CN2510503Y - Index revolving operation table for ion filming room - Google Patents
Index revolving operation table for ion filming room Download PDFInfo
- Publication number
- CN2510503Y CN2510503Y CN 01265931 CN01265931U CN2510503Y CN 2510503 Y CN2510503 Y CN 2510503Y CN 01265931 CN01265931 CN 01265931 CN 01265931 U CN01265931 U CN 01265931U CN 2510503 Y CN2510503 Y CN 2510503Y
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- China
- Prior art keywords
- main
- driving
- worktable
- rotary
- main worktable
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Abstract
Disclosed is a rotary index table device for an iron coating chamber. Thereof main worktable is used to realize the indexing and locating of a workpiece at a set work station, and meanwhile rotary motion transmission is done to the rotary table which is arranged on the main worktable, and the rotary table is used to realize clamping, rotation and needed swing angle position, and a limit part is matched with the main worktable to realize the limit and is matched with a rotary table to realize the motion transmission. The utility model is arranged inside a vacuum chamber and can realize the clamping of the workpiece, indexing rotation plasma cleaning and indexing rotation coating, which has large working range and ensures coating position.
Description
Technical field
The utility model relates to a kind of rotary index table device that is used for the ion film plating chamber.
Background technology
In the background technology, the rotary index table device that is used for the ion film plating chamber comprises rotary table, main worktable and drive unit, and rotary table is arranged on main worktable top.The shortcoming of the rotary index table device of this structure is: working range is little.Unplated piece is placed on the rotary table of rotary index table device, during plated film, because the rotary table that is driven by some pinion(gear)s only produces rotation, the rotation of pinion(gear) must rely on the rotation of a master wheel, therefore can not accomplish that a stationary table rotates a position, and the nozzle position of film coating apparatus is fixed, during plated film, then need sample before ion source, in the face of the ion source rotation, therefore can only carry out plated film to a certain specific position of unplated piece, working range is little, and the plated film position is difficult to guarantee.
The utility model content
The utility model has solved the technical problem that the rotary table working range is little, the plated film position is difficult to guarantee in the background technology.The technical solution of the utility model is:
A kind of rotary index table device that is used for the ion film plating chamber, comprise rotary table 3, main worktable 4 and drive unit 9, described rotary table 3 is arranged on main worktable 4 tops, described drive unit 9 comprises motor 15 and main driving axle 10, described main worktable 4 is arranged on the main driving axle 10, it is characterized in that: described main worktable 4 is provided with pivoting part 8, this pivoting part 8 comprises locking latches 2, transmission mechanism 11 and device for revolving and driving 5, transmission mechanism 11 is arranged on 3 of main worktable 4 and rotary tables, described rotary table 3 is that the axle that can rotate around the central shaft 13 of transmission mechanism 11 connects with 11 of transmission mechanisms, and locking latches 2 is arranged on the central shaft 13; Described device for revolving and driving 5 comprises revolution driving-disc 14 and driving wheel 12, and described revolution driving-disc 14 is arranged on the main driving axle 10 of main worktable 4 belows, and it connects with transmission mechanism 11 by driving wheel 12, and described main worktable 4 and revolution driving-disc 14 connect; Described main worktable 4 outer ends are provided with outer ratchet 1.
Above-mentioned main driving axle 10 can be provided with handle ratchet wheel 6 with main worktable 4 connection places.
Above-mentioned main driving axle 10 can be provided with down handle ratchet wheel 7 with revolution driving-disc 14 connection places.
Above-mentioned transmission mechanism 11 can adopt conical gear group or bevel gear set etc.
Above-mentioned locking latches 2 can adopt the spring collet locking latches.The utlity model has following advantage
The utility model is positioned at vacuum chamber, can realize that clamping workpiece, calibration revolution plasma clean and calibration revolution plated film, and working range is big, can guarantee the plated film position.
The drawing explanation
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is the schematic top plan view of Fig. 1.
Embodiment
Referring to Fig. 1, the utility model comprises rotary table 3, main worktable 4 and drive unit 9, and rotary table 3 is arranged on main worktable 4 tops, and drive unit 9 comprises motor 15 and main driving axle 10, and main worktable 4 is arranged on the main driving axle 10.Main worktable 4 is provided with pivoting part 8, this pivoting part 8 comprises locking latches 2, transmission mechanism 11 and device for revolving and driving 5, transmission mechanism 11 is arranged on 3 of main worktable 4 and rotary tables, rotary table 3 is that axle connects with 11 of transmission mechanisms, they can be around central shaft 13 rotations of transmission mechanism 11, and described locking latches 2 is arranged on the central shaft 13; Rotary table 3 is in order to realize the clamping of workpiece, revolution and required swash angle position; Device for revolving and driving 5 comprises revolution driving-disc 14 and driving wheel 12, and revolution driving-disc 14 is arranged on the main driving axle 10 of main worktable 4 belows, and it connects with transmission mechanism 11 by driving wheel 12, and main worktable 4 and revolution drive element 14 connect; Main worktable 4 outer ends are provided with outer ratchet 1.
