CN2636198Y - Membrane type micro-gyroscope and measurer having same - Google Patents
Membrane type micro-gyroscope and measurer having same Download PDFInfo
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- CN2636198Y CN2636198Y CNU032728689U CN03272868U CN2636198Y CN 2636198 Y CN2636198 Y CN 2636198Y CN U032728689 U CNU032728689 U CN U032728689U CN 03272868 U CN03272868 U CN 03272868U CN 2636198 Y CN2636198 Y CN 2636198Y
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- minisize gyroscopes
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Abstract
A film micro gyroscope is provided, which comprises a base plate with a first electrode zone on the upper surface, a thin film fixed on the base plate by a supporting unit and a top cover with a second electrode zone on the lower surface. A plurality of drive electrodes are provided in the first electrode zone and a plurality of sensing electrode are provided in the second electrode zone. The thin film can change additionally due to the influence of an external angular velocity, angular acceleration or inertia acting force after driven by the drive electrode and then the sensing electrode senses the external acting force and outputs the signals via the design of the sensing circuit and finishes the sensing action. The utility model can establish an effective optimization procedure analysis and have a plurality of modes of vibration, and have the feature that high sensing of angular velocity can gain higher sensitivity.
Description
Technical field
The utility model relates to a kind of minisize gyroscopes, refers to a kind of membrane type minisize gyroscopes especially, can set up effective optimization procedure analysis, have multiple mode of oscillation; Sensing with high angular velocity can obtain higher sensitivity.
Background technology
Gyroscope is a kind of device of angular velocity that can sensing self relative inertness coordinate system space.Gyroscope comes out and has had 100 years so far, early stage gyrostatic development concentrates on the navigation application of aircraft industry mostly, be the very expensive instrument of a kind of price, especially scope has more contained fields such as machinery, motor, control, electronic engineering aspect system combination.More because make that so the motion sensing in space such as acceleration, angular velocity, angular acceleration all are to belong to higher-priced application in the past.Development along with micro-electromechanical technology, accurate and gyroscope at a low price also becomes the emphasis of research and development, and be applied to civilian, as in recent years the accelerometer of the application of automobile sensor, air bag, prevent vehicle rollover (rollover) or the sensor (yaw rate sensor) that skids etc. all general gradually.The application of the picture systems stabilisation of the application of consumption electronic products such as digital video camera, 3D mouse, electronic game rocking bar etc. has potentiality especially in addition, in simple terms; Every physical quantity that relates to strength and motion detects all exercisable minisize gyroscopes, as seen develops the important of minisize gyroscopes.
Existing minisize gyroscopes is roughly oscillatory type gimbal or tuning fork, this type of architectural feature is the mass with a ring-type, the driving external force that this mass is changed by one-period encourages, produce the effect of coriolis force when the angular velocity that adds after, sense terminals will have voltage difference to change output because of pectination (or sensing electrode of other form).Minisize gyroscopes as No. 5932804 exposure of United States Patent (USP).Yet existing minisize gyroscopes still has following point:
(1) coupled wave equation formula complexity can't be set up effective optimization procedure.
(2) only a kind of mode of oscillation, and the vibration frequency of drive end and sense terminals will tend to resonance point simultaneously and be difficult for finishing.
(3) its sensitivity of the sensing of high angular velocity is lower.
The utility model content
Therefore to provide a kind of equation simple for fundamental purpose of the present utility model, can set up the membrane type minisize gyroscopes that effective optimization procedure is analyzed.
Another purpose of the present utility model provides a kind of multiple mode of oscillation that has, and tends to the membrane type minisize gyroscopes of resonance point easily.
Another purpose of the present utility model provides a kind of membrane type minisize gyroscopes that has the sensing of high angular velocity and can obtain higher sensitivity.
To achieve these goals, the utility model provides a kind of membrane type minisize gyroscopes to comprise: a substrate has a first region on the one upper surface; One film is fixed on this substrate by a support unit; One loam cake has second electrode district on its a lower surface.
Aforesaid membrane type minisize gyroscopes, wherein, this first region has a plurality of drive electrodes, and this second electrode district has a plurality of sensing electrodes.
Aforesaid membrane type minisize gyroscopes, wherein, this first region has a plurality of sensing electrodes, and this second electrode district has a plurality of drive electrodes.
Aforesaid membrane type minisize gyroscopes, wherein, this support unit is a support ring.
Aforesaid membrane type minisize gyroscopes, wherein, this support unit is a plurality of bracing frames.
Aforesaid membrane type minisize gyroscopes, wherein, described substrate can be silicon substrate or ceramic substrate.
Aforesaid membrane type minisize gyroscopes, wherein, described electrode district can be silicon or metal electrode.
Aforesaid membrane type minisize gyroscopes, wherein, described loam cake can be silicon substrate, ceramic substrate or glass substrate.
