CN1540374A - Full optical fiber type N Chi N optical swtich and preparing method - Google Patents

Full optical fiber type N Chi N optical swtich and preparing method Download PDF

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Publication number
CN1540374A
CN1540374A CNA2003101083501A CN200310108350A CN1540374A CN 1540374 A CN1540374 A CN 1540374A CN A2003101083501 A CNA2003101083501 A CN A2003101083501A CN 200310108350 A CN200310108350 A CN 200310108350A CN 1540374 A CN1540374 A CN 1540374A
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optical fibre
fibre layer
layer
input
output
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CNA2003101083501A
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Chinese (zh)
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吴亚明
屈红昌
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Shanghai Institute of Microsystem and Information Technology of CAS
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Shanghai Institute of Microsystem and Information Technology of CAS
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Priority to CNA2003101083501A priority Critical patent/CN1540374A/en
Publication of CN1540374A publication Critical patent/CN1540374A/en
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Abstract

The optical switch is composed of input fiber layer, output fiber layer and modulation layer, which is located at superposition position between input fiber layer and output fiber layer. Angle between input fiber layer and output fiber layer is less than 8 degree. A polymer layer in thickness 8-12 microns and refractive index in 1.4-1.5 is added between input fiber layer and output fiber layer. Optical fibers of input fiber layer and output fiber layer are bonded on array in V shaped groove. Optical fiber is as coupling channel between input and output directly. High coupling efficiency is from pinpoint ensured by techniques of chemical-mechanical polishing, silicon micro machine work and accuracy control.

Description

Full fiber type N * N photoswitch and method for making
Technical field
Say to the present invention relates to full fiber type high speed N * N photoswitch and method for making, belong to optical communication field.
Background technology
Development along with optical communication technique, the capacity of data transmission has required the more light path switching of high capacity, more speed, because development of Photonic Network, photoswitch is the main means that realize light-light exchange, and optical router and exchange component are used for the transmission and the exchange high bandwidth light data-signal of all-optical network.System at first is switching time, physical dimension (volume is little, port number is many) to the requirement of photoswitch, secondly is cross-talk, extinction ratio, driving power, return loss, Polarization Dependent Loss.The rise of all optical network, fast, the scale array light switch of a large amount of speed of needs requires device to have higher operating rate, low-loss and long-life on technical indicator, and small size requires higher integrated level.Present jumbo photoswitch all is very big by many volumes
The photoswitch cascade of 1 * N becomes N * N, and the comparatively rising photoswitch based on the silicon micro mechanical technology (MOEMS) has big progress though many successful product are also arranged owing to being difficult to reduce coupling loss.
Fig. 1 is the patent of invention product of Agilent Technologies, what it adopted is conventional array input optical fibre 110, input collimation lens 115, the catoptron 122 of array etc., output collimation lens 143, and output optical fibre 140 constitutes whole array light switch, this product has very big difficulty in the process of assembling, require the degree of regulation height, and is very high to the position accuracy demand of each lens, bring very big difficulty to adjustment process, the main cause that causes the cost of extensive photoswitch to be difficult to reduce.
Summary of the invention
The object of the present invention is to provide a kind of full fiber type high speed N * N photoswitch and method for making, it is the structure and the method for making of a kind of suitable large-scale production and the simple photoswitch of technology.Do not use conventional collimation lens and catoptron, thereby effectively avoided the high-precision adjusting requirement in the assembling process.Mainly be to use special array fibre, and use the switching medium of polymkeric substance, utilize its electrooptical effect to reach the purpose of switching at a high speed as light.
Full fiber type N provided by the invention * N photoswitch is made of input optical fibre layer, output optical fibre layer and optical modulation layer, and optical modulation layer that is to say the position of this two-layer coincidence between input optical fibre layer and output optical fibre layer.The optical fiber of input optical fibre layer and output optical fibre layer all is bonded on the V-type groove array, and optical fiber is directly as the coupling channel of input and output.When switching in polymeric layer and applying voltage and meet the demands, the input luminous energy is transferred in another passage gone.
One of preparation technology's feature of the present invention is the technology that has adopted wet etching on silicon chip, makes V groove array, is used for positioning optical waveguides, uses epoxy resin glue that optical fiber is bonded on the V groove, and optical fiber and silicon chip are processed together.
Another feature of preparation technology of the present invention is the side of optical fiber to be used the method for chemically mechanical polishing, makes the fibre core high index of refraction of optical fiber partly expose out, thereby has improved coupling efficiency.
Its concrete manufacture craft process is
(1) method of employing wet corrosion on silicon chip is produced V-type groove array, is used for fiber orientation, and fiber orientation is to be bonded on the V-type groove with epoxy resin;
(2) be bonded at the method for the side of the optical fiber on the V-type groove, make the fiber core high index of refraction partly expose out, be convenient to coupling with chemically mechanical polishing;
(3) angle is more little between the optical fiber of input optical fibre layer and output optical fibre layer, and the loss of generation is just more little, for reducing coupling loss, should reduce the angle between input optical fibre and the output optical fibre as far as possible, generally should be less than 8 degree.
(4) the very thin polymkeric substance of one deck is added at the coincidence position between output and input optical fibre layer, and the thickness of this polymkeric substance is 8-12um, and the refractive index of this polymkeric substance is between 1.4~1.5;
This shows that full fiber type N provided by the invention * N photoswitch is made of input optical fibre layer, output optical fibre layer and optical modulation layer, optical modulation layer that is to say the position of this two-layer coincidence between input optical fibre layer and output optical fibre layer.The optical fiber of input optical fibre layer and output optical fibre layer all is bonded on the V-type groove array, direct coupling channel as input and output.
Description of drawings
Fig. 1 is the patent of invention product structure synoptic diagram of previous Agilent Technologies related to the present invention.It adopts the collimated coupling, and array mirror.
Fig. 2 is structural representation of the present invention (is example with 4 * 4)
Fig. 3 is a cut-open view of the present invention
Fig. 4 is an another kind of way of realization of the present invention, a kind of 1 * 2 waveguide type photoswitch.
Fig. 5 is to be 1 * N (diagram N=4) photoswitch of unit with the present invention's 1 * 2 photoswitch.
Embodiment
Embodiment 1:4 * 4 optical switch element Fig. 2 and Fig. 3 are the structural representation and the cut-open view of present embodiment, and it is by input optical fibre layer 203, output optical fibre layer 204, and the silicon chip 202 of fixed fiber and V groove array 205 and polymeric layer 201 are formed.
Its manufacture craft process is: constitute optical modulation layer
Earlier optical fiber is fixed on the V groove array 205 with epoxy resin, and requires every optical fiber to want the bottom of fully close V groove.Use the method for chemically mechanical polishing (CMP) then, optical fiber and silicon chip are polished together, come out, and grind off a seldom part until the fibre core of optical fiber.Certain angle is arranged between input optical fibre and the output optical fibre, and angle is more little, and the loss that causes is more little.For the loss that reduces to be coupled, reduce the angle of input and output optical fiber, it is 5 ° that present embodiment is selected angle for use.In order to realize working alone of each passage, will in the middle of the coincidence position of output and input optical fibre, add very thin one layer of polymeric, the medium as light path is switched constitutes optical modulation layer 201.The refractive index of this polymkeric substance is between 1.45.When polymkeric substance satisfies voltage, just can make the luminous energy of input optical fibre be transformed into the output optical fibre the inside, thereby realize the translation function of switch.
Embodiment 2:1 * 2 optical switch elements (as shown in Figure 4), at first make two waveguides 401 that distance is very near, between two waveguides, make polymeric layer, by electrode 403, apply voltage, the light of input waveguide 401 can be switched between output waveguide 402 and 404.
The input waveguide and the output waveguide level of this 1 * 2 optical switch element are linked up, just constituted its manufacture craft of photoswitch (as shown in Figure 5) such as the embodiment 1 of 1 * N.

Claims (3)

1. the N of a full fiber type * N photoswitch, it is made of input optical fibre layer, output optical fibre layer and optical modulation layer.It is characterized in that optical modulation layer is positioned at the coincidence position of input optical fibre layer and output optical fibre layer; The optical fiber of input optical fibre layer and output optical fibre layer all is bonded on the V-type groove display, and optical fiber is directly as the coupling channel of input and output.
2. press the N * N photoswitch of the described full fiber type of claim 1, it is characterized in that angle is less than 8 ° between input optical fibre layer and the output optical fibre layer, between the coincidence position of input optical fibre layer and output optical fibre layer, adding thickness is the polymkeric substance of 8-12um, and its refractive index is between 1.4-1.5.
3. the N of a full fiber type * N optical switch preparation method is characterized in that:
(1) adopt corroding method on silicon chip, produce the V-type groove display that is used for positioning optical waveguides, optical fiber is bonded on the V-type groove with epoxy resin;
(2) optical fiber side that is bonded on the V-type groove partly exposes out with the fiber cores high index of refraction with chemical mechanical method;
(3) between input optical fibre layer and the output optical fibre layer angle less than 8 °;
(4) partly adding a layer thickness in the coincidence of input optical fibre layer and output optical fibre layer is 8-12um, the polymeric layer of refractive index between 1.4-1.5.
CNA2003101083501A 2003-10-31 2003-10-31 Full optical fiber type N Chi N optical swtich and preparing method Pending CN1540374A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1332242C (en) * 2005-05-25 2007-08-15 厦门大学 Total fiber-optical magneto-optical shutter
CN104678503A (en) * 2015-03-11 2015-06-03 哈尔滨工程大学 Optical fiber optical switch based on photothermal effect
CN104950396A (en) * 2015-07-06 2015-09-30 中国科学院半导体研究所 M*N optical switching array based on MEMS (micro-electro-mechanical system) technology
CN109143477A (en) * 2018-09-29 2019-01-04 南京邮电大学 A kind of 1 × 3 photoswitch based on V-type runner
CN116577876A (en) * 2023-07-13 2023-08-11 深圳市欧亿光电技术有限公司 Low-cost optical fiber optical switch and design method thereof

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1332242C (en) * 2005-05-25 2007-08-15 厦门大学 Total fiber-optical magneto-optical shutter
CN104678503A (en) * 2015-03-11 2015-06-03 哈尔滨工程大学 Optical fiber optical switch based on photothermal effect
CN104950396A (en) * 2015-07-06 2015-09-30 中国科学院半导体研究所 M*N optical switching array based on MEMS (micro-electro-mechanical system) technology
CN104950396B (en) * 2015-07-06 2018-03-23 中国科学院半导体研究所 A kind of M × N optical switching arrays based on micro-electromechanical technology
CN109143477A (en) * 2018-09-29 2019-01-04 南京邮电大学 A kind of 1 × 3 photoswitch based on V-type runner
CN109143477B (en) * 2018-09-29 2023-09-08 南京邮电大学 1X 3 optical switch based on V-shaped flow channel
CN116577876A (en) * 2023-07-13 2023-08-11 深圳市欧亿光电技术有限公司 Low-cost optical fiber optical switch and design method thereof
CN116577876B (en) * 2023-07-13 2023-10-03 深圳市欧亿光电技术有限公司 Low-cost optical fiber optical switch and design method thereof

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