CN1222795C - Two-dimension optical switcvh matrix made by adopting double piezoelectric crystal chip driver - Google Patents
Two-dimension optical switcvh matrix made by adopting double piezoelectric crystal chip driver Download PDFInfo
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- CN1222795C CN1222795C CN 02112181 CN02112181A CN1222795C CN 1222795 C CN1222795 C CN 1222795C CN 02112181 CN02112181 CN 02112181 CN 02112181 A CN02112181 A CN 02112181A CN 1222795 C CN1222795 C CN 1222795C
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Abstract
The present invention relates to a two-dimension optical switch matrix made by double piezoelectric crystal chip drivers, which belongs to the field of optical communication. The present invention is characterized in that the arrangement mode of mirror surfaces is developed into a non close arrangement mode from a close arrangement mode; the arrangement mode of optical fiber aligners is developed into the mode of aligning the gap of the mirror surfaces from the original mode of aligning the centers of the mirror surfaces; double piezoelectric crystal chip drivers are formed by mutually and parallelly gluing two long piezoelectric materials together; an intermediate electrode is inserted along a gluing surface; a second electrode and a third electrode are distributed on two other surfaces which correspond to the gluing surface; the roots are fixed on a bracket; during work, different voltages are added on piezoelectric chips along electrodes for generating curve; a curve direction and a curve size are controlled by the voltages; the mirror surfaces are inserted into positioning grooves arranged on the free ends of double piezoelectric crystal chips or are glued on the side walls of the free ends of the double piezoelectric crystal chips by a gluing method. The present invention breaks through the limit that the center of a mirror surface which does not work is not allowed to be at the same height with the centers of the aligners.
Description
Technical field
The present invention relates to a kind of two-dimentional optical switch matrix and preparation method thereof, relate to a kind of optical switch matrix and method thereof that adopts double piezoelectric crystal chip driver to make or rather, belong to optical communication field.
Background technology
At present, it is more and more general to adopt optical fiber to carry out the long-range transmission of voice and data, and the requirement of the data capacity that can carry light also improves constantly.How more effectively to utilize the bandwidth of existing fiber, improving transfer efficiency is a vital problem, current, than successful method is to adopt wavelength-division multiplex technique (WDM:Wave Division Multiplexing), and it can carry out information transmission by the light wave with a plurality of wavelength independently on same optical fiber.Along with the widespread use of WDM technology, increasing to the demand of conversion of the light path of various complexity and routing device in network service.Photoswitch plays crucial effect in optical-fiber network, optical switch matrix particularly, it is to make up light and insert/core of division multiplexer equipment (OADM:OpticalAdd-Drop Module) and the cross interconnected equipment of light (OXC:Optical Cross Connect).OADM is one of optical-fiber network key equipment, is generally used for Metropolitan Area Network (MAN) and backbone network.The concrete mode on road is a lot of up and down to realize the OADM light signal, but in most cases all used photoswitch realize on the light signal in the dense wave division multipurpose optical-fiber network/following road function.OXC is the nucleus equipment of WDM light exchange, adopt the photoswitch that volume is littler, price is more cheap to replace expensive high speed electronic switch device, be that direct sunshine cross-connect technology substitutes traditional light-electrical-optical (OEO) switch technology, the development of all optical network is had strategic importance.Based on the switch of electricity conversion is light exchange towards specific transfer rate, in case the network speed-raising, will upgrade and adapt to transfer rate faster in electric aspect.On the contrary, light directly exchange is transparent to transfer rate, and the photoswitch that is equipped with can satisfy the demand of following optical-fiber network speed-raising equally now.Photoswitch makes OADM and OXC have the dynamic-configuration reciprocal exchange of business and supportive protection switch function, and when network broke down, node switched to the fault business in the alternate routing, has strengthened viability and the protect networks and the recovery capability of network.Along with the development of optical transfer network technology, high capacity, high speed exchange, transparent, low-loss photoswitch will play even more important effect in development of optical network.
Mechanical optical switch is a kind of very important photoswitch, mechanical optical switch have insertion loss lower (＜2dB), the isolation height (＞45dB), not shaken by sheet and advantage such as wavelength affects, widespread use in optical communication.Mechanical optical switch is exactly for one type to reach straight-through light path or stop light path by the control minute surface, realizes the switching of light.In optical design, the optical switch matrix structure of switching in the 3 D auto space is called three-dimensional structure, and the optical switch matrix structure of switching at two-dimentional free space is called two-dimensional structure.
Two dimension N * N optical switch matrix be by one group of two dimension mirror array and mutually perpendicular optical fiber collimator capable/row line up optical texture (Fig. 1), two-dimentional N * N optical switch matrix needs N
2Individual minute surface is finished N
2The optical cross connect of individual free space, if to realize from the capable input of m switch to n row output (m, n＜=N), must be at m capable and n row point of crossing minute surface is arranged, the while is not having minute surface on other position of intersecting point on the light working direction.Have only this point of crossing minute surface of maintenance to the input reflection of light, the light of just setting up capable input of m and the output of n row is connected.According to this principle, at a time, can realize the arbitrary group of exchange that is input to N output from N.It is exactly the state of controlling the point of crossing minute surface that the two dimension optical switch matrix carries out the light exchange: minute surface can also can correspondingly, produce two kinds of different control methods from " nothing " to " having " from " having " to " nothing ".The first, the point of crossing minute surface initially exists, and during the light exchange, the point of crossing minute surface disappears; It two is, the point of crossing minute surface does not initially exist, and during the light exchange, minute surface appears in the position, point of crossing.More than the mode of motion of two kinds of control mirror status the translation or the various rotation of vertical paper are arranged usually.Obviously, the mirror status number that first method need change is that N (N-1) is individual, and the mirror status number that second method need change is N.In two-dimentional optical switch matrix, because minute surface square formation and optical fiber collimator come in the plane, greatly facilitate the coupling and the encapsulation of photoswitch, and mirror status has only two kinds, so the positioning accuracy request of mirror position is low, tolerance is big, and correspondent control circuits is simple, generally speaking, open loop control just can meet the demands.But the extendability of this structure is subjected to the restriction of light path and chip size significantly, is no more than 32 ports (needing 1024 micro mirrors) usually.
One of feature of two-dimentional optical switch matrix shown in Figure 1 is the minute surface square formation of solid matter, generally speaking, and should be very close to each other between the shortest principles and requirements adjacent mirror facets of light path; Two of feature is centers over against minute surface, the center of optical fiber collimator.More than 2 be the distinguishing feature of this structure, be referred to as two-dimentional minute surface solid matter optical switch matrix.
Two dimension minute surface solid matter optical switch matrix exists following two weak points.One is that minute surface does not allow in the diagonal translation, and this is because do not allow the space of minute surface along the diagonal translation between the solid matter minute surface; Its two center for the minute surface of not working can not be in sustained height with the collimating apparatus center, because light path is to propagate on the locality of minute surface arrangement, idle minute surface can not stop the light path propagation, need to disappear, the center of the minute surface that just requires not work can not be with the collimating apparatus center on same height.
High performance optical switch matrix needs the optical fiber collimator of long reach and low insertion loss to carry out free-space optical transmission and coupling, present commercial miniature fiber collimating apparatus is fit to the input and output optically-coupled of optical switch matrix, but all at the hundreds of micron, this has proposed requirement to driver to the beam waist diameter of hot spot usually.
Array driver in the optical switch matrix is most important, and the driver discreteness that adopts conventional art to make is big, and volume is big, is not suitable for making the array device.Optical switch matrix requires each driver each side character (comprising size, drive performance) all to want the same, just can produce the high drive array of consistance; Optical switch matrix requires the volume of each driver little, just can produce the little optical switch matrix of volume, is fit to the needs of following device development.Adopting microelectric technique to make microelectromechanical systems (MEMS:Micro electro mechanical system) on silicon substrate is the new technology of rising in the world the end of the eighties in last century, represents the direction of WeiLai Technology development.MEMS itself is a kind of technology, and its intension is very extensive, is not confined to silicon materials and IC technology, has developed many materials and the manufacturing process MEMS family that enriches constantly.The surperficial micro-processing technology of typical MEMS technology---silicon can be processed high conformity, drive array that size is little on silicon substrate, many in the world companies adopt this technological development optical switch matrix.The easiest realization of MEMS electrostatic actuator array, but have the shortcoming that displacement is little or corner is little; The MEMS electromagnetic driver has big displacement, but for array device, electromagnetic screen and power consumption are difficult points; The MEMS hot driver can be realized large deformation, but heating is a pair of contradiction with heat radiation, certainly will cause the utmost point asymmetry of switching time.Through well-designed MEMS electrostatic actuator, for example the lever electrostatic actuator of OMM company can drive micro mirror and realize that light switches, but the reliability of device remains to be confirmed.
Summary of the invention
First purpose of the present invention is to overcome the deficiency of two-dimentional minute surface solid matter optical switch matrix, improve the positional alignment relation of arrangement mode and the minute surface and the collimating apparatus row/row of minute surface, broken through the restriction at " the minute surface center of not working do not allow with collimating apparatus center on same height ", proposed the non-solid matter optical switch matrix of a kind of two-dimentional minute surface and design new thought.
Second purpose of the present invention is to improve present Drive technology, adopts double piezoelectric crystal chip driver to make the driver of optical switch matrix.Double piezoelectric crystal chip driver because of simple in structure, response speed is fast, the bearing capacity height, low energy consumption and lower-price characteristic receive much concern.Piezoelectric is to be used for producing micrometric displacement by external electrical field, utilizes piezoelectric to realize that displacement mainly contains dual mode: a kind of pure piezoelectric deforming that is the identical piezoelectrics of multilayer superpose produces big displacement; Another kind is a double piezoelectric crystal chip driver.The present invention adopts double piezoelectric crystal chip driver, because double piezoelectric crystal chip driver can be realized big displacement (1mm) motion easily, response is fast, and control is accurately simple, handling ease.
The 3rd purpose of the present invention is to adopt advanced MEMS technology to prepare the driver element and the high-precision micro-optic assembly platform of high conformity, use little mounting technology to prepare the photoswitch drive array, to overcome the big and bulky shortcoming of driver discreteness that conventional art is made.
First purpose of the present invention is implemented by following manner;
In the coordinate system of Fig. 2, z axle positive dirction is a short transverse,
(1) minute surface 1 arrangement mode develops into non-solid matter by solid matter, and the space requirement of minute surface along diagonal 5 translations should be satisfied in the gap between the adjacent mirror facets, and minute surface 1 becomes 135 degree to line up Nxm square formation (Fig. 2) with x axle horizontal positive dirction.
(2) between the adjacent mirror facets in the bee-line on the x direction 6 and the bee-line on the y vertical direction 7 all greater than hot spot 8 maximum gauges of optical fiber collimator 2, guarantee that hot spot 8 can propagate (Fig. 2) in the gap.
(3) optical fiber collimator 2 of x direction horizontally-arranged forms a line along the x direction, and the optical fiber collimator 2 of y direction vertical setting of types is in line along the y direction, and the center of optical fiber collimator 2 is facing to minute surface gap (Fig. 2).
(4) minute surface 1 is reflectings surface 12 in face of the one side of optical fiber collimator 2, and another side is an absorption surface 13, and the height 9 of minute surface 1 and width 10 are all greater than the maximum gauge (Fig. 3 and Fig. 4) of optical fiber collimator 2 hot spots 8.
(5) the center line intersection point of the optical fiber collimator 2 of the optical fiber collimator 2 of arbitrary horizontally-arranged and arbitrary vertical setting of types is positioned on the extended line of minute surface 1 reflecting surface 12 (Fig. 2).
When (6) initial, horizontally-arranged optical fiber collimator 2 sends on the working direction that light signal is a hot spot 8 without any minute surface (Fig. 2).
When (7) switching, minute surface 1 along diagonal 5 by origin-location 3 translations to position of intersecting point 4 places, reflecting surface 12 makes optical return signal to vertical setting of types optical fiber collimator 2 by principle of reflection change optical path direction.The move distance of minute surface should guarantee that hot spot 8 is reflected fully by the minute surface of position of intersecting point 4, and no matter whether minute surface 1 moves, minute surface centre-height constant substantially (Fig. 2 and Fig. 3).
(1≤m when (8) light of foundation from the capable optical fiber collimator 2 of m to n row optical fiber collimator 2 connects, n≤N), according to the 7th, minute surface 1 moves to capable optical fiber collimator of m and n row optical fiber collimator position of intersecting point 4 places, simultaneously the optical fiber collimator 2 of horizontally-arranged between the position of intersecting point 4 and position of intersecting point 4 to should be between the optical fiber collimator 2 of vertical setting of types without any minute surface (Fig. 2).
(9) in the Nxm optical switch matrix, each group light exchange is as long as N minute surface of motion has the individual minute surface of N (m-1) static (Fig. 2) at most.
Second purpose of the present invention implemented by following manner:
(1) double piezoelectric crystal chip driver 100 is pasted together in parallel to each other by two strip piezoelectrics 14, inserts target 17, the second electrodes 16 along stickup face and then is distributed on two other face relative with stickup face with third electrode 18, and 15 is solder joint.Piezoelectric is relaxor ferroelectric monocrystal or piezoelectric crystal and pottery, and deformation reaches 0.82%-1%.The free end of double piezoelectric crystal chip driver 100 is 100a, and root is 100b, and thickness is 0.2mm-1mm, and design provides (Fig. 5) to length according to deformation quantity.
(2) double piezoelectric crystal chip driver 100 root 100b are fixed on the bearing 19.When not working, double piezoelectric crystal chip driver 100 is in natural balanced state, and during work, different voltage is added on the piezoelectric patches along electrode 16-17 and 17-18, make a piezoelectric patches elongation another root piezoelectric patches contraction simultaneously, it is crooked to cause double piezoelectric crystal chip driver 100 to produce.The voltage constant of common electrode 16, electrode 18 ground connection, put on two voltages on the piezoelectric patches and change by changing the voltage signal of electrode 17, making, the bending direction of double piezoelectric crystal chip driver 100 and crooked size are correspondingly controlled by the voltage signal size that puts on the electrode 17.100 root 100b are limited by bearing 19 because of double piezoelectric crystal chip driver, and all piezoelectricity deformation is all born by free end 100a, thereby makes chip deflector, and free end 100a has produced displacement (Fig. 6).
(3) minute surface is to be made by optical glass, reflecting surface 12 forms through polishing, plating reflectance coating earlier, absorption surface 13 coating ahsorption membranes, the optical wavelength range of reflection and absorption is from 1.3um to 1.7um, wherein reflectance coating is meant that reflectivity is greater than the metal film more than 95%, as metals such as gold, aluminium, or the digital reflex rate is greater than the deielectric-coating more than 95%, as Si/SiO
2Deng multilayer complex films.The dimensions length of minute surface is 0.5mm-3mm, highly is 0.5mm-3mm, and thickness is 0.1mm-0.5mm (Fig. 4).The reflection and the absorbing wavelength scope from 1.3 μ m to 1.55 μ m.
(4) Fig. 7 has enumerated minute surface and has been bonded to the free-ended two kinds of typical structures of bimorph: in the locating slot of opening on minute surface or the insertion bimorph free end, or the absorption surface of minute surface sticks on the free end of bimorph; Minute surface is vertical mutually with bimorph.Preparation method corresponding to two kinds of structures is: insertion and mounting method.In Fig. 7 a, the free end 100a of bimorph 100 leaves a locating slot 20, the thickness wringing fit of groove width size and minute surface, groove depth is got the height 10%-40% of minute surface, along the direction shown in the arrow minute surface 1 is inserted in the locating slot 20, make it wringing fit, use glue then, cement as ultra-violet curing glue, epoxy resin etc., require minute surface 1 vertical with bimorph 100.In Fig. 7 b, with the reflecting surface 12 of minute surface 1 outwardly, absorption surface 13 inwardly, closely be adjacent to bimorph 100 free end 100a by the direction shown in the arrow, use glue, cement, require minute surface 1 vertical with bimorph 100 as commercially available ultra-violet curing glue, epoxy resin etc.Process the double piezoelectric crystal chip driver of band minute surface like this, be called mirror driver 200 hereinafter.
(5) Fig. 8 provides mirror driver 200 and carries out the deformation map that light path is switched, and the motion of minute surface 1 among Fig. 2 and Fig. 3 is made an explanation.When mirror driver 200 was not worked, minute surface 1 was stopped less than light signal 8; When mirror driver 200 work, minute surface 1 is intercepted light signal 8.Adopt this method, can be accurately and fast, can repeatedly realize the free-ended translation of double piezoelectric crystal chip driver, be installed in free-ended minute surface and produce displacement thereby make.
The 3rd purpose of the present invention is promptly by following enforcement:
(1) parallel the sticking together of piezoelectric that two block sizes are the same cuts into the same bimorph of size 100 with cutting machine, and the tolerance of size is controlled at the 6-10 micron.
(2) bimorph 100 of well cutting is bonded in the very flat substrate 21 in surface with wax as Fig. 9, with the buffing machine datum end face of dishing out earlier, and then reference field is bonded in the very flat substrate 21 in surface, throw the other end again, guarantee the consistance of bimorph 100.Adopt insertion or method of attaching that minute surface is fixed to and form mirror driver 200 on the double piezoelectric crystal chip driver.
(3) adopt micro mechanical technology to make bearing 19, guaranteed the consistance of the strip groove 22 of bearing 19, material is a monocrystalline silicon, and thickness is at 0.5mm.Silicon chip is coated with thick photoresist 10-20um earlier, and under mask figure protection, the flute profile of photoresist is produced in uv-exposure, development, erodes away groove 22 with the deep reaction ion etching technology again, and dimensional accuracy is controlled at micron dimension (Figure 10).
(4) adopt two bearings 19 to aim at up and down, the method for fixed mirror face driver 200 guarantees the homeotropic alignment of fixed mirror face driver and bearing.Two bearings are aimed at up and down mutually, and there is spacing 23 centre, and the size of spacing 23 requires to provide according to the verticality of mirror driver and bearing.Then mirror driver 200 is inserted along groove 22 one by one, fix with glue, Figure 10 is the structural drawing of bearing and the structural drawing of seeing along the direction of arrow.
(5) electrode of the drive array that will assemble is burn-on one by one with the corresponding solder joint on the control circuit board 24, is fixed on the carriage 25 again, at last optical fiber collimator is placed on the carriage 25 according to light path design, forms the optical switch matrix device.
(6) a kind of optical switch matrix is characterized in that: adopt non-solid matter photoswitch design of two-dimentional minute surface and double piezoelectric crystal chip driver and other optical element to constitute flashlight from being input to the equipment of output exchange.
(7) advantage of the present invention is: substitute existing driver with double piezoelectric crystal chip driver, adopt the two-dimentional minute surface optical design of non-solid matter to adapt with it, the utilization micro mechanical technology is made high-precision location assembly platform, makes optical switch matrix.
Description of drawings
The optical switch matrix schematic diagram of Fig. 1 two dimension minute surface solid matter.
The optical switch matrix schematic diagram of the non-solid matter of Fig. 2 two dimension minute surface.
Fig. 3 minute surface moves and light path switching principle figure.
Fig. 4 mirror surface structure figure.
Fig. 5 double piezoelectric crystal chip driver structural drawing.
Fig. 6 double piezoelectric crystal chip driver drive principle figure.
Fig. 7 minute surface and bimorph assembling synoptic diagram.
Fig. 8 bimorph drives minute surface translation synoptic diagram.
Fig. 9 bimorph end face polishing bonding figure.
Figure 10 seat structure and mirror driver are fixed on the bearing synoptic diagram.
Figure 11 optical switch matrix device block diagram.
The spatial relation synoptic diagram of each parts in Figure 12 optical switch matrix.
Embodiment
Further to illustrate substantive progressive and outstanding feature of the present invention, its concrete steps are as follows by following embodiment:
1. minute surface is of a size of 0.8mm * 1.1mm * 0.2mm, and one side throws into optical flat and the plating reflectivity reaches golden film more than 95%, 0.23 micron of thickness, another side coating ahsorption membrane.
2. double piezoelectric crystal chip driver is made by piezoelectric, has locating slot at its free end, clamping slot depth 0.3mm, and width 0.3mm, double piezoelectric crystal chip driver are of a size of 30mm * 0.6mm * 0.3mm.
3. minute surface is tightly fixed in the free-ended locating slot of double piezoelectric crystal chip driver, and fixes, make the driver of 64 band minute surfaces with ultra-violet curing glue.
4. adopt micro mechanical technology to make bearing, the material of bearing is a monocrystalline silicon, thickness 0.5mm.Silicon chip is coated with thick photoresist 10-20um earlier, and under mask figure protection, the flute profile of photoresist is produced in uv-exposure, development, erodes away groove with the deep reaction ion etching technology again, and dimensional accuracy is controlled at micron dimension.
5. the fixedly calculating of array driver locating slot on the bearing.The maximum waist diameter of the optical fiber collimator of X, Y direction 0.35mm, because miter angle incident, the catoptron minimum length is 0.5mm.According to the driver size of embodiment 1 and embodiment 2, the locating slot of bearing is of a size of 0.6mm * 0.3mm * 0.5mm, and the locating slot spacing is 1.35mm, the stroke 1mm of double piezoelectric crystal chip driver.
With two bearings up and down secured in alignment on carriage, standoff distance 3mm, in insertion locating slot of double piezoelectric crystal chip driver, fix with glue, again the electrode of driver is soldered on the solder joint of circuit board, the optical fiber collimator optical alignment is placed on makes optical switch matrix on the carriage at last.
Claims (8)
1. an optical switch matrix that adopts double piezoelectric crystal chip driver to make comprises minute surface and collimating apparatus, and minute surface becomes 135 degree to line up the NxN square formation with x axle positive dirction, it is characterized in that:
(1) the minute surface arrangement mode is non-solid matter, and the bee-line between the adjacent mirror facets on horizontal x direction and vertical y direction is all greater than the maximum spot diameter of optical fiber collimator; The space requirement of minute surface along the diagonal translation should be satisfied in gap between the adjacent mirror facets;
(2) the optical fiber collimator arrangement mode is for facing toward the minute surface gap, and the optical fiber collimator center line intersection point of arbitrary horizontally-arranged and vertical setting of types is positioned on the extended line of mirror reflection surface;
(3) double piezoelectric crystal chip driver is to be pasted together in parallel to each other by two strip piezoelectrics, inserts target along stickup face, and second electrode then is distributed on other relative two faces of stickup face with third electrode, and its root is fixed on the support;
(4) in the locating slot on the free end of minute surface or insertion bimorph; Or the absorption surface of minute surface sticks on the bimorph free end, and minute surface is vertical with bimorph;
When (5) initial, double piezoelectric crystal chip driver is motionless, on the hot spot working direction that optical fiber collimator sends without any minute surface; When light path is switched, minute surface along diagonal by the original position translation to the intersection point place, minute surface is stopped light signal, is that the horizon light signal is totally reflected to the vertical setting of types optical fiber collimator.
2. the optical switch matrix of making by the described employing double piezoelectric crystal chip driver of claim 1, the material that it is characterized in that described minute surface is an optical glass, is reflecting surface in face of the one side of optical fiber collimator, reflecting surface forms through polishing, plating reflectance coating; Another side is an absorption surface, coating ahsorption membrane; Minute surface height and width are all greater than the maximum spot diameter of optical fiber collimator.
3. the optical switch matrix of making by the described employing double piezoelectric crystal chip driver of claim 2 is characterized in that described reflectance coating is meant reflectivity greater than the metal film more than 95%, for a kind of in gold or the aluminium; Or the digital reflex rate is greater than the Si/SiO more than 95%
2MULTILAYER COMPOSITE deielectric-coating, reflection and the optical wavelength range that absorbs from 1.3 μ m to 1.55 μ m.
4. by the optical switch matrix of the described employing double piezoelectric crystal chip driver making of claim 2, it is characterized in that the size of described minute surface, its length is 0.5-3mm, highly is 0.5-3mm, and thickness is 0.1-0.5mm.
5. the optical switch matrix of making by the described employing double piezoelectric crystal chip driver of claim 1 is characterized in that piezoelectric is relaxor ferroelectric monocrystal or piezoelectric crystal or the pottery that deformation reaches 0.82%-1%.
6. by the optical switch matrix of the described employing double piezoelectric crystal chip driver making of claim 1, it is characterized in that: minute surface inserts the locating slot of opening on the bimorph free end, and its groove width and minute surface thickness wringing fit, groove depth are the height 10%-40% of minute surface.
7. by the optical switch matrix of the described employing double piezoelectric crystal chip driver making of claim 1, it is characterized in that making step is:
(1) parallel the sticking together of piezoelectric that two block sizes are the same cuts into the same bimorph of size with cutting machine, and the tolerance of size is controlled at the 6-10 micron; Two end faces polishings with the bimorph of well cutting;
(2) adopt insertion or mounting method that minute surface is fixed to and form mirror driver on the double piezoelectric crystal chip driver;
(3) adopt micro mechanical technology to make bearing, the material of bearing is a monocrystalline silicon, thickness 0.5mm silicon chip is coated with thick photoresist 10-20um earlier, under the protection of mask figure, uv-exposure, development, produce the flute profile of photoresist, erode away groove with the deep reaction ion etching technology again, dimensional accuracy is controlled at micron dimension;
(4) adopt two bearings to aim at up and down, the fixed mirror face driver and inserts mirror driver on bearing one by one along groove, and homeotropic alignment becomes array;
(5) electrode of the drive array that will assemble is burn-on one by one with the corresponding solder joint on the control circuit board, is fixed on the carriage again, at last optical fiber collimator is placed on the carriage according to light path design, forms the optical switch matrix device.
8. by the optical switch matrix of the described employing double piezoelectric crystal chip driver making of claim 7, it is characterized in that:
Described insertion is to drive a locating slot on the bimorph free end, groove width and minute surface thickness wringing fit, groove depth is the 10%-40% of minute surface height, inserts locating slot from the top down along groove, cement with ultra-violet curing glue or epoxy resin then, minute surface is vertical with bimorph;
Described mounting method is that the absorption surface with minute surface is adjacent to the free end at bimorph, cements with ultra-violet curing glue or epoxy resin, and minute surface is vertical with bimorph.
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| CN 02112181 CN1222795C (en) | 2002-06-21 | 2002-06-21 | Two-dimension optical switcvh matrix made by adopting double piezoelectric crystal chip driver |
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| CN 02112181 CN1222795C (en) | 2002-06-21 | 2002-06-21 | Two-dimension optical switcvh matrix made by adopting double piezoelectric crystal chip driver |
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