Aforesaid membrane type minisize gyroscopes, wherein, film can have a plurality of pores.
Aforesaid membrane type minisize gyroscopes, wherein, described loam cake has the magnetic resistance read head of multilayer, and described film has the circuit of magnetic resistance free layer.
The utility model also provides a kind of pick-up unit with this membrane type minisize gyroscopes, comprises:
One membrane type minisize gyroscopes has a substrate;
An integrated circuit that on this substrate, forms;
At least one surface installing type artificial circuit component that on this substrate, encapsulates;
This membrane type minisize gyroscopes also has:
The position is at a first region of upper surface of base plate;
One film is fixed on this substrate by a support unit;
One loam cake has second electrode district on its a lower surface.
Aforesaid membrane type micro gyroscope measuring device, wherein, this first region has a plurality of drive electrodes, and this second electrode district has individual sensing electrode.
Aforesaid membrane type micro gyroscope measuring device, wherein, this first region has a plurality of sensing electrodes, and this second electrode district has a plurality of drive electrodes.
Aforesaid membrane type micro gyroscope measuring device, wherein, this support unit is a support ring.
Aforesaid membrane type micro gyroscope measuring device, wherein, this support unit is a plurality of bracing frames.
Aforesaid membrane type micro gyroscope measuring device, wherein, described substrate can be silicon substrate or ceramic substrate.
Aforesaid membrane type micro gyroscope measuring device, wherein, described electrode district can be silicon or metal electrode.
Aforesaid membrane type micro gyroscope measuring device, wherein, described loam cake can be silicon substrate, ceramic substrate or glass substrate.
Aforesaid membrane type micro gyroscope measuring device, wherein, film can have a plurality of pores.
Aforesaid membrane type micro gyroscope measuring device, wherein, described loam cake has the magnetic resistance read head of multilayer, and described film has the circuit of magnetic resistance free layer.
The beneficial effects of the utility model are, this film is after being driven by drive electrode, can be because the influence of an external angular velocity, angular acceleration or an inertial force produces extra variation, and then sensing electrode senses this external acting force, by the design of sensing circuit sensor operation finished in this signal output.This membrane type minisize gyroscopes can be set up effective optimization procedure analysis, have multiple mode of oscillation; Sensing with high angular velocity can obtain higher sensitivity.
The utility model is described in further detail below in conjunction with the drawings and specific embodiments.
Description of drawings
Figure 1 shows that the side view of membrane type minisize gyroscopes of the present utility model;
Figure 2 shows that the exploded view of membrane type minisize gyroscopes of the present utility model;
Fig. 3 is the top view of another preferred embodiments of membrane type minisize gyroscopes of the present utility model;
Fig. 4 is the synoptic diagram of another preferred embodiment of the present utility model.
Wherein, description of reference numerals is as follows:
1 membrane type micro gyroscope measuring device
The specific integrated circuit of 10 membrane type minisize gyroscopes, 12 functions
14 surface installing type artificial circuit components
100 substrates, 102 the first regions
110 films, 112 set collars
114 bracing frames, 116 pores
120 loam cakes, 122 second electrode districts
Embodiment
As shown in Figure 1, be the side view of membrane type minisize gyroscopes 10 of the present utility model; As shown in Figure 2, be the exploded view of membrane type minisize gyroscopes 10 of the present utility model.The loam cake 120 that membrane type minisize gyroscopes 10 of the present utility model mainly comprises a substrate 100, be positioned at the film 110 on the substrate 100 and place on the substrate 100 and film 110 is coated.As shown in Figure 1, the upper surface at substrate 100 has the first region 102; This film 110 is by set collar 112 (referring to hereinafter explanation) or bracing frame 114 and being fixed on the upper surface of substrate 100; This loam cake 120 has the U type profile, and second electrode district 122 is arranged on its lower surface.
As shown in Figure 2, this first region 102 for example can be the drive electrode of four symmetries; This film 110 has the bracing frame 114 of four symmetries; This second electrode district 122 also has the sensing electrode of four symmetries.Referring to Fig. 1, behind the suitable in addition driving voltage of the drive electrode of the first region 102, this film 110 promptly can shake (referring to dotted line partly).For example drive electrode produces mode of oscillation or with the strength that (or counterclockwise) direction clockwise produces attraction in regular turn film 110 is under the ring-type foment with electrostatic force and vibrates.The variation of film 110 vibrative displacements outside will amount when being subjected to the influencing of an external angular velocity, angular acceleration or an inertial force, and then the sensing electrode of second electrode district 122 senses this external acting force, by the design of sensing circuit sensor operation finished in this signal output.
Referring to Fig. 3, be the top view of another preferred embodiments of membrane type minisize gyroscopes 10 of the present utility model, in this instantiation, film 110 is to be fixed on the upper surface of substrate 100 by set collar 112, and have a plurality of pores 116, the air resistance in the time of therefore can reducing vibrations.
Referring to Fig. 4, the synoptic diagram of the pick-up unit that provides for the utility model with this membrane type minisize gyroscopes.It is mechanical structure by single kenel, can realize sharing the purpose (common ASIC) of special chip by the design of analog line, the relation of each inter-module is utilized the silicon processing procedure to produce membrane type minisize gyroscopes 10 of the present utility model, the specific integrated circuit 12 of a function on single substrate 100, is reached a plurality of surface installing type artificial circuit components (SMD) 14 as shown in Figure 4.Except the cost that can save little procedure for processing, can present technique accomplish to share application-specific integrated circuit easily by the change of analog line.
Moreover, can make as mode as described in following according to membrane type minisize gyroscopes 10 of the present utility model:
(1) at first utilize micro electronmechanical process technique on a substrate, to plate the first region, this substrate can be silicon substrate or ceramic substrate, and electrode district can be silicon or any metal electrode, and the strength that produces attraction in regular turn with clockwise (or counterclockwise) direction when using as drive electrode is under the ring-type foment film to vibrate.This substrate can be sense terminals or drive end, and suitably design can have both functions simultaneously concurrently.
(2) utilize the fabrication techniques of etching or plated film growth to go out this vibration film, suitably design the sensitivity that bracing frame can promote sensing.
(3) loam cake of purchasing plates electrode with loam cake, and this loam cake can be silicon substrate, ceramic substrate or glass substrate, and electrode can be silicon or any metal electrode, then loam cake is placed on the base material.
(4) moreover the utility model also can improve the sensing sensitivity of assembly in conjunction with the plated film detection technology of magnetoresistance material, for improving sensitivity, former loam cake can be plated the magnetic resistance read head (multilayerMR head) of multilayer, the circuit of magnetic resistance free layer (MR free layer) of will overturning again is plated on the vibration film, just can read the variation of its voltage (V) when vibration of thin membrane.
Generally speaking, the motion analysis of membrane type minisize gyroscopes of the present utility model is subjected to the influence of mode of oscillation or ring-type excitation, and its motor behavior analysis is easier to.The speed of different modal vibrations or ring-type excitation can obtain different kinematic parameters, be easy to do design optimization at the mechanical structure of single kenel.The mechanical structure of this kenel can comprise large-scale external sense angular speed.Can improve the sensing sensitivity of assembly in conjunction with the plated film detection technology of magnetoresistance material.
In sum, membrane type minisize gyroscopes of the present utility model can be set up effective optimization procedure analysis, be had multiple mode of oscillation; Sensing with high angular velocity can obtain higher sensitivity, is a rare utility model in fact.
But notice this case scope is not limited to above-mentioned instantiation, and can do many variations, all in this case claim.
Claims (20)
1, a kind of membrane type minisize gyroscopes is characterized in that, comprises:
One substrate has a first region on the one upper surface;
One film is fixed on this substrate by a support unit;
One loam cake has second electrode district on its a lower surface.
2, membrane type minisize gyroscopes as claimed in claim 1 is characterized in that, this first region has a plurality of drive electrodes, and this second electrode district has a plurality of sensing electrodes.
3, membrane type minisize gyroscopes as claimed in claim 1 is characterized in that, this first region has a plurality of sensing electrodes, and this second electrode district has a plurality of drive electrodes.
4, membrane type minisize gyroscopes as claimed in claim 1 is characterized in that, this support unit is a support ring.
5, membrane type minisize gyroscopes as claimed in claim 1 is characterized in that, this support unit is a plurality of bracing frames.
6, membrane type minisize gyroscopes as claimed in claim 1 is characterized in that, described substrate can be silicon substrate or ceramic substrate.
7, membrane type minisize gyroscopes as claimed in claim 1 is characterized in that, described electrode district can be silicon or metal electrode.
8, membrane type minisize gyroscopes as claimed in claim 1 is characterized in that, described loam cake can be silicon substrate, ceramic substrate or glass substrate.
9, membrane type minisize gyroscopes as claimed in claim 1 is characterized in that, film can have a plurality of pores.
10, membrane type minisize gyroscopes as claimed in claim 1 is characterized in that, described loam cake has the magnetic resistance read head of multilayer, and described film has the circuit of magnetic resistance free layer.
11, a kind of pick-up unit with membrane type minisize gyroscopes is characterized in that, comprises:
One membrane type minisize gyroscopes has a substrate;
An integrated circuit that on described substrate, forms;
At least one surface installing type artificial circuit component that on described substrate, encapsulates;
This membrane type minisize gyroscopes also has:
The position is at a first region of upper surface of base plate;
One film is fixed on this substrate by a support unit;
One loam cake has second electrode district on its a lower surface.
12, the pick-up unit with membrane type minisize gyroscopes as claimed in claim 11 is characterized in that, this first region has a plurality of drive electrodes, and this second electrode district has individual sensing electrode.
13, the pick-up unit with membrane type minisize gyroscopes as claimed in claim 11 is characterized in that, this first region has a plurality of sensing electrodes, and this second electrode district has a plurality of drive electrodes.
14, the pick-up unit with membrane type minisize gyroscopes as claimed in claim 11 is characterized in that, this support unit is a support ring.
15, the pick-up unit with membrane type minisize gyroscopes as claimed in claim 11 is characterized in that, this support unit is a plurality of bracing frames.
16, the pick-up unit with membrane type minisize gyroscopes as claimed in claim 11 is characterized in that, described substrate can be silicon substrate or ceramic substrate.
17, the pick-up unit with membrane type minisize gyroscopes as claimed in claim 11 is characterized in that, described electrode district can be silicon or metal electrode.
18, the pick-up unit with membrane type minisize gyroscopes as claimed in claim 11 is characterized in that, described loam cake can be silicon substrate, ceramic substrate or glass substrate.
19, the pick-up unit with membrane type minisize gyroscopes as claimed in claim 11 is characterized in that, film can have a plurality of pores.
20, the pick-up unit with membrane type minisize gyroscopes as claimed in claim 11 is characterized in that, described loam cake has the magnetic resistance read head of multilayer, and described film has the circuit of magnetic resistance free layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU032728689U CN2636198Y (en) | 2003-07-14 | 2003-07-14 | Membrane type micro-gyroscope and measurer having same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU032728689U CN2636198Y (en) | 2003-07-14 | 2003-07-14 | Membrane type micro-gyroscope and measurer having same |
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| CN2636198Y true CN2636198Y (en) | 2004-08-25 |
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| CNU032728689U Expired - Fee Related CN2636198Y (en) | 2003-07-14 | 2003-07-14 | Membrane type micro-gyroscope and measurer having same |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101898744A (en) * | 2008-12-23 | 2010-12-01 | 意法半导体股份有限公司 | Strengthen the micro-electro-mechanical gyroscope of rejection of acceleration noise |
| CN102695941A (en) * | 2009-11-12 | 2012-09-26 | 萨基姆防务安全公司 | Gyroscopic sensor |
| CN106168483A (en) * | 2016-08-04 | 2016-11-30 | 上海交通大学 | Distributed gyroscope of bipolar electrode discrete under upper annular and preparation method thereof |
| CN106323259A (en) * | 2016-08-04 | 2017-01-11 | 上海交通大学 | Vertically-discrete dual-electrode distributed micro-gyroscope and manufacturing method thereof |
| CN106323261A (en) * | 2016-08-04 | 2017-01-11 | 上海交通大学 | Upper-discrete and lower-annular dual-electrode distributed micro-gyroscope and manufacturing method thereof |
| CN108414816A (en) * | 2018-01-31 | 2018-08-17 | 许继集团有限公司 | A kind of calculation method and device of AC single phase voltage |
-
2003
- 2003-07-14 CN CNU032728689U patent/CN2636198Y/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101898744A (en) * | 2008-12-23 | 2010-12-01 | 意法半导体股份有限公司 | Strengthen the micro-electro-mechanical gyroscope of rejection of acceleration noise |
| CN101898744B (en) * | 2008-12-23 | 2014-12-10 | 意法半导体股份有限公司 | Microelectromechanical gyroscope with enhanced rejection of acceleration noise |
| CN102695941A (en) * | 2009-11-12 | 2012-09-26 | 萨基姆防务安全公司 | Gyroscopic sensor |
| CN102695941B (en) * | 2009-11-12 | 2015-11-25 | 萨基姆防务安全公司 | Gyro sensor |
| CN106168483A (en) * | 2016-08-04 | 2016-11-30 | 上海交通大学 | Distributed gyroscope of bipolar electrode discrete under upper annular and preparation method thereof |
| CN106323259A (en) * | 2016-08-04 | 2017-01-11 | 上海交通大学 | Vertically-discrete dual-electrode distributed micro-gyroscope and manufacturing method thereof |
| CN106323261A (en) * | 2016-08-04 | 2017-01-11 | 上海交通大学 | Upper-discrete and lower-annular dual-electrode distributed micro-gyroscope and manufacturing method thereof |
| CN108414816A (en) * | 2018-01-31 | 2018-08-17 | 许继集团有限公司 | A kind of calculation method and device of AC single phase voltage |
| CN108414816B (en) * | 2018-01-31 | 2020-08-11 | 许继集团有限公司 | Method and device for resolving alternating current single-phase voltage |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20040825 Termination date: 20120714 |