CN2796096Y - Six phase power device for wafer static adsorption - Google Patents
Six phase power device for wafer static adsorption Download PDFInfo
- Publication number
- CN2796096Y CN2796096Y CN 200520011260 CN200520011260U CN2796096Y CN 2796096 Y CN2796096 Y CN 2796096Y CN 200520011260 CN200520011260 CN 200520011260 CN 200520011260 U CN200520011260 U CN 200520011260U CN 2796096 Y CN2796096 Y CN 2796096Y
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- voltage
- phase
- plate
- voltage amplifier
- power supply
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- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a six phase power supply device for wafer static absorption, which comprises a machine box, a blower, two high-voltage generation plates, a six phase signal generation plate, a six phase high voltage amplifier panel and a power supply control plate, wherein the two high-voltage generation plates, the six phase signal generation plate, the six phase high-voltage amplifier panel and the power supply control plate use an interlayer structure and are arranged in the machine box; the blower is arranged in the machine box; a high-voltage generation circuit can provide high-voltage direct current work voltage for a high voltage amplifier; the six phase high-voltage amplifier panel is used for amplifying six-phase low voltage square signals; the power supply control plate is connected with the output of the six phase high-voltage amplifier panel. Meanwhile, the power supply control plate is connected with a main control computer through optical fiber used for the generation of control signals and the judgment of wafer absorption. The utility model uses an interlayer structure and has the advantage of compact structure. The differences of the six phases are 60DEG. Signals of which the positive and the negative amplitude is symmetrical are added to an electrostatic suction disk equally divided into six parts in an alternate form. Thus, the total quantity of electrostatic charge of the wafer is zero.
Description
Technical field
The utility model relates to a kind of six phase supply units, relates to a kind of six phase supply units that are used for chip static electricity absorption especially.
Background technology
Ion implantor is mainly used in semiconductor technology, and along with lines are more and more thinner, semiconductor technology is had higher requirement to implanter, and is wherein more strict to the control of metallic pollution requirement.In ion implantor in the past, adopt metal mechanical device holding chip mostly, this mode causes metal to sputter metallic under high energy ion beam bombardment directly to pollute wafer easily, make the injection wafer defective, more satisfactory for this reason wafer holder mode is for adopting a kind of electrostatic chuck that does not have mechanical device holding chip.
Summary of the invention
The utility model promptly is propose at above-mentioned problems of the prior art a kind of simple in structure, the six phase supply units of realizing being used for reliably the crystal Electrostatic Absorption.
The utility model is achieved through the following technical solutions:
A kind of six phase supply units that are used for chip static electricity absorption, comprise that a cabinet, a blower fan, two high pressure produce plate, the generation of one or six phase signals plate, one six road high-voltage amplifier plate and a power board, described two high pressure produce plates, one or six phase signals produce plate, one six road high-voltage amplifier plate and a power board and adopt interlayer structure to be installed in the cabinet; Described blower fan is installed in the cabinet.
The described two-supremes living plate of cutting down output links to each other with six road high-voltage amplifier plates, and circuit for producing high voltage provides the high voltage direct current operating voltage for high-voltage amplifier; The input of described six road high-voltage amplifier plates links to each other with the output that six phase signals produce plate, is used for the amplification of six phase low pressure square-wave signals; Described power board links to each other with the output of six road high-voltage amplifier plates, is connected with computer by optical fiber simultaneously, is used for the generation of control signal and the judgement of wafer absorption.
The utlity model has following remarkable advantage:
1. this device adopts interlayer structure, compact conformation;
2. high pressure produces plate and selects high-frequency switch circuit for use, and its volume is little, the efficient height;
3. this device employing six tunnel differs the square wave of the positive and negative amplitude symmetry that is 60 °, alternately be added on the electrostatic chuck of six five equilibriums, make that the electrostatic charge total amount is zero on the wafer, do not have accumulation of static electricity, when institute's making alive on the electrostatic chuck fell back on zero, the suffered electrostatic attraction of its wafer dropped to zero immediately.
Description of drawings
Fig. 1 is used for the structure chart of six phase supply units of chip static electricity absorption for the utility model is a kind of;
Fig. 2 is used for the circuit board connection layout of six phase supply units of chip static electricity absorption for the utility model is a kind of.
Embodiment
Below in conjunction with the drawings and specific embodiments the present invention is further introduced, but not as a limitation of the invention.
Referring to Fig. 1, a kind of six phase supply units that are used for chip static electricity absorption, comprise that a cabinet 1, a blower fan 2, two high pressure produce plate 3,1 phase signals and produce plate 4, one six road high-voltage amplifier plate 5 and a power board 6, wherein two high pressure generation plate 3,1 phase signals generation plates 4, one six road high-voltage amplifier plate 5 and power boards 6 adopt interlayer structures to be installed in the cabinet 1, make that this power device structure is tight; Blower fan 2 is fixed on a side of cabinet 1, is used for the air blast cooling heat radiation of cabinet 1 internal components.
Referring to Fig. 2, the two-supremes living plate 3 of cutting down output links to each other with six road high-voltage amplifier plates 5, and its generation ± 1500VDC high pressure provides ± the high voltage direct current operating voltage of 1500VDC for high-voltage amplifier; The output that six phase signals produce plate 4 links to each other with the input of six road high-voltage amplifier plates 5, six phase signals produce plate 4 and produce six the road and satisfy that to differ be that 60 °, frequency are the square wave of 50Hz, the positive and negative amplitude of its square wave equals to import direct-current control voltage, the low pressure square-wave signal of its output is output as six tunnel high-voltage square wave signal through 5 150 times of the amplifications of six road high-voltage amplifier plates, adopt the direct current negative feedback between this amplifier output and the input, can be so that the multiplication factor of amplifier be extremely stable; Power board 6 links to each other with the output of six road high-voltage amplifier plates 5, carry out communication by optical fiber and computer 7 simultaneously, the order of computer 7 is become dc control signal, and the load current size of six phase power supplys fed back to computer 7, computer 7 judges according to the load current size of six phase power supplys whether wafer effectively holds.
In practice, the six tunnel differ the square wave of the positive and negative amplitude symmetry that is 60 °, alternately are added on the electrostatic chuck of six five equilibriums, make that the electrostatic charge total amount is zero on the wafer, do not have accumulation of static electricity, when institute's making alive on the electrostatic chuck fell back on zero, the suffered electrostatic attraction of its wafer dropped to zero immediately.
Specific embodiment of the present utility model elaborates content of the present utility model.For persons skilled in the art, any conspicuous change of under the prerequisite that does not deviate from the utility model spirit it being done all constitutes the infringement to the utility model patent, with corresponding legal responsibilities.
Claims (3)
1. one kind is used for the six phase supply units that chip static electricity adsorbs, it is characterized in that: this device comprises that a cabinet, a blower fan, two high pressure produce plate, the generation of one or six phase signals plate, one six road high-voltage amplifier plate and a power board, and described two high pressure produce plates, one or six phase signals produce plate, one six road high-voltage amplifier plate and a power board and adopt interlayer structure to be installed in the cabinet; Described blower fan is installed in the cabinet.
2. a kind of six phase supply units that are used for chip static electricity absorption as claimed in claim 1 is characterized in that: the described two-supremes living plate of cutting down output links to each other with six road high-voltage amplifier plates, and circuit for producing high voltage provides the high voltage direct current operating voltage for high-voltage amplifier; The input of described six road high-voltage amplifier plates links to each other with the output that six phase signals produce plate, is used for the amplification of six phase low pressure square-wave signals; Described power board links to each other with the output of six road high-voltage amplifier plates, is connected with computer by optical fiber simultaneously, is used for the generation of control signal and the judgement of wafer absorption.
3. a kind of six phase supply units that are used for chip static electricity absorption as claimed in claim 1 is characterized in that: described six phase signals adopt the direct current negative feedback between producing and exporting in the plate circuit and import.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520011260 CN2796096Y (en) | 2005-03-31 | 2005-03-31 | Six phase power device for wafer static adsorption |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520011260 CN2796096Y (en) | 2005-03-31 | 2005-03-31 | Six phase power device for wafer static adsorption |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2796096Y true CN2796096Y (en) | 2006-07-12 |
Family
ID=36813845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520011260 Expired - Fee Related CN2796096Y (en) | 2005-03-31 | 2005-03-31 | Six phase power device for wafer static adsorption |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2796096Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102398184A (en) * | 2010-09-16 | 2012-04-04 | 株式会社Aeg | Apparatus for controlling channel separation type electromagnetic chuck |
| CN102869184A (en) * | 2011-07-05 | 2013-01-09 | 北京中科信电子装备有限公司 | Director power supply device for low-energy end of accelerator |
-
2005
- 2005-03-31 CN CN 200520011260 patent/CN2796096Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102398184A (en) * | 2010-09-16 | 2012-04-04 | 株式会社Aeg | Apparatus for controlling channel separation type electromagnetic chuck |
| CN102398184B (en) * | 2010-09-16 | 2014-08-06 | 株式会社Aeg | Apparatus for controlling channel separation type electromagnetic chuck |
| CN102869184A (en) * | 2011-07-05 | 2013-01-09 | 北京中科信电子装备有限公司 | Director power supply device for low-energy end of accelerator |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060712 |