CN2686061Y - Electric capacity pair structure capable of raising matching - Google Patents
Electric capacity pair structure capable of raising matching Download PDFInfo
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- CN2686061Y CN2686061Y CN 200420001537 CN200420001537U CN2686061Y CN 2686061 Y CN2686061 Y CN 2686061Y CN 200420001537 CN200420001537 CN 200420001537 CN 200420001537 U CN200420001537 U CN 200420001537U CN 2686061 Y CN2686061 Y CN 2686061Y
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Abstract
The utility model provides an electric capacity pair structure capable of raising matching, which forms an electric capacity pair structure with a proper proportion through finger electrode structures interlaced with each other in parallel and a common electrode positioned between the two finger electrode structures, and the utility model can penetrate through a via to connect with the same electric capacity pair structure on different metal layers so as to increase the integral electric capacity value of the electric capacity pair structure.
Description
Technical field
The utility model relates to the right structure of a kind of electric capacity, particularly relates to a kind of electric capacity with increase matching degree to structure, and it produces the electric capacity of a designated ratio to structure by finger electrode structure and mutual parallel interspersed layout (layout) mode.
Background technology
Please refer to Figure 1A, it is the capacitance structure of multilayer storehouse.First conductor layer 110 and the 3rd conductor layer 130 are parallel to each other and see through that a lead interconnects and the end that forms multi-layer capacitor structure 100, and second conductor layer 120 and the 4th conductor layer 140 also are parallel to each other and form the other end of multi-layer capacitor structure 100 through another lead interconnects.Wherein second conductor layer, 120 equidistant parallels are interspersed between first conductor layer 110 and the 3rd conductor layer 130; The then relative equidistant parallel of the 3rd conductor layer 130 is interspersed between second conductor layer 120 and the 4th conductor layer 140, form so-called sandwich (sandwich) structure by this, and by adding up stray capacitance between each conductor layer to improve the capacitance in the unit volume.Yet, also have the generation of stray capacitance between corresponding parallel other conductor layer with it and and then influence the action of circuit when high frequency the lower surface of first conductor layer 110 and the upper surface of the 4th conductor layer 140.And the generation of these stray capacitances is directly proportional with the area of conductor layer, that is to say, when the conductor layer area of multi-layer capacitor structure 100 increased, not only its capacitance can increase, and the stray capacitance value outside its electrode both sides also can increase thereupon.
Then please refer to Figure 1B, it is for using side (fringe) capacitance structure.A plurality of conductor bars parallel to each other (conducting strip) 112 and 114 are mutual to be interted forming first conductor layer 110, and connects by suitable end points and to make the generation side capacitor C that can intercouple between conductor bar 112 and the adjacent conductor bar 114
fAnd also mutual interting of a plurality of conductor bars parallel to each other 124 and 122 and form second conductor layer 120, and lay respectively at corresponding conductor bar 112 and 114 directly over and parallel with it, connect by suitable end points and to make the generation side capacitor C that can intercouple between conductor bar 124 and the adjacent conductor bar 122
f, and make simultaneously conductor bar 124 and 122 and pairing conductor bar 112 and 114 between also can intercouple and produce stray capacitance C
sAnd a plurality of conductor bars parallel to each other 132 and 134 mutual interting and form the 3rd conductor layer 130, and lay respectively at corresponding conductor bar 124 and 122 directly over and parallel with it, connect by suitable end points and to make the generation side capacitor C that can intercouple between conductor bar 132 and the adjacent conductor bar 134
f, and make simultaneously conductor bar 132 and 134 and pairing conductor bar 124 and 122 between also can intercouple and produce stray capacitance C
sIn like manner, a plurality of conductor bars parallel to each other 144 and 142 intert alternately and form the 4th conductor layer 140 and can intercouple generation side capacitor C
f, and also can produce stray capacitance C simultaneously
sBetween pairing conductor bar 132 and 134.The rest may be inferred for all the other conductor layers, at last with all side capacitor C
fAnd stray capacitance C
sAdd up the maximum capacitor value that together obtains in the unit volume.