Main driving axle 10 is provided with handle ratchet wheel 6 with main worktable 4 connection places.
Main driving axle 10 is provided with down handle ratchet wheel 7 with revolution drive element 14 connection places.Ratchet is a limiting component, is mainly used in to cooperate main worktable 4 to realize spacing and rotary table realization motion transmission.The turning motion transmission of power is to import into through the main shaft of magnetic seal by the outer stepped start-stop system servosystem of vacuum chamber.
Above-mentioned transmission mechanism 11 is conical gear group or bevel gear set.
Referring to Fig. 2, main driving axle 10 turning anticlockwises are for driving calibration, and revolution drives for removing clockwise.In order to ensure correct location, needed that ratchet oppositely is provided with on ratchet on the limiting component and the main worktable cylindrical, promptly She Ji internal tooth is opposite with the external tooth teeth directional, and to limit main driving axle 10 when the revolution clockwise, main worktable 4 rests on the current station position.Six rotary tables 3 move by station and the process sequence set, finish processing work.The motion transmitting element of rotary table 3 is straight tooth gear and two pairs of common tooth conical gear, can be equipped with different frocks on the rotary table 3, and workpiece is carried out clamping.Simultaneously, this worktable is the pivot angle of 0 °～60 ° of beats outwards, to adapt to the requirement of different complete processings.After pivot angle is adjusted, can be by the spring collet locking of these parts.
Than i=0.26 reduction of speed, calibration and rotating speed are 0.26n to main driving axle 10 rotating speeds of rotary index table 3 by reduction of speed.Providing of calibration and revolution technological process signal can provide by optoelectronic switch and the logical ring of light cooperation of the calibration below the index table master worktable 4 that is provided with in the limiting component, carries out the station Working Procedure Controlling by microcomputer.The calibration of rotary index table and the speed of turning motion are adjustable arbitrarily, and optoelectronic angle resolving power can reach 5 °, and hard spacing spot placement accuracy can be less than 0.05mm.
Claims (5)
1. rotary index table device that is used for the ion film plating chamber, comprise rotary table (3), main worktable (4) and drive unit (9), described rotary table (3) is arranged on main worktable (4) top, described drive unit (9) comprises motor (15) and main driving axle (10), described main worktable (4) is arranged on the main driving axle (10), it is characterized in that: described main worktable (4) is provided with pivoting part (8), this pivoting part (8) comprises locking latches (2), transmission mechanism (11) and device for revolving and driving (5), transmission mechanism (11) is arranged between main worktable (4) and rotary table (3), for connecting around the axle of central shaft (13) rotation of transmission mechanism (11), locking latches (2) is arranged on the central shaft (13) between described rotary table (3) and transmission mechanism (11); Described device for revolving and driving (5) comprises revolution driving-disc (14) and driving wheel (12), described revolution driving-disc (14) is arranged on the main driving axle (10) of main worktable (4) below, it connects with transmission mechanism (11) by driving wheel (12), and described main worktable (4) and revolution driving-disc (14) connect; Described main worktable (4) outer end is provided with outer ratchet (1).
2. rotary index table device as claimed in claim 1 is characterized in that: described main driving axle (10) is provided with handle ratchet wheel (6) with main worktable (4) connection place.
3. rotary index table device as claimed in claim 1 or 2 is characterized in that: described main driving axle (10) is provided with down handle ratchet wheel (7) with revolution driving-disc (14) connection place.
4. rotary index table device as claimed in claim 3 is characterized in that: described transmission mechanism (11) is conical gear group or bevel gear set.
5. rotary index table device as claimed in claim 4 is characterized in that: described locking latches (2) is the spring collet locking latches.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01265931 CN2510503Y (en) | 2001-11-30 | 2001-11-30 | Index revolving operation table for ion filming room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01265931 CN2510503Y (en) | 2001-11-30 | 2001-11-30 | Index revolving operation table for ion filming room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2510503Y true CN2510503Y (en) | 2002-09-11 |
Family
ID=33672684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01265931 Expired - Fee Related CN2510503Y (en) | 2001-11-30 | 2001-11-30 | Index revolving operation table for ion filming room |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2510503Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106435507A (en) * | 2016-11-10 | 2017-02-22 | 北京帕托真空技术有限公司 | Rotating device for film coating machine |
-
2001
- 2001-11-30 CN CN 01265931 patent/CN2510503Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106435507A (en) * | 2016-11-10 | 2017-02-22 | 北京帕托真空技术有限公司 | Rotating device for film coating machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |