CN2706477Y

CN2706477Y - Optical film plating device

Info

Publication number: CN2706477Y
Application number: CN 200420046777
Authority: CN
Inventors: 林志泉
Original assignee: Hongfujin Precision Industry Shenzhen Co Ltd; Hon Hai Precision Industry Co Ltd
Current assignee: Hongfujin Precision Industry Shenzhen Co Ltd; Hon Hai Precision Industry Co Ltd
Priority date: 2004-05-31
Filing date: 2004-05-31
Publication date: 2005-06-29
Anticipated expiration: 2014-05-31

Abstract

An optical film plating device comprises a plating chamber, a bearing frame, a rotary motor and a deposition source. Further, the optical film plating device comprises a baffle plate which can be rotatablely provided between the bearing frame and then deposition source, in addition, rotary speed of the baffle plate is adjustable. The optical film plating device of the utility model adopts a rotary flow-stopping mechanism and the rotary speed of the baffle plate of this optical film plating device is controllable. Equivalent geometric shape of the baffle plate can be altered by changing the rotary speed of the baffle plate. Because the optical film plating device of the utility model doesn't need to directly correct the geometric shape of the baffle plate, plating cost is degraded and plating program is simplified, in addition, uniformity of plating is easy to accomplish.

Description

Optical coating device

[technical field]

The utility model is about a kind of optical coating device, especially rotates the optical coating device of flow-stopping plate about a kind of tool.

[background technology]

At present, optical thin film is widely used in opticinstrument, as a lot of fields such as transmitter, other semiconductor lasers, interferometer, glasses and optical-fibre communications element.Optical thin film normally utilizes interference effect and reaches its desired result, is meant to plate one or more layers dielectric film or metallic membrane changes the light wave transmission characteristics on optical module or separate substrates.

At present, optical thin film is made usually based on physical vapor deposition (physics vapordeposition, be called for short PVD), this method is by solid-state gaseous state or the ionic state of being converted into thin-film material, the material of gaseous state or ionic state passes through the space by evaporation source, arrives at substrate surface, after material arrives at substrate surface, will deposit and form film gradually.Usually, in order to make highly purified film, film-plating process must be finished under high vacuum environment.Extend vacuum plating thus, common practices is that substrate is cleaned with sono-cleaner, cleans back row and goes up anchor clamps, sends into coating equipment, heats and vacuumizes.After reaching high vacuum, the beginning plated film.During plated film, with the heating of electron beam gun or resistance-type, thin-film material is become ionic state, it is different and length arranged that the plated film time is then looked the number of plies and program.After plated film finishes, treat temperature cooling back taking-up.

But in the existing optical coating equipment, be the thickness distribution of control plated film, utilize the flow-stopping plate of special geometry to isolate the distribution of ionic current usually, make coating film thickness controlled with suitable adjustment space ionic current.As be disclosed in No. the 1459517th, the Chinese invention patent on December 3rd, 2003, and it discloses a film coating apparatus and film coating method, sees also Fig. 5, and this film coating apparatus comprises a rotating disk 11, a shield 12 and a plating source 13.Wherein, rotating disk 11 can rule rotate; Shield 12 is provided with according to the specific thicknesses of coatings 3, is arranged on the position near substrate 2; Plating source 13 and rotating disk 11 are relative and establish, and this shield 12 is arranged between the two.The shape of shield 12 is to design according to the specific thicknesses of coatings 3, and particularly, the shape of shield 12 is made of a plurality of isocentric circular arc.But shield 12 maintains static in the such scheme, and the therefore substrate to be plated that difference is required needs to change the flow-stopping plate of different geometries, and also more complicated of shield 12 shapes, need can reach requirement through revising repeatedly, so the coating cost of this scheme is higher.

At the problems referred to above, be necessary to provide a kind of reduction coating cost, realize the inhomogeneity optical coating device of plated film easily.

[utility model content]

The purpose of this utility model is to provide a kind of reduction coating cost, realizes the inhomogeneity optical coating device of plated film easily.

To achieve these goals, this optical coating device comprises coating chamber, carrier, rotation motor and vapor deposition source, and this optical coating device further comprises flow-stopping plate, and this flow-stopping plate can be rotatably set between carrier and the vapor deposition source.

In order to embody the purpose of this utility model more, the flow-stopping plate speed of rotation may command of this optical coating device can change its equivalent geometrical shape by changing the slewing rate of flow-stopping plate.

Compare prior art, optical coating device of the present utility model is not owing to need directly to revise the geometrical shape of flow-stopping plate, and therefore reducing coating cost, plated film program realizes the plated film homogeneity simply, easily.

[description of drawings]

Fig. 1 is the optical coating device sectional view of the utility model first embodiment;

Fig. 2 is the flow-stopping plate of the utility model optical coating device;

Fig. 3 is the optical coating device sectional view of the utility model second embodiment;

Fig. 4 is another shape flow-stopping plate that is applicable to the utility model optical coating device;

Fig. 5 is the structural representation of existing film coating apparatus.

[embodiment]

See also Fig. 1, the utility model optical coating device 10 comprises a coating chamber 20, a carrier 30, a flow-stopping plate 40, a rotation motor 50 and a vapor deposition source 60.

This optical coating device 10 also comprises a shaft joint 301 and a carrier back shaft 302, and an end of this carrier back shaft 302 is connected with rotation motor 50 by shaft joint 301, and its other end links to each other with carrier 30.In the present embodiment, this carrier 30 is a disc, can fix a plurality of substrates to be plated (figure does not show) on it.

This optical coating device 10 also comprises a variator 401 and a flow-stopping plate back shaft 402, and the output terminal of rotation motor 50 links to each other with flow-stopping plate back shaft 402 by variator 401, and the other end of this flow-stopping plate back shaft 402 is connected with flow-stopping plate 40.

Consult Fig. 2 in the lump, this flow-stopping plate 40 is a cross shape, its symmetry centre position is provided with through hole 403, flow-stopping plate back shaft 402 be provided with threaded hole (figure does not show) with match unification end of flow-stopping plate 40, a bolt (figure does not show) cooperates by the through hole 403 of flow-stopping plate 40 and with flow-stopping plate back shaft 402.This flow-stopping plate back shaft 402 is the solid slim axle, and carrier back shaft 302 is hollow thick axle, and this flow-stopping plate back shaft 402 passes carrier back shaft 302, so that flow-stopping plate 40 is concentric with the turning axle maintenance of carrier 30.

Vapor deposition source 60 is positioned at 40 times suitable distances of flow-stopping plate, and over against the geometric centre of this flow-stopping plate 40, its type of heating can be resistance-type vapour deposition method or electron beam evaporation plating method.

During plated film, the carrier 30 that links to each other with rotation motor 50 by shaft joint 301 rotates by certain rotating speed, simultaneously, the flow-stopping plate 40 that links to each other with rotation motor 50 by variator 401 also rotates, and by changing the rotating speed of variator 401, control the speed of rotation of flow-stopping plate 40, its equivalent geometrical shape is changed, by the distribution of suitable adjustment space ionic current, treat the plated film requirement of plated substrate to satisfy difference.

See also Fig. 3, second embodiment and first embodiment of the utility model optical coating device are roughly the same, its difference is, carrier 30 by shaft joint link to each other with first rotation motor 501, flow-stopping plate 40 links to each other with second rotation motor 502 by variator, the rotation of this carrier 30 and flow-stopping plate 40 by separately independently rotation motor control.

Being shaped as of the relevant flow-stopping plate of the most preferred embodiment that utilizes in the utility model is cross.But mainly be to change the rotating speed of flow-stopping plate and change its equivalent geometrical shape in the utility model, so the shape of its flow-stopping plate can be unsymmetric structure, be appreciated that the Y font flow-stopping plate (indicating among the figure) that also can use as shown in Figure 4.

The shape that is appreciated that the vacuum chamber 20 of the utility model optical coating device 10 also can be other shape such as rectangular parallelepiped, square, spheroid or right cylinder.In addition, this carrier 30 also can be the framework or the assembly of other tool supporting role, can be hemispherical or is one to extend the carrier of four connecting rods or two carrier bars that are cross-linked in the middle of two in its as it.

Claims

1. optical coating device, it comprises coating chamber, carrier, rotation motor and vapor deposition source, it is characterized in that, and this optical coating device further comprises flow-stopping plate, and wherein, flow-stopping plate can be rotatably set between carrier and the vapor deposition source.

2. optical coating device as claimed in claim 1 is characterized in that, this coating chamber is a kind of vacuum film coating chamber.

3. optical coating device as claimed in claim 1 is characterized in that this device also comprises carrier back shaft and shaft joint, one end of this carrier back shaft is connected with carrier, and be positioned within the coating chamber, its other end is connected with rotation motor by shaft joint, and is positioned at outside the coating chamber.

4. optical coating device as claimed in claim 3, it is characterized in that, this device also comprises flow-stopping plate back shaft and variator, one end of this flow-stopping plate back shaft is connected with flow-stopping plate, and be positioned within the coating chamber, its the other end is connected with rotation motor by variator, and is positioned at outside the coating chamber, and the rotating speed of flow-stopping plate can be regulated.

5. optical coating device as claimed in claim 1 is characterized in that, this flow-stopping plate is a cross shape, and its symmetry centre place is provided with a through hole.

6. optical coating device as claimed in claim 1 is characterized in that, this flow-stopping plate is a Y shape, and the center is provided with a through hole.

7. optical coating device as claimed in claim 4 is characterized in that, this carrier back shaft and the coaxial setting of this flow-stopping plate back shaft.

8. optical coating device as claimed in claim 7 is characterized in that, wherein the carrier back shaft is hollow thick axle, and the flow-stopping plate back shaft is the solid slim axle, and this flow-stopping plate back shaft passes this carrier back shaft.

9. optical coating device as claimed in claim 1 is characterized in that wherein the shape of this coating chamber can be rectangular parallelepiped, square, spheroid or right cylinder.

10. optical coating device, it comprises coating chamber, carrier and vapor deposition source, it is characterized in that, this optical coating device further comprises flow-stopping plate and two rotation motors, wherein, the rotation of carrier and flow-stopping plate is by independently rotation motor control separately, and flow-stopping plate can be rotatably set between carrier and the vapor deposition source, and the rotating speed of flow-stopping plate can be regulated.