The utility model content
The purpose of this utility model is to provide a kind of full dynamic formula shearing/interference mirror, be applied in the industrial nondestructive testing equipment of laser holographic interferometry, but the Non-Destructive Testing of integrated electronic speckle and shearing electronic speckle interference then can realize multimodal Non-Destructive Testing.
In order to achieve the above object and be convenient to understand the technical solution of the utility model, make relevant principle earlier and briefly introduce as follows:
1, electronic speckle is measured the ultimate principle of acoplanarity displacement, referring to Fig. 8
The interference light that is sent by laser instrument (1 ') forms two beam interferometer light through spectroscope (3 ').Wherein a branch of tested object plane (10 ') that after beam expanding lens (4 ') is dispersed, illuminates; Behind another Shu Guangjing catoptron (2 ') reflection and the expansion bundle, be incident upon on the diffusing screen (5 ').At preceding half-reflecting half mirror of placement of video camera (8 ') (6 ') and imaging len (7 '), the light wave of diffusion forms interference through transmission and reflection back on the video camera imaging plane on body surface and the diffusing screen.When there is defective in interior of articles, because the influence of stress concentration effect, the object plane part will produce bigger distortion.Therefore, the interference fringe by analyzing object plane just directly judgment object inside whether have defective.
2, the ultimate principle of shearing electronic speckle measurement acoplanarity displacement gradient
Shearing electronic speckle interference is measured the basic light path of acoplanarity displacement gradient and is seen shown in Figure 9
The interference light that is sent by laser instrument (1 ') reflects through catoptron (2 '), illuminates tested object plane (10 ') through bundle after beam expanding lens (4 ') is dispersed again.At preceding shear mirror of placement of video camera (8 ') (6 ') and imaging len (5 '),, and on the video camera imaging plane, form interference from light wave formation two beam interferometer light waves after passing through shear mirror (6 ') of body surface diffusion.The Wollaston prism is a kind of shear mirror commonly used, the effect of prism is equivalent to a wedge, make that a branch of photolysis of incident is two bundle emergent raies with mistake parallactic angle α, form two dislocation pictures on the video camera phase plane, the two is interfered mutually and forms the speckle interference image.
3, the ultimate principle of phase measurement
Phase measurement can effectively improve the stripe measurement precision, and makes datamation.The form that the light distribution of one width of cloth interference fringe image can be expressed as
I(x,y)=I
0(x,y)+I
1(x,y)cosΔ(x,y)
Wherein, I
0(x y) is the background light intensity of image, I
1(x y) is the contrast of striped, Δ (x, y) phase change that causes of representative body deformability.By phase-shifter, in a branch of optical interference circuit, introduce known phase-shift phase α
j, i=1,2,3,4, can obtain the interference fringe image of four width of cloth correspondences
I(x,y)=I
0(x,y)+I
1(x,y)cos[Δ(x,y)+α
1]
II(x,y)=I
0(x,y)+I
1(x,y)cos[Δ(x,y)+α
2]
III(x,y)=I
0(x,y)+I
1(x,y)cos[Δ(x,y)+α
3]
IIII(x,y)=I
0(x,y)+I
1(x,y)cos[Δ(x,y)+α
4]
If α
1=0, α
2=pi/2, α
3=π, α
4=3 pi/2s by finding the solution above system of equations, can directly draw the phase information that is associated with deformation of body
The utility model has adopted piezoceramic material, one end is fixed, the other end is connected with a catoptron, simultaneously ceramic two ends connect two electrodes, mode by regulation voltage changes the flexible of piezoelectric ceramics, make catoptron produce the translation of controlled wavelength magnitude, thereby make reference light and thing light produce known, controlled phasic difference.
4, shearing/interference mirror
Innovative point of the present utility model is to integrate two kinds of laser interferometry technology, pass through the novel full dynamic formula shearing/interference mirror that proposed, make and measure the sensitivity scalable, measure the sensitive direction scalable, introduced the phase shift automatic measurement technology simultaneously, can realize the automatic processing of measurement data, for the instrumentation of this novel non-destructive detecting device provides a kind of design philosophy easily.
Shearing/interference mirror is made up of a half-reflecting half mirror and two completely reflecting mirrors, sees shown in Figure 10.In Non-Destructive Testing, if adopt the shearing electronic speckle method, this patented claim can be used as a shear mirror and uses.Project the laser beam on the object, by after the object plane diffuse reflection at first through half-reflecting half mirror 3 beam splitting, wherein a branch of light arrives catoptron 1 and returns along former road; Another bundle light arrives catoptron 2, because there are a small angle in the normal direction of catoptron and light path, beam reflected will have a certain degree with the light beam shape that catoptron 1 reflects, thereby forms the phenomenon that two-beam is interfered on television camera 8 target surfaces.Catoptron 1 connects firmly on a pedestal that has a piezoelectric ceramics, and under the driving of power supply, catoptron 1 can be along the translation of its normal direction generation wavelength magnitude, and the known bits that is produced differs the position that can realize in (1) formula and measures automatically mutually.2 of catoptrons connect firmly on a rotatable platform with 2DOF, and platform is by driven by servomotor, can make catoptron 2 along in its face arbitrarily axis rotate, the normal direction of pivot center is the direction of shearing displacement δ x, rotational angle is then controlled the size of δ x.Thereby realize that measuring process medium sensitivity is adjustable, sensitive direction can be in harmonious proportion the time-phase displacement function, improve the practicality and the reliability of this measuring technology.
Another big advantage of this patented claim is exactly to change by simple, just can change another kind of Dynamic Non-Destruction Measurement into---the electronic speckle method realizes Non-Destructive Testing to object by measuring surface deformation, and this detection method is particularly suitable for differentiating the shape of defective in the object.Figure 11 has formed the electronic speckle pattern interferometry light path of a Measuring Object acoplanarity displacement.
Laser beam after expanding bundle is divided into two-beam by half-reflecting half mirror 3, and wherein a branch of light microscopic reflection back arrives object 2 surfaces, and its diffused light arrives television camera 8 target surfaces by half-reflecting half mirror again.Another bundle light transmission half-reflecting half mirror arrives catoptron 1, produces interference with the first bundle light on the television camera target surface again after its reflection light mirror reflection.Catoptron 1 connects firmly on a pedestal that has a piezoelectric ceramics, and under the driving of power supply, catoptron 1 can be along the translation of its normal direction generation wavelength magnitude, and the known bits that is produced differs the position that can realize in (1) formula and measures automatically mutually.
According to the relative theory of above introduction, for reaching above-mentioned utility model purpose, the utility model is adopted following technical proposals:
A kind of full dynamic formula shearing/interference mirror comprises spectroscope, catoptron and laser beam expander, it is characterized in that:
(1) described spectroscope with 45 ° be inclined in one up and down the four sides opening housing in;
(2) described catoptron has two: translation catoptron is arranged on the left opening part of described housing by controlled translation mechanism, and another deflection mirror is arranged on upper shed place of described housing by controlled offsetting mechanism;
(3) described laser beam expander is arranged on right opening the place ahead of described housing by hinges mechanism.
The structure of above-mentioned controlled translation mechanism is: described translation catoptron sticks on the slide block that has a swallow-tail form tenon, tight sliding joining of the swallow-tail form tenon of slide block and the swallow-tail form tongue-and-groove of a tray, tray is connected with a translation catoptron fixed cover by a cylinder shelly piezoelectric ceramics rod, voltage regulating and controlling circuit is connected at piezoelectric ceramics rod two ends, and translation catoptron fixed cover is connected the left opening part of described housing by screw retention.
Above-mentioned translation catoptron is catoptron or diffuse reflection surface mirror.
The structure of above-mentioned controlled deflection mechanism is: described deflection mirror sticks on the deflecting plate, one of deflecting plate by ball pivot and a deflection mirror fixed cover hinge, fix two servomotors on the deflection mirror fixed cover, the adjusting bolt of two roof pressure deflecting plate of driven by servomotor, the deflecting plate another side has spring to support, and the deflection mirror fixed cover is connected upper shed place of described housing by screw retention.
The structure of above-mentioned hinges mechanism is: pass through cantilevered pipe of a hinges hinge at the right opening part lower edge of described housing, the fixedly connected described laser beam expander of the free end of cantilevered pipe, the optical fiber of conduction laser imports from the hinge link of cantilevered pipe, connects laser beam expander behind the cantilevered tube cavity.
The utility model has following conspicuous substantive distinguishing features and advantage compared with prior art: (1) catoptron can be introduced phase shift by controlling its amount of movement along its normal direction translation, realizes automatic analysis of picture; (2) deflection angle of another catoptron is adjustable, and yawing moment is adjustable, by the shearing displacement and the shear direction of control shear mirror, reaches and regulates the purpose of measuring sensitivity and sensitive direction; (3) the rotation catoptron is detachable, and shear mirror and interference mirror are combined as a whole, and just electronic speckle and two kinds of measuring techniques of shearing electronic speckle is combined as a whole, and forms multimodal Non-Destructive Testing mode.
