CN206584890U - A kind of plasma processing apparatus - Google Patents
A kind of plasma processing apparatus Download PDFInfo
- Publication number
- CN206584890U CN206584890U CN201621251817.7U CN201621251817U CN206584890U CN 206584890 U CN206584890 U CN 206584890U CN 201621251817 U CN201621251817 U CN 201621251817U CN 206584890 U CN206584890 U CN 206584890U
- Authority
- CN
- China
- Prior art keywords
- shock module
- plasma processing
- processing apparatus
- disk
- reative cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model provides a kind of plasma processing apparatus, the device includes shell, power supply, electrod assembly, motor, spring, shock module, the reative cell being arranged in shell, electrod assembly is arranged in reative cell and is connected with power supply, shock module is arranged in reative cell, multiple concave points are provided with disk in shock module, two salient points are provided with the disk of motor, concave point coordinates when motor disk is moved, to make shock module form uniform vibrations under the reaction force of spring with salient point formation.Electrod assembly, which is powered, in the utility model to form high-frequency electric field and ionizes reacting gas, and granular materials is surface-treated in high-frequency electric field, and combines shock module vibrations, and granular materials overturn under vibrations, achievable uniform treatment, high treating effect.
Description
Technical field
The utility model is related to a kind of plasma processing apparatus, more particularly to carries out surface plasma to surfacing
The device of processing.
Background technology
Lower temperature plasma technology is as a kind of new surface modified method, and energy is quick, efficient, contamination-freely improve material
Surface property, new feature is assigned, while not changing the body feature of material again, increasingly by the research of countries in the world
Personnel are paid attention to, and plasma surface treatment is that the plasma produced using gas discharge carries out physics and change to material surface
Learn reaction.Participate in reaction has excited state particle, free radical and ion, also includes the effect of plasma resonance ultraviolet.It is logical
Cross surface reaction to be possible to introduce particular functional group on surface, produce surface active and etching, form cross-linked structure or generation table
Face free radical.These effects are generally not single, often based on certain effect, and several effects are simultaneously deposited.Exactly these effects are determined
The validity of plasma surface treatment is determined.
In the prior art, generally using plate electrode as electrode assemblie, material is carried out at surface between electrode assemblie
Reason, pending material remains static, and for granular materials, due to the fill characteristic of granular materials, easily causes material
Accumulation, causes material process uneven, treatment effect is undesirable.
Therefore, a kind of granular material surface plasma processing apparatus is needed badly.
Utility model content
The purpose of this utility model be overcome prior art exist defect there is provided a kind of plasma processing apparatus, should
Device is used to carry out surface plasma processing to surfacing.
The utility model provide a kind of plasma processing apparatus, described device include shell, power supply, electrod assembly,
Motor, spring, shock module, the reative cell being arranged in the shell, the electrod assembly are arranged at the reative cell
Interior and be connected with the power supply, the shock module is arranged in the reative cell, is set on the disk in the shock module
Have and two salient points are provided with multiple concave points, the disk of the motor.
In above-mentioned plasma processing apparatus, it is provided with the enclosure wall and enters the reaction for reacting gas
The gas access of room and the bleeding point for vacuumizing.
In above-mentioned plasma processing apparatus, the gas access is one or more, and the bleeding point is one
Or it is multiple.
In above-mentioned plasma processing apparatus, the motor is direct-drive motor.
In above-mentioned plasma processing apparatus, dismountable lid is additionally provided with above the shell.
The utility model has positive effect：Electrod assembly is powered to forming high-frequency electric field by reaction gas in the utility model
Volume ionization, granular materials is surface-treated in high-frequency electric field, and combines shock module vibrations, and granular materials is under vibrations
Upset, can be achieved uniform treatment, high treating effect.
Brief description of the drawings
In order that content of the present utility model is easier to be clearly understood, below according to specific embodiment and with reference to attached
Figure, is described in further detail to the utility model, wherein：
Fig. 1 is the structural representation of the plasma processing apparatus according to embodiments of the invention.
Fig. 2 is the upward view of the plasma treatment body device according to embodiments of the invention.
Fig. 3 is the sectional view of the plasma treatment body device according to embodiments of the invention.
Wherein：
1 motor；
2 shock modules；
3 reative cells；
4 cover glass；
5 electrod assemblies；
6 shells；
7 springs；
The concave point of disk in 8 shock modules；
Salient point on 9 motor disks.
Embodiment
In order to preferably show plasma processing apparatus of the present utility model, existing example is as follows：
Embodiment 1
As shown in figure 1, the utility model provides the device that surface plasma processing is carried out to surfacing, plasma
Processing unit includes motor 1, shock module 2, shell 6, power supply (not shown), electrod assembly 5 and spring 7, shell
Detachable be provided with 6 tops is provided with the gas access entered for reacting gas in shell and use on lid 4, the wall body of shell 6
In being provided with reative cell 3 in the bleeding point vacuumized, shell 6, electrod assembly 5 is be vertically arranged in reative cell 3 for a pair flat
Plate electrode, this pair of plate electrode is connected with power supply respectively, and shock module 2 is arranged in reative cell 3 and is arranged at two flat board electricity
Between the part of pole, and it is provided with disk in shock module 2 on multiple concave points 8, the disk of motor 1 and is provided with salient point
9, salient point 9 totally two is symmetrical with the center of circle, and the disk on motor 1 enters with motor shaft by interference fit or by key
Row link.Disk in shock module 2 is integrated with shock module or linked by screw.The concave point of disk in shock module
8 coordinate with the formation of salient point 9 on motor disk, and shock module 2 is made when motor disk is moved in the anti-work of spring 7
It is firmly lower to form uniform vibrations.
The present embodiment middle plateform electrod assembly, which is powered, to be formed high-frequency electric field and ionizes reacting gas, and granular materials is in high-frequency electrical
It is surface-treated, and is shaken with reference to shock module 2 in, granular materials is overturn under vibrations, uniform treatment, place can be achieved
Manage effect good.
Embodiment 2
As the presently preferred embodiments, remaining is same as Example 1, and difference is, the lid 4 that the present embodiment is provided is glass
Glass lid, can conveniently check working condition of the granular materials in processing procedure.
Particular embodiments described above, has carried out entering one to the purpose of this utility model, technical scheme and beneficial effect
Step is described in detail, be should be understood that and be the foregoing is only specific embodiment of the utility model, is not limited to this
Utility model, all within spirit of the present utility model and principle, any modification, equivalent substitution and improvements done etc. all should be wrapped
It is contained within protection domain of the present utility model.
Claims (5)
1. a kind of plasma processing apparatus, it is characterised in that described device includes shell, power supply, electrod assembly, driving electricity
Machine, spring, shock module, the reative cell being arranged in the shell, the electrod assembly be arranged in the reative cell and with
The power supply connection, the shock module is arranged in the reative cell, is provided with the disk in the shock module multiple
Two salient points are provided with concave point, the disk of the motor, the concave point coordinates with driving electricity with salient point formation
When machine disk is moved, the shock module is set to form uniform vibrations under the reaction force of the spring.
2. plasma processing apparatus according to claim 1, it is characterised in that being provided with the enclosure wall is used for
Reacting gas enters the gas access of the reative cell and the bleeding point for vacuumizing.
3. plasma processing apparatus according to claim 2, it is characterised in that the gas access is one or many
Individual, the bleeding point is one or more.
4. plasma processing apparatus according to claim 1, it is characterised in that the motor is DC driven electricity
Machine.
5. plasma processing apparatus according to claim 1, it is characterised in that being additionally provided with above the shell can
The lid of dismounting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621251817.7U CN206584890U (en) | 2016-11-21 | 2016-11-21 | A kind of plasma processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621251817.7U CN206584890U (en) | 2016-11-21 | 2016-11-21 | A kind of plasma processing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206584890U true CN206584890U (en) | 2017-10-24 |
Family
ID=60109078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621251817.7U Expired - Fee Related CN206584890U (en) | 2016-11-21 | 2016-11-21 | A kind of plasma processing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206584890U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106373852A (en) * | 2016-11-21 | 2017-02-01 | 青岛理工大学 | Plasma processing device |
-
2016
- 2016-11-21 CN CN201621251817.7U patent/CN206584890U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106373852A (en) * | 2016-11-21 | 2017-02-01 | 青岛理工大学 | Plasma processing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171024 Termination date: 20191121 |