CN2935467Y - 具有多层涂层的抗腐蚀铝元件 - Google Patents

具有多层涂层的抗腐蚀铝元件 Download PDF

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Publication number
CN2935467Y
CN2935467Y CNU200620000359XU CN200620000359U CN2935467Y CN 2935467 Y CN2935467 Y CN 2935467Y CN U200620000359X U CNU200620000359X U CN U200620000359XU CN 200620000359 U CN200620000359 U CN 200620000359U CN 2935467 Y CN2935467 Y CN 2935467Y
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CN
China
Prior art keywords
gas
aluminium
process chamber
substrate
aluminum
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Expired - Lifetime
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CNU200620000359XU
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English (en)
Chinese (zh)
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阿施施·布特那格尔
拉克斯曼·牧鲁格施
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Applied Materials Inc
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Applied Materials Inc
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Physical Vapour Deposition (AREA)
CNU200620000359XU 2005-01-18 2006-01-18 具有多层涂层的抗腐蚀铝元件 Expired - Lifetime CN2935467Y (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/037,633 US7732056B2 (en) 2005-01-18 2005-01-18 Corrosion-resistant aluminum component having multi-layer coating
US11/037,633 2005-01-18

Publications (1)

Publication Number Publication Date
CN2935467Y true CN2935467Y (zh) 2007-08-15

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Family Applications (1)

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CNU200620000359XU Expired - Lifetime CN2935467Y (zh) 2005-01-18 2006-01-18 具有多层涂层的抗腐蚀铝元件

Country Status (4)

Country Link
US (1) US7732056B2 (enExample)
JP (1) JP4881015B2 (enExample)
CN (1) CN2935467Y (enExample)
TW (1) TWM310107U (enExample)

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CN102061472A (zh) * 2011-01-26 2011-05-18 巨科集团有限公司 一种镜面铝表面氧化镀膜方法
CN102400091A (zh) * 2010-09-10 2012-04-04 鸿富锦精密工业（深圳）有限公司 铝合金的表面处理方法及由铝合金制得的壳体
CN102458068A (zh) * 2010-11-03 2012-05-16 鸿富锦精密工业（深圳）有限公司 壳体及其制作方法
CN103866322A (zh) * 2014-03-21 2014-06-18 佛山市红利建材有限公司 铝材真空镀膜工艺
CN104213173A (zh) * 2014-09-01 2014-12-17 吴啟良 一种铝及铝合金的混酸型硬质阳极氧化方法
CN105990081A (zh) * 2015-02-09 2016-10-05 中微半导体设备(上海)有限公司 等离子体处理装置及其制作方法
CN108884585A (zh) * 2016-03-31 2018-11-23 Abm股份有限公司 金属构件、其制造方法及装备有上述金属构件的处理腔室
WO2019169912A1 (zh) * 2018-03-08 2019-09-12 北京北方华创微电子装备有限公司 反应腔室部件及其制备方法、反应腔室

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US20180240649A1 (en) * 2017-02-17 2018-08-23 Lam Research Corporation Surface coating for plasma processing chamber components
KR102659394B1 (ko) * 2018-07-03 2024-04-19 램 리써치 코포레이션 세라믹 코팅을 컨디셔닝하기 위한 방법
KR102737117B1 (ko) * 2018-07-26 2024-11-29 램 리써치 코포레이션 플라즈마 프로세싱 챔버 컴포넌트들을 위한 표면 코팅
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KR20210142205A (ko) * 2019-04-16 2021-11-24 램 리써치 코포레이션 표면 코팅 처리
CN115135812A (zh) * 2020-02-19 2022-09-30 朗姆研究公司 用于调整半导体处理室部件的方法
US11555250B2 (en) * 2020-04-29 2023-01-17 Applied Materials, Inc. Organic contamination free surface machining
JP2023092365A (ja) * 2021-12-21 2023-07-03 日本発條株式会社 積層構造体、半導体製造装置および積層構造体の製造方法
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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102400091A (zh) * 2010-09-10 2012-04-04 鸿富锦精密工业（深圳）有限公司 铝合金的表面处理方法及由铝合金制得的壳体
CN102458068A (zh) * 2010-11-03 2012-05-16 鸿富锦精密工业（深圳）有限公司 壳体及其制作方法
CN102061472A (zh) * 2011-01-26 2011-05-18 巨科集团有限公司 一种镜面铝表面氧化镀膜方法
CN103866322A (zh) * 2014-03-21 2014-06-18 佛山市红利建材有限公司 铝材真空镀膜工艺
CN103866322B (zh) * 2014-03-21 2016-09-07 恩平建高实业有限公司 铝材真空镀膜工艺
CN104213173A (zh) * 2014-09-01 2014-12-17 吴啟良 一种铝及铝合金的混酸型硬质阳极氧化方法
CN105990081A (zh) * 2015-02-09 2016-10-05 中微半导体设备(上海)有限公司 等离子体处理装置及其制作方法
CN105990081B (zh) * 2015-02-09 2018-09-21 中微半导体设备(上海)有限公司 等离子体处理装置及其制作方法
CN108884585A (zh) * 2016-03-31 2018-11-23 Abm股份有限公司 金属构件、其制造方法及装备有上述金属构件的处理腔室
WO2019169912A1 (zh) * 2018-03-08 2019-09-12 北京北方华创微电子装备有限公司 反应腔室部件及其制备方法、反应腔室

Also Published As

Publication number Publication date
US7732056B2 (en) 2010-06-08
JP2006241589A (ja) 2006-09-14
US20060159940A1 (en) 2006-07-20
JP4881015B2 (ja) 2012-02-22
TWM310107U (en) 2007-04-21

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