Embodiment
Details are as follows in conjunction with the accompanying drawings for this practical preferred embodiment:
Referring to Fig. 1, this full dynamic formula shearings/interference mirror includes spectroscope 3, catoptron and laser beam expander 7, and described spectroscope 3 is inclined in one up and down on four sides in the housing 8 of opening with 45 °.Described catoptron has two: translation catoptron 1 is arranged on the left opening part of described housing 8 by controlled translation mechanism, and another deflection mirror 2 is arranged on upper shed place of described housing 8 by controlled offsetting mechanism; Described laser beam expander 7 is arranged on right opening the place ahead of described housing 8 by hinges mechanism.
Referring to Fig. 2, Fig. 3 and Fig. 4, the structure of above-mentioned controlled translation mechanism is: described translation catoptron 1 sticks on the slide block 12 that has a swallow-tail form tenon, tight sliding joining of the swallow-tail form tenon of slide block 12 and the swallow-tail form tongue-and-groove of a tray 11, tray 11 is connected with a translation catoptron fixed cover 9 by cylinder shelly piezoelectric ceramics rod 10, voltage regulating and controlling circuit is connected at piezoelectric ceramics rod 10 two ends, and translation catoptron fixed cover 9 is connected the left opening part of described housing 8 by screw retention.
Above-mentioned translation catoptron 1 is catoptron or diffuse reflection surface mirror.
Referring to Fig. 5, Fig. 5 and Fig. 7, the structure of above-mentioned controlled deflection mechanism is: described deflection mirror 2 sticks on the deflecting plate 15, one of deflecting plate 15 by ball pivot 17 and deflection mirror fixed cover 14 hinges, fix two servomotors 13 on the deflection mirror fixed cover 14, servomotor 13 drives the adjusting bolt 16 of two roof pressure deflecting plate 15, deflecting plate 15 another sides have spring to support, and deflection mirror fixed cover 14 is connected upper shed place of described housing 8 by screw retention.
Referring to Fig. 1, the structure of above-mentioned hinges mechanism is: pass through cantilevered pipe 6 of a hinges 5 hinges at described housing 8 right opening part lower edges, the fixedly connected described laser beam expander 7 of the free end of cantilevered pipe 6, the optical fiber 4 of conduction laser imports from the hinge link of cantilevered pipe 6, connects laser beam expander 7 behind cantilevered pipe 6 inner chambers.
The concrete operations step of different working modes following (referring to Fig. 1):
One, when adopting the shearing electronic speckle pattern, this equipment is as shear mirror, and the concrete operations step is as follows:
1, controlled rotation catoptron 2 is installed, is connected the control corresponding cable.
2, cantilever 6 around pin joint 5 about 180 degree that turn clockwise, regulate the laser beam 7 of fiber optic conduction, laser beam is illuminated be positioned at the testee on equipment right side.
3, the irreflexive light beam of object plane projects respectively on catoptron 1 and 2 through half-reflecting half mirror 3, and the reflection back receives by the image capturing system that is positioned at half-reflecting half mirror 3 belows again.
4, upwards observe from half-reflecting half mirror 3 belows, can see that testee is through catoptron 1 and 2 original images that form and dislocation picture clearly.
5, utilize the rotation direction of servomotor accommodation reflex mirror 2, can observe the dislocation picture and move around original image; The amount of spin of accommodation reflex mirror 2, can observe dislocation picture and original object image distance from variation.Select suitable rotation direction and rotational angle.
Two, when adopting the electronic speckle pattern, this equipment is as interference mirror, and the concrete operations step is as follows:
1, removes controlled rotation catoptron and control corresponding cable.
2, cantilever 6 is rotated to position shown in Figure 1 around pin joint 5, regulate the laser beam 7 of fiber optic conduction, make laser beam irradiation to half-reflecting half mirror 3.Ray Of Light illuminates the object that is positioned at the equipment top after half-reflecting half mirror 3 reflections, the irreflexive light beam of object plane after half-reflecting half mirror 3 transmissions, projects half-reflecting half mirror again
On the television camera target surface of 3 belows; Another bundle light is mapped to through half-reflecting half mirror and reaches catoptron 1, arrives the video camera target surface of below after the reflection again through the half-reflecting half mirror reflection.If discovery is too strong through the brightness of catoptron 1, can substitute catoptron with diffuse reflection surface as shown in Figure 6.
3, upwards observe from half-reflecting half mirror 3 belows, can see the original image of representing contour of object clearly and from the speckle field image of catoptron 1.