CN2545747Y - Location platform of high-speed linear motor - Google Patents
Location platform of high-speed linear motor Download PDFInfo
- Publication number
- CN2545747Y CN2545747Y CN 02236551 CN02236551U CN2545747Y CN 2545747 Y CN2545747 Y CN 2545747Y CN 02236551 CN02236551 CN 02236551 CN 02236551 U CN02236551 U CN 02236551U CN 2545747 Y CN2545747 Y CN 2545747Y
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- China
- Prior art keywords
- side structure
- linear motor
- fixed part
- locating platform
- magnetic module
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- Expired - Fee Related
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Abstract
The utility model provides a high-speed linear motor positioning platform, which comprises a fixed part and a moveable part arranged in the middle of the fixed part. The fixed part comprises a last side structure and a next side structure. Zero-loss bearings are vertically embedded in the inner parts of the last side structure and the next side part. The moveable part is floated and hung between the last side structure and the next side structure by the zero-loss bearings. With the design, a positioning platform structure with high positioning accuracy, low friction, high acceleration, high reliability and small size is gained.
Description
Technical field
The utility model is the fine structure about a kind of linear motor locating platform, is meant a kind of primary side with motor especially as fixed part, and is suitable for the linear motor locating platform of high-speed mobile.
Background technology
In order to increase work efficiency, need the mechanism of high-speed motion various, utilization extensively, for example: wafer pick-and-place machine, high speed wafer inspection machine etc. all is, mechanism for high-speed motion, two kinds of type of drive are arranged at present, and the first uses spiral shell pearl screw rod to convert the rotary power of high speed servo motor to rectilinear motion, and it is second for using the direct driving mechanism of linear motor.Use the mechanism of spiral shell pearl screw drive that the bar axle of spiral shell pearl screw rod is located with bearing; Then be connected with hookup between the bar axle of spiral shell pearl screw rod and motor, the bar axle of spiral shell pearl screw rod drives the nut rectilinear motion of spiral shell pearl screw rod again, drives the moving member fast moving by nut at last; Because the bar axle and the nut of bearing, hookup, spiral shell pearl screw rod all have problems such as rigidity and back clearance, so the moving member of fast moving has the error of positioning accuracy; Moreover, since members such as spiral shell pearl screw rod and bearing all being in contact with one another property move, so can because of rub because of disorderly, speed and acceleration are restricted, its acceleration is usually below 1G, and speed generally also seldom is higher than 60 meters of per minutes; And two thing friction, must produce loss, it also is mechanical convention, and the action of ball screw different rollings between movable part and fixed part, abrasion, cause movable part, ball screw and fixed part three's contact-making surface to form uncertain abrasion relatively, and then the machining accuracy of locating platform is affected, also shorten the useful life of machinery and correlated parts.Again, this apparent size of commonly using the locating platform structure is quite huge, often causes the restriction of factory building ornaments, is its another drawback.
The mechanism that the use linear motor of commonly using directly drives is to use ferrimagnet to manufacture to have the fixed part of dentalation, and becomes a movable part with group portions such as electromagnet and permanent magnets, moves with respect to fixed part; Wherein electromagnet since be directly by electric current pass through to produce magnetic field, be called the primary side of linear motor, and the ferrimagnet of dentalation is called secondary side owing to be the changes of magnetic field of responding to the primary side generation.When this kind online design motor movement velocity is slow, no problem really in the use, but when movable part moves around fast, connect the very easy fracture of wiring of electromagnet on the movable part, become very low useful life, be that the fault avoid happening suddenly takes place, wiring needs periodic replacement even, the mechanism that historical facts or anecdotes non-is good.
The utility model content
The purpose of this utility model is to provide a kind of high-speed linear motor locating platform, the utility model is become a kind ofly reach high position precision, low friction, high acceleration, high-reliability simultaneously, and still possess the locating platform structure of requirements such as good thrust and volume are little.
For reaching above-mentioned utility model purpose, the utility model provides a kind of high-speed linear motor locating platform, comprises:
One fixed part, its be by a last side structure and once the primary side structure constituted, wherein last side structure reaches that side structure is affixed mutually next time, and includes several magnetic modules respectively; And aforesaid magnetic module respectively comprises a permanent magnet, one group of silicon steel sheet and a coil; And
One movable part, it is to be made and the secondary lateral structure which is provided with dentalation is constituted by ferrimagnet; And
Aforesaid last side structure and next time side structure be arranged at the secondary lateral structure both sides of aforesaid movable part respectively, form a sandwich combination.
Wherein last side structure and next time side structure include two zero loss bearings respectively, to avoid the friction between fixed part and movable part.
Wherein zero loss bearing is to be an air bearing.
Wherein the last side structure of fixed part and secondary lateral structure opposite position add a position quantity examining system, and the read head of position quantity examining system is to be located at aforesaid fixed part.
Wherein aforesaid magnetic module comprises magnetic module that drives the X-axis motion and the magnetic module that drives the Y-axis motion, and the magnetic module that drives the magnetic module of X-axis motion and drive the Y-axis motion intersects quadrature.
Movable part of the present utility model is made for using ferrimagnet, does not have wiring on it; Fixed part is made of the structure with several magnetic modules, have wiring on it and connect the magnetic module, so that the magnetic module produces changes of magnetic field to surrounding space when electric current changes, the utility model is not owing to there being wiring, so the problem that does not have wiring to be broken when fast moving above the movable part; Move for making the movable part motion time can follow certain track, and has bigger thrust, high-speed linear motor locating platform of the present utility model is designed to sandwich-like, its fixed part comprises last side structure and the side structure next time that branch is located at the movable part both sides, last side structure and next time side structure respectively be provided with the structure of magnetic module, and inside vertically is embedded zero loss bearing (for example gas thrust bearing), utilizes zero loss bearing to make movable part be suspended in the last side structure of fixed part and next time between the side structure; And since the movable part both sides each all be provided with the structure of magnetic module, the intensity in magnetic field can rise to tradition with primary side a times as the linear motor of movable part.By design like this, high-speed linear motor locating platform of the present utility model is reached have high thrust, high position precision, low friction, high acceleration, high-reliability and the little locating platform structure of volume.
When high-speed linear motor locating platform of the present utility model needs feedback that the position detects, rupture in high-speed mobile for avoiding the detecting signal line, read head then is installed in the fixed part of linear motor locating platform.
The utility model provides high-speed linear motor locating platform, commonly uses structure mutually relatively the time with other, has following advantage:
1. movable part of the present utility model be by air bearing be suspended in fixed part on, next time between the side structure, Compressed Gas by the air bearing outflow, make between fixed part and movable part, no matter be static or relatively move at a high speed, all do not contact, the friction that produces when getting rid of the two articles contact fully and the problem of abrasion, effectively improve process velocity, and, make the other tool air cooling of the utility model effect because air bearing can flow out the design of Compressed Gas.Moreover fixed part adopts the two-layer mode of upper and lower primary side structure, can increase the board thrust of twice at least, is beneficial to the process velocity that improves board.And it is divided into the compound mode of three ply board shape fixed part and movable part, then is to reach to commonly use can't be obtained simple in structure of structure and advantage that volume is little, can improve the service efficiency of plant area.
2. simultaneously, owing to use linear motor directly to drive, do not have problems such as rigidity and back clearance, make location precision be kept certain level, thoroughly getting rid of and commonly using structure is the scarce fraud that the power media is easy to produce frictional dissipation and back clearance with the rolling screw.
Moreover, because wiring is to be connected on the fixed part, so can avoid the linear motor problem that wiring is ruptured in high-speed motion.
Description of drawings
Fig. 1 is applied to the cutaway view that single shaft is opened circuit controls for high-speed linear motor locating platform of the present utility model;
Fig. 2 is applied to the schematic diagram of single shaft loop circuit control for high-speed linear motor locating platform of the present utility model;
Fig. 3 is applied to the schematic diagram that twin shaft is opened circuit controls for high-speed linear motor locating platform of the present utility model;
Fig. 4 is applied to the schematic diagram of twin shaft loop circuit control for the high-speed linear motor locating platform of this type of this practicality.
Embodiment
Seeing also an example of the high-speed linear motor locating platform provided by the utility model of Fig. 1, when being applied to single shaft and opening circuit controls, mainly is by a fixed part 10 and movable part 20 structure of organizing; Wherein:
Fixed part 10 mainly be by the last side structure 11 of high-speed linear motor and next time side structure 12 constituted last side structure 11 and 12 direct or indirect Joints of side structure next time; Last side 11 includes at least two magnetic modules 30 (present embodiment is four); Magnetic module 30 is made up of a permanent magnet 31, one group of silicon steel sheet 32 and a coil 33 respectively; And between per two magnetic modules 30, embed one zero loss bearings 40 (can be air bearing structure) respectively.And side structure 12 also includes at least two magnetic modules 30 (it is four that this reality is dragged example) next time; Magnetic module 30 is made up of a permanent magnet 31, one group of silicon steel sheet 32 and a coil 33 respectively; And between per two magnetic modules 30, embed one zero loss bearings 40 (can be air bearing structure) respectively.Again in last side structure 11 and next time 12 folders of side structure establish a movable part 20.
Above-mentioned movable part 20 is that the secondary lateral structure 21 by the high-speed linear motor is constituted, and this secondary lateral structure 21 is made by ferrimagnet, which is provided with the structure of dentation, and the ferrimagnet structure of dentation can change with the magnetic field of magnetic module 30 produce thrust.Movable part 20 is because be sheet-type, and amount gently and easily is suspended in the last side structure 11 and 40 on the zero loss bearing of side structure 12 next time.The movable part 20 of high-speed linear motor locating platform of the present utility model and the secondary lateral structure 21 of fixed part 10, because the dentation ferrimagnet structure of secondary lateral structure 21, by the electromagnetism principle, make the last side 11 of fixed part 10 and next time the secondary lateral structure 21 of the magnetic module 30 in the side 12 and movable part 20 interact and produce excitatory effect, make movable part 20 be able to and move in the side 12 next time, reach the benefit of workpiece location processing in last once side 11.
See also Fig. 2, this design is the locating platform that the utility model is applied to single shaft loop circuit state of a control, this structure on fixed part 10 once the opposite position of side structure 11 and movable part 20 add a position quantity examining system 50; Position quantity examining system 50 is made of the read head 51 of being located at last side structure 11 and the blade 52 of being located at movable part 20, feedback signal that so can measurement system is done loop circuit control, to prevent the error of step-out, further improve positioning accuracy, and, can avoid the problem of detecting signal thread breakage in high-speed the moving because read head 51 is to be installed on the fixed part 10 of linear motor locating platform.
Fig. 3 is that the utility model is applied to the schematic diagram that twin shaft is opened the locating platform of circuit controls, wherein mainly be in last side structure 11 and the magnetic module 60 and the magnetic module 70 that drives the Y-axis motion of the motion of configuration driven X-axis respectively on the side structure 12 next time, wherein drive the magnetic module 60 of X-axis motion and drive the magnetic module 70 crossing quadratures that Y-axis is moved, movable part 10 and last side structure 11 and next time the induction region of side structure 12 then be respectively equipped with the dentation secondary lateral structure 80 that ferrimagnet is made, drive the magnetic module 60 of X-axis motion and drive the magnetic module 70 of Y-axis interlock with correspondence; So design can make movable part 20 increase the function of rapid movement when having X-axis and Y-axis, improves the workpiece processing benefit.
See also Fig. 4, this is designed to the locating platform that the utility model is applied to the control of twin shaft loop circuit, and it mainly is to add a position quantity examining system 90 again at the fixed part 10 of Fig. 3 embodiment and the opposite position of movable part 20; Position quantity examining system 90 mainly is to be combined by the read head 91 of being located at last side structure 11 and the blade 92 (two-dimensional structure) of being located at movable part 20.So can do loop circuit control by feedback detection signal,, further improve positioning accuracy to prevent step-out and contracted position error; And, can avoid the problem of detecting signal thread breakage because read head 91 is to be installed on the fixed part 10 of linear motor locating platform.
Claims (5)
1. a high-speed linear motor locating platform is characterized in that, comprises:
One fixed part, its be by a last side structure and once the primary side structure constituted, wherein last side structure reaches that side structure is affixed mutually next time, and includes several magnetic modules respectively; And aforesaid magnetic module respectively comprises a permanent magnet, one group of silicon steel sheet and a coil; And
One movable part, it is to be made and the secondary lateral structure which is provided with dentalation is constituted by ferrimagnet; And
Aforesaid last side structure and next time side structure be arranged at the secondary lateral structure both sides of aforesaid movable part respectively, form a sandwich combination.
2. by the described high-speed linear motor of claim 1 locating platform, it is characterized in that, wherein last side structure and next time side structure include two zero loss bearings respectively, to avoid the friction between fixed part and movable part.
3. by the described high-speed linear motor of claim 2 locating platform, it is characterized in that wherein zero loss bearing is to be an air bearing.
4. by the described high-speed linear motor of claim 1 locating platform, it is characterized in that wherein the last side structure of fixed part and secondary lateral structure opposite position add a position quantity examining system, and the read head of position quantity examining system is to be located at aforesaid fixed part.
5. by the described high-speed linear motor of claim 1 locating platform, it is characterized in that, wherein aforesaid magnetic module comprises magnetic module that drives the X-axis motion and the magnetic module that drives the Y-axis motion, and the magnetic module that drives the magnetic module of X-axis motion and drive the Y-axis motion intersects quadrature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02236551 CN2545747Y (en) | 2002-06-05 | 2002-06-05 | Location platform of high-speed linear motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02236551 CN2545747Y (en) | 2002-06-05 | 2002-06-05 | Location platform of high-speed linear motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2545747Y true CN2545747Y (en) | 2003-04-16 |
Family
ID=33710788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02236551 Expired - Fee Related CN2545747Y (en) | 2002-06-05 | 2002-06-05 | Location platform of high-speed linear motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2545747Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101253673B (en) * | 2005-08-29 | 2011-08-31 | 皇家飞利浦电子股份有限公司 | Ironless magnetic linear motors having levitating and transversal force capacities |
| CN102930904A (en) * | 2012-10-10 | 2013-02-13 | 北京航空航天大学 | Micro-motion platform for improving resolution of linear motor based on flexible inclined beam |
| CN110326199A (en) * | 2017-02-06 | 2019-10-11 | 自由活塞式发动机有限公司 | Magnetic fluid linear actuators |
| CN112865477A (en) * | 2019-11-12 | 2021-05-28 | 高明铁企业股份有限公司 | Thin bipolar phase alignment linear stepping motor |
-
2002
- 2002-06-05 CN CN 02236551 patent/CN2545747Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101253673B (en) * | 2005-08-29 | 2011-08-31 | 皇家飞利浦电子股份有限公司 | Ironless magnetic linear motors having levitating and transversal force capacities |
| CN102930904A (en) * | 2012-10-10 | 2013-02-13 | 北京航空航天大学 | Micro-motion platform for improving resolution of linear motor based on flexible inclined beam |
| CN102930904B (en) * | 2012-10-10 | 2015-03-11 | 北京航空航天大学 | Micro-motion platform for improving resolution of linear motor based on flexible inclined beam |
| CN110326199A (en) * | 2017-02-06 | 2019-10-11 | 自由活塞式发动机有限公司 | Magnetic fluid linear actuators |
| US11467065B2 (en) | 2017-02-06 | 2022-10-11 | Libertine Fpe Ltd | Hydro-magnetic linear actuator |
| CN112865477A (en) * | 2019-11-12 | 2021-05-28 | 高明铁企业股份有限公司 | Thin bipolar phase alignment linear stepping motor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20030416 Termination date: 20100605 |