CN2571076Y - Two-dimensional optical switch matrix made by piezoelectric driver - Google Patents
Two-dimensional optical switch matrix made by piezoelectric driver Download PDFInfo
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- CN2571076Y CN2571076Y CN02267128U CN02267128U CN2571076Y CN 2571076 Y CN2571076 Y CN 2571076Y CN 02267128 U CN02267128 U CN 02267128U CN 02267128 U CN02267128 U CN 02267128U CN 2571076 Y CN2571076 Y CN 2571076Y
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Abstract
The utility model relates to a two-dimensional optical switch matrix made of piezoelectric drivers, which is characterized in that the utility model is composed of mutually orthogonal optical fiber collimator arrays, piezoelectric drivers, an upper positioning plate, a mirror surface array, and a related driver; the optical fiber collimator matrices and the piezoelectric drivers form a 45 DEG angle; the top of each piezoelectric driver is provided with a reflecting mirror surface; the bottom end of the piezoelectric drivers is formed into a matrix and is fixed in a positioning groove of a base plate, the top end of the piezoelectric drivers is arranged in a guiding groove of the upper positioning plate; the electrodes of the piezoelectric drivers are connected with circuits of the drivers through welding procedure. Each surface of the piezoelectric drivers is directly processed into the mirror surface; each piezoelectric driver is electrically connected in parallel through tens of ceramic sheets and is mechanically connected in series. Because drivers adopting traditionally technological production are replaced by the piezoelectric drivers, the produced optical switch matrix not only has small size and good consistency, but also is suitable for demand of development of future devices.
Description
Technical field
The utility model relates to a kind of two-dimentional optical switch matrix, more specifically to a kind of optical switch matrix that adopts the piezoelectrics driver drives, belongs to optical communication field.
Background technology
At present, adopt the fine long-range transmission of carrying out voice and data of light dimension more and more general, the requirement of the data capacity that can carry light also improves constantly.How more effectively to utilize the existing fiber bandwidth, improving efficiency of transmission is a vital problem, current, than successful method is to adopt wavelength-division multiplex technique (WDM:Wave Division Multiplexing), and it can carry out message transmission by the light wave with a plurality of wavelength independently on same optical fiber.Along with the extensive use of WDM technology, increasing to the demand of conversion of the light path of various complexity and routing device in network service.Optical switch plays crucial effect in network, particularly the optical switch square falls, and it is to make up light and insert/core of division multiplexer equipment (OADM:OpticalAdd-Drop Module) and the cross interconnected equipment of light (OXC:Optical Cross Connect).OADM is one of optical-fiber network key equipment, is generally used for metropolitan area network and backbone network.The concrete mode on road is a lot of up and down to realize the OADM light signal, but in most cases all used optical switch realize on the light signal in the dense wave division multipurpose optical-fiber network/following road function.OXC is the nucleus equipment of WDM light exchange, adopt the optical switch that volume is littler, part lattice are more cheap to replace expensive high speed electronic switch device, be that direct sunshine cross bonding technology substitutes traditional light one an electric light (OEO) switch technology, the development of all optical network is had strategic importance.Based on the switch of electricity conversion is light exchange towards specific transmission rate, in case the network speed-raising, will upgrade and adapt to transmission rate faster in electric aspect.On the contrary, light directly exchange is transparent to transmission rate, and the optical switch that is equipped with can satisfy the not demand of optical-fiber network speed-raising with auspicious now.Optical switch makes OADM and OXC have the dynamic-configuration reciprocal exchange of business and supportive protection switch function, and when network broke down, node switched to the fault business in the alternate routing, has strengthened survival ability and the protect networks and the recovery capability of network.Along with the development of optical transfer network technology, big capacity, high speed exchange, transparent, low-loss optical switch lattice play even more important effect in development of optical network.
Mechanical optical switch is a kind of very important optical switch, mechanical optical switch have insertion loss lower (＜2dB=, the isolation height (＞45dB), be not subjected to advantages such as polarization and wavelength affects, extensive use in optical communication.Mechanical optical switch is exactly for one type to reach straight-through light path or stop light path by the control minute surface, realizes the switching of light.In optical design, the optical switch matrix structure of switching in the 3 D auto space is called three selection structures, pushes away the optical switch matrix structure that free space switches two and is called two-dimensional structure.
