CN2544842Y - Silicon material cleaning apparatus - Google Patents
Silicon material cleaning apparatus Download PDFInfo
- Publication number
- CN2544842Y CN2544842Y CN 02217258 CN02217258U CN2544842Y CN 2544842 Y CN2544842 Y CN 2544842Y CN 02217258 CN02217258 CN 02217258 CN 02217258 U CN02217258 U CN 02217258U CN 2544842 Y CN2544842 Y CN 2544842Y
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- CN
- China
- Prior art keywords
- cleaning
- manipulator
- cabin
- sealing
- level moving
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model belongs to a silicon raw material cleaning equipment, in particular to relate to a cleaning equipment adopting mechanical type to clean the silicon raw material. The utility model comprises an enclosing cleaning cabin, an input device, a horizontal operation mechanism, a cleaning trough, a manipulator, a cleaning box, an output device, and an automatic control device. The enclosing cleaning cabin is arranged on a frame; the enclosing cleaning cabin is internally provided with the cleaning trough; two ends of the enclosing cleaning cabin are respectively provided with the input device and the output device; the utility model is characterized in that a drying device is arranged between the cleaning trough and the output device; the enclosing cleaning cabin is provided with the horizontal operation mechanism; the manipulator and the horizontal operation mechanism are matched; the manipulator can reciprocate on the horizontal operation mechanism; the horizontal operation mechanism is arranged on the upper part of the cleaning trough; the manipulator can be matched with the cleaning box. Compared with the prior art, the utility model has the advantages of simple structure, cheap manufacture cost, high drying efficiency, convenient use, safety, and being a economic and practical silicon raw material cleaning equipment.
Description
Technical field
The utility model belongs to the former material cleaning equipment of a kind of silicon, particularly relates to a kind of cleaning equipment that adopts mechanical system to clean the silicon raw material.
Background technology
In the prior art, the manual mode that combines with machinery is adopted in the cleaning of silicon raw material mostly, because the silicon raw material needs to clean in different acid ﹠ alkali liquids, hand operated is bigger to the health effect of human body, therefore, it is the inexorable trend of technical development that the cleaning equipment that adopts machinery to combine with electronic technology cleans the silicon raw material, at present, developed countries has been developed a kind of silicon raw material automatic rinser of Totally-enclosed-type, it comprises feeding device, pay-off, service sink, blanking device and automaton, because its complex structure, involve great expense, and be difficult in the industry, popularize.
Summary of the invention
The purpose of this utility model is to provide a kind of silicon simple in structure, easy to use, that efficient is high former material cleaning equipment.
The purpose of this utility model is to adopt such technical scheme to realize: it comprises sealing cleaning cabin, input unit, level moving machinery, rinse bath, manipulator, clean basket, output device and automaton, described sealing is cleaned the cabin and is installed on the support, this sealing is cleaned in the cabin and is provided with rinse bath, the two ends that the cabin is cleaned in described sealing are respectively equipped with input unit and output device, it is characterized in that being provided with drying device between described rinse bath and the output device, on sealing cleaning cabin, be provided with level moving machinery, manipulator and level moving machinery match, and it comprises sealing cleaning cabin, input unit, level moving machinery, rinse bath, manipulator, clean basket, output device and automaton, described sealing is cleaned the cabin and is installed on the support, this sealing is cleaned in the cabin and is provided with rinse bath, the two ends that the cabin is cleaned in described sealing are respectively equipped with input unit and output device, it is characterized in that being provided with drying device between described rinse bath and the output device, on sealing cleaning cabin, be provided with level moving machinery, manipulator matches with level moving machinery, manipulator can be on level moving machinery shift reciprocately, described level moving machinery is positioned at the rinse bath top, and manipulator can match with the cleaning basket.
The utility model compared with prior art, have characteristics simple in structure, cheap, that drying efficiency is high, easy to use, safe, be that the former material cleaning equipment of a kind of economical and practical silicon closes, manipulator can be on level moving machinery shift reciprocately, described level moving machinery is positioned at the rinse bath top, and manipulator can match with the cleaning basket.
The utility model compared with prior art has characteristics simple in structure, cheap, that drying efficiency is high, easy to use, safe, is the former material cleaning equipment of a kind of economical and practical silicon.
In conjunction with the accompanying drawings and embodiments the utility model is specified as follows
Description of drawings
Fig. 1 is one of structural representation of the present utility model
Fig. 2 is a robot manipulator structure schematic diagram of the present utility model
Fig. 3 is a drying unit structural representation of the present utility model
The specific embodiment
With reference to accompanying drawing: it comprises that sealing cleans the cabin the utility model, input unit 7, level moving machinery 1, rinse bath 13, manipulator 4, clean basket 14, output device 11 and automaton 9, cleaning the cabin in described sealing is installed on the support 10, this sealing is cleaned in the cabin and is provided with rinse bath 13, the two ends of cleaning the cabin in sealing are respectively equipped with input unit 7 and output device 11, be provided with drying device 15 between described rinse bath 13 and the output device 11, described sealing is cleaned the cabin and is provided with level moving machinery 1, manipulator 4 matches with level moving machinery 1, manipulator 4 can be on level moving machinery 1 shift reciprocately, described level moving machinery 1 is positioned at rinse bath 13 tops, and manipulator 4 can match with cleaning basket 14; Described sealing cleaning cabin is made up of case 8, observation window 6 and air draft mechanism 3, and by the working condition that observation window 6 can in time be watched each station, air draft mechanism 3 can discharge the mist that sealing is cleaned in the cabin; Described level moving machinery 1 is by guide rail 5 and drag chain 2 and constitute, described input unit 7 and output device 11 all adopt known rollaway type structure for conveying, and by power source 12 drivings, in the cabin is cleaned in sealing, a plurality of rinse baths 13 can be set on demand, cleaning basket 14 can be placed in the rinse bath 13, described cleaning basket 14 can be proposed by manipulator 4, also can be placed into follow-up required station by manipulator 4, also be provided with drying unit 15 in sealing cleaning cabin, this drying unit 15 is between rinse bath 13 and output device 11; Described manipulator 4 is made of connected body 17, drawing mechanism 16 and work package 18, drawing mechanism 16 is installed on the connected body 17, connected body 17 can and drag chain 2 with the guide rail 5 of level moving machinery 1 and match, and can translation on guide rail 5, work package 18 is arranged on the lower end of drawing mechanism 16, drawing mechanism 16 adopts piston structure, and it is finished the required energy of action that stretches and can be provided by compressed air; Described drying unit 15 comprises casing and case lid, casing is made of heating box 20 and drying baker 24, be respectively arranged with case lid 19 on heating box 20 and the drying baker 24,25, the unlatching of case lid or close can be by automaton 9 control, can place the cleaning basket 14 that the silicon raw material is housed in the described drying baker 24, be provided with the thermal treatment zone 22 in the described heating box 20, heating element heater in the thermal treatment zone 22 adopts known heater element, one side of heating box 20 is provided with air admission hole 21, its opposite side is provided with the venthole 23 that communicates with drying baker 24, extraneous compressed air can enter heating box 20 from air admission hole 21, after heating through the thermal treatment zone 22, high-temperature gas enters drying baker 24 through venthole 23, thereby will clean the silicon raw material stoving in the basket 14; Each electronic, pneumatic or mechanical action of the present utility model finish the control that all is subjected to automaton 9, automaton 9 is to adopt known electronic technology and electricity connected mode with the cooperation of associated components with being connected, and does not so far give unnecessary details.
Claims (3)
1. former material cleaning equipment of silicon, it comprises sealing cleaning cabin, input unit (7), level moving machinery (1), rinse bath (13), manipulator (4), clean basket (14), output device (11) and automaton (9), cleaning the cabin in described sealing is installed on the support (10), this sealing is cleaned in the cabin and is provided with rinse bath (13), the two ends of cleaning the cabin in sealing are respectively equipped with input unit (7) and output device (11), it is characterized in that being provided with drying device (15) between described rinse bath (13) and the output device (11), described sealing is cleaned the cabin and is provided with level moving machinery (1), manipulator (4) matches with level moving machinery (1), manipulator can (4) can be gone up shift reciprocately at level moving machinery (1), described level moving machinery (1) is positioned at rinse bath (13) top, and manipulator (4) can match with cleaning basket (14).
2. the former material cleaning equipment of silicon as claimed in claim 1, it is characterized in that described manipulator (4) is made of connected body (17), drawing mechanism (16) and work package (18), drawing mechanism (16) is installed on the connected body (17), connected body (17) can and drag chain (2) with the guide rail (5) of level moving machinery (1) and match, and work package (18) is arranged on the lower end of drawing mechanism (16).
3. the former material cleaning equipment of silicon as claimed in claim 1, it is characterized in that described drying unit (15) comprises casing and case lid, casing is made of heating box (20) and drying baker (24), be respectively arranged with case lid (19,25) on heating box (20) and the drying baker (24), can place in the described drying baker (24) and clean basket (14); The thermal treatment zone (22) is housed, the venthole (23) that a side of heating box (20) is provided with air admission hole (21), its opposite side is provided with communicates with drying baker (24) in the described heating box (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02217258 CN2544842Y (en) | 2002-04-29 | 2002-04-29 | Silicon material cleaning apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02217258 CN2544842Y (en) | 2002-04-29 | 2002-04-29 | Silicon material cleaning apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2544842Y true CN2544842Y (en) | 2003-04-16 |
Family
ID=33696111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02217258 Expired - Fee Related CN2544842Y (en) | 2002-04-29 | 2002-04-29 | Silicon material cleaning apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2544842Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102259102A (en) * | 2011-08-10 | 2011-11-30 | 浙江硅宏电子科技有限公司 | Silicon material washer |
| CN104347456A (en) * | 2014-09-15 | 2015-02-11 | 南通皋鑫电子股份有限公司 | Chemical treatment device for high-voltage silicon rectifier stack die |
-
2002
- 2002-04-29 CN CN 02217258 patent/CN2544842Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102259102A (en) * | 2011-08-10 | 2011-11-30 | 浙江硅宏电子科技有限公司 | Silicon material washer |
| CN104347456A (en) * | 2014-09-15 | 2015-02-11 | 南通皋鑫电子股份有限公司 | Chemical treatment device for high-voltage silicon rectifier stack die |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |