CN2779603Y - Equip-grads accelerative tube - Google Patents
Equip-grads accelerative tube Download PDFInfo
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- CN2779603Y CN2779603Y CNU2005200112728U CN200520011272U CN2779603Y CN 2779603 Y CN2779603 Y CN 2779603Y CN U2005200112728 U CNU2005200112728 U CN U2005200112728U CN 200520011272 U CN200520011272 U CN 200520011272U CN 2779603 Y CN2779603 Y CN 2779603Y
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Abstract
The utility model discloses an accelerative tube with an equal gradient, which comprise a low-voltage flange, a low-voltage electrode, six collars, a suppressor electrode, four intermediate electrodes, five insulating rings, a high-voltage electrode, a high-voltage flange, eight pull rods, six equalizing rings and a wiring rod. The low-voltage flange, the low-voltage electrode, the intermediate electrodes, the insulating rings, and the high-voltage electrode are connected by the pull rods. The suppressor electrode is arranged at the end of the low-voltage flange. The insulating rings are arranged between the low-voltage electrode and the intermediate electrodes. Sealing rings are sealed in vacuum between the adjacent intermediate electrodes, and between the intermediate electrodes and the high-voltage electrode. The equalizing rings are metal pipes in circular ring shapes, and are fixedly arranged at the outer edges of the low-voltage electrode, the intermediate electrodes, and the high-voltage electrode. The utility model adopts the operating mode of an equal gradient, so that an electric field is uniform, structure is in a demountable mode and the installation and maintenance performances are good.
Description
Technical field
The utility model relates to a kind of constant gradient accelerating tube, and particularly the constant gradient accelerating tube in the ion implantor belongs to field of manufacturing semiconductor devices.
Background technology
The develop rapidly of ic manufacturing technology, each semiconductor manufacturing equipment is had higher requirement, as the ion implantor of one of key equipment of semiconductor ion doping processing line also in line index, beam energy purity, inject aspects such as degree of depth control, implantation homogeneity and productivity ratio and be subjected to very stern challenge.
In order to obtain higher energy, ion quickens the energy to obtain being scheduled under just need the electric field in accelerating tube.In former traditional ion implantor equipment, mostly adopt two unit, single gap formula accelerating tube, though this type of accelerating tube is simple in structure, focusing power is strong, because electric field is more concentrated, spark phenomenon very easily occurs, causes device damage; Some novel constant gradient accelerating tubes of developing recently then adopt linear design, are made up of a series of electrodes by dielectric isolation, and the negative voltage on the electrode increases successively, and this accelerating tube Electric Field Distribution is even, difficult to be punctured, but but structure is complicated.
Simultaneously, ion enters accelerating tube just to begin to quicken, interelectrode voltage difference will be superimposed, and total voltage is high more, and the speed of ion is big more, energy is just big more, thereby for the very high accelerating tube of energy, also will be in the face of the material and the requirement of withstand voltage of dead ring, vacuum seal performance, the material of electrode and version, many-sided requirements at the higher level such as design of inhibition voltage.
Summary of the invention
The utility model promptly is at above-mentioned present situation of the prior art, the uniform constant gradient accelerating tube of a kind of Electric Field Distribution that proposes according to the special high requirement of withstand voltage of angled ion implanter.
The utility model is achieved through the following technical solutions:
A kind of constant gradient accelerating tube comprises: a low pressure flange, a low-field electrode, six collars, suppress electrode, four targets, five dead rings, a high-field electrode, a high pressure flange, eight pull bars, six grading rings, a junction pole, it is characterized in that:
Described low pressure flange, low-field electrode, target, dead ring and high-field electrode connect by pull bar;
Described inhibition electrode is arranged at the low pressure flange end;
Described dead ring is arranged between low-field electrode and the target, between the adjacent target, between target and the high-field electrode, adopts sealing ring vacuum seal;
Described grading ring is the circular ring metal pipe, and the outer rim that is fixed in low-field electrode, target and high-field electrode is set, and collar is fixed.
The utlity model has following remarkable advantage:
1. adopt the constant gradient working method, make electric field more even;
2. structure is a removably, and installation and maintainability are good.
Description of drawings
Fig. 1 is the front view of accelerating tube of the present utility model.
Fig. 2 is the right view of accelerating tube of the present utility model.
Specific embodiment
Below in conjunction with the drawings and specific embodiments the utility model is described further, but not as to qualification of the present utility model.
Referring to Fig. 1 and Fig. 2, a kind of constant gradient accelerating tube comprises: a low pressure flange 1, one low-field electrode 2, six collars 3, one suppresses electrode 4, four targets 5, five dead rings 6, one high-field electrode 7, one high pressure flange 8, eight pull bars 9, six grading rings 10, one junction pole 11, wherein: low pressure flange 1 is the electronegative potential adpting flange, low-field electrode 1,8 of target 5 and high-field electrodes are provided with dead ring 6, and employing sealing ring vacuum sealing mode, low pressure flange 1, low-field electrode 2, target 5, dead ring 6 and high-field electrode 8 utilize eight parallel draw bars 9 to connect, constitute an integral body, and guaranteed the vacuum seal performance of whole device.Outward flange at low-field electrode 1, target 5 and high-field electrode 8, all be fixed with grading ring 10, make electric field more even, grading ring 10 is the circular rings that stainless steel or other metal materials are made, and is connected and fixed by collar 3, has guaranteed the smooth of connection, suppressing electrode 4 insulation is fixed on the low pressure flange 1, avoid electron back to quicken, junction pole 11 is the crunch seal lead-in wires that suppress electrode 4, and inhibition voltage is added in by the sealing-in lead-in wire and suppresses on the electrode.
Low-field electrode 1 is in electronegative potential, and high-field electrode 8 is in high potential, and with target 5, under grading resistor distributed the effect of all pressing, the constant gradient that forms electric field distributed.Also can be used as on ion optics by two gardens of entrance and exit pore membrane sheet lens, the lens combination that the uniform electric field district is formed in the middle of adding is handled.The interelectrode electric field of constant gradient accelerating tube is a uniform electric field, and ion beam quickens in this electric field, obtains acceleration energy simultaneously.
Specific embodiment of the present utility model elaborates content of the present utility model.For persons skilled in the art, any conspicuous change of under the prerequisite that does not deviate from the utility model spirit it being done all constitutes the infringement to the utility model patent, with corresponding legal responsibilities.
Claims (1)
1. a constant gradient accelerating tube comprises: a low pressure flange, a low-field electrode, six collars, suppress electrode, four targets, five dead rings, a high-field electrode, a high pressure flange, eight pull bars, six grading rings, a junction pole, it is characterized in that:
Described low pressure flange, low-field electrode, target, dead ring and high-field electrode connect by pull bar;
Described inhibition electrode is arranged at the low pressure flange end;
Described dead ring is arranged between low-field electrode and the target, between the adjacent target, between target and the high-field electrode, adopts sealing ring vacuum seal;
Described grading ring is the circular ring metal pipe, and the outer rim that is fixed in low-field electrode, target and high-field electrode is set.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2005200112728U CN2779603Y (en) | 2005-03-31 | 2005-03-31 | Equip-grads accelerative tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2005200112728U CN2779603Y (en) | 2005-03-31 | 2005-03-31 | Equip-grads accelerative tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2779603Y true CN2779603Y (en) | 2006-05-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2005200112728U Expired - Fee Related CN2779603Y (en) | 2005-03-31 | 2005-03-31 | Equip-grads accelerative tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2779603Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104051211A (en) * | 2014-06-04 | 2014-09-17 | 中国电子科技集团公司第四十八研究所 | Ion optical system of high-temperature high-energy ion implanter |
| CN104134469A (en) * | 2014-07-01 | 2014-11-05 | 兰州大学 | High-current ion beam accelerating tube applied to fusion reaction accelerator neutron source |
| CN106449386A (en) * | 2016-09-26 | 2017-02-22 | 中国电子科技集团公司第四十八研究所 | Ion implantation method and device for doping SiC wafer |
| CN114126186A (en) * | 2021-11-26 | 2022-03-01 | 中山大学 | BBU (base band unit) restraining structure of high-current electron linear accelerator for nuclide preparation |
| CN114126183A (en) * | 2021-10-11 | 2022-03-01 | 核工业西南物理研究院 | Detachable ion beam accelerating tube |
-
2005
- 2005-03-31 CN CNU2005200112728U patent/CN2779603Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104051211A (en) * | 2014-06-04 | 2014-09-17 | 中国电子科技集团公司第四十八研究所 | Ion optical system of high-temperature high-energy ion implanter |
| CN104134469A (en) * | 2014-07-01 | 2014-11-05 | 兰州大学 | High-current ion beam accelerating tube applied to fusion reaction accelerator neutron source |
| CN106449386A (en) * | 2016-09-26 | 2017-02-22 | 中国电子科技集团公司第四十八研究所 | Ion implantation method and device for doping SiC wafer |
| CN114126183A (en) * | 2021-10-11 | 2022-03-01 | 核工业西南物理研究院 | Detachable ion beam accelerating tube |
| CN114126183B (en) * | 2021-10-11 | 2022-10-18 | 核工业西南物理研究院 | Detachable ion beam accelerating tube |
| CN114126186A (en) * | 2021-11-26 | 2022-03-01 | 中山大学 | BBU (base band unit) restraining structure of high-current electron linear accelerator for nuclide preparation |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060510 Termination date: 20100331 |