of a multi-target body with four target surfaces and a replaceable window. The present invention is mainly used for an X-photoelectron spectrograph and other instruments needing X-ray sources.

Description

X-ray generator
The present invention is that the instrument of excitaton source is relevant with needing with X-ray source.
Quote material as proof:
(1) K.Siegbahn etc., " ESCA:Atomic; Molecular; and Solid State Strueture Studied by Means of Electron Spectroscopy ", Nova Acta Regiae Soc.Sei., Upsaliensis, Ser.IV.vol.20(1967).
(2) K.Yate etc., J.Phya, E, b, 130(1973).
（3）Q.C.Herd，UK Patent Application，GB2133-208A
Existing x-photoelectron spectroscopy all is excitaton source with the x-ray generator, Pa in 1967 crust (Siegbahn) etc. (1)With the single anode x-ray generator of electron bombard formula as excitaton source.Refined spy (Yate) etc. in 1973 (2)Deliver the technical scheme that TURP changes the double anode x-ray generator and seen Fig. 1.Later this technical scheme is adopted by most of x-photoelectron spectroscopy manufactory.Nineteen eighty-two He De (Herd) (3)Having invented four anode remote controls selects the target x-ray generator to see Fig. 2.This invention is used in the x-photoelectron spectroscopy that Britain's Cratos (Kratos) company produces.
X-photoelectron spectroscopy experimental technique is made a further demand to x-ray generator at present:
1, needs more high-intensity excitaton source.2, the X-ray source that multiple alternative characteristic curve energy is arranged and do not have a cross interference to be to realize the non-decomposition superthin layer of XPS profile analysis, measures electron binding energy and the photoelectric cross-section thereof that deep layer core more can the utmost point and obtains auger parameter (Auger Parameter) widely.3, at random select the window material that is complementary with used target.4, high duplication quantitative analysis.
Existing x-ray generator must be exitted the operating room when changing window and target, and the work target surface is subjected to the pollution from filament and environment inevitably, can't obtain the quantitative analysis of high duplication.Water is as the heat dissipation medium, and then the rated power of anode is restricted.The alternative characteristic X-ray of double anode target can only have two kinds, and then there is serious cross interference in the target of four anode constructions, so can not satisfy above-mentioned requirement.
The said x-ray generator of the present invention can solve above-mentioned requirements preferably.
The present invention is an electron bombard formula x-ray generator, and the general structure of generator is seen Fig. 3.
Form the rifle body by cold finger bar (6), target body (10), filament assembly (8), window-frame (9) and transmission bar (11).Target body can also can be pulled to by the transmission bar and carry out the target surface cleaning in the clean room (14), or clean room is exitted so that change target body to select working face by rotational angle under the transmission bar drive.
Window-frame (9) can be sent into or take out with the transmission bar by getting window cap (29), and vacuum workshop and clean room inter-burst are connected with ultrahigh vacuum valve (12), are used for the switching between vacuum workshop and the clean room.
Clean room is made up of etching ion gun (13) pumping hole (15) vacuum capping (16) etc.
Sealing bearing sleeve (17) is used for the vacuum seal of clean room and transmits the horizontal supporting of bar.It supports sleeve pipe and difference bleeding point (18) to form by the sealing ring that includes.Scale (19) transmits the axial and angle position of bar in order to indication.
The heat that produces during target body work is eliminated by heat dissipation device, heat dissipation device is made up of the cold finger bar in low-temperature (low temperature) vessel (1) and the rifle body, hold the cryogenic media that can replenish at any time in the low-temperature (low temperature) vessel, cold finger bar one end inserts the target body of hollow, and the other end and low-temperature (low temperature) vessel inner core are linked into one.
Target body is the four prisms cylinder of hollow, have four orthogonal target surfaces, target surface is slightly concave and sees Figure 10, (10 ") are welded into one and see Fig. 9; the termination of transmitting bar has an external screw thread body (30) to see Fig. 8; (10 ") are complementary, and window-frame (9) comprises that window material fixed head (27) and location notch (28) see Fig. 6, get window cap (29) and can link with window-frame and transmission bar respectively and be used for fetching and delivering of window with the internal thread body for target body and internal thread body.
The said x-ray generator of the present invention has following advantage than prior art:
1, adopts low temperature conduction method to carry out heat dissipation and guarantee the high-power operation state of target and the noiselessness of system, do not have the corrosion running.
2, the target surface of different anode materials can be selected to have on the same target body arbitrarily, target body can be changed at any time and the window material that is complementary with used anode and needn't destroy the vacuum state of vacuum workshop.
3, can carry out the target surface cleaning at any time, realize highly repeated quantitative measurment.
4, the target body structure with four nick faces has been avoided cross interference fully.
Description of drawings:
Fig. 1 represents that the TURP delivered of refined spy (Yate) etc. in 1973 changes the double anode x-ray generator.
A 1-anode surface 1 a-cooling water pipe
A 2-anode surface 2 b-target bodys
f 1-filament 1 c-barricade
f 2-filament 2 d-rifle body sleeves
The w-window
Fig. 2 represents that four anode remote controls of nineteen eighty-two He De (Herd) invention select the target x-ray generator.
T 1-anode surface 1 e 1-barricade 1
T 2-anode surface 2 e 2-barricade 2
T 3-anode surface 3 e 3-barricade 3
T 4-anode surface 4 e 4-barricade 4
F 1-filament 1 g-electronics trap
F 2-filament 2 h-rifle body sleeves
Fig. 3 illustrates x-ray generator general structure of the present invention
1-low-temperature (low temperature) vessel 11-transmits bar
2-high-field electrode 12-ultrahigh vacuum valve
3-filament electrode 13-etching ion gun
4-insulation supporter 14-clean room
5-rifle body sleeve 15-pumping hole
The capping of 6-cold finger bar 16-vacuum
The 17-of 7-vacuum workshop seals supporting
8-filament assembly 18-difference bleeding point
9-window-frame 19-Position Scale
The 10-target body
The profile position mark of A-A-Fig. 4
Fig. 4 rifle body cross section is represented the relative position of target body and sample and electron energy analyzer.
The section mark of A-A-in Fig. 3
20-electron energy analyzer 24a-filament a
21-window 24b-filament b
22-window pressing plate 25-filament base
23-barricade 26-sample
Fig. 5 window-frame sectional view
The section mark of B-B-in Fig. 6
The 28-location notch
Fig. 6 window-frame outline drawing
B-B-Fig. 5 section mark
27-window support plate
Fig. 7 gets window cap profile
29-gets the window cap
Fig. 8 transmits the bar outline drawing
30-external screw thread body 11-transmits bar
Fig. 9 target body profile
C-C-Figure 10 sectional position mark
10 '-copper anode matrix 10 " internal thread body
This figure of Figure 10 target body sectional view is cross section, C-C position on Fig. 9 target body
10 1'-target surface 1 10 3'-target surface 3
10 2'-target surface 2 10 4'-target surface 4
Preferred forms:
Referring to Fig. 3 low-temperature (low temperature) vessel (1) is the telescoping structure of double-deck hollow and mutually insulated, wherein can hold liquid nitrogen (178 ℃), and for guaranteeing safety, the protection relay with the high-field electrode interlocking is equipped with in the bottleneck capping.Insulation supporter (4) useful ceramics is made.
The cold finger bar is made with stainless steel at an end of low-temperature (low temperature) vessel, make with oxygenless copper material at the other end that vacuum work is indoor, two parts join together in the threaded engagement mode, insert in the target body of hollow at the indoor cold finger rod end head of vacuum work, and the heat conduction that produces when target body is worked is come out.
Rifle body sleeve (5) is made with oxygenless copper material, referring to Fig. 9, Figure 10, target body 10 by copper anode matrix 10 ' and the internal thread body that is welded into one with it (10 ") are formed; the outer surface of anode substrate is slightly concave can select thermal evaporation for use, and methods such as electron beam evaporation or radio frequency sputtering are the required anode material of plating on the anode substrate outer surface.
Provide high pressure by high-field electrode (2) to target body, 2～20 kilovolts of practical voltage ranges.
Referring to Fig. 4, filament assembly (8) by support on ceramic base (25) two filaments (24a) and (24b) and filament barricade (23) form, filament is in zero or approach zero potential.
Two filaments can be independent, also can work simultaneously, and the practical emission current scope of each filament is 1～60 milliampere, and barricade (23) is in identical with filament or omits negative potential.
Window material can be selected 5 micron aluminum foils, 10～20 micron thickness beryllium paper tinsels or other thin-film material (as polyester and mica etc.) that is suitable for for use according to the characteristic of the characteristic X-ray of anode emission, and window material (21) is fixed on the window-frame (9) by window pressing plate (22).
Target body (10) can rotate by the angle of transmitting bar (11) selects working face, and the transmission bar also can be pulled to the target body level clean room and carry out the target surface cleaning by etching ion gun, or target body is taken out in clean room venting back change.
Window-frame (9) can be pulled out more to renew window with the transmission bar by getting window cap (29).
All above-mentioned commentaries on classics targets, get target and get window operation and all do not destroy vacuum workshop's vacuum.
Be in ultrahigh vacuum valve (12) and high-field electrode interlock protection between vacuum workshop (7) and clean room (14); ultrahigh vacuum valve is opened; height breaks; transmit can freely come in and go out operating room and change target, fetch and deliver target and fetch and deliver window operation of bar with this understanding; only after the transmission bar deactivates outdoor and cuts out ultrahigh vacuum valve, just may start high pressure.
Etching ion gun adopts large beam spot sweep type argon-ion gun.
What join with pumping hole (15) is 60 liters of/second little turbomolecular pumps.
Difference bleeding point (18) is connected to the forepump of main frame.
Sealing supporting (17) includes 2 to 3 spring viton seal rings and a tetrafluoroethene sleeve pipe.
Position Scale (19) transmits the service position of the axial and anglec of rotation of bar in order to indication.
According to above-mentioned same mode, the present invention also can be used as the x-ray generator part in the X-light monochromator system, and for example, target surface can be aluminized and the silver anode material, with 1010 quartz crystals is diffractometer, then can go up at 78.5～77.5 ° of Bragg angles (Bragg angle) and obtain (A1 K α 1) and (Ag L α 1) high-purity characteristic curve.

Claims (7)

1, a kind of x-ray generator has vacuum workshop (7), rifle body and target body is carried out the device of heat dissipation, and ultrahigh vacuum valve and filament assembly is characterized in that:
A, there are a clean room (14), ultrahigh vacuum valve (12) to be connected in the middle of vacuum workshop and the clean room,
Cold finger bar (6), target body (10), window-frame (9) and filament assembly (8) are arranged in B, the rifle body,
One low-temperature (low temperature) vessel (1) is arranged in C, the heat dissipation device, and the cold finger bar (6) in the inner core of low-temperature (low temperature) vessel and the rifle body fuses,
Be equipped with one on D, the clean room (14) and can clean etching ion gun (13) and sealing bearing sleeve (17) of being convenient to change target body and window-frame that target surface is used.
2, by the said x-ray generator of claim 1, it is characterized in that window-frame is a hollow circular cylinder, on the normal direction on the face of cylinder, be provided with window (21), the helicitic texture that can be connected with transmission bar (11) is arranged on the window-frame.
3, by the said x-ray generator of claim 2, it is characterized in that target body is the hollow four prisms cylinder, have four orthogonal target surfaces (10 1', 10 2', 10 3', 10 4'), target surface is the nick shape, and the helicitic texture that can be connected with the transmission bar is arranged on the target body.
CN85102523A 1985-04-10 1985-04-10 X-ray generator Expired CN85102523B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN85102523A CN85102523B (en) 1985-04-10 1985-04-10 X-ray generator
GB08608765A GB2175739A (en) 1985-04-10 1986-04-10 X-ray generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN85102523A CN85102523B (en) 1985-04-10 1985-04-10 X-ray generator

Publications (2)

Publication Number Publication Date
CN85102523A CN85102523A (en) 1986-02-10
CN85102523B true CN85102523B (en) 1988-01-27

Family

ID=4792576

Family Applications (1)

Application Number Title Priority Date Filing Date
CN85102523A Expired CN85102523B (en) 1985-04-10 1985-04-10 X-ray generator

Country Status (2)

Country Link
CN (1) CN85102523B (en)
GB (1) GB2175739A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4110468A1 (en) * 1991-03-30 1992-10-01 Forschungszentrum Juelich Gmbh DEVICE FOR X-RAY RADIATION OF OBJECTS
JP3839528B2 (en) * 1996-09-27 2006-11-01 浜松ホトニクス株式会社 X-ray generator
CN103594308A (en) * 2013-11-25 2014-02-19 丹东华日理学电气股份有限公司 Double-lamp filament X-ray tube
CN105489461B (en) * 2015-12-04 2017-09-29 魏理贵 Many rotatable X-ray bulbs of negative electrode
CN109540942B (en) * 2018-11-27 2021-05-25 东莞中子科学中心 Temperature-variable automatic sample changing device for scattering or diffraction experiment

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB843009A (en) * 1957-01-10 1960-08-04 Hilger & Watts Ltd Anode systems for x-ray tubes
GB878182A (en) * 1957-01-10 1961-09-27 Hilger & Watts Ltd X-ray tubes
GB1042751A (en) * 1963-02-11 1966-09-14 Hilger & Watts Ltd Improvements in electron-beam discharge devices
DE2347178B2 (en) * 1973-09-19 1975-09-18 Siemens Ag, 1000 Berlin Und 8000 Muenchen X-ray diagnostic apparatus

Also Published As

Publication number Publication date
GB8608765D0 (en) 1986-05-14
CN85102523A (en) 1986-02-10
GB2175739A (en) 1986-12-03

Similar Documents

Publication Publication Date Title
US4431901A (en) Induction plasma tube
CN85102523B (en) X-ray generator
SE450539B (en) PLASMA PACKAGING FOR PLANNING TRANSFERS
PT1856303E (en) Single, right-angled end-block
CN85102774B (en) Method and structure of causing electrostatic 4-porlarity field by using closed boundary
CN1525803A (en) Normal pressure radio frequency and DC mixed type cold plasma system and spray gun thereof
WO2022114721A1 (en) Static electricity eliminating apparatus using excimer lamp
CN113817999B (en) Vacuum coating equipment for preparing piezoelectric ceramics
US5039864A (en) Device for replacing electron microscope specimens
CN114016004B (en) Graphite boat front electrode reconstruction structure capable of avoiding falling sheets in furnace
CN110379667A (en) A kind of vacuum extinction chamber device
US3736246A (en) Apparatus for the preparation and treatment of thin layers
US2154278A (en) Carbon exterior anode
US2347424A (en) X-ray tube
CN209893934U (en) ECR ion source induction furnace
CN112018622A (en) Low-voltage draw-out type structure switch cabinet
CN2241698Y (en) Plane magnetic control sputtering source
CN2604848Y (en) Atmospheric radio-frequency cold plasma generator
CN219898672U (en) Annular paint spraying device
CN210826334U (en) Magnetron sputtering's two target structures
Mog Machinable glass-ceramic: a new material for vacuum equipment
CN2220477Y (en) Processing furnace for preparation low surface energy recuperative pipe using magnetic control plasma technology
DE3883224D1 (en) HIGH CURRENT SWITCH.
CN218632828U (en) Low-voltage switch cabinet
CN214541742U (en) Quick cooling type electric porcelain insulator with anti-spalling function

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C13 Decision
GR02 Examined patent application
C14 Grant of patent or utility model
GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee