CN2816056Y - Novel zone melting furnace - Google Patents
Novel zone melting furnace Download PDFInfo
- Publication number
- CN2816056Y CN2816056Y CN 200520070760 CN200520070760U CN2816056Y CN 2816056 Y CN2816056 Y CN 2816056Y CN 200520070760 CN200520070760 CN 200520070760 CN 200520070760 U CN200520070760 U CN 200520070760U CN 2816056 Y CN2816056 Y CN 2816056Y
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- CN
- China
- Prior art keywords
- zone melting
- high vacuum
- cabinet
- melting furnace
- worktable
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model relates to a novel zone melting furnace which comprises a working table, a high vacuum machine set and an electric control cabinet, wherein the high vacuum machine set is composed of a vacuum pump and a diffusion pump, and is provided with a high precision electromagnetic valve and a high vacuum measuring apparatus which realize automatic control conveniently. The electric control cabinet is in an upright-cabinet type structure, and all electricity meters and operating mechanisms are arranged at the front side of the cabinet body so as to observe and regulate conveniently. The novel zone melting furnace of the utility model is not only suitable for a germanic zone melting which uses hydrogen or other inert gas as protective gas, but also suitable for a germanic zone melting in a vacuum state. The high vacuum machine set adopts pneumatic control so as to realize the automatic control without manual operation. A zone melting trolly is towed by a steel cable, and the transmission structure is simplified. The electric control cabinet is controlled by a PLC, thereby, the automatic control of an overall process can be realized, and the automatic control of a half process can be also realized.
Description
Technical field
The utility model relates to a kind of semiconductor Germanium material equipment for purifying, relates to a kind of novel zone melting furnace specifically.
Background technology
The zone-refine of semiconductor material germanium is the critical process of producing high-purity monocrystalline, because the demand of product increases, existing zone melting furnace equipment can not satisfy the production needs, and main deficiency is: single logical hydrogen technology; Can not carry out the zone melting under the various states; Can't realize the automatic control of whole process.
Summary of the invention
The purpose of this utility model is the deficiency at existing installation, and a kind of novel zone melting furnace is provided.The enforcement of this device is the automatization control of adopting the high-frequency induction mode to heat and can realizing production process.
The technical solution of the utility model is: a kind of novel zone melting furnace, it comprises worktable, high vacuum unit, electrical control cabinet, described high vacuum unit is made up of vacuum pump and diffusion pump, is furnished with high precision magnetic valve and high vacuum survey meter so that realize control automatically; Described electrical control cabinet is the cabinet-type structure, and all ammeters and operating mechanism are observed easy to adjust all in the cabinet front side.Wherein electrical control cabinet links to each other with worktable, and worktable links to each other with the high vacuum unit.
Above-mentioned novel zone melting furnace, it is further characterized in that described worktable contains the molten dolly in district, worktable can be laid four silica tubes, sealing is realized by aluminium alloy end plate and stainless steel fire door assembly in the two ends of silica tube, except that can realizing the vacuum area melting, also can realize the logical hydrogen zone melting under the barotropic condition; The molten dolly in district adopts rope traction, realizes switching at a slow speed soon of dolly by fast two DC servo motor at a slow speed by two overrunning clutches; The main frame upper forepart of described electrical control cabinet is a thyristor installation, and last rear portion is a valve oscillator, and following front portion is the rly. control section, and high-tension transformer, silicon rectifier fuel tank, filament potentiostat are placed in following rear portion.
Novel zone melting furnace of the present utility model is not only applicable to do with hydrogen or other rare gas elementes the zone melting of the germanium of protective gas, is applicable to the zone melting of the germanium under the vacuum state yet; The high vacuum unit is that pneumatic control can realize automatic control, need not manual operation; The molten dolly in district adopts rope traction, and drive mechanism is simplified; Electric by PLC control, can realize that whole process controls automatically, can realize that also half way controls automatically.Compact integral structure, volume is less, and working service is convenient.
Description of drawings
Fig. 1 is the complete machine structure figure of the utility model zone melting furnace;
Fig. 2 is the electrical schematic diagram of the utility model zone melting furnace.
Embodiment
Below in conjunction with accompanying drawing, preferred embodiment of the present utility model is described in detail as follows:
As shown in Figure 1, the utility model zone melting furnace complete machine divides three parts, worktable (containing the molten dolly in district), high vacuum unit, radio-frequency generator (electrical control cabinet).Worktable 01 contains the molten dolly 11 in district, and worktable can be laid four silica tubes 12, and sealing is realized by aluminium alloy end plate 13 and stainless steel fire door assembly 14 in the two ends of silica tube, except that can realizing the vacuum area melting, also can realize the logical hydrogen zone melting under the barotropic condition; The molten dolly 11 in district adopts rope traction, realizes switching at a slow speed soon of dolly by fast two DC servo motor at a slow speed by two overrunning clutches.High vacuum unit 02 is made up of vacuum pump 21 and diffusion pump 22, is furnished with high precision magnetic valve and high vacuum survey meter so that realize control automatically.Electrical control cabinet 03 is the cabinet-type structure, and all ammeters and operating mechanism are observed easy to adjust all in the cabinet front side.The main frame upper forepart is a thyristor installation, and last rear portion is a valve oscillator, and following front portion is the rly. control section, and high-tension transformer, silicon rectifier fuel tank, filament potentiostat etc. are placed in following rear portion.
High frequency region smelting furnace electric part is mainly by the three phase ac voltage regulation power supply, step-up transformer, and high-voltage rectification silicon stack, valve oscillator, working coil, compositions such as mechanical transmission pilot circuit, its electrical schematic diagram is seen Fig. 2.High frequency furnace adopts the three-phase controllable silicon AC voltage adjusting to boost to 7300V through the three-phase high-voltage transformer, again through 6 high voltage silicon rectifier stacks form the three-phase bridge rectifier circuit rectification, output 0-12KV high direct voltage is supplied with valve oscillator after the filtering.Valve oscillator adopts plate grid inductive feedback formula self-maintained circuit, oscillator circuit is by tank capacitance, pickup coil and working coil are formed, adopt the parallel operation mode, high-voltage power supply and tank circuit parallel connection, in order to prevent tank coil with power supply short circuit, between the tank circuit and wing, insert a partiting dc capacitor, high-frequency current still can pass through to stop galvanic current to flow to the tank circuit.In addition, with a high-frequency chocke and power supply series connection, do not allow high-frequency current flow to power supply, and prevent that power supply is with the high-frequency voltage short circuit.Grid adopts self-grid bias, is characterized in that starting of oscillation is easy, vibrational stabilization.This vibrator can be regulated the grid tickler coil and obtain optimum Working under the unequally loaded situation.The whole control system adopts the PC programmable logic controller.PC control process (is example with the vacuum technology): after the operator throws honest material, start the machine, PC promptly brings into operation; close or open corresponding solenoid valve, start vacuum pump and begin to vacuumize, simultaneously pre-thermionic tube; after the vacuum controller detects rough vacuum and reaches; PC promptly switches to pumping high vacuum, after high vacuum reaches, begins heating; treat that the mechanical dolly in material fusing back begins reciprocal walking; PC meter is the walking number of times down, reaches after the set(ting)value auto stop and sends the sound, the notifying operation person.
Most preferred embodiment of the present utility model is illustrated, and the various variations or the remodeling of being made by those of ordinary skills all belong to protection domain of the present utility model.
Claims (3)
1, a kind of novel zone melting furnace, it comprises worktable, high vacuum unit, electrical control cabinet, it is characterized in that described high vacuum unit is made up of vacuum pump and diffusion pump, is furnished with high precision magnetic valve and high vacuum survey meter so that realize control automatically; Described electrical control cabinet is the cabinet-type structure, and all ammeters and operating mechanism are observed easy to adjust all in the cabinet front side; Wherein said electrical control cabinet links to each other with described worktable, and described worktable links to each other with described high vacuum unit.
2, novel zone melting furnace according to claim 1, the main frame upper forepart that it is characterized in that described electrical control cabinet is a thyristor installation, last rear portion is a valve oscillator, following front portion is the rly. control section, high-tension transformer, silicon rectifier fuel tank, filament potentiostat are placed in following rear portion.
3, novel zone melting furnace according to claim 1 and 2 is characterized in that described worktable contains the molten dolly in district, and worktable can be laid four silica tubes, and sealing is realized by aluminium alloy end plate and stainless steel fire door assembly in the two ends of described silica tube; The molten dolly in described district adopts rope traction, realizes switching at a slow speed soon of dolly by fast two DC servo motor at a slow speed by two overrunning clutches.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520070760 CN2816056Y (en) | 2005-04-15 | 2005-04-15 | Novel zone melting furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520070760 CN2816056Y (en) | 2005-04-15 | 2005-04-15 | Novel zone melting furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2816056Y true CN2816056Y (en) | 2006-09-13 |
Family
ID=36995859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520070760 Expired - Lifetime CN2816056Y (en) | 2005-04-15 | 2005-04-15 | Novel zone melting furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2816056Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106498129A (en) * | 2016-09-26 | 2017-03-15 | 中国电子科技集团公司第四十八研究所 | A kind of ELECTROMAGNETIC VACUUM annealing furnace |
| CN113061988A (en) * | 2021-03-10 | 2021-07-02 | 中国恩菲工程技术有限公司 | Silicon core preparation method and silicon core preparation equipment |
-
2005
- 2005-04-15 CN CN 200520070760 patent/CN2816056Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106498129A (en) * | 2016-09-26 | 2017-03-15 | 中国电子科技集团公司第四十八研究所 | A kind of ELECTROMAGNETIC VACUUM annealing furnace |
| CN113061988A (en) * | 2021-03-10 | 2021-07-02 | 中国恩菲工程技术有限公司 | Silicon core preparation method and silicon core preparation equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: NANJING CHINA GERMANIUM SCIENCE CO., LTD. Free format text: FORMER NAME: NANJING GERMANIUM CO., LTD |
|
| CP03 | Change of name, title or address |
Address after: Moling Town, Jiangning District of Nanjing City, Jiangsu province zip code: 211165 Patentee after: Nanjing Germanium Technology Co., Ltd. Address before: Mo Ling, Jiangning District of Nanjing City, Jiangsu province zip code: 211165 Patentee before: Nanjing Ge Plant Co., Ltd. |
|
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20150415 Granted publication date: 20060913 |