CN2665146Y - Compliance type compressing apparatus - Google Patents
Compliance type compressing apparatus Download PDFInfo
- Publication number
- CN2665146Y CN2665146Y CNU032800975U CN03280097U CN2665146Y CN 2665146 Y CN2665146 Y CN 2665146Y CN U032800975 U CNU032800975 U CN U032800975U CN 03280097 U CN03280097 U CN 03280097U CN 2665146 Y CN2665146 Y CN 2665146Y
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- CN
- China
- Prior art keywords
- housing
- guide pillar
- base
- down gear
- plane
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- Expired - Lifetime
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- Electroplating Methods And Accessories (AREA)
Abstract
The utility model discloses a holding apparatus, comprising a guide pillar, a base, a shell, a fixed stand, a ring-like part and a press plate, wherein, the base consists of a column, at least a positioning pin and a salient point; a hole and a plurality of positioning holes are arranged in the centre of the ringlike part. The guide pillar is arranged on the column. The guide pillar and the column are arranged in the shell. An opening is arranged on the top of the shell and is penetrated by the guide pillar. The shell and the base of the utility model are combined together, and the shell passes through the hole in the center of the ringlike part; the shell is arranged in the hole of the center of the fixed stand; the shell and the base are respectively provided with level sides that are mutually embedded, avoiding the rotation of the shell. Then the guide pillar is combined with fixed stand to make the positioning pin and the positioning hole corresponding to each other. After that, the press plate is combined with the ringlike part, therefore, an external air supply device may be used to make the shell move up and down along the guide pillar, so that the force is exerted on the plated object when the salient point of the base oppresses the press plate.
Description
Technical field
The utility model relates to a kind of hold-down gear, and a kind of hold-down gear that evenly compresses strength that provides especially is provided.
Background technology
It is that plated body body such as chip are placed negative electrode that chip lug is electroplated, and by the dissociated metal ion of anode metal or by dissociated metal ion in the electroplate liquid, and metal ion is attached to the plated body surface, to grow metal coupling.Previous chip plating mode (with reference to U.S. Pat 6152167) relevant for automatization lift-off blast formula, chip is to be placed horizontally on the seal assembly, utilize the base of a hold-down gear directly to oppress the chip periphery again, and then the seal assembly of chip below is out of shape, produce sealing effectiveness, pollute chip back etc. and do not need galvanized zone so can block electroplate liquid.
Figure 1 shows that the synoptic diagram of known hold-down gear and negative electrode plated body.Please refer to Fig. 1, known hold-down gear is made of a guide pillar 102, a base 104 and a housing 106.Wherein, base 104 is positioned at the below of housing 106, and combines with it, and guide pillar 102 is to be positioned at housing 106 and base 104 formed spaces.
Yet, guide pillar 102 has one first end 112 and reaches and its mutual one second corresponding end 114, and first end 112 is to be an inboardend, the diameter of right second end 114 is greater than the diameter of first end 112, and second end 114 has a groove 116, in groove 116 and dispose an elastic component 118, for example 0 shape is encircled, so that housing 106 is when mobile, second end 114 can pass through elastic component 118, and closely is adjacent to the internal diameter of housing 106.
In addition, the top of housing 106 has a central opening 120, and the side of housing 106 also has one first pore 122 and one second pore 124.Wherein, central opening 120 also has a groove 126, and disposes an elastic component 128 in groove 126, for example O shape ring.As previously mentioned, first end 112 of guide pillar 102 is an inboardend, after it passes the central opening 120 of housing 106, fixes with extraneous the combination.And do when moving up and down when housing 106, the elastic component 128 that is disposed at central opening 120 is closely to be adjacent to guide pillar 102.
