CN106498129A - A kind of ELECTROMAGNETIC VACUUM annealing furnace - Google Patents
A kind of ELECTROMAGNETIC VACUUM annealing furnace Download PDFInfo
- Publication number
- CN106498129A CN106498129A CN201610852538.4A CN201610852538A CN106498129A CN 106498129 A CN106498129 A CN 106498129A CN 201610852538 A CN201610852538 A CN 201610852538A CN 106498129 A CN106498129 A CN 106498129A
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- China
- Prior art keywords
- annealing furnace
- specimen holder
- infrared lamp
- vacuum annealing
- cavity
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Classifications
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/04—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering with simultaneous application of supersonic waves, magnetic or electric fields
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Furnace Details (AREA)
Abstract
The invention discloses a kind of ELECTROMAGNETIC VACUUM annealing furnace, including vacuum cavity and the specimen holder in vacuum cavity, also include that the heat screen in the vacuum cavity, least one set infrared lamp component and two pieces are used for producing field pole, the specimen holder and the infrared lamp component are located in the heat screen, it is outer and be symmetrically arranged in the specimen holder both sides that two pieces of magnetic poles are located at the heat screen, and the present invention has that temperature rate is fast, pollute little, heating process does not affect Distribution of Magnetic Field in cavity.
Description
Technical field
A kind of the present invention relates to for the Equipment for Heating Processing of semiconductor machining, more particularly to ELECTROMAGNETIC VACUUM annealing furnace.
Background technology
ELECTROMAGNETIC VACUUM annealing furnace is that under vacuum conditions sample is heated, and prevents sample oxidized at high temperature or pollutes,
The time control that is lowered the temperature by heating and thermal insulation, is realized the annealing to sample, makes the internal stress of sample interior or surface membrane material
It is released, is stablized the performance of material；For magnetic material, directional magnetic field can also be obtained, in clean environment
In changed material property, realize its specific function.
Existing ELECTROMAGNETIC VACUUM annealing furnace is mostly using coiling outside vacuum cavity so as to sample area product in cavity
Magnetisation field, as the characteristic of the magnetic line of force causes magnetic field homogeneity bad；In addition existing ELECTROMAGNETIC VACUUM annealing furnace is mostly using electricity
Resistance silk heating, as resistance wire itself is with thermal inertia is big, temperature rate is slow characteristic, and Resistant heating to there is temperature anti-
The problems such as low sensitivity, complicated winding and pollution is answered, the heated current that more seriously resistance wire applies can affect annealing furnace
Distribution of Magnetic Field in cavity, changes the magnetic-field annealing environment of sample.
Content of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, there is provided a kind of temperature rate is fast, pollution
Little, heating process does not affect the ELECTROMAGNETIC VACUUM annealing furnace of Distribution of Magnetic Field in cavity.
For solving above-mentioned technical problem, the present invention is employed the following technical solutions：
A kind of ELECTROMAGNETIC VACUUM annealing furnace, including vacuum cavity and the specimen holder in vacuum cavity, also includes positioned at institute
Stating the heat screen in vacuum cavity, least one set infrared lamp component and two pieces is used for producing field pole, the specimen holder
It is located in the heat screen with the infrared lamp component, two pieces of magnetic poles are located at outside the heat screen and are symmetrically arranged in institute
State specimen holder both sides.
Further improvement as above-mentioned technical proposal：
The heat screen includes that a pair of plates and a pair of arc plates, a pair of plates are located between two pieces of magnetic poles, arc plate two
End is connected with one flat plate respectively, and the infrared lamp component is provided with two groups and is symmetrically arranged in specimen holder both sides, and two groups infrared
Fluorescent tube component is located between a pair of arc plates, and infrared lamp component includes many infrared lamps, and each infrared lamp center is to described
The distance at specimen holder center is equal, and the centre-to-centre spacing between adjacent two infrared lamps is apart from equal.
The vacuum cavity is equipped with cavity door, and one of which infrared lamp component is fixedly arranged in the vacuum cavity, separately
One group of infrared lamp component is installed on the cavity door.
The flat board and arc plate are mirror face stainless steel plate.
Triggering device for generation horizontal magnetic field between two pieces of magnetic poles, the triggering are installed outside the vacuum cavity
Device includes that connecting plate and two groups of trigger assemblies, two groups of trigger assemblies and two pieces of magnetic poles are corresponded and arranged, the trigger assembly
Including sealing flange, column and the spiral winding being set around in column, the magnetic pole is plate-like piece, the column and magnetic
Pole is welded, and is sealed by the sealing flange between column and the vacuum cavity, and the connecting plate is connected to two groups of triggerings
Between the column of component.
Waterway is equipped with the magnetic pole and the column and is mutually communicated, the spiral winding is equipped with air-cooled dress
Put.
The magnetic pole surfaces nickel plating.
The specimen holder includes base plate, top board and three support bars being triangularly arranged, and opens up on three support bars
There are multiple grooves for placing sample, wherein two support bar upper and lower ends are fixedly connected with base plate and top board respectively, described
Draw-in groove is offered on top board, another support bar lower end is hinged with base plate, and upper end is lock onto in the draw-in groove by securing member.
Also include that the temperature measuring equipment in the heat screen, the temperature measuring equipment are connected with temperature controller, the temperature controller
It is located at outside the vacuum cavity.
The temperature measuring equipment is thermocouple, and the hot junction of the thermocouple contacted with the sample on specimen holder, thermocouple cold
End is connected with the temperature controller.
Compared with prior art, it is an advantage of the current invention that：ELECTROMAGNETIC VACUUM annealing furnace disclosed by the invention, using infrared lamp
Tube assembly radiant heating, it is easy to control heating process, temperature rate fast, it is to avoid the winding work of pollution and complexity, heating
During do not interfere with Distribution of Magnetic Field in vacuum cavity yet；On the one hand heat screen is used for heat-insulated, it is to avoid magnetic pole temperature is too high, separately
On the one hand heat can also be gathered in heat screen, reduces thermal losses.
Description of the drawings
Fig. 1 is the structural representation of ELECTROMAGNETIC VACUUM annealing furnace of the present invention.
Fig. 2 is the structural representation of the magnetic pole in the present invention.
Fig. 3 is the main structure diagram of the specimen holder in the present invention.
Fig. 4 is the overlooking the structure diagram of the specimen holder in the present invention.
In figure, each label is represented：1st, vacuum cavity；2nd, specimen holder；21st, base plate；22nd, top board；221st, draw-in groove；222nd, fasten
Part；23rd, support bar；231st, groove；3rd, heat screen；31st, flat board；32nd, arc plate；4th, infrared lamp component；41st, infrared lamp；
5th, magnetic pole；6th, cavity door；7th, triggering device；71st, connecting plate；72nd, trigger assembly；721st, sealing flange；722nd, column；723、
Spiral winding；73rd, waterway；8th, sample；9th, temperature measuring equipment；10th, suction interface.
Specific embodiment
The present invention is described in further details below with reference to Figure of description and specific embodiment.
As shown in Figures 1 to 4, the ELECTROMAGNETIC VACUUM annealing furnace of the present embodiment, including vacuum cavity 1 and is located at vacuum cavity 1
Interior specimen holder 2, also includes that the heat screen 3 in vacuum cavity 1, least one set infrared lamp component 4 and two pieces are used for producing
Raw field pole 5, specimen holder 2 and infrared lamp component 4 are located in heat screen 3, and two pieces of magnetic poles 5 are outer and right positioned at heat screen 3
Claim to be arranged in 2 both sides of specimen holder, the ELECTROMAGNETIC VACUUM annealing furnace, using 4 radiant heating of infrared lamp component, it is easy to control heated
Journey, temperature rate are fast, it is to avoid the winding work of pollution and complexity, also do not interfere with vacuum cavity 1 in heating process
Distribution of Magnetic Field；3 one side of heat screen be used for heat-insulated, it is to avoid 5 temperature of magnetic pole is too high, on the other hand can also by heat be gathered in every
In heat shielding 3, thermal losses is reduced.
Heat screen 3 includes that a pair of plates 31 and a pair of arc plates 32, a pair of plates 31 are located between two pieces of magnetic poles 5, circular arc
32 two ends of plate are connected with one flat plate 31 respectively, and infrared lamp component 4 is provided with two groups and is symmetrically arranged in 2 both sides of specimen holder, and two
Group infrared lamp component 4 is located between a pair of arc plates 32, and infrared lamp component 4 includes many infrared lamps 41, each infrared lamp
41 center of pipe is equal to the distance at 2 center of specimen holder, and the centre-to-centre spacing between adjacent two infrared lamps 41 is apart from equal, namely
All of infrared lamp 41 is in adjacent two infrared lamps on the circumference with the center of specimen holder 2 as the center of circle and in same group
41 corresponding central angle of pipe is equal, and the structure of the heat screen 3 can be such that 3 interior temperature everywhere of heat screen is preferably consistent, infrared
The heat that fluorescent tube 41 sends reaches more preferable heat build-up effect to 2 foveal reflex of specimen holder, in the present embodiment, two pieces of magnetic poles 5 and
It is distributed in 2 left and right sides of specimen holder to flat board 31, before a pair of arc plates 32 and two groups of infrared lamp components 4 are distributed in specimen holder 2
Both sides afterwards.
Vacuum cavity 1 is equipped with cavity door 6, and one of which infrared lamp component 4 is fixedly arranged in vacuum cavity 1, another group
Infrared lamp component 4 is installed on cavity door 6, can be by corresponding one group of infrared lamp component 4 while cavity door 6 are opened
Remove, be easy to load and unload specimen holder 2, in the present embodiment, cavity door 6 is located on front side of vacuum cavity 1, and the shell with vacuum cavity 1
It is hinged, can achieve 180 ° of openings, the infrared lamp component 4 of front side is removed during opening, the suction interface 10 of vacuum cavity 1 is located at
The rear portion of vacuum cavity 1, realizing for 1 inner vacuum of vacuum cavity are same as the prior art, repeat no more.
In the present embodiment, flat board 31 and arc plate 32 are mirror face stainless steel plate, and the housing of vacuum cavity 1 is all led by non-
Magnetic stainless steel material makes.
Triggering device 7 for generation horizontal magnetic field between two pieces of magnetic poles 5, triggering device 7 are installed outside vacuum cavity 1
Including connecting plate 71 and two groups of trigger assemblies 72, two groups of trigger assemblies 72 and two pieces of one-to-one corresponding settings of magnetic poles 5, trigger assembly 72
Including sealing flange 721, column 722 and the spiral winding 723 being set around in column 722, magnetic pole 5 is plate-like piece, cylinder
Part 722 is welded with magnetic pole 5, is sealed by sealing flange 721 between column 722 and vacuum cavity 1, and connecting plate 71 is connected to two
Between the column 722 of group trigger assembly 72, after high frequency electric is led in spiral winding 723, the magnetic field that column 722 is produced turns
The horizontal magnetic field between two boards shape part is turned to, so as to the stabilizing magnetic field of orientation is formed on 8 surface of sample, and between magnetic pole 5
Uniformity is good.
In the present embodiment, it is equipped with waterway 73 and is mutually communicated in magnetic pole 5 and column 722, spiral winding 723 is arranged
There is air cooling equipment, lead to cooling water in waterway 73 and realize water-cooled, spiral winding 723 is using air-cooled so that magnetic field intensity is more heated
Degree, and improve the service life of spiral winding 723.
In the present embodiment, 5 plating nickel on surface of magnetic pole can further improve the stability in magnetic field.
Specimen holder 2 includes the support bar 23 that base plate 21, top board 22 and three are triangularly arranged, on three support bars 23
Offer multiple grooves 231 for placing sample 8, wherein two 23 upper and lower ends of support bar respectively with base plate 21 and top board 22
It is fixedly connected, on top board 22, offers draw-in groove 221, another 23 lower end of support bar is hinged with base plate 21, upper end passes through securing member
222 lock onto in draw-in groove 221, in the present embodiment, and three support bars 23 are arranged in equilateral triangle, two support bars 23 on right side
Upper and lower ends are fixedly connected with base plate 21 and top board 22 respectively, and 23 lower end of support bar and the base plate 21 in left side are hinged, and upper end passes through
Wing nut is lock onto in draw-in groove 221, during dress sample 8, unclamps wing nut and the support bar 23 is rotated down, opened, will
Sample 8 is placed in groove 231, after sample 8 is installed, and the support bar 23 is pivoted upwardly in draw-in groove 221 and is locked
, the specimen holder 2 can each layer sample 8 fully built on stilts, sample 8 preferably can directly receive the radiant heat of infrared lamp 41,
Ensure heating rate.
ELECTROMAGNETIC VACUUM annealing furnace also includes the temperature measuring equipment 9 in heat screen 3, and temperature measuring equipment 9 is with temperature controller (in figure not
Illustrate) connection, outside vacuum cavity 1, in the present embodiment, temperature measuring equipment 9 is thermocouple to temperature controller, and thermocouple is from vacuum cavity
1 top is stretched into, and the hot junction of thermocouple is contacted with the sample 8 on specimen holder 2, and the cold end of thermocouple is by compensating wire and temperature control
Instrument connects, and controls heating-up temperature using temperature controller.In other embodiments, thermocouple can also use critesistor, PN junction temperature
Sensor, infrared thermometry sensor etc. replace.
In the present embodiment, on vacuum cavity 1 and cavity door 6, especially bosh is welded with sealing, prevents sealing ring
Because of overheated and accelerated ageing.
Although the present invention is disclosed above with preferred embodiment, but is not limited to the present invention.Any it is familiar with ability
The technical staff in domain, in the case of without departing from technical solution of the present invention scope, using the technology contents pair of the disclosure above
Technical solution of the present invention makes many possible variations and modification, or the Equivalent embodiments for being revised as equivalent variations.Therefore, every
Without departing from the content of technical solution of the present invention, according to the technology of the present invention essence to any simple modification made for any of the above embodiments,
Equivalent variations and modification, all should fall in the range of technical solution of the present invention protection.
Claims (10)
1. a kind of ELECTROMAGNETIC VACUUM annealing furnace, including vacuum cavity (1) and the specimen holder (2) being located in vacuum cavity (1), its feature
It is：Also include that the heat screen (3) in the vacuum cavity (1), least one set infrared lamp component (4) and two pieces are used for
Field pole (5) is produced, specimen holder (2) and the infrared lamp component (4) are located in the heat screen (3), two pieces
Described magnetic pole (5) outward and are symmetrically arranged in the specimen holder (2) both sides positioned at the heat screen (3).
2. ELECTROMAGNETIC VACUUM annealing furnace according to claim 1, it is characterised in that：Described heat screen (3) include a pair of plates
(31) and a pair of arc plates (32), a pair of plates (31) be located at two pieces of magnetic poles (5) between, arc plate (32) two ends respectively with one piece
Flat board (31) connects, and infrared lamp component (4) are provided with two groups and are symmetrically arranged in specimen holder (2) both sides, two groups of infrared lamps
Tube assembly (4) is located between a pair of arc plates (32), and infrared lamp component (4) includes many infrared lamps (41), each infrared lamp
Pipe (41) center equal to the distance at the specimen holder (2) center, and the centre-to-centre spacing between adjacent two infrared lamps (41) away from
From equal.
3. ELECTROMAGNETIC VACUUM annealing furnace according to claim 2, it is characterised in that：Vacuum cavity (1) is equipped with cavity
Door (6), one of which infrared lamp component (4) are fixedly arranged in the vacuum cavity (1), another group of infrared lamp component (4) peace
Loaded on cavity door (6).
4. ELECTROMAGNETIC VACUUM annealing furnace according to claim 2, it is characterised in that：Flat board (31) and arc plate (32) are
For mirror face stainless steel plate.
5. ELECTROMAGNETIC VACUUM annealing furnace according to any one of claim 1 to 4, it is characterised in that：Vacuum cavity (1)
Triggering device (7) for generation horizontal magnetic field between two pieces of magnetic poles (5) is installed outward, described triggering device (7) include connecting
Fishplate bar (71) and two groups of trigger assemblies (72), two groups of trigger assemblies (72) are corresponded with two pieces of magnetic poles (5) and are arranged, the triggering
Component (72) includes sealing flange (721), column (722) and the spiral winding (723) being set around in column (722), institute
Magnetic pole (5) is stated for plate-like piece, column (722) are welded with magnetic pole (5), column (722) and the vacuum cavity (1) it
Between by the sealing flange (721) seal, connecting plate (71) are connected to the column (722) of two groups of trigger assemblies (72)
Between.
6. ELECTROMAGNETIC VACUUM annealing furnace according to claim 5, it is characterised in that：Magnetic pole (5) and the column
(722) it is equipped with waterway (73) and is mutually communicated in, spiral winding (723) are equipped with air cooling equipment.
7. ELECTROMAGNETIC VACUUM annealing furnace according to claim 6, it is characterised in that：Magnetic pole (5) plating nickel on surface.
8. ELECTROMAGNETIC VACUUM annealing furnace according to any one of claim 1 to 4, it is characterised in that：Described specimen holder (2) wrap
Base plate (21), top board (22) and three support bars being triangularly arranged (23) are included, is offered on three support bars (23) many
The individual groove (231) for placing sample (8), wherein two support bar (23) upper and lower ends respectively with base plate (21) and top board
(22) it is fixedly connected, on top board (22), offers draw-in groove (221), another support bar (23) lower end is cut with scissors with base plate (21)
Connect, upper end is lock onto in the draw-in groove (221) by securing member (222).
9. ELECTROMAGNETIC VACUUM annealing furnace according to any one of claim 1 to 4, it is characterised in that：Also include positioned at described
Temperature measuring equipment (9) in heat screen (3), temperature measuring equipment (9) are connected with temperature controller, and the temperature controller is located at the vacuum chamber
Body (1) is outward.
10. ELECTROMAGNETIC VACUUM annealing furnace according to claim 9, it is characterised in that：Described temperature measuring equipment (9) are thermocouple,
The hot junction of the thermocouple is contacted with the sample (8) on specimen holder (2), and the cold end of thermocouple is connected with the temperature controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610852538.4A CN106498129B (en) | 2016-09-26 | 2016-09-26 | A kind of ELECTROMAGNETIC VACUUM annealing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610852538.4A CN106498129B (en) | 2016-09-26 | 2016-09-26 | A kind of ELECTROMAGNETIC VACUUM annealing furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106498129A true CN106498129A (en) | 2017-03-15 |
| CN106498129B CN106498129B (en) | 2018-09-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610852538.4A Active CN106498129B (en) | 2016-09-26 | 2016-09-26 | A kind of ELECTROMAGNETIC VACUUM annealing furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN106498129B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109880976A (en) * | 2019-04-03 | 2019-06-14 | 郭盘林 | A kind of small-sized quick magnetic field annealing furnace |
| CN113096914A (en) * | 2021-03-18 | 2021-07-09 | 钢铁研究总院 | Device and method for applying magnetic field to high-temperature heat source |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2816056Y (en) * | 2005-04-15 | 2006-09-13 | 南京锗厂有限责任公司 | Novel zone melting furnace |
| JP2006257486A (en) * | 2005-03-17 | 2006-09-28 | Jfe Steel Kk | Method for annealing grain oriented electrical steel sheet, and inner cover for batch annealing of grain oriented electrical steel sheet |
| CN102212658A (en) * | 2010-04-01 | 2011-10-12 | 中国科学院物理研究所 | Vacuum infrared heating annealing furnace |
| CN204509419U (en) * | 2015-02-03 | 2015-07-29 | 苏州太平洋电线电缆有限公司 | A kind of vacuum annealing furnace |
| CN205035425U (en) * | 2015-08-20 | 2016-02-17 | 要琛 | Can realize carrying on thermal treatment's device under magnetic field environment |
-
2016
- 2016-09-26 CN CN201610852538.4A patent/CN106498129B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006257486A (en) * | 2005-03-17 | 2006-09-28 | Jfe Steel Kk | Method for annealing grain oriented electrical steel sheet, and inner cover for batch annealing of grain oriented electrical steel sheet |
| CN2816056Y (en) * | 2005-04-15 | 2006-09-13 | 南京锗厂有限责任公司 | Novel zone melting furnace |
| CN102212658A (en) * | 2010-04-01 | 2011-10-12 | 中国科学院物理研究所 | Vacuum infrared heating annealing furnace |
| CN204509419U (en) * | 2015-02-03 | 2015-07-29 | 苏州太平洋电线电缆有限公司 | A kind of vacuum annealing furnace |
| CN205035425U (en) * | 2015-08-20 | 2016-02-17 | 要琛 | Can realize carrying on thermal treatment's device under magnetic field environment |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109880976A (en) * | 2019-04-03 | 2019-06-14 | 郭盘林 | A kind of small-sized quick magnetic field annealing furnace |
| CN113096914A (en) * | 2021-03-18 | 2021-07-09 | 钢铁研究总院 | Device and method for applying magnetic field to high-temperature heat source |
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| Publication number | Publication date |
|---|---|
| CN106498129B (en) | 2018-09-28 |
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