Above-mentioned capacitance structure of the prior art all is to be an individual with single electric capacity, ability links together the electric capacity of two individuals when electric capacity must be used with the right circuit form of electric capacity, and this kind method not only causes the waste in space on the circuit layout and influence that the matching relationship between two independent capacitances also is subjected to external factor easily and instability, for example: an electric capacity is in the layout of the wafer outside and another electric capacity is in the layout of crystal circle center, then these two scripts electric capacity that the fixed proportion value should be arranged be to just might causing the change of this two capacitance ratio because of the difference slightly between the wafer outside and center thickness, or because of there being the high-current circuit layout to make this electric capacity be subjected to it to influence the capacitance that changes induction etc. around a certain electric capacity.In addition, the stray capacitance that is produced between the noncapacitive electrode also can interference capacitors to the running when the high-frequency circuit.
Summary of the invention
In view of above-mentioned technical background, the running of stray capacitance interfered circuit, non-habitual circuit layout and the electric capacity ratio value that the right structure of electric capacity has between the noncapacitive electrode to be produced in the prior art is subject to the external factor influence and problems such as change.The purpose of this utility model is to provide a kind of electric capacity with increase matching degree to structure, improves the shortcoming that exists in the prior art by this.
One of the purpose of this utility model provides a kind of electric capacity that utilizes side electric capacity to structure, still can keep under the situation of conductor layer area reduction and the identical capacitance of script structure.
Another purpose of the present utility model provides the two mutual finger electrode structure of interting and to be positioned at common electrode between this two electrode structure, increases the right matching degree of electric capacity by this and improves the right circuit layout density of electric capacity.
A purpose more of the present utility model provides one to be positioned at the two mutual common electrodes that intert between finger electrode structure, and the reduction by its area reduces the interelectrode stray capacitance of noncapacitive and produces.
According to above-described purpose, the utility model provides a kind of and has had the electric capacity of high matching degree to structure, comprise: one first finger electrode structure, comprise one first electrode and a plurality of first extension electrode, these first extension electrodes are parallel to each other and be connected in above-mentioned first electrode; One second finger electrode structure, comprise one second electrode and a plurality of second extension electrode, these second extension electrodes are parallel to each other and be connected in the second above-mentioned electrode, and second wherein above-mentioned electrode and the first above-mentioned electrode are positioned at same plane and parallel to each other; And a third electrode structure, comprising a plurality of third electrodes that interlink, these third electrodes are interspersed between above-mentioned first finger electrode structure and above-mentioned second finger electrode structure.
Description of drawings
Figure 1A is the capacitance structure schematic diagram that uses the multilayer storehouse in the prior art;
Figure 1B is the capacitance structure schematic diagram that uses side electric capacity in the prior art;
Fig. 2 A is that the electric capacity of an embodiment of the present utility model is to structural representation;
Fig. 2 B one meets the circuit diagram of practical application of the present utility model;
Fig. 3 A is that the electric capacity of another embodiment of the present utility model is to the structure vertical view;
Fig. 3 B is the right structure vertical view of different proportion electric capacity among Fig. 3 A;
Fig. 4 A is that the electric capacity of another embodiment again of the present utility model is to the structure vertical view; And
Fig. 4 B is the right structure vertical view of different proportion electric capacity among Fig. 4 A.
Symbol description among the figure:
110,120,130,140 first, second, third, fourth conductor layers
112,114,122,124,132,134,142,144 conductor bars
210,310,410 first electrodes
212,312,412 first extension electrodes
214,314,414 first interlayer holes
220,320,420 second electrodes
222,322,422 second extension electrodes
224,324,424 second interlayer holes
230,332,432 third electrodes
234,334,434 the 3rd interlayer holes
250 operational amplifiers
330,430 the 4th electrodes
340,440 virtual protections (guard dummy) structure
350 virtual extension electrodes
A, B, C contact A, B, C
C1, C2 electric capacity
C
fSide electric capacity
C
sStray capacitance
Embodiment
Shown in Fig. 2 A, for the electric capacity of the utility model one preferred embodiment to structural representation.First finger electrode structure comprises first electrode 210 and a plurality of first extension electrode 212, and wherein a plurality of first extension electrodes 212 are equidistant parallel and be vertically connected at first electrode 210 each other.Second finger electrode structure then comprises second electrode 220 and a plurality of second extension electrode 222, and wherein a plurality of second extension electrodes 222 are equidistant parallel and be vertically connected at second electrode 220 each other.Two above-mentioned finger electrode structure form a so-called finger by the mutual layout type that interts and insert shape (finger-interlaced) electrode structure, its make a plurality of first extension electrodes 212 respectively equidistant parallel be interspersed between a plurality of second extension electrodes 222, and make the electrode 210 of winning parallel with second electrode 220.Third electrode structure 230 then equidistantly detours and is in the layout of the finger that first finger electrode structure and second finger electrode structure formed and inserts between the shape electrode structure, form two capacitance structures by this between first finger electrode structure and the third electrode structure 230 and between second finger electrode structure and the third electrode structure 230 with identical capacitance values, and the side electric capacity that the size of its capacitance depends between electrode structure to be produced and deciding.Wherein, can be considered as be single continuous strip conductor to third electrode structure 230; Also can be considered as is that the strip conductor of multistage is connected to each other and forms.
In the present embodiment, two finger electrode structure sizes are identical, and because two finger electrode structure are identical with the area of third electrode structure 230 couplings, therefore the ratio of two capacitances is 1: 1; And when external such environmental effects (for example: the chip thickness that is caused in the manufacture of semiconductor variation is uneven or the layout of high-current circuit arranged on every side), because present embodiment is adopted the mutual layout type that interts, therefore the amplitude of variation of two capacitances also can be identical, and and then to make capacitance ratio keep fixing, to improve the right matching degree of electric capacity.Also adopt the mutual layout type that interts and utilize the side capacity effect that is produced between its electrode structure owing to present embodiment, not only can be so that circuit layout area still can be kept original capacitance after dwindling, and reduce the stray capacitance that is produced between the noncapacitive electrode simultaneously.In addition, first finger electrode structure, second finger electrode structure and third electrode structure 230 more can see through a plurality of first interlayer holes (via) 214, a plurality of second interlayer hole 224 and a plurality of the 3rd interlayer hole 234 respectively and be connected with the identical electrodes structure of different conductor layer, and the stray capacitance that is produced between the identical electrodes structure by the different conductor layer increases the capacitance of electric capacity to structure.
Then please refer to Fig. 2 B, it is one to meet switch type electric capacity (switched-capacitor) circuit diagram of the utility model practical application.Contact B be capacitor C 1, capacitor C 2 and an electronic installation 250 (for example: the common joint of input operational amplifier), it can be the third electrode structure 230 among Fig. 2 A, and contact A and contact C then can be respectively first finger electrode structure 210 and second finger electrode structure 220 among Fig. 2 A.With the viewpoint of circuit, contact B stray capacitance over the ground is the smaller the better, and so the signal when high frequency operates just can directly not be shorted to ground via contact B.And electric capacity of the present utility model is that common electrode with the conventional planar formula dwindles and becomes the common electrode (as the third electrode structure 230 among Fig. 2 A) that detours between two finger electrode structure to structure, thus its stray capacitance over the ground also can be relative dwindle into originally below 1/3.In addition, capacitor C 1 and capacitor C 2 more can maintain the high matching degree of a fixed ratio in embodiment of the present utility model.
As shown in Figure 3A, for the electric capacity of another preferred embodiment of the present utility model to structural representation.First finger electrode structure comprises first electrode 310 and a plurality of first extension electrode 312, and wherein a plurality of first extension electrodes 312 are equidistant parallel and be vertically connected at first electrode 310 each other.Second finger electrode structure then comprises second electrode 320 and a plurality of second extension electrode 322, and wherein a plurality of second extension electrodes 322 are equidistant parallel and be vertically connected at second electrode 320 each other.Two above-mentioned finger electrode structure also form a so-called finger by the mutual layout type that interts and insert the shape electrode structure, its make a plurality of first extension electrodes 312 respectively parallel equidistant be interspersed between a plurality of second extension electrodes 322, and make the electrode 310 of winning parallel with second electrode 320.The third electrode structure has then comprised the 4th electrode 330 and a plurality of third electrode 332, wherein a plurality of third electrode 332 is parallel to each other, and equidistantly be interspersed in respectively between a plurality of first extension electrodes 312 and a plurality of second extension electrode 322, and see through a plurality of the 3rd interlayer holes 334 and be connected with the 4th electrode 330, and the 4th electrode 330 is the conductor structure of a different conductor layer.340 on virtual protection (guard dummy) structure is that above-mentioned first finger electrode structure, second finger electrode structure and a plurality of third electrode 332 are surrounded; influence with isolated external environment factor; for example: electric capacity can reduce by the barrier of this virtual protection structure 340 electric capacity to the high voltage and current circuit institute inductive coupling around it, makes this electric capacity can improve the capacitance accuracy of structure.
In the present embodiment, because two finger electrode structure are big or small identical and still identical with the area of a plurality of third electrodes 332 couplings, therefore the ratio of two capacitances still is maintained 1: 1.In like manner, first finger electrode structure, second finger electrode structure and a plurality of third electrode 332 also can see through a plurality of first interlayer holes 314, a plurality of second interlayer hole 324 and a plurality of the 3rd interlayer hole 334 respectively and be connected with the identical electrodes structure of different conductor layer, and the stray capacitance that is produced between the identical electrodes structure by the different conductor layer increases the capacitance of electric capacity to structure.
Then please refer to Fig. 3 B, it is modified as the electric capacity of a different proportion to structure for utilizing the electric capacity among Fig. 3 A to structure.Electric capacity among Fig. 3 B to the electric capacity among structure and Fig. 3 A between the structure maximum different be in not wait in a plurality of second extension electrodes 322 be longer than a plurality of first extension electrodes 312, therefore the side capacity effect between a plurality of second extension electrodes 322 and a plurality of third electrode 332 also will be not equal to the side capacity effect between a plurality of first extension electrodes 312 and a plurality of third electrode 332, and the ratio size that two electric capacity are produced then depends on the length ratio of a plurality of first extension electrodes 312 and a plurality of second extension electrodes 322.That is to say, can obtain the electric capacity of any capacitance ratio to structure by the length ratio that changes a plurality of first extension electrodes 312 and a plurality of second extension electrodes 322, for example: when the length ratio of a plurality of first extension electrodes 312 and a plurality of second extension electrodes 322 is 1: 0.75 or when being 0.7: 1, then the right ratio of this electric capacity also just was respectively 1: 0.75 or 0.7: 1.A plurality of virtual (dummy) extension electrode 350 then is in the layout of because of the deficient a plurality of extension electrode parts of ratio adjustment, but not a plurality of therewith extension electrodes are connected, wherein a plurality of extension electrodes can be that a plurality of first extension electrodes 312 also can be a plurality of second extension electrodes 322, the situation difference at extension electrode two ends is caused in the space of avoiding layout not to use by this, for example: cause the crooked of extension electrode and cause the inaccurate phenomenon of capacitance etc. when processing procedure.
Shown in Fig. 4 A, for the electric capacity of another preferred embodiment again of the present utility model to structural representation.First finger electrode structure comprises first electrode 410 and a plurality of first extension electrode 412, and wherein a plurality of first extension electrodes 412 are equidistant parallel and be vertically connected at first electrode 410 each other.Second finger electrode structure then comprises second electrode 420 and a plurality of second extension electrode 422, and wherein a plurality of second extension electrodes 422 are equidistant parallel and be vertically connected at second electrode 420 each other.And the end points that a plurality of first extension electrodes 412 are not connected with first electrode 410 (i.e. the other end of first extension electrode 412), the end points (i.e. the other end of second extension electrode 422) that is not connected with respect to a plurality of second extension electrodes 422 of level then with second electrode 420, make win finger electrode structure and second finger electrode structure form a finger layout respect to one another, and make the electrode 410 of winning parallel with second electrode 420.The third electrode structure has then comprised the 4th electrode 430 and a plurality of third electrode 432, wherein a plurality of third electrodes 432 are equidistant parallel and its two ends are interspersed between a plurality of first extension electrodes 412 respectively and between a plurality of second extension electrode 422 each other, and see through a plurality of the 3rd interlayer holes 434 and be connected with the 4th electrode 430, and the 4th electrode 430 comprises the conductor structure of a different conductor layer.440 on virtual protection structure is the influence that equally the first above-mentioned finger electrode structure, second finger electrode structure and a plurality of third electrode 432 is surrounded with isolated external environment factor.
In the present embodiment, because the 4th electrode 430 of different conductor layer is with a plurality of first extension electrodes 412 and there is no overlapping areas in vertical direction with a plurality of second extension electrodes 422 and produce, therefore the 4th electrode 430 and each extension electrode also have influence on the accuracy of capacitance with regard to the generation that do not have stray capacitance between vertical direction.And, because two finger electrode structure sizes are identical, and still identical with the area of a plurality of third electrode 432 couplings, therefore the ratio of two capacitances still maintains 1: 1.In like manner, first finger electrode structure, second finger electrode structure and a plurality of third electrode 432 also can see through a plurality of first interlayer holes 414, a plurality of second interlayer hole 424 and a plurality of the 3rd interlayer hole 434 respectively and be connected with the identical electrodes structure of different conductor layer, and the stray capacitance that is produced between the identical electrodes structure by the different conductor layer increases the capacitance of electric capacity to structure.
Then please refer to Fig. 4 B, it is modified as the electric capacity of a different proportion to structure for utilizing the electric capacity among Fig. 4 A to structure.Electric capacity among Fig. 4 B to the electric capacity among structure and Fig. 4 A between the structure maximum different be in not to wait in a plurality of second extension electrodes 422 be longer than a plurality of first extension electrodes 412, so the side electric capacity that is produced between a plurality of second extension electrodes 422 and a plurality of third electrode 432 also will be not equal to the side electric capacity that is produced between a plurality of first extension electrodes 412 and a plurality of third electrode 432.In like manner, the ratio size that produced of two electric capacity also is the length ratio that depends on a plurality of first extension electrodes 412 and a plurality of second extension electrodes 422.In other words, can obtain the electric capacity of any capacitance ratio to structure by the length ratio that changes a plurality of first extension electrodes 412 and a plurality of second extension electrodes 422.
Yet the length that changes extension electrode except the above utilization that discloses changes the right ratio of electric capacity, more can reach the purpose of adjusting the electric capacity reduced value through the identical electrodes structure of the suitable connection different conductor layer of interlayer hole.For example: first electrode structure among Fig. 3 A is identical with the second electrode structure size, and with a plurality of third electrodes 332 between the side capacity effect that produced also identical, so the right ratio of electric capacity is 1: 1.But working as first electrode structure and a plurality of third electrode 332 is connected with the identical electrodes structure of another conductor layer by a plurality of first interlayer holes 314 and a plurality of the 3rd interlayer hole 334 respectively, and second electrode structure is when still keeping the side capacitance of plain conductor layer, and then Ci Shi electric capacity reduced value will be adjusted to 2: 1 or 2: 1 above ratio.That is to say that when identical electrode structure is not when being positioned at the same position of adjacent conductive layers, the capacitance that increased this moment only is the side capacity effect of another identical electrodes structure, so the right ratio of electric capacity is 2: 1; But when identical electrode structure is positioned at the same position of adjacent conductive layers, the capacitance that increased this moment not only comprises the side capacity effect of another identical electrodes structure, the stray-capacity effect that has also comprised identical electrodes structure between the different conductor layer, so the right ratio of electric capacity is more than 2: 1.By this, see through the suitable calculating and the connection of interlayer hole, the electric capacity among Fig. 3 A also can produce different proportion to structure to the electric capacity among structure and Fig. 4 A electric capacity is to realistic application.In like manner, above-mentioned connected mode also can be applied to electric capacity among Fig. 3 B to the electric capacity among structure and Fig. 4 B to structure with the electric capacity that obtains higher ratio to structure.
Above-described is the preferred embodiment of the utility model only, is not in order to limit claim of the present utility model; All other changes or modification for breaking away from the equivalence of being finished under the spirit that the utility model disclosed, and all should be included in the described claim.
Claims (9)
1. an electric capacity that increases matching degree is characterized in that structure, comprises:
One first finger electrode structure comprises one first electrode and a plurality of first extension electrode, and these a plurality of first extension electrodes are parallel to each other and be connected in this first electrode;
One second finger electrode structure comprises one second electrode and a plurality of second extension electrode, and these a plurality of second extension electrodes are parallel to each other and be connected in this second electrode, and wherein this second electrode and this first electrode are positioned at same plane and parallel to each other: and
One third electrode structure comprises a plurality of third electrodes that interlink, and is interspersed between this first finger electrode structure and this second finger electrode structure.
2. the electric capacity of increase matching degree as claimed in claim 1 is to structure, and wherein above-mentioned these a plurality of first extension electrodes intert alternately with these a plurality of second extension electrodes.
3. the electric capacity of increase matching degree as claimed in claim 1 is to structure, and the other end of wherein above-mentioned these a plurality of first extension electrodes is relative with the other end level of these a plurality of second extension electrodes.
4. the electric capacity of increase matching degree as claimed in claim 1 is to structure, and wherein above-mentioned these a plurality of third electrodes equidistantly are interspersed between these a plurality of first extension electrodes respectively and between these a plurality of second extension electrodes.
5. the electric capacity of increase matching degree as claimed in claim 1 is to structure, and wherein above-mentioned these a plurality of first extension electrodes are vertically connected at this first electrode, and a plurality of second extension electrodes are vertically connected at this second electrode.
6. the electric capacity of increase matching degree as claimed in claim 1 more comprises a virtual safeguard structure this first finger electrode structure, this second finger electrode structure and this third electrode structure is surrounded structure.
7. the electric capacity of increase matching degree as claimed in claim 1 is to structure, wherein above-mentioned this first finger electrode structure can see through a plurality of first interlayer holes and be connected with another first finger electrode structure of another conductor layer, second finger electrode structure can see through a plurality of second interlayer holes and be connected with another second finger electrode structure of another conductor layer, and the third electrode structure can see through these a plurality of the 3rd interlayer holes and be connected with another third electrode structure of another conductor layer.
8. the electric capacity of increase matching degree as claimed in claim 1 more comprises one the 4th electrode to structure, sees through a plurality of the 3rd interlayer holes and connects these a plurality of third electrodes.
9. the electric capacity of increase matching degree as claimed in claim 1 is to structure, when these a plurality of first extension electrodes are shorter in length than this a plurality of second extension electrode length, the part that is short of at these a plurality of first extension electrodes adds a plurality of virtual extension electrodes, and wherein these a plurality of virtual extension electrodes are not connected with these a plurality of first extension electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420001537 CN2686061Y (en) | 2004-01-12 | 2004-01-12 | Electric capacity pair structure capable of raising matching |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420001537 CN2686061Y (en) | 2004-01-12 | 2004-01-12 | Electric capacity pair structure capable of raising matching |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2686061Y true CN2686061Y (en) | 2005-03-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420001537 Expired - Lifetime CN2686061Y (en) | 2004-01-12 | 2004-01-12 | Electric capacity pair structure capable of raising matching |
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| Country | Link |
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| CN (1) | CN2686061Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102593128A (en) * | 2011-12-07 | 2012-07-18 | 威盛电子股份有限公司 | Capacitor structure |
| CN104282594A (en) * | 2014-10-20 | 2015-01-14 | 武汉新芯集成电路制造有限公司 | Test structure for monitoring performance of dielectric layers |
-
2004
- 2004-01-12 CN CN 200420001537 patent/CN2686061Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102593128A (en) * | 2011-12-07 | 2012-07-18 | 威盛电子股份有限公司 | Capacitor structure |
| CN102593128B (en) * | 2011-12-07 | 2016-01-13 | 威盛电子股份有限公司 | Capacitor structure |
| CN104282594A (en) * | 2014-10-20 | 2015-01-14 | 武汉新芯集成电路制造有限公司 | Test structure for monitoring performance of dielectric layers |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20140112 Granted publication date: 20050316 |
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| CX01 | Expiry of patent term |