So the start principle of known hold-down gear is for when first pore 122 is inflated, housing 106 related bases 104 rise together, and when 124 inflations of second pore, housing 106 related bases 104 descend together.The strength of utilizing base 104 to move down compress applying plated body 110, and plated body 110 is the tops that are positioned at cathode electrode 130 and seal assembly 108, and plated body for example is a silicon wafer, and seal assembly 108 for example is the sealing lip or the O shape ring of rubber material.
Yet the base of known technology and seal assembly must keep the good parallel seal assembly that just can make to be out of shape uniformly, reach best sealing effectiveness, if mutual inclination takes place in both, then base is when compressing plated body, seal assembly must absorb this dip deviation, cause the uneven compression set of seal assembly, especially when tilt quantity is big, even can't make the regional area of seal assembly produce sealing effectiveness, cause poor sealing, and have plating bath to leak and pollute possibility of the back side and cathode electrode, when serious even the cathode electrode plating takes place.If the strength that compresses of utilizing this moment the increase base to press down seal assembly is avoided this kind poor sealing situation, will make the plated body chip break easily, especially, obvious especially to the application of thin type chip.
Also have, the pressing plate of known technology can rotate, and the chip that therefore is not suitable for having directivity carries out the galvanized application of chip.
Summary of the invention
Technical problem to be solved in the utility model provides a kind of compliant type hold-down gear, solves to be not suitable for being applied to the chip with directivity is carried out the galvanized problem of chip because of the uneven compression set of seal assembly causes the problem of poor sealing and the pressing plate of known technology.
For achieving the above object, the utility model provides a kind of compliant type hold-down gear, is used to compress a plated body, and its characteristics are, include:
One guide pillar has one first end and one second corresponding mutually end, and the diameter of this second end is greater than the diameter of this first end;
One base, be positioned at this second end below of this guide pillar, the central authorities of this base are an outstanding cylinder, and this base has one first plane and one second corresponding mutually plane, at least one steady brace of this first planar configuration, and this second planar center has a salient point;
One housing, its side has a plane, and this housing is positioned at this top, first plane of this base, and this guide pillar and this cylinder are the inside that is positioned at this housing, this of this base first plane is to combine with this housing;
One permanent seat, central authorities have a blind hole that does not penetrate, and the circumference of its blind hole internal diameter has a plane, and this housing and this guide pillar are to be disposed in this blind hole, and this first end of this guide pillar is to interlink with this permanent seat;
One ring part is disposed at this first planar top of this base, and its central authorities have a hole, and this housing passes through this hole, and this ring part has at least one pilot hole, and this pilot hole is this steady brace that corresponds on this first plane of this base; And
One pressing plate, it is disposed at the below of this ring part, and is connected with this ring part.
Above-mentioned compliant type hold-down gear, its characteristics are that the top of this housing also has a central opening and several pores, and the circumference of this housing internal diameter also has several apertures, those pores are corresponding connection with those apertures, and this first end of this guide pillar is this central opening that passes this housing.
Above-mentioned compliant type hold-down gear, its characteristics are that the material of this plated body comprises silicon wafer.
Above-mentioned compliant type hold-down gear, its characteristics are that this of this guide pillar second end also has a groove, configuration one elastic component in this groove.
Above-mentioned compliant type hold-down gear, its characteristics be, this salient point of this of this base second planar and this pressing plate segment distance of being separated by, and this distance breaks away from the required displacement of this pilot hole greater than this steady brace.
Above-mentioned compliant type hold-down gear, its characteristics are that this cylinder of this base also has a groove, configuration one elastic component in this groove.
Above-mentioned compliant type hold-down gear, its characteristics are that this plane of this housing side is to fit mutually with this plane of this permanent seat.
Above-mentioned compliant type hold-down gear, its characteristics are that those pores are one first pore and one second pore, and those apertures are one first aperture and one second aperture, this first pore and this first aperture interconnect, and this second pore and this second aperture interconnect.
Above-mentioned compliant type hold-down gear, its characteristics are that the circumference of this central opening of this housing also has a groove, and configuration one elastic component in this groove.
Above-mentioned compliant type hold-down gear, its characteristics are that this housing moves up and down at this guide pillar of gas effect lower edge of described aperture ejection, remains with the gas action space between described aperture and this guide pillar second end.
Technique effect of the present utility model is:
The utility model adopts the hold-down gear with conformability, it connects an air feeder, when pressing plate does not contact plated body as yet, the steady brace that base is had engages in correspondence with each other with the pilot hole of ring part, and by the plane of permanent seat and the mutual applying in plane of housing, make the unlikely generation of pressing plate be offset and rotation, can be applicable to have the chip plating of directivity.Provide gas by air feeder again, make pressing plate decline contact chip, because salient point to pressing plate still has a segment distance, can allow steady brace break away from pilot hole completely, this moment is by salient point compressing pressing plate, press chip so pressing plate can fully, conformably be fitted, and chip is pressed on the seal assembly equably.
Further describe specific embodiment of the utility model below in conjunction with accompanying drawing.
Description of drawings
Figure 1 shows that the synoptic diagram of known hold-down gear and negative electrode plated body;
Figure 2 shows that the compliant type hold-down gear combination synoptic diagram of the utility model preferred embodiment;
Figure 3 shows that the compliant type hold-down gear combination diagrammatic cross-section of the utility model preferred embodiment;
Before Figure 4 shows that compliant type hold-down gear of the present utility model does not contact plated body as yet, when the synoptic diagram of compliant type hold-down gear and plated body run-off the straight;
Figure 5 shows that its steady brace of compliant type hold-down gear of the present utility model breaks away from the synoptic diagram of pilot hole;
The pressing plate that Figure 6 shows that compliant type hold-down gear of the present utility model produces the synoptic diagram that the oneself complies with deflection applying plated body.
Wherein, description of reference numerals is as follows:
102,202: guide pillar
104,204: base
106,206: housing
108: sealing lip
110,260: plated body
112,218: the first ends
114,220: the second ends
116,126,222,264,268: groove
118,128,224,266,270: elastic component
120,236: central opening
122,238: the first pores
124,240: the second pores
130: cathode electrode
208: permanent seat
210: ring part
212: pressing plate
214: cylinder
216: hole
226: the first planes
228: the second planes
230: steady brace
232: salient point
234,280: the plane
242: air feeder
244: the first apertures
246: the second apertures
248: pilot hole
254: the first spaces
256: the second spaces
258: blind hole
262:O shape ring
Embodiment
Figure 2 shows that the compliant type hold-down gear combination synoptic diagram of the utility model preferred embodiment, Figure 3 shows that the compliant type hold-down gear combination diagrammatic cross-section of the utility model preferred embodiment.Please also refer to Fig. 2 and Fig. 3, the compliant type hold-down gear of present embodiment mainly is made up of a guide pillar 202, a base 204, a housing 206, a permanent seat 208, ring part 210 and a pressing plate 212.Wherein, guide pillar 202 is disposed in the housing 206, and base 204 central authorities have a cylinder 214, and cylinder 214 also is disposed in the housing 206 simultaneously, and housing 206 links together with base 204.Afterwards, housing 206 passes the hole 216 of ring part 210 central authorities, and then ring part 210 and pressing plate 212 are linked together, and guide pillar 202 links together with permanent seat 208.
Please continue with reference to figure 2 and Fig. 3, guide pillar 202 has one first end 218 and reaches and its mutual one second corresponding end 220, the diameter of second end 220 is greater than the diameter of first end 218, and second end 220 has a groove 222, and configuration one elastic component 224 in groove 222, for example O shape is encircled, and its material comprises rubber, elastic component 224 is fitted fully with the internal diameter of housing 206, to avoid disappointing.First end 218 then is an inboardend, and it is to pass the blind hole 258 that permanent seat 208 central authorities do not penetrate, and interlinks together with permanent seat 208, for example fixes with screw.
From the above, base 204 is positioned at second end, 220 belows of guide pillar 202, and the central authorities of base 204 are an outstanding cylinder 214, and the diameter of cylinder 214 is second end, 220 diameters that equal guide pillar 202, as aforementioned, cylinder 214 is to be positioned within the housing 206, and below guide pillar 202, and cylinder 214 also has a groove 264, and configuration one elastic component 266 in groove 264, for example O shape is encircled, and its material comprises rubber, elastic component 266 is fitted fully with the internal diameter of housing 206, to avoid disappointing.And base 204 has one first plane 226 and one second corresponding mutually plane 228, and at least one steady brace 230 of first plane, 226 configurations, and at center configuration one salient point 232 on second plane 228, with as the point of application.
Please continue with reference to figure 2 and Fig. 3, the side of housing 206 has a plane 234, and housing 206 is positioned at 226 tops, first plane of base 204, and links together with it.And the top of housing 206 has a central opening 236, one first pore 238 and one second pore 240, and first pore 238 and second pore 240 connect an air feeder 242 with pipeline.In the same manner, the circumference of the central opening 236 at housing 206 tops also has a groove 268, and also disposes an elastic component 270 in groove 268, and for example O shape is encircled, and its material comprises rubber, and elastic component 270 is fitted fully with the internal diameter of guide pillar 202, to avoid disappointing.Yet the circumference of housing 206 internal diameters is tool one first aperture 244 and one second aperture 246 also, and first pore 238 and first aperture 244 interconnect, and second pore 240 and second aperture 246 interconnect.In addition, guide pillar 202 and cylinder 214 are the inside that is positioned at housing 206, and first end 218 of guide pillar 202 is the central openings 236 that pass housing 206, and first plane 226 of base 204 is to combine with housing 206.
Yet, it is 226 tops, first plane that are disposed at base 204 for a ring part 210, and combines with first plane 226, and ring part 210 central authorities have a hole 216, make housing 206 be passed through hole 216, and enter in the blind hole 258 that the central authorities of permanent seat 208 do not penetrate.And ring part 210 has at least one pilot hole 248, and it is the steady brace 230 that corresponds to first plane 226 of base 204.And pressing plate 212 its be the below that is disposed at ring part 210, and interconnection with ring part 210.
After all component groups cast off, air feeder 242 is via first aperture, 244 air feed, because guide pillar 202 links together with mounting block 208, so will force housing 206 drive ring parts 210 and pressing plate 212 up to move, make first space 254 be full of air, this moment, ring part 210 can contact permanent seats 208, made ring part 210 can not take place up and down or rotatablely moved.If air feeder 242 via second aperture, 246 air feed, then will force housing 206 to drive ring part 210 and pressing plate 212 moves down, make second space 256 be full of air.When housing 206 moves down, because of housing 206 links base 204, and the salient point 232 and the pressing plate 212 on base 204 second planes 228 have a distance H, this distance H and pressing plate 212 form enough displacements, allow the steady brace 230 of base 204 break away from the pilot hole 248 of ring part 210, and then make salient point 232 clamping platens 212, pressing plate 212 compresses plated body 260 (as Fig. 4) and seal assembly 262 (as Fig. 4) again, plated body 260 is silicon wafer for example, and seal assembly 262 is O shape ring for example.
Before Figure 4 shows that compliant type hold-down gear of the present utility model does not contact plated body as yet, when the synoptic diagram of compliant type hold-down gear and plated body run-off the straight.Please also refer to Fig. 3 and Fig. 4, if first aperture, 244 air feed, then pressing plate 212 is above plated body 260, this kind situation, though pressing plate 212 has mutual tilt phenomenon with plated body 260, because steady brace 230 is positioned at pilot hole 248, and also fit mutually with the plane of permanent seat 208 internal diameter circumference 280 in the plane 234 of housing 206 sides, therefore pressing plate 212 can not be offset rotation, so this moment, the compliant type hold-down gear had the function of position and orientation.
Figure 5 shows that its steady brace of compliant type hold-down gear of the present utility model breaks away from the synoptic diagram of pilot hole.Please also refer to Fig. 3 and Fig. 5, this moment, 206 past declines of housing were because of ring part 210 is on first plane 226 of base 212, so related ring part 210 and pressing plate 212 are all toward moving down by second aperture, 246 air feed.The pressing plate 212 of present embodiment rigidly connects when touching plated body 260, because of the salient point 232 of base 204 still has a segment distance H with pressing plate 212, have only the part weight of pressing plate 212 to be pressed on the plated body 260 this moment, and this segment distance H provides steady brace 230 to break away from enough displacements of pilot hole 248, so housing 206 still can continue to move down, break away from pilot hole 248 fully up to steady brace 230, and till the salient point 232 contact pressing plates 212.
The pressing plate that Figure 6 shows that compliant type hold-down gear of the present utility model produces the synoptic diagram that the oneself complies with deflection applying plated body.Please refer to Fig. 6, from the above, behind pressing plate 212 contact plated bodies 260, this moment second, aperture 246 continued air feed, make housing 206 continue to descend, and be the point of application with salient point 232, applying pressure to pressing plate 212, hole 216 diameters of ring part 210 central authorities are greater than the external diameter of housing 206, so ring part 210 offsets downward, related pressing plate 212 also offsets downward, and makes pressing plate 212 compress applying plated body 260 fully at last, and compresses strength and be uniformly applied to plated body 260 by pressing plate 212.
In above-mentioned preferred embodiment, be that pilot hole with ring part cooperates with the steady brace of base, pressing plate promptly has the function of location, orientation, if pilot hole and steady brace break away from, pressing plate promptly has and can be offset and the function that compresses downwards arranged, and snap-in force is just to put on the pressing plate after pressing plate is complied with the applying plated body, and passes through the pressing plate indirect transfer on plated body, so have buffering effect and avoid plated body to be impacted and disruptive danger.Yet above-mentioned only for illustrating, be not in order to limiting ring part of the present utility model, steady brace and pilot hole, any personnel Ying Ke that is familiar with this technology knows ring part of the present utility model, steady brace and pilot hole by inference can also be other kenel.
Comprehensive the above, compliant type hold-down gear of the present utility model has following advantage at least:
1. compliant type hold-down gear of the present utility model has the function of location, orientation, as yet not before the contact chip,, make unlikely generation skew of pressing plate and rotation at pressing plate because steady brace is positioned at pilot hole, can be applicable to have the chip plating of directivity, use more extensive than known technology.
2. compliant type hold-down gear of the present utility model has the function of complying with the applying plated body automatically, when steady brace breaks away from pilot hole, make the ring part skew downwards, the related pressing plate that makes can the ground applying of complete free deflection compress chip, cause chip and oppress seal assembly equably, therefore seal assembly produces distortion uniformly, reaches best sealing effectiveness, avoids chip back and cathode electrode polluted by electroplate liquid.
3. compliant type hold-down gear of the present utility model has the function of complying with the applying chip automatically, and allowing when pressing with trim has bigger mutual tilt phenomenon, and obviously required than known technology tooling cost and assembly cost are low.
4. compliant type hold-down gear of the present utility model has the function of complying with the applying chip automatically, can be evenly dispersed in very much the strength that compresses on the chip, and snap-in force is just to put on the pressing plate behind pressing plate applying chip, and by the pressing plate indirect transfer on chip, have buffering effect and avoid the chip disruptive danger that is impacted.
5. compliant type hold-down gear of the present utility model has the function of complying with the applying chip automatically, when being applied in a plurality of plating tank, a plurality of hold-down gears can be installed simultaneously, reduces the device fabrication cost.
