CN2466665Y - Strong magnetic resistance sensor - Google Patents
Strong magnetic resistance sensor Download PDFInfo
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- CN2466665Y CN2466665Y CN 01202985 CN01202985U CN2466665Y CN 2466665 Y CN2466665 Y CN 2466665Y CN 01202985 CN01202985 CN 01202985 CN 01202985 U CN01202985 U CN 01202985U CN 2466665 Y CN2466665 Y CN 2466665Y
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- giant magnetoresistance
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Abstract
The utility model relates to a sensor used for current measurement, which adopts Wheatstone bridge structure. Four-arm resistors are multilayer film resistors with autogiration valve structure and can generate giant magnetic resistance effect. Soft magnetic materials are arranged around two-arm multilayer film resistors which are opposite to the giant magnetic resistance sensor, so that the shielded resistors are insensitive to an external magnetic field, and moreover, the soft magnetic materials have the converging action of magnetic flux for other two-arm resistors. The utility model has the advantages of high sensitivity of a circuit and high precision of a test result, and can be used for high pressure and extra-high voltage systems.
Description
The utility model relates to a kind of sensor that is used for current measurement, relates in particular to a kind of giant magnetoresistance sensor that measures current value by the electromagnetic conversion parts.
In electronic product and power transmission and transformation system, need to use current measure device usually, the traditional measurement means are generally based on following three kinds of methods: first kind: utilize ohm's law, series connection one known resistance calculates the size of electric current then according to ohmically voltage drop on circuit-under-test; Second kind: use mutual inductor, calculate size of current by the size of current that magnetic flux change in the closed-loop path is inducted; The third: use Hall element, measure electric current by the method that adds the poly-magnetic of softmagnetic.
The method application of measuring electric current by the known resistance of connecting is very limited, generally adopts under situations such as laboratory.In high pressure, ehv power transmission system, the general now mutual inductance type current sensor that adopts.This type of sensor bulk is big, cost is high, heaviness, and installation difficulty is big, and because elementary and secondary can not the isolation mutually, the insulation difficulty is big, sets off an explosion dangerous property easily.
Measuring instrument that uses in electric system such as watt-hour meter, its core component is exactly a current sensor, adopts the punching mutual inductor to respond to now usually and obtains current signal.This method has reliability, but also have shortcomings such as volume is big, cost height, and it is restricted to measure range in addition, and to have different ranges to select for users be exactly this reason to watt-hour meter usually, have certainly can gear shift watt-hour meter, but cost is higher.
Hall element is widely used in fields such as electronic product and current instruments, but has following problem: 1) response frequency is lower, about 100KHz; 2) Hall element output is voltage signal, can be interfered when measuring in high pressure, UHV (ultra-high voltage); What 3) Hall element was measured is the interior magnetic field of vertical plane, when measuring electric current, in order to improve sensitivity, makes the more magnetic line of force by sensor, must use soft magnetic core to gather magnetic.
The purpose of this utility model is to provide a kind of convenience, inexpensive and reliable giant magnetoresistance sensor, and it is particularly useful for high pressure, extra high voltage system, but and continuous coverage size of current.
The utility model provides a kind of giant magnetoresistance sensor to achieve these goals, and it adopts this stool bridge architecture of favour, and four-arm resistance is the multilayer film resistance of spin valve structure, and this resistance can produce giant magnetoresistance effect.
The giant magnetoresistance sensor that further provides of the utility model to achieve these goals, soft magnetic material is arranged around the multilayer film resistance of relative two arms in described giant magnetoresistance sensor, magnetic field is insensitive to external world to make the resistance of conductively-closed, and other two arm resistance are had the magnetic flux converging action again.
The utility model is owing to adopt said structure, and giant magnetoresistance has the characteristics in certain direction magnetic field generation great variety, i.e. giant magnetoresistance effect, so circuit sensitivity height, and test result precision height can be used in high pressure and the extra high voltage system; And because this circuit is this stool bridge circuit of simple favour, and circuit structure is simple, and is easy to use, cheap, circuit reliability is good.Owing to use soft magnetic material, strengthen shielding and magnet accumulating cap in addition, make measurement sensitivity improve 2-100 doubly, so the current sensor of this kind structure has had very wide testing current scope.
Fig. 1 is a giant magnetoresistance sensor structure principle chart of the present utility model
Fig. 2 is that as shown in Figure 1 giant magnetoresistance sensor output is to the response curve in outfield
The relative position relation synoptic diagram of sensor and electric current when Fig. 3 is testing current
Fig. 4 is for amplifying rectification display circuit schematic diagram
Fig. 5 be as shown in Figure 1 giant magnetoresistance sensor and the working power of amplification rectification display circuit shown in Figure 4
Below in conjunction with accompanying drawing giant magnetoresistance sensor specific embodiment of the present utility model is described in further detail.
