CN2716284Y - Device for treating tail gas from chemical vapor codeposition and infiltration - Google Patents
Device for treating tail gas from chemical vapor codeposition and infiltration Download PDFInfo
- Publication number
- CN2716284Y CN2716284Y CN 200420073083 CN200420073083U CN2716284Y CN 2716284 Y CN2716284 Y CN 2716284Y CN 200420073083 CN200420073083 CN 200420073083 CN 200420073083 U CN200420073083 U CN 200420073083U CN 2716284 Y CN2716284 Y CN 2716284Y
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- Prior art keywords
- alkali lye
- strainer
- casing
- pipeline
- communicated
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 239000000126 substance Substances 0.000 title claims abstract description 14
- 230000008595 infiltration Effects 0.000 title claims abstract description 9
- 238000001764 infiltration Methods 0.000 title claims abstract description 9
- 238000007710 freezing Methods 0.000 claims abstract description 23
- 230000008014 freezing Effects 0.000 claims abstract description 23
- 239000003513 alkali Substances 0.000 claims description 32
- 238000001914 filtration Methods 0.000 claims description 20
- 150000001875 compounds Chemical class 0.000 claims description 17
- 238000002485 combustion reaction Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 8
- 229910000831 Steel Inorganic materials 0.000 claims description 4
- 239000000498 cooling water Substances 0.000 claims description 4
- 230000035515 penetration Effects 0.000 claims description 4
- 239000010959 steel Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 49
- 238000000034 method Methods 0.000 abstract description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract description 5
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 abstract description 5
- 229910000041 hydrogen chloride Inorganic materials 0.000 abstract description 5
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 4
- 239000002131 composite material Substances 0.000 abstract description 3
- 238000001816 cooling Methods 0.000 abstract description 2
- 239000012670 alkaline solution Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000010742 number 1 fuel oil Substances 0.000 abstract 1
- 239000003921 oil Substances 0.000 description 10
- 239000011280 coal tar Substances 0.000 description 7
- 239000011269 tar Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000007806 chemical reaction intermediate Substances 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 150000001282 organosilanes Chemical class 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229910021332 silicide Inorganic materials 0.000 description 3
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 3
- 239000002826 coolant Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000295 fuel oil Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- Applications Or Details Of Rotary Compressors (AREA)
Abstract
The utility model belongs to the field of devices manufacture using composite materials, which relates to the improvement of a tail gas treating device for chemical vapor codeposition and infiltration devices. The utility model is characterized in that a water-cooling filter, a freezing filter, a composite filter, a vacuum pump, an alkaline solution filter and an emptying burning structure are connected in series by pipelines to form a four-stage tail gas treating device. The utility model with the advantages of simple structure, convenient operation, and good tail gas treating ability can simultaneously or alone carry out the treating process to the coal oil and the hydrogen chloride in the tail gas of the chemical vapor deposition and infiltration process.
Description
Technical field
The utility model belongs to matrix material producing apparatus field, relates to the improvement to the exhaust gas processing device of chemical gas phase codeposition and penetration equipment use.
Background technology
Along with the develop rapidly of modern science and technology, the ultrahigh-temperature matrix material has obtained extensive studies and application in high-tech sectors such as Aeronautics and Astronautics and nuclear industry.Chemical vapour deposition and osmosis process are mostly adopted in the development of ultrahigh-temperature matrix material at present, and the tail gas that produces in deposition and process of osmosis comprises that the hydrogen chloride gas that coal tar oil gas, undecomposed organosilane, the organic silicide of reaction intermediate, precipitated product particle and reaction generate etc. is bigger to equipment and environmental hazard.The HCL that undecomposed organosilane and reaction generate meets water will generate the extremely strong acid of corrodibility; The organic silicide of reaction intermediate, precipitated product particle and coal tar oil gas deposit in equipment, and pipeline and mechanical pump will be stopped up.Therefore handle and have great importance adopting chemical vapor deposition method to prepare the tail gas that produces in the ultrahigh-temperature composite material.The exhaust gas processing device of the chemical vapor depsotition equipment of present domestic development mostly is separately coal tar oil gas or hydrogenchloride to be handled, and for the tail gas that produces in chemical gas phase codeposition and infiltration carbon and the ceramic process, can not handle simultaneously.
Summary of the invention
The purpose of this utility model is: provide a kind of simple in structure, easy to operate, and the exhaust gas processing device handled of the coal tar that can be simultaneously the chemical gas phase codeposition be produced and hydrogen chloride tail gas.
The technical solution of the utility model is: a kind of chemical gas phase codeposition and infiltration exhaust gas processing device, comprise a water-cooled strainer, a freezing and filtering device, a compound filter, vacuum pump, alkali lye strainer and emptying combustion mechanism, it is characterized in that, by pipeline successively with the water-cooled strainer, the freezing and filtering device, compound filter, vacuum pump, alkali lye strainer and the series connection of emptying burning structure are the level Four exhaust gas processing device, the gas inlet of water-cooled strainer [1] is communicated with the exhaust emissions port of penetration equipment with the chemical gas phase codeposition, the tail gas outlet of water-cooled strainer is communicated with by the inlet of pipeline with the freezing and filtering device, the outlet of freezing and filtering device is communicated with the inlet of compound filter by pipeline, the outlet of compound filter is communicated with the inlet of vacuum pump by pipeline, the vacuum pump outlet is communicated with by the inlet of pipeline with the alkali lye strainer, and the outlet of alkali lye strainer is communicated with the emptying combustion mechanism by pipeline.
The utility model has the advantages that:
1. simple in structure;
2. operation and regularly to remove tar convenient;
3. the vent gas treatment ability is strong;
4. can simultaneously or handle the tail gas coal tar and the hydrogenchloride of chemical vapour deposition and osmosis process separately.
Description of drawings
Fig. 1 is a topology layout synoptic diagram of the present utility model.Among the figure, 1. gas inlet; 2. water coolant; 3. steel wire tennis; 4. water-cooled filter box-body; 5. gas baffle; 6. freezing and filtering device casing; 7. refrigerating structure; 8. liquid oil; 9. siccative; 10. sliding vane rotary vacuum pump; 11. Roots vaccum pump; 12. recycle pump; 13. alkali lye; 14. alkali lye pipeline; 15. tail gas outlet; 16. alkali lye filter box-body; 17. burning emptying structure.
Embodiment
Below the utility model is described in further details.The utility model chemical gas phase codeposition adopts the level Four filter type with the infiltration exhaust gas processing device.The first step is the water-cooled strainer, mainly is tar heavy oil composition and the organic silicide of removing in the coal tar of reaction intermediate; The second stage is the freezing and filtering device, mainly is the tar light oil composition of removing in the coal tar; The third stage is a compound filter, built-in liquid oil and siccative, liquid oil can be removed undecomposed organosilane, precipitated product particle, and purpose is to guarantee that tail gas discharged becomes the HCL gas that does not contain solid, liquid component thus, and then reduces damage and influence to mechanical pump; Fourth stage alkali lye strainer mainly is to remove the HCL that reaction produces.The utility model comprises a water-cooled strainer, a freezing and filtering device, a compound filter, vacuum pump, alkali lye strainer and emptying combustion mechanism, it is characterized in that, by pipeline successively with the water-cooled strainer, the freezing and filtering device, compound filter, vacuum pump, alkali lye strainer and the series connection of emptying burning structure are complete level Four exhaust gas processing device, the gas inlet 1 of water-cooled strainer is communicated with the exhaust emissions port of penetration equipment with the chemical gas phase codeposition, the tail gas outlet of water-cooled strainer is communicated with by the inlet of pipeline with the freezing and filtering device, the outlet of freezing and filtering device is communicated with the inlet of compound filter by pipeline, the outlet of compound filter is communicated with the inlet of vacuum pump by pipeline, the vacuum pump outlet is communicated with by the inlet of pipeline with the alkali lye strainer, and the outlet of alkali lye strainer is communicated with the emptying combustion mechanism by pipeline.
Water-cooled strainer recited above by casing 4, be positioned at the cooling water pipeline 2 of casing 4 and be positioned at the outer a large amount of steel wire tennises of casing 4 internal cooling water lines 2 and constitute; Described freezing and filtering device is made up of casing 6, some gas baffles 5 of surrounding the freezing plant 7 of casing 6 and being positioned at casing 6, and gas baffle 5 staggered arrangement form the gas circuit of transferring of making a circulation; Described compound filter is connected to form by liquid oil casing 8 and siccative casing 9; Described vacuum pump is composed in parallel by sliding vane rotary vacuum pump 10 and Roots vaccum pump 11; Described alkali lye filter box-body 16, recycle pump 12, alkali lye circulation line 14 constitute, and alkali lye 13 is arranged in the alkali lye filter box-body 16; Tail gas output tube 15 is communicated with the inner chamber of alkali lye filter box-body 16 with emptying combustion mechanism 17.
In the embodiment in figure 1, gas inlet 1 is connected with the bottom of the casing 4 of water-cooled strainer; Be provided with the crooked coil pipe 2 of water coolant in the casing 4 of water-cooled strainer, and many steel wire tennises 3 are housed in casing; Refrigerating structure 7 is close in casing 6 outsides of freezing and filtering device, and gas baffle 5 is staggered successively to be fixed on the wall of the intravital left and right sides of case; Built-in liquid oil 8 of compound filter and siccative 9; Sliding vane rotary vacuum pump 10 adopts with Roots vaccum pump 11 and is connected in parallel; Fill certain alkali lye 13 in the casing 16 of alkali lye strainer, recycle pump 12 is housed in the alkali lye circulation tube 14; Tail gas output tube 15 is connected with casing 16 bottoms of alkali lye strainer.
When using the utility model to carry out vent gas treatment, open cooling circulating water, freezing and filtering device, vacuum pump, recycle pump, treat that temperature is reduced to-15 ℃ in the freezing and filtering device after, can carry out vent gas treatment.Water-cooled strainer and freezing and filtering device are regularly pulled down and are cleared up collected tar, liquid oil and siccative in the compound filter are regularly handled, alkali lye in the alkali lye strainer is regularly changed, and can guarantee that thorough tail gas treatment and equipment normally move.
Claims (2)
1, a kind of chemical gas phase codeposition and infiltration exhaust gas processing device, comprise a water-cooled strainer, a freezing and filtering device, a compound filter, vacuum pump, alkali lye strainer and emptying combustion mechanism, it is characterized in that, by pipeline successively with the water-cooled strainer, the freezing and filtering device, compound filter, vacuum pump, alkali lye strainer and the series connection of emptying burning structure are the level Four exhaust gas processing device, the gas inlet of water-cooled strainer [1] is communicated with the exhaust emissions port of penetration equipment with the chemical gas phase codeposition, the tail gas outlet of water-cooled strainer is communicated with by the inlet of pipeline with the freezing and filtering device, the outlet of freezing and filtering device is communicated with the inlet of compound filter by pipeline, the outlet of compound filter is communicated with the inlet of vacuum pump by pipeline, the vacuum pump outlet is communicated with by the inlet of pipeline with the alkali lye strainer, and the outlet of alkali lye strainer is communicated with the emptying combustion mechanism by pipeline.
2, chemical gas phase codeposition according to claim 1 and infiltration exhaust gas processing device, it is characterized in that, described water-cooled strainer by casing [4], be positioned at the cooling water pipeline [2] of casing [4] and be positioned at the outer a large amount of steel wire tennises of casing [4] internal cooling water lines [2] and constitute; Described freezing and filtering device is made up of casing [6], some gas baffles [5] of surrounding the freezing plant [7] of casing [6] and being positioned at casing [6], gas baffle [5] staggered arrangement, the make a circulation gas circuit of transferring of formation; Described compound filter is connected to form by liquid oil casing [8] and siccative casing [9]; Described vacuum pump is composed in parallel by sliding vane rotary vacuum pump [10] and Roots vaccum pump [11]; Described alkali lye filter box-body [16], recycle pump [12], alkali lye circulation line [14] constitute, and alkali lye [13] is arranged in the alkali lye filter box-body [16]; Tail gas output tube [15] is communicated with the inner chamber of alkali lye filter box-body [16] with emptying combustion mechanism [17].
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420073083 CN2716284Y (en) | 2004-07-07 | 2004-07-07 | Device for treating tail gas from chemical vapor codeposition and infiltration |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420073083 CN2716284Y (en) | 2004-07-07 | 2004-07-07 | Device for treating tail gas from chemical vapor codeposition and infiltration |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2716284Y true CN2716284Y (en) | 2005-08-10 |
Family
ID=34874188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420073083 Expired - Lifetime CN2716284Y (en) | 2004-07-07 | 2004-07-07 | Device for treating tail gas from chemical vapor codeposition and infiltration |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2716284Y (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102600675A (en) * | 2012-03-22 | 2012-07-25 | 西安航空制动科技有限公司 | Tail gas treatment device for chemical vapor deposition furnace |
| CN103590004A (en) * | 2012-08-15 | 2014-02-19 | 苏州宏久航空防热材料科技有限公司 | Plasma physical and chemical codeposition apparatus and deposition method thereof |
| CN104226098A (en) * | 2014-10-11 | 2014-12-24 | 北京嘉格伟业筑路科技有限公司 | Modified asphalt tail gas treating system and treating process thereof |
| CN107022752A (en) * | 2016-02-02 | 2017-08-08 | 中晟光电设备（上海）股份有限公司 | A kind of collection device and gas-phase deposition system of organo-metallic compound accompaniment |
| CN110527979A (en) * | 2018-05-25 | 2019-12-03 | 北京北方华创微电子装备有限公司 | Tail gas pipeline assembly and vapor deposition apparatus for vapor deposition apparatus |
| CN114053818A (en) * | 2021-11-03 | 2022-02-18 | 中国科学院金属研究所 | Tail gas treatment device and tail gas treatment method for preparing SiC matrix or SiC coating by CVI method or CVD method |
-
2004
- 2004-07-07 CN CN 200420073083 patent/CN2716284Y/en not_active Expired - Lifetime
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102600675A (en) * | 2012-03-22 | 2012-07-25 | 西安航空制动科技有限公司 | Tail gas treatment device for chemical vapor deposition furnace |
| CN102600675B (en) * | 2012-03-22 | 2013-12-04 | 西安航空制动科技有限公司 | Tail gas treatment device for chemical vapor deposition furnace |
| CN103590004A (en) * | 2012-08-15 | 2014-02-19 | 苏州宏久航空防热材料科技有限公司 | Plasma physical and chemical codeposition apparatus and deposition method thereof |
| CN104226098A (en) * | 2014-10-11 | 2014-12-24 | 北京嘉格伟业筑路科技有限公司 | Modified asphalt tail gas treating system and treating process thereof |
| CN104226098B (en) * | 2014-10-11 | 2016-03-30 | 北京嘉格伟业筑路科技有限公司 | A kind of modified pitch exhaust treatment system and treatment process thereof |
| CN107022752A (en) * | 2016-02-02 | 2017-08-08 | 中晟光电设备（上海）股份有限公司 | A kind of collection device and gas-phase deposition system of organo-metallic compound accompaniment |
| CN107022752B (en) * | 2016-02-02 | 2018-04-20 | 中晟光电设备（上海）股份有限公司 | A kind of collection device and gas-phase deposition system of organo-metallic compound accompaniment |
| CN110527979A (en) * | 2018-05-25 | 2019-12-03 | 北京北方华创微电子装备有限公司 | Tail gas pipeline assembly and vapor deposition apparatus for vapor deposition apparatus |
| CN110527979B (en) * | 2018-05-25 | 2021-08-13 | 北京北方华创微电子装备有限公司 | Tail gas pipeline assembly for vapor deposition equipment and vapor deposition equipment |
| CN114053818A (en) * | 2021-11-03 | 2022-02-18 | 中国科学院金属研究所 | Tail gas treatment device and tail gas treatment method for preparing SiC matrix or SiC coating by CVI method or CVD method |
| CN114053818B (en) * | 2021-11-03 | 2022-07-05 | 中国科学院金属研究所 | Tail gas treatment device and tail gas treatment method for preparing SiC matrix or SiC coating by CVI method or CVD method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20140707 Granted publication date: 20050810 |