CN2489463Y

CN2489463Y - Cleaning device for sheeting electronic element

Info

Publication number: CN2489463Y
Application number: CN 01227725
Authority: CN
Inventors: 吴湘涵; 吴永清
Original assignee: Individual
Current assignee: Individual
Priority date: 2001-06-25
Filing date: 2001-06-25
Publication date: 2002-05-01
Anticipated expiration: 2011-06-25

Abstract

The utility model relates to a cleaning device for sheeting electronic element, which is characterized in having a cleaning container which is arranged on the top of a machine platform and is pivoted with a sealing cover. The cleaning container is internally provided with a rotating plate which is driven by a driving device to rotate, and the top of the rotating plate is symmetrically provided with a plurality of supporting bases which are respectively provided with a stone holder gauge in a sliding way. A plurality of hollow and concave feeding spaces are respectively provided with the stone holders which are provided with sheeting electric elements, the stone holders inward inclined and hung on the rotating plate, a cleaning device which is dried by importing with temperature inert gas jet after being pressure gushed and cleaned, sheeting electric elements which are dipped, cleaned and dried by electrostatic inert gas and an operating device which operate the sequence motion, motion time and speed of each module.

Description

The cleaning device of sheet type electronic component

The utility model is about the cleaning device behind a kind of sheet type electronic component manufactured goods; Especially instigate to be used in thin little sheet type electronic component in the electronic building brick,, need cleaning to be equipped with the clean dry device that supplies next process operations in processing procedure mesexine institute remaining impurities.

(for example: quartz wafer) be generally used in the electronic building bricks such as wireless telecommunications part, quartz (controlled) oscillator, filter employed sheet type electronic component, after making, must remove various chemical agents or impurity and the static etc. that the processing procedure mesexine is attached, and provide clean electronic component to use for next processing procedure; Right manufactured goods as quartz wafer are thin again little, and (its size dimension is looked closely the electronic component of use and is decided, little person is about the wide 3.8mm of long 3.8mm thick 0.5～1mm), and it is very easily stressed cracked, commonly using procedure operation is that most quartz wafers are tiled in depression in the charging tray, soak again to insert in the ultrasonic waves cleaning liquid bath and sieve cleaning, and also must be dry after cleaning and other dipping bath in nitrogen etc. by the station operation, must in processing procedure, rock and sieve and wash, move cleaning and pursue the groove carrying, very easily the sheet type electronic component be dropped and existing its disappearance.

In view of this this case creator still studies in detail and improves, and discloses the cleaning device of a kind of sheet type electronic component of the utility model.

The utility model main purpose provides a kind of cleaning device of sheet type electronic component, and running off with the volatilization of cleaning fluid in the isolated sheet type electronic component scale removal process causes contaminated environment and injure human body.

A time purpose of the present utility model provides a kind of cleaning device of sheet type electronic component, make the sheet type electronic component can and the cleaning fluid friction of jet flow wash, with clean surface foreign material everywhere positively.

Another purpose of the present utility model provides a kind of cleaning device of sheet type electronic component, with the clean operation that seals the volume of equipment is reduced, and improves the utilization of area rate and reduces cost.

A purpose more of the present utility model provides a kind of cleaning device of sheet type electronic component, has certain clean ability, and centrifugal revolution gets rid of and remove and drying operation, and can be effective really, to increase production efficiency and to save labour turnover.

The purpose of this utility model and its feature will further describe in detail with relevant accompanying drawing in following description.

To being simply described as follows of accompanying drawing:

Fig. 1 is a charging tray schematic appearance of commonly using the sheet type electronic component.

Fig. 2 is a positive combination cut-away view of the present utility model.

Fig. 3 is a side of the present utility model combination dissected figure.

Fig. 4 is the combination dissected figure of overlooking of the present utility model.

Fig. 5 is a quartzy Sheng dish tool side-looking cut-away view of the present utility model.

Look rough schematic on Fig. 6 the 5th figure.

Fig. 7 is the rough schematic of the utility model cleaning operation.

Fig. 8 is the rough schematic of the utility model flip operation.

Shown in Fig. 2～4, the utility model is by a board 1, one washed container 2, one power set 3, and number charging tray tool 4, one clean dry devices 5, one actuation means 6 grades constitute.

Board 1 end face is embedded a washed container 2 pivots and connects a capping 21, the washed container 1 of raising or cover that one dynamic equipment 22 articulates capping 21 operations moves, or can raise or cover action by handle 211 manual operations that are connected with in the capping 21, washed container 2 bottoms that pass that one rotating disk, 23 bottoms are connected with a rotating shaft 231 sealings connect power set 3 driving shafts 31 that set firmly in the board 1, and washed container 1 bottom surface is provided with one and drains valve 24.

Outer rim is symmetrical arranged number and supports seat 25 on the rotating disk 23, and same axis respectively digs and establishes a downward and outer oblique fit slot 251 on each support seat 25, hold axle 41 with the pivot that each charging tray tool 4 both sides of slide fastener that bridge are connected with, the pivot of counterpoise is suspended on the rotating disk 23, and present count is surveyed shake device 26 on washed container 2 perisporiums, detect shake altogether takes place in the rotation such as rotating disk 23 assemblies such as grade, or vibrations stop to turn when surpassing set point.

Shown in Fig. 5,6, the pivot that every charging tray tool 4 both sides are connected with is held axle 41 and is provided with a circular groove 411 slide fasteners in the fit slot 251 of supporting seat 25, and every charging tray tool 4 separations are arranged with several material spaces 42 of putting, hold the charging tray P that many sheet type electronic component A are put in the shop to close to put to limit, and be equipped with many saturating vacancies 43, and two pivots to hold axle 41 support axis be that imbalance suspends, make inwardly tiltedly down predetermined angular (shown in Fig. 2,3) of each charging tray tool 4 center of gravity.

Clean dry device 5 is arranged on washed container 2 cappings 21 bottoms, contains: a spray pipe 51, removes liquid air jet pipe 52, one dry air jet pipe 53, one static air jet pipes 54.Spray pipe 51 is communicated with the cleaning fluid source of supply, and several hole for water sprayings 522 that wear of radiation-like are stretched in the revolution range that places each support seat 25 inner edge, make over against each charging tray tool 4 rotary track, and remove liquid air jet pipe 52 its mouth of pipe 521 neighborwise cappings 21 bottom surfaces of extending, finish to open (for example: nitrogen) blow down residual attached cleaning fluid spraying into noble gas when draining valve 24 in cleaning.

Dry air jet pipe 53 (for example: nitrogen) is connected the noble gas source of supply, wear several puff prots 531 and stretch interior each charging tray tool 4 jet flow of neighborwise of the revolution range that places each to support seat 25 inner edges, and establish a deep bead 532 in each fumarole 531 side, in case each supports seat 25 rotating belt turmoils stream, making provides the operation of cleaning the back drying, static air jet pipe 54 is located at capping 21 bottoms directly over each support seat 25 rotary track, introduce dipping in the back fully in 2 sheet type electronic component cleaning-dryings, and by the sequentially-operating of actuation means 6 each assembly of operation and the operate time and the speed of each assembly.

When using the utility model, the charging tray (P) of many sheet type electronic components (A) will tile in advance (with reference to shown in Figure 1, charging tray and tiling operation are the technology of commonly using, and charging tray and reach through hole thereof can be according to the designs such as sheet type electronic component shape size of desire processing, do not repeat them here), after closing respectively putting of placing that each charging tray tool 4 is arranged with limit being held in the material space 42, making each charging tray tool 4 pivot hold axle 41 circular grooves 411 slide fasteners goes in each support seat 25 fit slot 251, be being suspended on the rotating disk 23 of predetermined oblique angle symmetry, control rotary disk 23 again, make each charging tray tool 4 bear rotating centrifugal force and be near normal shape (with reference to shown in Figure 7), clean with the cleaning fluid of accepting spray pipe 51 each hole for water spraying 511 pressure ejection, and make cleaning fluid and impurity by charging tray (P) reach through hole (P1) and each charging tray tool 4 saturating vacancies 43, throw away with revolution centrifugal force.

After the cleaning fluid predetermined operation time, close, open the drainage valve 24 of washed container 1 bottom and get rid of cleaning fluid, breakdown removes liquid air jet pipe 52 simultaneously, name is introduced noble gas and is being followed after capping 21 bottom surfaces and washed container 2 internal faces blow down residual cleaning fluid, open dry air jet pipe 53 again, the dry-heat air jet flow is dried up and close and drain valve 24 and dry air jet pipe 53, static air jet pipe 54 is promptly opened introducing static electrification noble gas (as: nitrogen) and is full of in the washed container 1, make each sheet type electronic component (A) top layer attach (this nitrogen dipping operation is for the program of commonly using in the sheet type electronic component processing procedure of quartz wafer, does not repeat them here).Open capping 21 after the scheduled time in the dipping noble gas and take out each charging tray tool 4, will preset each charging tray tool 4 slide fastener of pending sheet type electronic component (A) charging tray (P) again and go into respectively to support seat 25 fit slots 251 to repeat operation.

Each charging tray tool 4 of the utility model can be by the angle of its vertical configuration of centrifugal force controlled of rotating disk 23 speeds of gyration, or be arranged on by a block group 252 on the track of each charging tray tool inclination angle change, to control predetermined change angle, in order to avoid initial speed of gyration adjustment makes each charging tray tool 4 angle of inclination change excessive improperly and makes hydro-peening unsuitable.This creation also can be used the electronic component of difformity in other limits are loaded on charging tray (P), size, thickness.

In sum, the utlity model has following all advantages:

1. the utility model implement to be cleaned operation in the container of sealing, make washing usefulness cleaning fluid and Drying process and static electrification Sui gas impregnating are sealed in running in container and the pipeline, and environment is not got dirty Dye or injure human body.

The utility model in the cleaning fluid hydro-peening and heated-air drying is all carried out in a closed container and Be difficult for evaporation and relatively container is little, do not take up space, to reduce venue cost.

This product with novel operations be when sheeting electronic element is cleared up, just provide cleaning fluid and Dry-heat air and static electrification Sui gas are not done meaningless jet flow, and are done in sealed container and pipeline Already, do not consider the anxiety that has drain evaporation to waste energy.

4. the utility model can make the operation of sheeting electronic element rotating, with each sheet type electronics The arbitrary corner of element can both contact with hydrojet, and makes cleaning more certain with liquid relative motion friction, more Have the centrifugal force of rotation to be easy to get rid of impurity removing or liquid, make that drying more really saves trouble, saves time, the saving of labor with Reduce cost of labor, and enhance productivity.

The utility model is function outward appearance, configuration and the whole effect of disclosed each member for convenience of explanation With spirit and category, can the appropriateness suitable change and conversion or the modification of do, also should be considered as this reality With Novel photo performance category together.

Claims

1. the cleaning device of a sheet type electronic component is to comprise:

One board, ccontaining each assembly:

What one washed container, pivot connected a capping is arranged on the board end face, make disk shaft sealing pass the washed container bottom, and the number that is provided with of outer rim symmetry is supported seat on the rotating disk;

One power set are installed in the board, and its driving shaft connects the disk shaft of washed container;

Number charging tray tool, the pivot that respectively is connected with of its same axis in both sides is held axle, each is supported on the seat at washed container to make each slide fastener, and the saturating empty number that is arranged with puts material space and respectively close and put limit and hold the charging tray of sheet type electronic component, and makes unbalanced inwardly oblique being suspended on the rotating disk of predetermined angle down of center of gravity;

One clean dry device contains a spray pipe, and one removes the liquid air jet pipe, a dry air jet pipe, and compositions such as a static air jet pipe, each supports each charging tray tool rotary track of seat pivot button to make the corresponding washed container of each pipeline, is arranged on the washed container closure base portion;

One actuation means is controlled the sequentially-operating of each assembly, and the operate time and the speed of each assembly.

2. the cleaning device of sheet type electronic component according to claim 1, it is characterized in that the wherein capping of washed container is to be articulated by a dynamic equipment, the operation capping action of raising or covering washed container, or the action of raising or covering of the handle that is connected with of manual operation capping.

3. the cleaning device of sheet type electronic component according to claim 1 is characterized in that wherein the bottom of washed container is provided with a drainage valve, gets rid of soiling solution and impurity after cleaning.

4. the cleaning device of sheet type electronic component according to claim 1 is characterized in that wherein that the precalculated position sets firmly number on the washed container perisporium to survey the shake device, makes the shock value that detects in the rotating disk rotation, takes place to stop to turn when shake altogether or vibrations surpass set point.

5. the cleaning device of sheet type electronic component according to claim 1, it is characterized in that wherein on the washed container rotating disk symmetrically arranged each support seat to go up same axis respectively to dig and establish an outer oblique fit slot downwards, make the pivot of each charging tray tool hold a slide fastener that bridges in fit slot, the pivot button of whole counterpoise is suspended on the rotating disk.

6. according to the cleaning device of claim 1 or 4 described sheet type electronic components, it is characterized in that pivot that each charging tray tool both sides wherein are connected with holds axle and be provided with a circular groove slide fastener in the fit slot of supporting seat.

7. the cleaning device of sheet type electronic component according to claim 1, it is characterized in that the wherein spray pipe of clean dry device, be radially to wear several hole for water sprayings and stretch and put that each supports to make each sheet type electronic component charging tray of holding over against each charging tray tool upper limit in the revolution range of seat inner edge at washed container.

8. the cleaning device of sheet type electronic component according to claim 1, what it is characterized in that clean dry device wherein removes the liquid air jet pipe, be the bottom surface of its mouth of pipe neighborwise washed container capping of extending, when cleaning is finished, spray into Sui's air-blowing and remove residual attached cleaning fluid on capping bottom surface and the washed container internal face.

9. the cleaning device of sheet type electronic component according to claim 1, it is characterized in that the wherein dry air jet pipe of clean dry device, being provided with several puff prots stretches in the revolution range of putting each support seat inner edge in washed container, and each charging tray tool jet flow of neighborwise, and in each fumarole side one deep bead is set, the introducing Sui gas blowout fluidized drying of operation.

10. the cleaning device of sheet type electronic component according to claim 1, it is characterized in that wherein the static air jet pipe of decontaminating apparatus is located at the closure base portion directly over each support seat rotary track in the washed container, behind sheet type electronic component cleaning-drying, introduce dipping.

11. the cleaning device of sheet type electronic component according to claim 1, it is characterized in that wherein each charging tray tool borrows the centrifugal force of rotating disk speed of gyration to form the pressure hydro-peening that approximately perpendicular state bears cleaning fluid, or be on the track of inclination angle change by centrifugal force at each charging tray tool, the predetermined angle of inclination of each charging tray tool of block group block is set.