One of feature of two-dimentional optical switch matrix shown in Figure 1 is the minute surface square formation of solid matter, and is generally speaking, very close to each other between the shortest principles and requirements adjacent mirror facets of light path; Two of feature is centers over against minute surface, the center of optical fiber collimator.High performance optical switch matrix needs collimated light to transmit and is coupled, and Corning Incorporated develops a kind of optical fiber collimator of small-sized dribbling lens, and the beam waist diameter of hot spot is at tens microns.Array driver in the optical switch matrix is most important, and the driver discreteness that adopts conventional art to make is big, and volume is big, is not suitable for making the array device.Optical switch matrix requires each driver each side character (comprising size, drive performance) to want consistent simultaneously, just can produce the high drive array of consistency; And the volume of each driver is little, just can produce the little optical switch matrix of volume, is fit to the needs of following device development.
Summary of the invention
The utility model proposes a kind of two-dimentional mirror matrix that adopts the piezoelectrics driver drives to make, thereby realize the switch arrays of N * N light exchange.The piezoelectrics driver because of simple in structure, response speed is fast, the bearing capacity height, low energy consumption and lower-price characteristic receive much concern, extensive use.Piezoelectric ceramic is to be used for producing micrometric displacement by external electrical field, utilizes piezoelectric to appear displacement suddenly and mainly contains dual mode: a kind of pure piezoelectric deforming that is the identical piezoelectrics of multilayer superpose produces big displacement; Another kind is a double piezoelectric crystal chip driver.The utility model adopts the identical piezoelectricity of multilayer to appoint the pure piezoelectric deforming of stack to produce big displacement to make minute surface do a little vertical motions, and is straight-through or stop light path.The multilayer piezoelectric ceramic stack of sheets is mechanically contacted, in parallel on electricity, form by many ferroelectric crystallites for every layer, it has two kinds of effects under External Electrical Field, piezoelectric effect and electrostriction effect, essence all is the dielectric crystal produces polarization under External Electrical Field result, and lattice is distorted, and shows as mechanism's strain on the macroscopic view.
The N of the two-dimensional structure that the utility model provides * N array of photoswitch by mutually perpendicular optical fiber collimator capable/row, go up location-plate, voltage body driver is formed with minute surface square formation and relevant drive circuit.Adopt the purpose of optical fiber collimator to be to increase light path, reduce loss.Adopt the identical piezoelectrics stack preparation piezoelectrics driver of multilayer, purpose is to increase the deflection of driver.The optical fiber collimator array becomes miter angle to put with the piezoelectrics driver, at the top of each piezoelectrics driver a mirror surface is installed, and perhaps directly the Surface Machining of piezoelectrics driver is become minute surface, and the technology of employing can be mill polishing more earlier.Piezoelectrics driver bottom is lined up array and is fixed in the substrate location notch, and the top places in the guide channel of location-plate.When the piezoelectrics driver does not have making alive, minute surface is in the equilbrium position, and light path is straight-through, and minute surface is inoperative.When the piezoelectrics driver added voltage, the piezoelectrics longitudinal tensile strain drove the minute surface translation that makes progress, and blocks input light, and reflection enters the output optical fibre collimater.Location-plate and substrate location notch are gone up in whole process using MEMS technology processing, employing three pushes away multicore sheet encapsulation (3D-MCM) processes and goes out the piezoelectrics driver, adopting packaging technology that array is lined up in piezoelectrics driver bottom at last is fixed in the substrate location notch, the top places in the guide channel of location-plate, and then by welding procedure the electrode of piezoelectric actuator and drive circuit board are linked up, finish the making of entire device.
Strain with ceramic sheet of piezoelectric effect generally can only reach 1%, so displacement that need gather into folds tens of identical piezoelectric ceramic thin sheets to obtain tens microns, adopt structure that the 3D-MCM technology processes the piezoelectrics driver as shown in Figure 3, mechanically connecting, is parallel-connection structure on electricity.
The guide channel of last location-plate and the location notch of substrate require about consistency height, and the figure of the location notch of the guide channel of last location-plate and substrate is made on the same mask, adopt the microelectronics manufacturing technology can guarantee this point.Material is a monocrystalline silicon, initial oxidation, and photoetching is carved with the deep reaction ion etching silicon chip then and is worn, and the location notch of the guide channel of location-plate and substrate in the formation is as Fig. 4.The thickness of the guiding groove width specific pressure electricity body driver of last location-plate is big slightly, and the location notch groove width of substrate equates with the thickness of piezoelectrics driver.
The utility model is owing to adopt the piezoelectrics driver to substitute the driver of traditional fabrication techniques, and not only volume is little and high conformity to make the array of photoswitch of making, is fit to the needs of following device development.
Description of drawings
Fig. 1 is two-dimentional optical switch matrix principle schematic.
Fig. 2 is the two-dimentional optical switch matrix structure chart that the utility model provides.
Fig. 3 is piezoelectrics driver (a) battery lead plate lead-in wire schematic diagram (b) piezoelectrics driver outline drawing.
Fig. 4 goes up location-plate and substrate plate schematic diagram.
Among the figure:
1-minute surface, 2-collimater, 3-guide channel
4-upward location-plate 5-piezoelectric actuators
Contact conductor 7-the substrate plate of the piezoelectrics 6-piezoelectrics of 51-composition piezoelectric actuator
Embodiment
Embodiment 1
(1) employing 3D-MCM processes goes out piezoelectrics driver as shown in Figure 3, and wherein, every piezoelectrics thickness is identical, and material component also identical (as the PMN lead magnesio-niobate) forms parallel connection, mechanically Chuan Lian piezoelectric actuator on the electricity.
(2) adopt the microelectronics manufacturing technology, the location notch of the guide channel of last location-plate and substrate is made on the same mask (Fig. 4), its technology is to adopt initial oxidation, photoetching, with deep reaction ion etching silicon chip is carved then and is worn the location notch of the guide channel of location-plate and substrate in the formation.
(3) with packaging technology array is lined up in the piezoelectric actuator bottom and be fixed on the location notch of base, the top places in the guide channel of location-plate.
(4) by welding procedure the electrode of piezoelectrics driver and driver circuit board have been connected the end, finished the making of entire device, as shown in Figure 2,2 is orthogonal optical fiber collimator array.
Claims (4)
1. two-dimentional optical switch matrix that adopts the piezoelectrics driver to make is characterized in that:
(1) forms by mutual vertical fiber collimator array, anti-electric body driver, last location-plate, minute surface square formation and sharp mutually pass driver;
(2) the optical fiber collimator array becomes miter angle with the piezoelectrics driver;
(3) at the top of each piezoelectrics driver a mirror surface is installed;
(4) piezoelectrics driver bottom is lined up array and is fixed in the substrate orientation groove, and the top places in the guide channel of location-plate;
(5) electrode of piezoelectric actuator is connected by welding procedure with drive circuit.
2. the two-dimentional optical switch matrix of making by the described employing piezoelectrics of claim 1 driver is characterized in that the surface of each piezoelectrics driver or directly is processed into minute surface.
3. the two-dimentional optical switch matrix of making by the described employing piezoelectrics of claim 1 driver is characterized in that each piezoelectrics driver is in parallel on electricity by tens of ceramic sheets, and mechanically Chuan Lian mode is formed.
4. the two-dimentional optical switch matrix of making by the described employing piezoelectrics of claim 1 driver is characterized in that the thickness of the electric body driver of guiding groove width specific pressure of location-plate is big slightly, and the location notch groove width of substrate equates with the thickness of piezoelectrics driver.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN02267128U CN2571076Y (en) | 2002-09-13 | 2002-09-13 | Two-dimensional optical switch matrix made by piezoelectric driver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN02267128U CN2571076Y (en) | 2002-09-13 | 2002-09-13 | Two-dimensional optical switch matrix made by piezoelectric driver |
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| Publication Number | Publication Date |
|---|---|
| CN2571076Y true CN2571076Y (en) | 2003-09-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN02267128U Expired - Fee Related CN2571076Y (en) | 2002-09-13 | 2002-09-13 | Two-dimensional optical switch matrix made by piezoelectric driver |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103312416A (en) * | 2013-03-19 | 2013-09-18 | 上海玖麟通讯技术有限公司 | Intelligent optical fiber wiring system adopting two-dimensional (2D) optical switch matrix |
| CN108873182A (en) * | 2017-05-12 | 2018-11-23 | 华为技术有限公司 | optical switch chip |
| CN113013321A (en) * | 2021-02-07 | 2021-06-22 | 西安交通大学 | Preparation method of piezoelectric single crystal laminated driver |
-
2002
- 2002-09-13 CN CN02267128U patent/CN2571076Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103312416A (en) * | 2013-03-19 | 2013-09-18 | 上海玖麟通讯技术有限公司 | Intelligent optical fiber wiring system adopting two-dimensional (2D) optical switch matrix |
| CN108873182A (en) * | 2017-05-12 | 2018-11-23 | 华为技术有限公司 | optical switch chip |
| CN108873182B (en) * | 2017-05-12 | 2020-01-03 | 华为技术有限公司 | Optical switch chip |
| CN113013321A (en) * | 2021-02-07 | 2021-06-22 | 西安交通大学 | Preparation method of piezoelectric single crystal laminated driver |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20030903 Termination date: 20091013 |