CN2926265Y - Self-controlled permanent-magnetic variable magnetic-field device - Google Patents
Self-controlled permanent-magnetic variable magnetic-field device Download PDFInfo
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- CN2926265Y CN2926265Y CN 200620026813 CN200620026813U CN2926265Y CN 2926265 Y CN2926265 Y CN 2926265Y CN 200620026813 CN200620026813 CN 200620026813 CN 200620026813 U CN200620026813 U CN 200620026813U CN 2926265 Y CN2926265 Y CN 2926265Y
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Abstract
The utility model relates to a self-controlled variable magnetic field device, which includes a mechanical part and a control part. The mechanical part includes an internal magnetic ring and an external magnetic ring stitched and knotted by fan-shaped magnetic blocks of same quantity, and fixed between the fixed ring and the base through the upper bearing and lower bearing. The internal magnetic ring is connected to the central part of the transmission shaft in the base through the horizontal bevel gear and vertical bevel gear. The stepper motor and asynchronous motor are connected respectively to both ends of the said transmission shaft through the electromagnetic clutch with stepper motor and electromagnetic clutch with asynchronous motor. The rotary encoder is also connected to the central part of the transmission shaft through the gear. A double ring pin is arranged on the upper side of the outer diameter of the external magnetic ring; while an outer ring pin is arranged on the lower part of the outer diameter of the external magnetic ring. The control part includes a central control unit, a position and speed inspection unit and a serial communication unit which are connected with it, as well as a switch control unit and a display unit which are controlled by the control part.
Description
Technical field
The utility model relates to a kind of semiconductor material manufacturing technology, is specially a kind of permanent magnetism variable magnetic field device with automatic controlled function.International Patent classificating number intends being Int.C1.C30B30/00 (2006.01).
Background technology
The applicant has obtained power " the equivalent micro-gravity crystal growth adjustable permanent magnetic device (ZL99257515.X) in radial radiation-type magnetic field ", can be used as the application's background technology.It has described the primary structure characteristics of this device, on furnace base, installing growth furnace, installing guide pillar in the growth furnace peripheral circumferential, adorning leading screw by bottom bracket in the guide pillar, installing power wheel on the leading screw, power wheel is connected with transmission rig by transmission belt, and the peripheral suit of growth furnace permanent magnetic ring, the collar that is packed on the magnet ring is sleeved on the guide pillar, is adorning electromagnetic clutch in the collar.This apparatus structure is simple, saves the energy, can realize crystalline " equivalent micro-gravity growth ", improves crystal homogeneity and microcell homogeneity greatly, and cost is low, can be widely used in the growth of mineral crystal.Device of this three rings permanent magnet can be obtained manufacturing effect preferably when being applied to czochralski crystal growing furnace below 3 inches, and when being used for major diameter (more than 3 inches) single crystal growing furnace, reach the sizableness difficulty in required magnetic field, and the cost costliness, is difficult to use.Along with silicon single-crystal develops to major diameter, the thermal convection in the melt is more and more serious.Need to adopt method from permanent magnetic field to the melt space that introduce, with the thermal convection of inhibition conductive melt, thereby the oxygen level in the reduction crystal improves the crystal product quality.Experimental study shows that existing tricyclic permanent magnetic field is not suitable for the large diameter single crystals growth more than six inches.On the other hand, three ring magnetic field of permanent magnet formerly are that it is very inconvenient to operate by manual shift, and quality product is restive.
The utility model content
At the deficiencies in the prior art, the technical problems to be solved in the utility model is a kind of automatic control permanent magnetism variable magnetic field device of design, this device can be realized the radial magnetic field that the crystal pulling of major diameter magnetic field is required, be applicable to the large diameter single crystals growth more than six inches, and the big I in magnetic field is adjustable continuously within the specific limits under computer control, simultaneously simple in structure, cost is lower.
The technical scheme that the utility model solves described automatic control permanent magnetism variable magnetic field device technical problem is: design a kind of automatic control permanent magnetism variable magnetic field device, this device comprises mechanical part and control section, mechanical part comprises internal magnetic ring and the outer magnetic ring that is spliced and is nested together mutually by the identical fan-shaped magnetic patch of quantity, it is packed between set collar and the base by head bearing and lower bearing, internal magnetic ring is connected by the middle part of the transmission shaft in horizontal bevel gear and vertical bevel gear and the base, stepper-motor and asynchronous machine are connected to the two ends of described transmission shaft respectively by stepper-motor electromagnetic clutch and asynchronous machine electromagnetic clutch, rotary encoder also is connected with the middle part of transmission shaft by gear pair; External diameter top at outer magnetic ring is equipped with the dicyclo tumbler pin, in the external diameter bottom of outer magnetic ring the outer shroud tumbler pin is installed; Control section comprises central control unit, position that is attached thereto and speed detection unit and serial communication unit, and the switching value control unit and the display unit that are subjected to its control.
Compared with prior art, the utility model automatic control permanent magnetism variable magnetic field device has following advantage:
1. be applicable to major diameter single crystal, can be applicable to single crystal growing furnace more than six inches, realize the required magnetic field of large diameter single crystals growth;
2. the radial magnetic field of realizing ideal by the transverse magnetic field rotation, can be similar to the formation radial magnetic field ideal to the magnetic field crystal pulling under lower cost, realize the radial magnetic field effect at crystallization liquid level place;
3. improve the quality of products, when being applied to six inches single crystal growings, the product detected result shows that oxygen level has reduced about 40% in the wafer;
4. realize control automatically, under computer control, can realize regulating automatically magnetic field size and magnetic field speed of rotation;
5. have multi-functionally, not only can be used for the magnetic field crystal pulling, and can be applicable to chemical industry crystallization, magnetic field the effect research of biomass cells and other are needed the occasion in magnetic field.
Description of drawings
Fig. 1 is the mechanical part Facad structure synoptic diagram of a kind of embodiment of the utility model automatic control permanent magnetism variable magnetic field device;
Fig. 2 is the plan structure rough schematic view of a kind of embodiment of the utility model automatic control permanent magnetism variable magnetic field device;
Fig. 3 is magnet ring structure and the magnetizing direction synoptic diagram of a kind of embodiment of the utility model automatic control permanent magnetism variable magnetic field device;
Fig. 4 is the Controlling System schematic block diagram of a kind of embodiment of the utility model automatic control permanent magnetism variable magnetic field device;
Fig. 5 is the Controlling System structural representation block diagram of a kind of embodiment of the utility model automatic control permanent magnetism variable magnetic field device;
Fig. 6 is the angular adjustment modular circuit synoptic diagram of a kind of embodiment of the utility model automatic control permanent magnetism variable magnetic field device;
Fig. 7 is the speed control by frequency variation modular circuit synoptic diagram of a kind of embodiment of the utility model automatic control permanent magnetism variable magnetic field device.
Embodiment
Be described in detail the utility model below in conjunction with embodiment and accompanying drawing thereof:
A kind of automatic control permanent magnetism variable magnetic field device of the utility model design is (hereinafter to be referred as magnetic field device, referring to Fig. 1-7) comprise mechanical part and control section, mechanical part (referring to Fig. 1-3) comprises internal magnetic ring 1 and the outer magnetic ring 2 that is spliced and is nested together mutually by the identical fan-shaped magnetic patch of quantity, it is packed between set collar 5 and the base 6 by head bearing 3 and lower bearing 4, internal magnetic ring 1 is connected by the middle part of the interior transmission shaft 9 of horizontal bevel gear 7 and vertical bevel gear 8 and base 6, stepper-motor 10 and asynchronous machine 11 are connected to the two ends of described transmission shaft 9 respectively by stepper-motor electromagnetic clutch 12 and asynchronous machine electromagnetic clutch 13, rotary encoder 14 also is connected with the middle part of transmission shaft 9 by gear pair 17; External diameter top at outer magnetic ring 2 is equipped with dicyclo tumbler pin 15, in the external diameter bottom of outer magnetic ring 2 outer shroud tumbler pin 16 is installed; Control section comprises central control unit, and position that is attached thereto and speed detection unit and serial communication unit are subjected to the switching value control unit and the display unit of its control.
The inside and outside magnet ring 1 that is nested together mutually described in the utility model and 2 is permanent magnetic ring.They are installed between set collar 5 and the base 6, and are fixed by upper and lower bearing 3 and 4.The fan-shaped magnetic patch that described inside and outside magnet ring 1,2 is respectively equated by quantity is spliced, studies show that fan-shaped magnetic patch assembly unit quantity is that 16 or 32 are comparatively desirable, the inside and outside magnet ring 1,2 of embodiment is respectively assembled by 16 fan-shaped magnetic patch, in the fan-shaped magnetic patch that described internal magnetic ring 1 and outer magnetic ring 2 splice separately, the magnetizing direction of two adjacent fan-shaped magnetic patch differs 22.5 degree successively, and (corresponding 16 fan-shaped magnetic patch are referring to Fig. 3.Arrow is represented the magnetizing direction of every fan-shaped magnetic patch among Fig. 3, and magnetizing direction and deviation angle are foundation with the radial slit of every fan-shaped magnetic patch) or 11.25 degree (corresponding 32 fan-shaped magnetic patch).When described inside and outside magnet ring 1 and 2 spliced the magnetizing direction consistent (position as shown in Figure 3) of fan-shaped magnetic patch, the magnetic field at described magnet ring hollow position place reached maximum value, and Distribution of Magnetic Field is a uniform distribution.Along with inside and outside magnet ring 1,2 rotates to an angle relatively, the magnetic field value at its hollow position place reduces gradually, but Distribution of Magnetic Field remains uniform distribution, up to the relative Rotate 180 of interior outer magnetic ring °, magnetic field value reaches minimum, approaches zero, inside and outside magnet ring 1,2 continues rotation relatively, magnetic field value progressively increases again, and until 360 ° of relative rotations, it is maximum that magnetic field value reaches.So, under the control of Controlling System,, can regulate continuously within the specific limits the magnetic field size at magnet ring hollow position place by regulating inside and outside magnet ring 1,2 relative rotation angle.Internal magnetic ring 1 aperture design of the utility model embodiment is 340mm, and external diameter is 420mm; The aperture 430mm of outer magnetic ring 2, external diameter are 520mm; Inside and outside magnet ring 1,2 height are 560mm.But this is unrestricted, can design as required fully.
Keep under the controlled condition in the magnetic field size, the magnetic field at described inside and outside magnet ring 1,2 hollow position places is equally distributed transverse magnetic field, and rotate with certain speed when interior 1 while of outer magnetic ring, on the circumference of distance magnet ring center position equidistance, the radial component in magnetic field will by identical rule within the specific limits the cycle change, but approximate simulation alternating magnetic field effect radially.By regulating the speed of rotation of internal magnetic ring 1, can realize the frequency adjustment of radial magnetic field effect.
When the utility model magnetic field device is laid, regulate horizontal adjustment screw 18, make described inside and outside magnet ring 1 vertical with sea line with 2 medullary ray.During the magnetic field device operation, the regulate process of magnetic field size is: locking outer shroud tumbler pin 16, unclamp dicyclo tumbler pin 15, in making, outer magnetic ring 1,2 can rotate relatively, according to required magnetic field size, in microcomputer, calculate the angle of internal magnetic ring 1 required rotation, 12 adhesives of microcomputer-controlled step motor electromagnetic clutch, stepper-motor 10 drives transmission shaft 9 rotations, after making internal magnetic ring 1 rotation respective angles by vertical bevel gear 8 and horizontal bevel gear 7, lock dicyclo tumbler pin 15 then, unclamp outer shroud tumbler pin 16, and disconnect stepper-motor electromagnetic clutch 12, and instructing described asynchronous motor electromagnetic clutch 13 adhesives, control asynchronous motor 11 is by the speed operation work of setting.Said outer shroud tumbler pin 16 and dicyclo tumbler pin 15 embodiment are pin pin-and-hole structure.Can certainly adopt other simple known structure.
Magnetic field speed of rotation regulate process is: dicyclo tumbler pin 15 is in the lock state, outer shroud tumbler pin 16 is in releasing orientation, inside and outside magnet ring 1,2 can be rotated simultaneously, 13 adhesives of adhesive electromagnetic clutch, asynchronous machine 11 drives transmission shaft 9 rotations under microcomputer control, make inside and outside magnet ring 1,2 with given speed rotation by described horizontal bevel gear 7 and vertical bevel gear 8.
Between stepper-motor 10 described in the utility model, asynchronous machine 11 and transmission shaft 9, the internal magnetic ring 1 and the mechanical transmission mechanism of rotary encoder 14 etc. be prior art.
For the needs of rotary encoder 14 are installed, an additional teeth wheel set 17 also is housed on transmission shaft 9, when transmission shaft 9 rotations, rotary encoder 14 can be along with rotating together, thereby can detect the magnet ring speed of rotation by converting.Transmission shaft 9 is designed to 1: 4 with the transmitting ratio embodiment of 14 of rotary encoders.But this transmitting ratio can change fully as required.
Control section described in the utility model or system are design voluntarily, but are generally prior art.It comprises central control unit, and position that is attached thereto and speed detection unit and serial communication unit are subjected to the switching value control unit and the display unit (referring to Fig. 4-7) of its control.This Controlling System can be implemented in and accurately regulate magnetic field size and magnetic field speed of rotation under the microcomputer control.The magnetic field size is regulated by the angular adjustment module, and it is core with the controller, produces the pulse signal, direction control signal, the segmentation that drive stepper-motor 10 by the P2.0-P2.3 mouth respectively and selects signal, motor releasor.The user acts on singlechip controller to the operation signal of industrial computer with the communication form, thereby realizes the control to stepper-motor 10 running statuses, realizes angular adjustment.The speed setting module has adopted speed control by frequency variation (asynchronous machine 11) technology to realize the accurate adjusting of magnetic field speed of rotation.
The main control chip of described Controlling System embodiment adopts the AT89S52 micro-chip of Atmel company, and display unit drives 8 charactrons by charactron special driving chip MAX7219 and forms.Position and speed detection unit are used to detect the position and the speed of rotation of magnet ring, and detected signal sent into central processing unit for processing, the position of embodiment and speed detection unit adopt Omron E6CP-AG5C-C absolute valve circumvolve coder, the switching value control unit adds the optocoupler amplification by micro-chip P1 mouth and constitutes driving circuit, be used for control output stepping pulse signal and electromagnetic clutch control signal, the used optocoupler of embodiment is high-speed photoelectric coupler spare 6N136 and power magnification optocoupler TLP521-1.Communication unit is made of electrical level transferring chip MAX202E, finishes the data transmission of upper computer and central processing unit, accepts the task of upper computer instruction and data.Based on the Controlling System of AT89S52 micro-chip, receive the instruction of upper computer, instruct the angle of adjusting inside and outside permanent-magnetic clamp or the speed of rotation that detects permanent-magnetic clamp in real time according to upper computer, and the relative angle and the speed of rotation that detect are sent to upper computer.Display unit shows detected magnet ring position and speed of rotation in real time, with convenient monitoring and debugging.
The Design of Automatic Control System of the utility model magnetic field device can improve the precision of magnetic field control, and the person's of simplifying the operation workflow makes the worker avoid long term operation in the high-intensity magnetic field district, realizes working condition, the real-time demonstration of data, and function has humanistic feature.
After the magnetic field size had been adjusted, locking dicyclo tumbler pin 15 unclamped outer shroud tumbler pin 16, and fixedly internal magnetic ring 1, and inside and outside magnet ring 1,2 can be rotated under the drive of cone gear 7 synchronously.Upper computer and inverter communication, upper computer is by given frequency converter frequency of RS232/RS485 transmodulator and sense of rotation, the control high-speed motor drives inside and outside two magnet rings 1,2 with given speed by cone gear 8 and cone gear 7 and rotates synchronously, for the melt space provides rotatingfield, it is even to guarantee that melt is experienced magnetic field, reduces the influence of crucible rotation effect to crystal pulling.The utility model can be controlled the sense of rotation and the speed of rotation of inside and outside magnet ring 1,2 automatically.
The monitoring and the real display system of the utility model upper computer comprise, speed run curve window, warning window, speed control curve etc.Relation between real-time display frequency of speed run curve window and the speed, and the actual value size that starts speed when stopping.Warning window is presented at whether occur guard signal in the operational process; When guard signal, show corresponding signal indication.Guard signal comprise overcurrent, superpotential, overheated, frequency transformer overload, electric motor overload, outside unusual, quicken in overcurrent, slow down in signals such as overcurrent, shorted to earth, low voltage and over torque in the overcurrent, constant speed.Speed control curve is provided with the run curve of motor when mainly starting or stopping in system, compare by the graphic representation with real-time measurement, and whether whether observation is provided with acceleration and deceleration curves reasonable, move according to setting curve.
Though the utility model magnetic field device designs for making semiconductor material, it has multi-functional, not only can be used for the magnetic field crystal pulling, and can be applicable to chemical industry crystallization, magnetic field the effect research of biomass cells and other are needed the occasion in magnetic field.
The utility model magnetic field device is not addressed part and is applicable to prior art.
Claims (4)
1. automatic control permanent magnetism variable magnetic field device, this device comprises mechanical part and control section, mechanical part comprises internal magnetic ring and the outer magnetic ring that is spliced and is nested together mutually by the identical fan-shaped magnetic patch of quantity, it is packed between set collar and the base by head bearing and lower bearing, internal magnetic ring is connected by the middle part of the transmission shaft in horizontal bevel gear and vertical bevel gear and the base, stepper-motor and asynchronous machine are connected to the two ends of described transmission shaft respectively by stepper-motor electromagnetic clutch and asynchronous machine electromagnetic clutch, rotary encoder also is connected with the middle part of transmission shaft by gear pair; External diameter top at outer magnetic ring is equipped with the dicyclo tumbler pin, in the external diameter bottom of outer magnetic ring the outer shroud tumbler pin is installed; Control section comprises central control unit, position that is attached thereto and speed detection unit and serial communication unit, and the switching value control unit and the display unit that are subjected to its control.
2. automatic control permanent magnetism variable magnetic field device according to claim 1, each is assembled by 16 or 32 fan-shaped magnetic patch to it is characterized in that described inside and outside magnet ring, in 16 of splicing separately of internal magnetic ring and outer magnetic ring or the 32 fan-shaped magnetic patch, the magnetizing direction of two adjacent fan-shaped magnetic patch differs 22.5 degree or 11.25 degree successively.
3. automatic control permanent magnetism variable magnetic field device according to claim 1 and 2 is characterized in that described internal magnetic ring aperture is 340mm, and external diameter is 420mm; The aperture 430mm of outer magnetic ring, external diameter are 520mm; Inside and outside magnet ring height is 560mm.
4. automatic control permanent magnetism variable magnetic field device according to claim 1 and 2 is characterized in that the transmitting ratio of described transmission shaft and rotary coder shaft is designed to 1: 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620026813 CN2926265Y (en) | 2006-07-24 | 2006-07-24 | Self-controlled permanent-magnetic variable magnetic-field device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620026813 CN2926265Y (en) | 2006-07-24 | 2006-07-24 | Self-controlled permanent-magnetic variable magnetic-field device |
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| Publication Number | Publication Date |
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| CN2926265Y true CN2926265Y (en) | 2007-07-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200620026813 Expired - Fee Related CN2926265Y (en) | 2006-07-24 | 2006-07-24 | Self-controlled permanent-magnetic variable magnetic-field device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107316729A (en) * | 2017-06-15 | 2017-11-03 | 中国科学院近代物理研究所 | The method of magnetic ring component and manufacture magnetic ring component |
-
2006
- 2006-07-24 CN CN 200620026813 patent/CN2926265Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107316729A (en) * | 2017-06-15 | 2017-11-03 | 中国科学院近代物理研究所 | The method of magnetic ring component and manufacture magnetic ring component |
| CN107316729B (en) * | 2017-06-15 | 2019-08-30 | 中国科学院近代物理研究所 | The method of magnetic ring component and manufacture magnetic ring component |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070725 Termination date: 20100724 |