CN2675043Y - A multiple electrode array - Google Patents
A multiple electrode array Download PDFInfo
- Publication number
- CN2675043Y CN2675043Y CNU032526725U CN03252672U CN2675043Y CN 2675043 Y CN2675043 Y CN 2675043Y CN U032526725 U CNU032526725 U CN U032526725U CN 03252672 U CN03252672 U CN 03252672U CN 2675043 Y CN2675043 Y CN 2675043Y
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- CN
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- Prior art keywords
- electrode
- array
- multiple electrode
- microwell array
- single electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000011347 resin Substances 0.000 claims abstract description 19
- 229920005989 resin Polymers 0.000 claims abstract description 19
- 239000011148 porous material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 229910000831 Steel Inorganic materials 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- 238000003491 array Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000000284 extract Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 229910000806 Latten Inorganic materials 0.000 description 1
- 229920000297 Rayon Polymers 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 210000005013 brain tissue Anatomy 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 210000005036 nerve Anatomy 0.000 description 1
- 210000002569 neuron Anatomy 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 208000037816 tissue injury Diseases 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
The utility model relates to the technique of a multiple electrode array, in particular to a multiple electrode array structure. The multiple electrode array of the utility model comprises a micropore array, a single electrode and a fix resin. The single electrode is a right angle type which is arranged at the vertical hole in the micropore array; the stern of the single electrode is longer compared with the head and extends horizontally; the head of the single electrode is in shape of a tip and extends out of the vertical hole of the micropore array; the fix resin is arranged above the horizontal tail of portion of the single electrode and the upper surface of the micropore array. The utility model makes the metallic filament as the electrode, the electrode can be manufacture vary finely, and the electrode gap can be small. The position, angle, and length of the electrode can be delimited by using a micropore array with depth. The wire electrode can be used for the leading-wire directly, which omits the process of the higher level of difficulty, and the reliability and the mechanical strength is very high.
Description
Technical field
This utility model relates to the multiple electrode array technology, particularly a kind of multiple electrode array structure.
Background technology
Multiple electrode array is to form array at the integrated a plurality of microelectrodes of substrate, implants the multiple electrode array of cortex, can read the active detailed information of neuron colony in the brain.Aspect the neuroscience basic research, multiple electrode array begins to become a kind of important nerve information detection means, and aspect medical application, multiple electrode array becomes the interface of neuroscience towards medical application.
1981, people such as U.S. scientist Kruger became multiple electrode array with the fixing a plurality of microelectrodes of ceramic material on the grid of 250 microns of spacings, and this method efficient is low, and the electrode length and the depth of parallelism are wayward.Multiple improvement multiple electrode array manufacture method has appearred later on, electrod-array as You Ta university is directly to carve a plurality of electrode tip with saw blade on silicon chip, make finished product through technologies such as insulation, bonding wires again, this class methods problem is that the size of electrode tip can not do too carefully, and too thick electrode pair brain tissue injury is bigger, also is difficult to make the high multiple electrode array of density simultaneously.Adopt planar integrated circuit manufacturing process such as photoengraving, ion sputtering to make flaky multi-electrode in addition in addition, be built up multiple electrode array again, as the electrod-array of Univ Michigan-Ann Arbor USA, but this class electrod-array still need improve yet not commercialization at present aspect combination property.
Summary of the invention
The purpose of this utility model be to provide a kind of electrode diameter very thin, be easy to realize highdensity multiple electrode array.
For achieving the above object, solution of the present utility model provides a kind of multiple electrode array, is made up of microwell array, single electrode and fixing resin, and its single electrode is a square, places the upright opening of microwell array; Unipolar afterbody is than head length, horizontal-extending, and unipolar head is pointed, stretches out the upright opening of microwell array; Above the upper surface of unipolar part of horizontal afterbody and microwell array, fixing resin is arranged.
Described multiple electrode array, the more single electrode external diameter of its described micro-pore diameter is big 4～8 microns.
Described multiple electrode array, thick 0.8～1.5 millimeter of its described microwell array.
Described multiple electrode array, its described fixing resin is organic siliconresin.
This utility model is that the single electrode that superfine wire electrode is made is inserted in the microwell array, forms multiple electrode array.Microwell array can be made on resin substrate with photoetching process, and its aperture is slightly larger than the wire electrode external diameter, and electrode can be fixed on ad-hoc location after inserting, and microwell array has certain thickness, can guarantee the depth of parallelism of each electrode.The electrode tail end is elongated, and directly conduct goes between, needn't be at electrod-array back side welding lead.
This utility model uses tinsel to do electrode, and electrode can be made very carefully, and electrode spacing also can be very little.Use has the microwell array of certain depth to limit position, angle, the length of electrode, is easy to realize.Directly use the tail end of wire electrode to make lead-in wire, saved the higher bonding wire craft of difficulty, reliability and mechanical strength are also very high.
Description of drawings
Fig. 1 is multiple electrode array of the present utility model and manufacture method sketch map thereof, wherein:
Fig. 1 (a) is the microwell array thin slice;
Fig. 1 (b) is for inserting tinsel;
Fig. 1 (c) annotates resin;
Fig. 1 (d) holder is molded as microwell array;
Fig. 1 (e) intercalative electrode;
Fig. 1 (f) drips resin in the back side to be fixed.
The specific embodiment
Multiple electrode array of the present utility model, its structure are made up of microwell array 4, single electrode 5 and fixing resin 6 shown in Fig. 1 (f).The single electrode made from tinsel 5 is a square, places the upright opening of microwell array 4; The afterbody of single electrode 5 is than head length, the horizontal-extending certain distance, and the head of single electrode 5 is pointed, stretches out the upright opening of microwell array 4; Fixing resin 6 is locked togather the part of horizontal afterbody of single electrode 5 and the upper surface of microwell array 4.
The manufacture method of multiple electrode array of the present utility model is as follows:
A) on resin substrate, make microwell array 4 with photoetching process;
B) make the single electrode 5 of square with tinsel, its head is tip shape, and afterbody is longer;
C) the single electrode 5 that wire electrode is made is inserted in the upright opening of microwell array 4, and the head of electrode 5 stretches out upright opening, the afterbody horizontal positioned;
D) with fixing resin 6 the part of horizontal afterbody of single electrode 5 and the upper surface of microwell array 4 are locked togather;
E) get finished product.
The also available following method of a) step of said method is carried out:
1) on sheet metal, make a call to the micropore of 10 * 10 arrays with laser, two microwell array thin plates 1;
2) two microwell array thin plates 1 being separated 1 millimeter fixes;
3) steel wire 2 is cut into 30 millimeters after, insert in the micropore of two microwell array thin plates 1, front end exposes 1 millimeter, suitable length is exposed in the rear end;
4), inject between two microwell array thin plates 1 with resin 3;
5) after 20 minutes, extract steel wire 2 out, peel off two microwell array thin plates 1, recontour get final product microwell array 4.
Embodiment:
See Fig. 1 (a)～(f), get two of the latten(-tin)s of 0.05 millimeter of thickness, laser is made a call to the micropore of 10 * 10 arrays, 30 microns in aperture, 200 microns of pitchs of holes, with two microwell array thin plates 1 horizontally separated 1 millimeter fixing.Cut-off directly is the steel wire 2 about 27 microns, is cut into 2 one hundred on the steel wire of 30 millimeters long after stretching, with micrurgy steel wire 2 is inserted in the micropore of two microwell array thin plates 1, and 1 millimeter is exposed at the tip, and suitable length is exposed in the rear end.With new deployed artificial tooth dens supporter resin 3, inject 1 of two microwell array thin plate immediately, resin 3 solidifies after 20 minutes, extracts steel wire 2 out, peels off two microwell array thin plates 1, and the profile of finishing dens supporter blob of viscose can obtain 1 millimeter in about 25 microns in aperture, hole depth, 10 * 10 microwell array 4.
Be equipped with diameter and be 20 microns 5 one hundred of single electrodes, 5 most advanced and sophisticated 2.5 millimeters places curve the right angle with electrode, with micrurgy single electrode 5 are inserted microwell arrays 4 each hole, after all electrode 5 inserts, drip fixing resin 6 at microwell array 4 back sides, fixed electrode 5, the tail end output signal of electrode 5.
Claims (4)
1, a kind of multiple electrode array is made up of microwell array, single electrode and fixing resin, it is characterized in that, single electrode is a square, places the upright opening of microwell array; Unipolar afterbody is than head length, horizontal-extending, and unipolar head is pointed, stretches out the upright opening of microwell array; Above the upper surface of unipolar part of horizontal afterbody and microwell array, fixing resin is arranged.
2, multiple electrode array as claimed in claim 1 is characterized in that, the more single electrode external diameter of described micro-pore diameter is big 4～8 microns.
3, multiple electrode array as claimed in claim 1 is characterized in that, thick 0.8～1.5 millimeter of described microwell array.
4, multiple electrode array as claimed in claim 1 is characterized in that, described fixing resin is organic siliconresin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU032526725U CN2675043Y (en) | 2003-09-26 | 2003-09-26 | A multiple electrode array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU032526725U CN2675043Y (en) | 2003-09-26 | 2003-09-26 | A multiple electrode array |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2675043Y true CN2675043Y (en) | 2005-02-02 |
Family
ID=34473330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU032526725U Expired - Fee Related CN2675043Y (en) | 2003-09-26 | 2003-09-26 | A multiple electrode array |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2675043Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106037723A (en) * | 2016-05-17 | 2016-10-26 | 西安交通大学 | Brain electrophysiological signal recording device and method for transcranial ultrasonic nerve stimulation |
-
2003
- 2003-09-26 CN CNU032526725U patent/CN2675043Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106037723A (en) * | 2016-05-17 | 2016-10-26 | 西安交通大学 | Brain electrophysiological signal recording device and method for transcranial ultrasonic nerve stimulation |
| CN106037723B (en) * | 2016-05-17 | 2020-11-10 | 西安交通大学 | Brain electrophysiological signal recording device and method for transcranial ultrasonic nerve stimulation |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |