CN2758972Y - 集成电路晶片封装 - Google Patents

集成电路晶片封装 Download PDF

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Publication number
CN2758972Y
CN2758972Y CNU2004201157539U CN200420115753U CN2758972Y CN 2758972 Y CN2758972 Y CN 2758972Y CN U2004201157539 U CNU2004201157539 U CN U2004201157539U CN 200420115753 U CN200420115753 U CN 200420115753U CN 2758972 Y CN2758972 Y CN 2758972Y
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integrated circuit
wafer
stress
encapsulation
utility
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李新辉
曹佩华
苏昭源
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Taiwan Semiconductor Manufacturing Co TSMC Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/562Protection against mechanical damage
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/16Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • H01L23/3128Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

本实用新型揭示一种集成电路晶片的封装,其包括一集成电路晶片、一围堰、一应力缓冲材料、及一封胶材料。集成电路晶片是附着于一基板上。围堰是围绕集成电路晶片而应力缓冲材料则覆盖集成电路晶片的至少一角落。封胶材料是覆盖集成电路晶片及围堰内部的整个基板。其中封胶材料是覆盖应力缓冲材料,且应力缓冲材料是防止集成电路晶片的角落的封胶材料发生剥离。

Description

集成电路晶片封装
技术领域
本实用新型是有关于一种集成电路装置的封装,特别是有关于一种不会造成晶粒(die)角落剥离的集成电路装置的封装。
背景技术
在集成电路装置的组装中,超级球栅阵列(super ball gridarray,SBGA)技术已广泛应用于电子封装并将其安装于内连线基板上,例如转接板(interposer)或印刷电路板(PCB)。举例而言,图1A及图1B是分别绘示出超级球栅阵列(SBGA)基板10的上视图及剖面图。集成电路晶片(chip)12是安装于SBGA基板10上。现在,利用一液态树脂封装该晶片12以保护该晶片。此对于昂贵的低介电常数材料晶圆而言格外重要。举例而言,低介电常数的晶圆具有比氟硅玻璃(fluorinated silicate glass,FSG)更脆的介电材料。
高黏度材料是供作一围堰14之用。接着封胶材料是局限于围堰14所环绕的区域之内,如图2A及图2B的标号16所示。此封胶材料的黏度低于围堰材料。然而,于热循环测试中,显示出液态的封胶材料因封胶层收缩而于晶粒(die)角落发生剥离。高总体应力(global stress)出现于晶粒角落处。此乃晶粒的热膨胀系数与封胶材料之间失配(mismatch)所导致而成。
请参照图3,其为晶片12的放大图,并显示出封胶材料16于固化期间发生收缩22的情形。层18是表示有效(active)金属电路层。封胶材料是从基底的表面剥离,如标号20所示。为了增加SBGA组装的可靠度及良率,必须寻求一种可防止晶粒角落发生剥离的方法。
DiStefano于美国专利第6,127,724号以及Shim等人于美国专利第6,020,218号揭示出传统的封胶方法。Farnsworth于美国专利第6,537,482号揭示一种以树脂封装晶粒的方法。这些参考文献并未揭示防止晶粒角落发生剥离的方法。
实用新型内容
有鉴于此,本实用新型的目的在于提供一种有效的且可制造的集成电路晶片封装。
本实用新型的另一目的在于提供一种集成电路晶片封装,适用于超级球栅阵列(SBGA)封装。
又本实用新型的另一目的在于提供一种集成电路晶片封装,以防止晶粒角落发生剥离。
本实用新型的又一目的在于提供一种集成电路晶片封装,其于填入封胶材料之前,先采用低热膨胀系数材料来覆盖晶粒角落。
根据上述的目的,本实用新型提供一种集成电路晶片的封装,其包括一集成电路晶片、一围堰、一应力缓冲材料、及一封胶材料。集成电路晶片是附着于一基板上。围堰是围绕集成电路晶片而应力缓冲材料则覆盖集成电路晶片的至少一角落。封胶材料是覆盖集成电路晶片及围堰内部的整个基板,其中封胶材料是覆盖应力缓冲材料,且应力缓冲材料是防止集成电路晶片的角落的封胶材料发生剥离。
本实用新型所述的集成电路晶片封装,该集成电路晶片是借由一球栅阵列而附着于该基板上。
本实用新型所述的集成电路晶片封装,该集成电路晶片是借由一超级球栅阵列而附着于该基板上。
本实用新型所述的集成电路晶片封装,该封胶材料是覆盖该应力缓冲材料,且该应力缓冲材料是防止该集成电路晶片的该角落的封胶材料发生剥离。
本实用新型所述的集成电路晶片封装,该应力缓冲材料是择自于还氧化物及树脂的任一种。
本实用新型所述的集成电路晶片封装,该应力缓冲材料是一低热膨胀系数材料。
本实用新型所述的集成电路晶片封装,该集成电路晶片包含低介电常数介电层。
附图说明
图1A及图2A是绘示出习知集成电路晶片组装的上视图;
图1B是绘示出图1A的剖面示意图;
图2B是绘示出图2A的剖面示意图;
图3是绘示出习知技术中发生剥离的剖面放大图;
图4A及图5A是绘示出本实用新型实施例的集成电路晶片组装的上视图;
图4B是绘示出图4A的剖面示意图;
图5B是绘示出图5A的剖面示意图;
图6是绘示出本实用新型实施例的晶粒角落的斜视图;
图7是绘示出本实用新型实施例的晶片封装的剖面放大图。
具体实施方式
本实用新型提供一种集成电路晶片封装,其可防止角落剥离。此处以超级球栅阵列(SBGA)基板作为一范例,用以解释本实用新型的制程方法。然而,熟习此技艺的人士可轻易了解到本实用新型的制程方法对于其它类似的基板而言同样有帮助。
请参照图4A及图4B,其绘示出一SBGA基板10。一集成电路晶片12是安装于SBGA基板10上。提供一高黏度材料作为一围堰14。此材料可以是环氧化物。现在,于本实用新型的关键步骤中,高黏度、低热膨胀系数(CTE)材料30是涂覆于晶片12的晶粒角落。此材料同样可为环氧化物。因为晶粒与材料30的CTE小,所以两者之间的CTE失配(mismatch)低。同样地,晶粒与材料30之间接触面积小。前涂覆材料30将晶粒角落处的总体应力(global stress)降低成小的局部应力(local stress)。
现在,封胶材料是局限于围堰14所围绕的区域之内,如图5A及图5B的标号32所示。此封胶材料可为环氧化物或树脂。晶粒角落处的材料30是于热制程期间供作应力缓冲之用,以防止晶粒角落处的封胶材料发生剥离。
请参照图6,其绘示出晶粒角落的斜视图。材料30是覆盖在晶粒角落处。请参照图7,其为晶片12的剖面放大图,并显示出有效金属电路层33,且此应力缓冲材料层30是覆盖在晶粒角落处。而封胶材料32是覆盖整个晶粒。
本实用新型是借由在封胶制程之前,以一应力缓冲材料覆盖晶粒角落,进而防止晶粒角落处的封胶材料发生剥离。
虽然本实用新型已以较佳实施例揭露如上,然其并非用以限定本实用新型,任何熟习此项技艺者,在不脱离本实用新型的精神和范围内,当可作更动与润饰,因此本实用新型的保护范围当以本申请的权利要求书所界定的范围为准。
附图中符号的简单说明如下:
10~超级球栅阵列基板
12~晶片
14~围堰
16、32~封胶材料
18、33~有效金属电路层
20~剥离
22~收缩
30~应力缓冲材料

Claims (7)

1.一种集成电路晶片的封装,其特征在于所述集成电路晶片封装包括:
一集成电路晶片,附着于一基板上;
一围堰,围绕该集成电路晶片;
一应力缓冲材料,覆盖该集成电路晶片的至少一角落;以及
一封胶材料,覆盖该集成电路晶片及该围堰内部的该整个基板。
2.根据权利要求1所述的集成电路晶片封装,其特征在于:该集成电路晶片是借由一球栅阵列而附着于该基板上。
3.根据权利要求1所述的集成电路晶片封装,其特征在于:该集成电路晶片是借由一超级球栅阵列而附着于该基板上。
4.根据权利要求1所述的集成电路晶片封装,其特征在于:该封胶材料是覆盖该应力缓冲材料,且该应力缓冲材料是防止该集成电路晶片的该角落的封胶材料发生剥离。
5.根据权利要求1所述的集成电路晶片封装,其特征在于:该应力缓冲材料是择自于还氧化物及树脂的任一种。
6.根据权利要求1所述的集成电路晶片封装,其特征在于:该应力缓冲材料是一低热膨胀系数材料。
7.根据权利要求1所述的集成电路晶片封装,其特征在于:该集成电路晶片包含低介电常数介电层。
CNU2004201157539U 2003-11-20 2004-11-19 集成电路晶片封装 Expired - Lifetime CN2758972Y (zh)

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US20050112795A1 (en) 2005-05-26
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TWI245351B (en) 2005-12-11
CN100345267C (zh) 2007-10-24
CN1627490A (zh) 2005-06-15

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