CN2558076Y - Chip cleaning machine - Google Patents
Chip cleaning machine Download PDFInfo
- Publication number
- CN2558076Y CN2558076Y CN 02235920 CN02235920U CN2558076Y CN 2558076 Y CN2558076 Y CN 2558076Y CN 02235920 CN02235920 CN 02235920 CN 02235920 U CN02235920 U CN 02235920U CN 2558076 Y CN2558076 Y CN 2558076Y
- Authority
- CN
- China
- Prior art keywords
- rotating disk
- wash bowl
- motor
- rotary disc
- washing cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
Disclosed is a wafer washer. A washing cylinder is arranged on a frame and a flange is arranged on the hemline of the washing cylinder. A cover body is pivoted on the upper edge of the washing cylinder. A rotary disc is arranged on the inner bottom of the washing cylinder. A motor is arranged on the lower part of the washing cylinder. The flange arranged on the motor is integrated with the lower flange arranged on the hemline of the washing cylinder by a screw. The shaft end of motor output shaft is locked on the hemline of the rotary disc. A plurality of positioning bodies are symmetrically arranged on the surface of the rotary disc. A plurality of limit columns are symmetrically arranged on the edge of the rotary disc surface and a plurality of fixtures are arranged on the surface of the rotary disc. A groove which is to be inserted with wafer carrying discs is arranged on the center of each fixture. A groove hole is formed on the top surface of each fixture. A side flow through hole and a bottom flow through hole are respectively formed on the lateral and bottom surfaces of each fixture. An embedding body is arranged on an embedded groove which is formed by the lower edge of the end surface and the positioning body and the rotary disc. The wafer carrying disc can be directly inserted and positioned on the utility model which can be directly embedded and positioned on the rotary disc of the washing cylinder; thereby, the complex positioning process is avoided and the effect of convenient application is realized.
Description
Technical field
The utility model relates to a kind of cleaning device of wafer, relates in particular to a kind of position fixing process loaded down with trivial details to chip carrying disk, easy to operate wafer cleaning machine exempted.
Background technology
Chemical agent that wafer is attached in processing procedure or impurity must be cleaned via cleaning machine in good time.But the cleaning procedure of existing cleaning machine, there is no tool can directly locate for chip carrying disk, makes that the position fixing process of chip carrying disk very is a trouble, so operation is very inconvenient.
Summary of the invention
In order to overcome pretty troublesome that existing wafer cleaning machine exists to the chip carrying disk position fixing process, the shortcoming that operation is very inconvenient, the utility model provides a kind of wafer cleaning machine, its tool can be for the chip carrying disk location of directly planting, and can directly set the rotating disk that is positioned wash bowl, can exempt loaded down with trivial details position fixing process, have easy to operate effect.
The technical scheme that its technical problem that solves the utility model adopts is:
A kind of wafer cleaning machine is characterized in that, it comprises a frame; One wash bowl is to be arranged on the frame, and its root edge is provided with lower flange; One lid, the one lateral margin is hubbed at the wash bowl upper limb by rotating shaft, and inner face is provided with cleaning part; One rotating disk is to be installed on the wash bowl inner bottom part; One motor, it is the below that is arranged at described wash bowl, the top of this motor is provided with upper flange, utilize the lower flange of screw and this wash bowl root edge to be fixed as one by this upper flange, and after the output shaft of motor is upward through the waterproof jacket that is arranged at wash bowl bottom, the axle head of this output shaft is locked in described rotating disk root edge, starter, and motor drives the rotating disk rotation by output shaft; Several positioning bodies are the surfaces that are symmetrically fixed on aforementioned rotating disk, and these several positioning body opposite sides upper limbs are formed with protruding lip, constitute caulking groove between protruding lip and the rotating disk; Several limited posts are the edges that are symmetrically fixed on disc surfaces; Several tools, be to be arranged on the surface of rotating disk, these several tools directly are embedded at respectively in the corresponding caulking groove between the adjacent positioned body, the central authorities of each tool are provided with the slot of planting for chip carrying disk, end face then is formed with slotted eye, side and bottom surface are respectively equipped with effluent through hole and underflow through hole, and the end face lower edge to should positioning body and rotating disk between the caulking groove that constitutes be provided with inlay.
Aforesaid wafer cleaning machine, wherein tool is formed by a base and a loam cake assembly group.
Aforesaid wafer cleaning machine, wherein the lid end face is provided with and lifts handle.
The beneficial effects of the utility model are, its tool can be for the chip carrying disk location of directly planting, and can directly set the rotating disk that is positioned wash bowl, can exempt loaded down with trivial details position fixing process, has easy to operate effect.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is a stereoscopic schematic diagram of the present utility model
Fig. 2 is the utility model vertical profile TV structure figure
Fig. 3 is the cutaway view of 3-3 hatching line shown in Figure 2
Fig. 4 is that tool of the present utility model is set view
Fig. 5 is the view that the utility model tool is planted for chip carrying disk
Fig. 6 is the cutaway view of the utility model tool
Embodiment
At first, see also Fig. 1 to shown in Figure 3, the utility model comprises:
One frame 10;
One wash bowl 11 is to be arranged on the frame 10, and its root edge is provided with lower flange 111;
One lid 12, the one lateral margin is hubbed at wash bowl 11 upper limbs by rotating shaft 120, and inner face is provided with cleaning part, and the cleaning part in the present embodiment is a remover liquid nozzle 121;
One rotating disk 13 is the bottoms that are installed in the wash bowl 11;
One motor 14, it is the below that is arranged at aforementioned wash bowl 11, the top of this motor 14 is provided with upper flange 141, utilize the screw 142 and the lower flange 111 of these wash bowl 11 root edges to be fixed as one by this upper flange 141, and after the output shaft of motor 14 is upward through the waterproof jacket 112 that is arranged at wash bowl 11 bottoms, the axle head of this output shaft is locked in aforementioned rotating disk 13 root edges, starter 14, and motor 14 drives rotating disk 13 rotations by output shaft;
Several limited posts 16 are the edges that are symmetrically fixed on rotating disk 13 surfaces;
See also Fig. 5,6, several tools 17, be to be arranged on the surface of rotating disk 13, these several tools 17 directly are embedded at respectively in the corresponding caulking groove 152 of 15 of adjacent positioned bodies, the central authorities of each tool 17 are provided with the slot of planting for wafer 19 load plates 18 171, its end face then is formed with the slotted eye 172 that allows wafer 19 appear, and side and bottom surface are respectively equipped with effluent through hole 173 and underflow through hole 174, and the end face lower edge to should positioning body 15 and the caulking groove 152 of 13 formations of rotating disk be provided with inlay 175.
Based on said structure, the utility model is to be symmetrical arranged several positioning bodies 15 on the surface of the rotating disk 13 of wash bowl 11, and 15 of adjacent positioning bodies then constitute corresponding caulking groove 152, directly set the location for this tool 17.And the slot 171 of tool 17 can allow chip carrying disk 18 directly plant and locate, and whole position fixing process is very simple and convenient.Like this, when rotating disk 13 rotated, 17 of each tools can be resisted against this limited post 16 location because of centrifugal force, and the cleaning fluid of clean wafers 19 also can be owing to centrifugal force, and flow out from the effluent through hole 173 or the underflow through hole 174 of tool 17, can be not residual, cleaning can be carried out smoothly.In addition, be prior art owing to clean setting (as nozzle 121), do not repeat them here.
The utility model can directly be planted chip carrying disk 18 and be positioned in the tool 17, then tool 17 directly is embedded at the caulking groove 152 of 15 of adjacent positioned bodies, and whole position fixing process is very simple, and is easy to operate.
In sum, the structure that the utility model disclosed by former times is not had, and really can reach the effect of expection, and tool can supply industrial utilization, meets novel patent requirement fully, so file an application in accordance with the law.
The above, it only is preferred embodiment of the present utility model, be not that the utility model is done any pro forma restriction, every foundation technical spirit of the present utility model all still belongs in the scope of technical solutions of the utility model any simple modification, equivalent variations and modification that above embodiment did.
Claims (3)
1, a kind of wafer cleaning machine is characterized in that, it comprises:
One frame;
One wash bowl is to be arranged on the frame, and its root edge is provided with lower flange;
One lid, the one lateral margin is hubbed at the wash bowl upper limb by rotating shaft, and inner face is provided with cleaning part;
One rotating disk is to be installed on the wash bowl inner bottom part;
One motor, it is the below that is arranged at described wash bowl, the top of this motor is provided with upper flange, utilize the lower flange of screw and this wash bowl root edge to be fixed as one by this upper flange, and after the output shaft of motor is upward through the waterproof jacket that is arranged at wash bowl bottom, the axle head of this output shaft is locked in described rotating disk root edge, starter, and motor drives the rotating disk rotation by output shaft;
Several positioning bodies are the surfaces that are symmetrically fixed on aforementioned rotating disk, and these several positioning body opposite sides upper limbs are formed with protruding lip, constitute caulking groove between protruding lip and the rotating disk;
Several limited posts are the edges that are symmetrically fixed on disc surfaces;
Several tools, be to be arranged on the surface of rotating disk, these several tools directly are embedded at respectively in the corresponding caulking groove between the adjacent positioned body, the central authorities of each tool are provided with the slot of planting for chip carrying disk, end face then is formed with slotted eye, side and bottom surface are respectively equipped with effluent through hole and underflow through hole, and the end face lower edge to should positioning body and rotating disk between the caulking groove that constitutes be provided with inlay.
2, wafer cleaning machine according to claim 1 is characterized in that described tool is formed by a base and a loam cake assembly group.
3, wafer cleaning machine according to claim 1 is characterized in that described lid end face is provided with to lift handle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02235920 CN2558076Y (en) | 2002-06-04 | 2002-06-04 | Chip cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02235920 CN2558076Y (en) | 2002-06-04 | 2002-06-04 | Chip cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2558076Y true CN2558076Y (en) | 2003-06-25 |
Family
ID=33710326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02235920 Expired - Lifetime CN2558076Y (en) | 2002-06-04 | 2002-06-04 | Chip cleaning machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2558076Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1765528B (en) * | 2004-10-28 | 2010-08-04 | 株式会社迪思科 | Rotary cleaning device and cutting device |
| CN101972764A (en) * | 2010-06-30 | 2011-02-16 | 张家港市超声电气有限公司 | Locking mechanism of door closure |
| CN108284095A (en) * | 2017-12-30 | 2018-07-17 | 铜陵日科电子有限责任公司 | A kind of quartz crystal processing unit (plant) |
-
2002
- 2002-06-04 CN CN 02235920 patent/CN2558076Y/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1765528B (en) * | 2004-10-28 | 2010-08-04 | 株式会社迪思科 | Rotary cleaning device and cutting device |
| CN101972764A (en) * | 2010-06-30 | 2011-02-16 | 张家港市超声电气有限公司 | Locking mechanism of door closure |
| CN101972764B (en) * | 2010-06-30 | 2012-12-26 | 张家港市超声电气有限公司 | Locking mechanism of door closure |
| CN108284095A (en) * | 2017-12-30 | 2018-07-17 | 铜陵日科电子有限责任公司 | A kind of quartz crystal processing unit (plant) |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20120604 Granted publication date: 20030625 |