6. compliant type hold-down gear of the present utility model, its material is used plastics, not only applicable to having the corrosive environment, and cheap for manufacturing cost.
The above only is preferred embodiment of the present utility model, can not with restriction scope of the present utility model.Be that all equalizations of being done according to the utility model claim change and modification, will do not lose main idea of the present utility model place, also do not break away from spirit and scope of the present utility model, the former capital should be considered as further enforcement situation of the present utility model.Therefore protection domain of the present utility model should be as the criterion with the scope that claim was defined.
Claims (10)
1, a kind of compliant type hold-down gear is used to compress a plated body, it is characterized in that, includes:
One guide pillar has one first end and one second corresponding mutually end, and the diameter of this second end is greater than the diameter of this first end;
One base, be positioned at this second end below of this guide pillar, the central authorities of this base are an outstanding cylinder, and this base has one first plane and one second corresponding mutually plane, at least one steady brace of this first planar configuration, and this second planar center has a salient point;
One housing, its side has a plane, and this housing is positioned at this top, first plane of this base, and this guide pillar and this cylinder are the inside that is positioned at this housing, this of this base first plane is to combine with this housing;
One permanent seat, central authorities have a blind hole that does not penetrate, and the circumference of this blind hole internal diameter has a plane, and this housing and this guide pillar are to be disposed in this blind hole, and this first end of this guide pillar is to interlink with this permanent seat;
One ring part is disposed at this first planar top of this base, and its central authorities have a hole, and this housing passes through this hole, and this ring part has at least one pilot hole, and this pilot hole is this steady brace that corresponds on this first plane of this base; And
One pressing plate is disposed at the below of this ring part, and is connected with this ring part.
2, compliant type hold-down gear according to claim 1, it is characterized in that, the top of this housing also has a central opening and several pores, and the circumference of this housing internal diameter also has several apertures, those pores are corresponding connection with those apertures, and this first end of this guide pillar is this central opening that passes this housing.
3, compliant type hold-down gear according to claim 1 and 2 is characterized in that, the material of this plated body comprises silicon wafer.
4, compliant type hold-down gear according to claim 1 and 2 is characterized in that, this of this guide pillar second end also has a groove, configuration one elastic component in this groove.
5, compliant type hold-down gear according to claim 1 and 2 is characterized in that, this salient point of this of this base second planar and this pressing plate segment distance H of being separated by, and this distance H breaks away from the required displacement of this pilot hole greater than this steady brace.
6, compliant type hold-down gear according to claim 1 and 2 is characterized in that, this cylinder of this base also has a groove, configuration one elastic component in this groove.
7, compliant type hold-down gear according to claim 2 is characterized in that, this plane of this housing side is to fit mutually with this plane of this permanent seat.
8, compliant type hold-down gear according to claim 2, it is characterized in that described pore is one first pore and one second pore, described aperture is one first aperture and one second aperture, this first pore and this first aperture interconnect, and this second pore and this second aperture interconnect.
9, compliant type hold-down gear according to claim 2 is characterized in that, the circumference of this central opening of this housing also has a groove, and configuration one elastic component in this groove.
10, compliant type hold-down gear according to claim 2 is characterized in that, this housing moves up and down at this guide pillar of gas effect lower edge of described aperture ejection, remains with the gas action space between described aperture and this guide pillar second end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU032800975U CN2665146Y (en) | 2003-09-30 | 2003-09-30 | Compliance type compressing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU032800975U CN2665146Y (en) | 2003-09-30 | 2003-09-30 | Compliance type compressing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2665146Y true CN2665146Y (en) | 2004-12-22 |
Family
ID=34332500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU032800975U Expired - Lifetime CN2665146Y (en) | 2003-09-30 | 2003-09-30 | Compliance type compressing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2665146Y (en) |
-
2003
- 2003-09-30 CN CNU032800975U patent/CN2665146Y/en not_active Expired - Lifetime
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20130930 Granted publication date: 20041222 |