The utility model comprises a giant magnetoresistance (GMR) sensor, magnet and the corresponding rectification display circuit that amplifies.This sensor is to adding magnetic-field-sensitive, and produces a magnetic field relevant with size of current around the electrified wire, thereby this structure can be measured electric current.
The giant magnetoresistance sensor of this utility model adopts this stool bridge architecture of favour as shown in Figure 1, and its four- arm resistance 3,4 is the multilayer film of spin valve structure (thickness is a nanometer scale) resistance.This resistance 3,4 has the characteristics that great variety takes place, i.e. giant magnetoresistance (GMR) effect under certain direction the action of a magnetic field.Cooperation is with suitable working line, and then this resistance variations can be converted into voltage or electric current changes, and then is shown as the value of measuring current.Simultaneously, for increasing measurement sensitivity to Weak current.Magnetic shielding and poly-magnetic flux technology have also been adopted in our giant magnetoresistance sensor.Promptly with shielding resistance 4 shielding of soft magnetic material 5 with relative two arms of bridge architecture, magnetic field is insensitive to external world to make the resistance of conductively-closed.By rational layout (stating as follows), then magnetic shield is for other two arm resistance, and the effect that has magnetic flux to assemble has again strengthened the action effect of outfield to this two arms resistance, has also promptly strengthened the measurement sensitivity of this sensor to the outfield.
This humidification can be adjusted by the relative position of selecting different shielding materials and adjust in the structure.This corrective action can make measurement sensitivity improve 2-100 times.Therefore the current sensor of this structure has very wide testing current scope, and present level is high to 2000 amperes, also has the leeway of further improving.
This sensor has bigger linear responding range to the outfield, but extremely low after the match linearity and High-Field under linear inconsistent, cause bigger test error.For realizing 0 ampere of requirement of electric current metering, we adopt sensor are added the magnet method that can produce bias magnetic field, make its initial working point move to the High-Field linear zone, have obtained satisfied effect.
Described magnet can be permanent magnet or electrified wire.Permanent magnet can be various structures, and different shape does not have concrete requirement to the magnetic property size yet.But the structure of magnet, size and magnetic field size have determined the position of magnet with respect to sensor.This position is determined in conjunction with the output signal of monitored meter sensor under the energising situation.For electrified wire, its direction, the size of position and electric current is determined with the same method.
Adjust the size of bias magnetic field, can make this sensor adapt to the requirement of alternating current-direct current test.
Promptly there is magnetic sensitive axes 6 (as shown in Figure 1) in this sensor to the directive requirement of the response that adds.Therefore flowing to of electric current 8 should be near sensitive axes 6 directions perpendicular to sensor when requiring measuring current, and then the magnetic field that produces of electric current is approximate along magnetic sensitive axes 6 directions.
Giant magnetoresistance (GMR) sensor is an active device, for its resistance is converted into voltage signal output with the variation in outfield, is necessary for it operating voltage or electric current are provided.Giant magnetoresistance sensor adopts semiconductor technology integrated as shown in Figure 1, and it is this stool bridge diagram structure of favour, and the resistance 3,4 on four arms is connected successively.Opposite end 1,1 ' output terminal are operating voltage or electric current incoming end therein, two ends 2,2 ' are the signal output part of sensor in addition, soft magnetic material 5 is arranged under the special occasion, and it is deposited at the bottom of the adherance of sensor and magnetic structure 10 or cover on the multilayer film electric resistance structure.Its effect is magnetic screening actions for resistance 4, makes that shielding resistance 4 is insensitive for the outfield; And, then play the effect of poly-magnetic flux for non-shielding resistance 3, and promptly amplified the effect of external magnetic field to non-shielding resistance 3, strengthened the sensitivity of sensor to the outfield, also promptly strengthened the ability of the little electric current of sensor test.Adjust between soft magnetic material 5 and the non-shielding resistance 3 apart from d, can change and gather the action effect of magnetic flux resistance.This corrective action is with more multifactor relevant, but roughly can be estimated as the ratio of b and d on the figure.Thereby adjust the test specification of sensor to electric current.Have only external magnetic field when there is non-vanishing component in the sensitive axes direction 6 of sensor, sensor just has corresponding output response.10 sizes are 436 μ m * 3370 μ m at the bottom of the adherance of sensor.
Fig. 2 is the response curve of sensor output voltage to externally-applied magnetic field, and figure China and foreign countries are biased magnetic field H ', can guarantee between output voltage and outfield that (on the figure between H1, the H2) is linear.
The relative position of 8 in sensor 7 and electric current when Fig. 3 is testing current.Wherein the sensitive axes direction 6 of sensor 7 is perpendicular with electric current 8, i.e. the direction in the magnetic field 9 of electric current 8 generations is along sensitive axes 6 directions of sensor.
Fig. 4 is for amplifying the rectification display circuit.Wherein connect successively in amplifier section 13, rectifying part 14 and display part 15.Need to prove, when this circuit is used for alternating-current measurement, need or not return to zero with each switch among the figure as for exchanging a shelves AC position; When being used for DC test, need need through zero potentiometer R with each switch among the figure as for zero frequency span DC position
0Return to zero.
Fig. 5 is the working power of giant magnetoresistance sensor and amplification display circuit.Wherein an output terminal 11 is for giant magnetoresistance sensor with have the working power 12 of A/D translation function standard scale, and output voltage is 9V, its earth terminal can not with other parts of circuit altogether; Another output terminal output voltage is 5V, provides operating voltage for amplifying part 13 and rectifying part 14.
More than design can be widely used for the test to big or small electric current.Has noncontact, measurement sensitivity height, the characteristics that precision is good.Especially ought be used for big electric current, high voltage field is fashionable, have simple to operate, safety outstanding advantage.It is existing renewal product with current sensor.
Claims (7)
1, a kind of giant magnetoresistance sensor is characterized in that, it adopts this stool bridge architecture of favour, and four-arm resistance (3,4) is the multilayer film resistance of spin valve structure, and this resistance (3,4) can produce giant magnetoresistance effect.
2, giant magnetoresistance sensor as claimed in claim 1, it is characterized in that described giant magnetoresistance sensor also comprises the soft magnetic material (5) with the multilayer film resistance shielding of relative two arms of bridge architecture, magnetic field is insensitive to external world to make the resistance of conductively-closed, and other two arm resistance are had the magnetic flux converging action again.
3, giant magnetoresistance sensor as claimed in claim 1 or 2 is characterized in that described giant magnetoresistance sensor also comprises can produce the magnet that adds bias magnetic field.
4, giant magnetoresistance sensor as claimed in claim 3 is characterized in that described magnet is permanent magnet or electrified wire.
5, giant magnetoresistance sensor as claimed in claim 1 or 2, it is characterized in that described giant magnetoresistance sensor also comprises amplification rectification display circuit, it comprises switching back and forth and exchanges or partly (13), rectification partly (14) and show partly (15) of the amplification of DC test that this three part (13,14,15) is connected successively.
6, giant magnetoresistance sensor as claimed in claim 3, it is characterized in that described giant magnetoresistance sensor also comprises amplification rectification display circuit, it comprises switching back and forth and exchanges or partly (13), rectification partly (14) and show partly (15) of the amplification of DC test that this three part (13,14,15) is connected successively.
7, giant magnetoresistance sensor as claimed in claim 4, it is characterized in that described giant magnetoresistance sensor also comprises amplification rectification display circuit, it comprises switching back and forth and exchanges or partly (13), rectification partly (14) and show partly (15) of the amplification of DC test that this three part (13,14,15) is connected successively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01202985 CN2466665Y (en) | 2001-01-17 | 2001-01-17 | Strong magnetic resistance sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01202985 CN2466665Y (en) | 2001-01-17 | 2001-01-17 | Strong magnetic resistance sensor |
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| CN2466665Y true CN2466665Y (en) | 2001-12-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01202985 Expired - Fee Related CN2466665Y (en) | 2001-01-17 | 2001-01-17 | Strong magnetic resistance sensor |
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101140263B (en) * | 2007-09-30 | 2010-10-13 | 浙江大学 | Electric transverse currents detecting sensor based on strong magnetic resistance and method thereof |
| CN101042360B (en) * | 2007-04-20 | 2010-12-01 | 中国科学院电工研究所 | Sensor based on strong magnetic resistance |
| CN102169133A (en) * | 2011-04-22 | 2011-08-31 | 江苏多维科技有限公司 | Current measurement device |
| CN102323467A (en) * | 2011-08-31 | 2012-01-18 | 清华大学 | Giant magnetoresistive effect current sensor using amorphous alloy magnetic ring structure |
| CN102323554A (en) * | 2011-05-17 | 2012-01-18 | 杭州电子科技大学 | Integrated coil-biased giant magnetoresistance magneto-dependent sensor |
| CN102549442A (en) * | 2009-08-14 | 2012-07-04 | 森泰克有限公司 | Current sensor |
| CN103314304A (en) * | 2010-12-27 | 2013-09-18 | 阿尔卑斯绿色器件株式会社 | Electromagnetic proportional current sensor |
| CN103575302A (en) * | 2012-08-10 | 2014-02-12 | 北京嘉岳同乐极电子有限公司 | Magnetic sensor chip, magnetic sensor and manufacturing method of magnetic sensor |
| CN103624040A (en) * | 2013-12-09 | 2014-03-12 | 沈阳永业实业有限公司 | Pipe cleaner provided with giant-magnetoresistance sensor |
| CN105021867A (en) * | 2015-07-13 | 2015-11-04 | 东莞电子科技大学电子信息工程研究院 | System and method for measuring network voltage |
| CN105988263A (en) * | 2015-03-19 | 2016-10-05 | 精工精密株式会社 | Blade drive device and optical apparatus |
| CN108389959A (en) * | 2018-02-28 | 2018-08-10 | 中国电子科技集团公司第十三研究所 | A kind of bridge type GaN pressure sensors preparation method and device |
| CN108717169A (en) * | 2018-06-22 | 2018-10-30 | 钱正洪 | A kind of two-dimensional magnetic field sensor |
| CN110741269A (en) * | 2017-10-06 | 2020-01-31 | 株式会社村田制作所 | Magnetic sensor and current sensor |
| CN112363097A (en) * | 2020-11-02 | 2021-02-12 | 珠海多创科技有限公司 | Magneto-resistance sensor chip |
-
2001
- 2001-01-17 CN CN 01202985 patent/CN2466665Y/en not_active Expired - Fee Related
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101042360B (en) * | 2007-04-20 | 2010-12-01 | 中国科学院电工研究所 | Sensor based on strong magnetic resistance |
| CN101140263B (en) * | 2007-09-30 | 2010-10-13 | 浙江大学 | Electric transverse currents detecting sensor based on strong magnetic resistance and method thereof |
| CN102549442A (en) * | 2009-08-14 | 2012-07-04 | 森泰克有限公司 | Current sensor |
| CN103314304A (en) * | 2010-12-27 | 2013-09-18 | 阿尔卑斯绿色器件株式会社 | Electromagnetic proportional current sensor |
| CN102169133A (en) * | 2011-04-22 | 2011-08-31 | 江苏多维科技有限公司 | Current measurement device |
| CN102323554A (en) * | 2011-05-17 | 2012-01-18 | 杭州电子科技大学 | Integrated coil-biased giant magnetoresistance magneto-dependent sensor |
| CN102323467A (en) * | 2011-08-31 | 2012-01-18 | 清华大学 | Giant magnetoresistive effect current sensor using amorphous alloy magnetic ring structure |
| CN103575302A (en) * | 2012-08-10 | 2014-02-12 | 北京嘉岳同乐极电子有限公司 | Magnetic sensor chip, magnetic sensor and manufacturing method of magnetic sensor |
| CN103624040A (en) * | 2013-12-09 | 2014-03-12 | 沈阳永业实业有限公司 | Pipe cleaner provided with giant-magnetoresistance sensor |
| CN105988263A (en) * | 2015-03-19 | 2016-10-05 | 精工精密株式会社 | Blade drive device and optical apparatus |
| CN105021867A (en) * | 2015-07-13 | 2015-11-04 | 东莞电子科技大学电子信息工程研究院 | System and method for measuring network voltage |
| CN110741269A (en) * | 2017-10-06 | 2020-01-31 | 株式会社村田制作所 | Magnetic sensor and current sensor |
| CN108389959A (en) * | 2018-02-28 | 2018-08-10 | 中国电子科技集团公司第十三研究所 | A kind of bridge type GaN pressure sensors preparation method and device |
| CN108717169A (en) * | 2018-06-22 | 2018-10-30 | 钱正洪 | A kind of two-dimensional magnetic field sensor |
| CN108717169B (en) * | 2018-06-22 | 2020-10-09 | 钱正洪 | Two-dimensional magnetic field sensor |
| CN112363097A (en) * | 2020-11-02 | 2021-02-12 | 珠海多创科技有限公司 | Magneto-resistance sensor chip |
| CN112363097B (en) * | 2020-11-02 | 2021-09-21 | 珠海多创科技有限公司 | Magneto-resistance sensor chip |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C57 | Notification of unclear or unknown address | ||
| DD01 | Delivery of document by public notice |
Addressee: Shenzhen Huaxia Magnetic Electronic Technology Development Co., Ltd. Document name: Notification of Termination of Patent Right |
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| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |