CN2578970Y - Ion implantation apparatus for internal surface of tubular workpiece - Google Patents
Ion implantation apparatus for internal surface of tubular workpiece Download PDFInfo
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- CN2578970Y CN2578970Y CN 02275566 CN02275566U CN2578970Y CN 2578970 Y CN2578970 Y CN 2578970Y CN 02275566 CN02275566 CN 02275566 CN 02275566 U CN02275566 U CN 02275566U CN 2578970 Y CN2578970 Y CN 2578970Y
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Abstract
The utility model relates to an ion implantation apparatus for an internal surface of a tubular workpiece, which relates to a plasma processing apparatus. A gas source (1) is communicated with a vacuum chamber (4); an insulating frame (6) is fixed in the vacuum chamber; the tubular workpiece (7) is installed on the insulating frame; the left terminal of a central electrode (3) is arranged in the center of the tubular workpiece; a left terminal head (3-2) of the central electrode is exposed; the middle part of the central electrode passes through a hole (4-1) on one side wall of the vacuum chamber; the right terminal of the central electrode is connected with a drive mechanism (5); the central electrode and the tubular workpiece form relatively rotary linear translation; a negative electrode of a high-voltage pulse power supply (2) is connected with the tubular workpiece; a positive electrode of the high-voltage pulse power supply (2) is connected with the central electrode. The utility model does not need additional plasma. Under the condition of a proper air pressure range and proper implantation voltage, the ion implantation can be carried out so long as the high voltage pulse is present. A coating layer can be formed if carbonaceous gas is adopted. The relative rotation of the central electrode and the workpiece can realize uniform and high-efficient ion implantation effects on the inner surface of the tubular workpiece.
Description
Technical field: the utility model relates to a kind of plasma processing apparatus, particularly relates to the device that the tube type work piece inner surface plasma modification is handled.
Background technology: the internal surface ion of tube type work piece injection at present is to utilize the plasma that adds to produce plasma in vacuum chamber, and utilize the diffusivity of plasma, make the plasma enter into the tube type work piece deep inside, apply high-tension pulse again and bring enforcement.But the density of plasma in socket is lower, and more inward, density is low more, and the plasma in the socket is seriously inhomogeneous, treatment effect is bad, because the inner limited plasma of socket applies through high-voltage pulse one, inner ion is very fast depleted, have to turn-off pulse in addition, wait for that external plasma diffuses into once more, just can carry out next pulse and inject, so the treatment effect of power supply is extremely low, high-voltage pulse can not make full use of.
Summary of the invention: the utility model is a kind of tube type work piece inner surface ion implantation apparatus of development, make it have continuous plasma diffusion, and can realize even, the high efficiency Ion Implantation Strengthening of tube type work piece inner surface is handled to the socket work piece inner surface.The utility model comprises gas source 1, vacuum chamber 4, and it also includes high-voltage pulse power source 2, central electrode 3, insulating support 6, insulating case 9, transmission mechanism 5; Gas source 1 is connected with vacuum chamber 4, insulating support 6 is fixed in the vacuum chamber 4, tube type work piece 7 is installed on the insulating support 6, the left end of central electrode 3 is arranged on the center of tube type work piece 7, the left end head 3-2 of central electrode 3 is exposed, the remainder of central electrode 3 is enclosed within the insulating case 3-1, the hole 4-1 of the sidewall of vacuum chamber 4 is passed at the middle part of central electrode 3, the right-hand member of central electrode 3 is connected with transmission mechanism 5, form between central electrode 3 and the tube type work piece 7 and not only rotate but also moving relative to straight line, the negative pole of high-voltage pulse power source 2 is connected with tube type work piece 7, the positive pole of high-voltage pulse power source 2 is connected with central electrode 3, is fixed with insulating case 9 between vacuum chamber 4 inwalls and the tube type work piece 7.The utility model reasonable in design, the inside that utilizes the ionization of high-voltage pulse self to act on tube type work piece 7 produces continual plasma and carries out Ion Implantation Strengthening and handle, it need not add plasma, under suitable air pressure range and suitable injecting voltage condition, as long as high-voltage pulse exists, ion injects and just can carry out.With the utility model tube type work piece is carried out internal surface ion and inject high efficiency, if adopt carbonaceous gas (as methane, acetylene etc.) then can form coating, central electrode 3 injects effect with relatively rotating with the ion that moves the uniform high-efficiency that can realize tube type work piece inner surface relative to straight line of workpiece 7, and the power utilization rate is also high.
Description of drawings: Fig. 1 is an overall structure schematic diagram of the present utility model.
Embodiment one: present embodiment is made up of gas source 1, high-voltage pulse power source 2, central electrode 3, vacuum chamber 4, insulating support 6, insulating case 9, transmission mechanism 5; Gas source 1 is connected with vacuum chamber 4, insulating support 6 is fixed in the vacuum chamber 4, tube type work piece 7 is installed on the insulating support 6, the left end of central electrode 3 is arranged on the center of tube type work piece 7, the left end head 3-2 of central electrode 3 is exposed, the remainder of central electrode 3 is enclosed within the insulating case 3-1, the hole 4-1 of the sidewall of vacuum chamber 4 is passed at the middle part of central electrode 3, the right-hand member of central electrode 3 is connected with transmission mechanism 5, form between central electrode 3 and the tube type work piece 7 and not only rotate but also the motion of relative straight line, the negative pole of high-voltage pulse power source 2 is connected with tube type work piece 7, the positive pole of high-voltage pulse power source 2 is connected with central electrode 3, is fixed with insulating case 9 between vacuum chamber 4 inwalls and the tube type work piece 7.
Embodiment two: the transmission mechanism 5 in the present embodiment is made up of shaft joint 5-1, transmission 5-2, motor 5-3, leading screw 5-4, nut 5-5, base plate 5-6, sliding bearing 5-7, overcoat 5-8, axle sleeve 5-9; The right-hand member head of central electrode 3 is connected by shaft joint 5-1 with the left end of leading screw 5-4, leading screw 5-4 forms with nut 5-5 and is threaded, nut 5-5 is set in the overcoat 5-8, sliding bearing 5-7 is set in the axle sleeve 5-9, overcoat 5-8, axle sleeve 5-9, motor 5-3 all are fixed on the base plate 5-6, the right-hand member of leading screw 5-4 is connected with the end of transmission 5-2, and the other end of transmission 5-2 is connected with the output shaft of motor 5-3.Other composition is identical with embodiment one with annexation.
Embodiment three: the gas source 1 in the present embodiment can provide nitrogen, ammonia, argon gas, oxygen etc. to form direct ion injection, and gas source 1 also can provide carbonaceous gas (as acetylene, methane) etc., can form coating.
Embodiment four: present embodiment is that the threading place of vacuum chamber 4 sidewalls that are connected with workpiece 7 of the negative pole at high-voltage pulse power source 2 is provided with insulating sealer 4-3.
Operation principle: workpiece 7 is installed on the insulating support 6, make vacuum chamber 4 be in vacuum, positive pole with high-voltage pulse power source 2 during high-voltage pulse power source 2 work is connected with central electrode 3, the negative pole of high-voltage pulse power source 2 is connected with tube type work piece 7, or with the plus earth of high-voltage pulse power source 2, or with the minus earth of high-voltage pulse power source 2, between the central electrode 3 of the inside of tube type work piece 7 and workpiece 7 inwalls, just there is electric field to exist like this, under suitable air pressure range and injecting voltage, glow discharge will produce, the plasma that glow discharge produces makes that under the effect of high voltage electric field ion flies to the socket inwall at a high speed, form and inject, as long as high-voltage pulse continues to exist, ion injects and just can continue to carry out, add nitrogen this moment, ammonia, argon gas, gases such as oxygen can form the ion injection effect, if the gas of employing carbon containing is (as acetylene, methane etc.) then can form coating.In order to realize socket inside discharge process equably, and in order to prevent that tube wall is overheated or pulse power power is not enough, thereby central electrode 3 is arranged to can rotate along work centre line, the structure that again can straight line moves is injected the uniformity of handling to guarantee ion.Characteristics of the present utility model are that plasma is directly produced by high-voltage pulse, have removed external plasma sources from and have produced the inhomogeneities that plasma diffusion is delivered to socket inside.Most importantly can provide ion, ion to inject the not diffusion restriction of subject plasma continuously for inner chamber injects or deposits, thereby injection efficiency improve greatly.
Claims (3)
1, the tube type work piece inner surface ion implantation apparatus, it comprises gas source (1), vacuum chamber (4), it also includes high-voltage pulse power source (2), central electrode (3), insulating support (6), insulating case (9), transmission mechanism (5), it is characterized in that gas source (1) is connected with vacuum chamber (4), insulating support (6) is fixed in the vacuum chamber (4), tube type work piece (7) is installed on the insulating support (6), the left end of central electrode (3) is arranged on the center of tube type work piece (7), the left end head (3-2) of central electrode (3) is exposed, the remainder of central electrode (3) is enclosed within the insulating case (3-1), the hole (4-1) of the sidewall of vacuum chamber (4) is passed at the middle part of central electrode (3), the right-hand member of central electrode (3) is connected with transmission mechanism (5), the negative pole of high-voltage pulse power source (2) is connected with tube type work piece (7), the positive pole of high-voltage pulse power source (2) is connected with central electrode (3), is fixed with insulating case (9) between vacuum chamber (4) inwall and the tube type work piece (7).
2, tube type work piece inner surface ion implantation apparatus according to claim 1 is characterized in that transmission mechanism (5) is made up of shaft joint (5-1), transmission (5-2), motor (5-3), leading screw (5-4), nut (5-5), base plate (5-6), sliding bearing (5-7), overcoat (5-8), axle sleeve (5-9); The right-hand member head of central electrode (3) is connected by shaft joint (5-1) with the left end of leading screw (5-4), leading screw (5-4) forms with nut (5-5) and is threaded, nut (5-5) is set in the overcoat (5-8), sliding bearing (5-7) is set in the axle sleeve (5-9), overcoat (5-8), axle sleeve (5-9), motor (5-3) all are fixed on the base plate (5-6), the right-hand member of leading screw (5-4) is connected with an end of transmission (5-2), and the other end of transmission (5-2) is connected with the output shaft of motor (5-3).
3, tube type work piece inner surface ion implantation apparatus according to claim 1 is characterized in that the threading place of vacuum chamber (4) sidewall that the negative pole at high-voltage pulse power source (2) is connected with workpiece (7) is provided with insulating sealer (4-3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02275566 CN2578970Y (en) | 2002-09-30 | 2002-09-30 | Ion implantation apparatus for internal surface of tubular workpiece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02275566 CN2578970Y (en) | 2002-09-30 | 2002-09-30 | Ion implantation apparatus for internal surface of tubular workpiece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2578970Y true CN2578970Y (en) | 2003-10-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02275566 Expired - Fee Related CN2578970Y (en) | 2002-09-30 | 2002-09-30 | Ion implantation apparatus for internal surface of tubular workpiece |
Country Status (1)
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| CN (1) | CN2578970Y (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101343725B (en) * | 2008-08-23 | 2010-08-18 | 牛君 | Method and apparatus for forming different seeping layer on different surfaces when ion inleakage of object |
| CN101410930B (en) * | 2006-03-31 | 2011-05-11 | 瓦里安半导体设备公司 | Insulator system for a terminal structure of an ion implantation system |
| CN101649445B (en) * | 2009-08-31 | 2012-01-25 | 哈尔滨工业大学 | Ion injection method for inner electrode movable type inner surface plasma |
| CN103952677A (en) * | 2014-05-12 | 2014-07-30 | 北京航空航天大学 | Method for coating inner wall of electron-enhanced plasma discharge tube |
| CN105132858A (en) * | 2015-08-06 | 2015-12-09 | 西华大学 | Inner hole local area glow plasma discharging device and use method thereof |
| CN106961779A (en) * | 2017-05-11 | 2017-07-18 | 无锡荣坚五金工具有限公司 | It is a kind of to carry the plasma-initiated polymerization device for turning electrode group surely |
-
2002
- 2002-09-30 CN CN 02275566 patent/CN2578970Y/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101410930B (en) * | 2006-03-31 | 2011-05-11 | 瓦里安半导体设备公司 | Insulator system for a terminal structure of an ion implantation system |
| CN101343725B (en) * | 2008-08-23 | 2010-08-18 | 牛君 | Method and apparatus for forming different seeping layer on different surfaces when ion inleakage of object |
| CN101649445B (en) * | 2009-08-31 | 2012-01-25 | 哈尔滨工业大学 | Ion injection method for inner electrode movable type inner surface plasma |
| CN103952677A (en) * | 2014-05-12 | 2014-07-30 | 北京航空航天大学 | Method for coating inner wall of electron-enhanced plasma discharge tube |
| CN105132858A (en) * | 2015-08-06 | 2015-12-09 | 西华大学 | Inner hole local area glow plasma discharging device and use method thereof |
| CN105132858B (en) * | 2015-08-06 | 2017-11-10 | 西华大学 | Endoporus local glow plasma discharge device and its application method |
| CN106961779A (en) * | 2017-05-11 | 2017-07-18 | 无锡荣坚五金工具有限公司 | It is a kind of to carry the plasma-initiated polymerization device for turning electrode group surely |
| CN106961779B (en) * | 2017-05-11 | 2024-02-02 | 江苏菲沃泰纳米科技股份有限公司 | Plasma initiation polymerization device with fixed rotation electrode group |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |