CN108717169A - A kind of two-dimensional magnetic field sensor - Google Patents
A kind of two-dimensional magnetic field sensor Download PDFInfo
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- CN108717169A CN108717169A CN201810654001.6A CN201810654001A CN108717169A CN 108717169 A CN108717169 A CN 108717169A CN 201810654001 A CN201810654001 A CN 201810654001A CN 108717169 A CN108717169 A CN 108717169A
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- mistor
- guiding device
- magnetic flux
- flux guiding
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle
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Abstract
The present invention relates to a kind of two-dimensional magnetic field sensors.The present invention includes magnetic flux guiding device.Magnetic flux guiding device is arranged on substrate, and magnetic flux guiding device external frame is annular or semicircular configuration, and magnetic flux guiding device is divided into two or four region according to symmetry axis；Each region is provided with mistor and places gap.Each region is provided with a pair of of mistor, and mistor is respectively provided on substrate, and a mistor is covered by magnetic flux guiding device, and another mistor setting is placed in mistor in gap.Two pairs of mistors in diagonal two regions are linked to be two groups of wheatstone bridge configurations respectively.The present invention is integrated for single, can integrated level height.Using in magnetic flux guiding device gap mistor and the mistor that is covered by magnetic flux guiding device constitute two groups of wheatstone bridge configurations and form difference outputs, the previous two-dimensional magnetic field sensor that compares has higher precision, strong antijamming capability, is easier to miniaturization, is integrated, while double bridge can effectively inhibit temperature drift.
Description
Technical field
The invention belongs to Magnetic Sensor fields, are related to a kind of two-dimensional magnetic field sensor.
Background technology
Previous magnetic field sensor is the progress with magnetic measurement apparatus and is gradually developed, certainly with information industry, industry
The rapid development of dynamicization, communications and transportation, power electronic technique, office automation, household electrical appliance, Medical Instruments etc. and electrometer
The application of calculation machine it is universal, the demand of magnetic field sensor constantly increases, and with the development of microelectric technique, magnetic field sensor is towards small
Type, integrated and intelligentized direction are developed, and then the performance requirement of magnetic field sensor are also continuously improved.
The existing sensor for carrying out two-dimensional magnetic field measurement is mainly orthogonal by installing two on measuring plane
Magnetic Sensor obtains the magnetic field intensity of two dimensions respectively；A kind of two dimension is described in the patent of Patent No. 02147304.8
Magnetic sensor, it includes the first MI elements being arranged for detecting the first coordinate axial direction ingredient of external magnetic field, for examining
The 2nd MI elements and integrated circuit surveyed the second coordinate axial direction ingredient of external magnetic field and be arranged；This magnetic field sensor can be given and survey
Amount system brings error, and occupies larger space, meanwhile, this structure needs to realize two chips by encapsulating, unfavorable
In integrated.Also a kind of method measuring two-dimensional magnetic field is measured by two magnetic tunnel junction sensors, wherein the first magnetic tunnel
Road knot sensor includes the first nailed layer and the first sensing element formed on the first nailed layer, and the second magnetic tunnel-junction passes
Sensor includes the second nailed layer and formed on the second nailed layer and orthogonal with the first sensing element the second sensing
Element；It is this to design there are complex process, realize the problems such as more difficult.
Invention content
In view of the above-mentioned deficiencies in the prior art, it is an object of the present invention to propose a kind of two-dimensional magnetic field sensor.
The present invention includes magnetic flux guiding device.Magnetic flux guiding device is arranged on substrate, and magnetic flux guiding device external frame is Fang Huan
Magnetic flux guiding device is divided into four regions by shape or cirque structure, two diagonal lines or two vertical symmetry axis；Each region
It is provided with mistor and places gap.Each region is provided with a pair of of mistor, and mistor is respectively provided on substrate, one
Mistor is covered by magnetic flux guiding device, and another mistor setting is placed in mistor in gap.
Two pairs of mistors in diagonal two regions are linked to be two groups of wheatstone bridge configurations respectively.
In the present invention magnetic flux guiding device external frame can also be horizontal direction or the symmetrical semicircular configuration of vertical direction,
Magnetic flux guiding device is divided into two regions by symmetry axis；Each region is provided with mistor and places gap.Each region is provided with
A pair of of mistor, mistor are respectively provided on substrate, and a mistor is covered by magnetic flux guiding device, another mistor
Setting is placed in mistor in gap.A pair of of mistor of the same area is linked to be Wheatstone bridge half-bridge structure.
It is in be more than 0 ° of inclination angle for being less than 90 ° that the mistor, which places the both sides in gap and trimming,；
Two gaps or four gaps of the described magnetic flux guiding device induction flat magnetic field by magnetic flux guiding device, in gap
Mistor experience the magnetic-field component by gap, magneto-resistor changes with outfield, and is covered by magnetic flux guiding device
Mistor by soft magnetism due to being shielded, therefore magneto-resistor does not change with outfield, mistor in the gap of magnetic flux guiding device and
The mistor covered by magnetic flux guiding device forms two pairs of Wheatstone bridges and forms difference output, to realize to two-dimensional magnetic field
It measures.
The mistor is made of same material, is anisotropic magnetoresistance, giant magnetoresistance, magnetic tunnel-junction resistance.
In the same area, the angle of inclination of the mistor and the mistor placement angle of inclination in gap are identical,
The both sides of mistor are parallel with the trimming in gap.
The magnetic flux guiding device selects soft magnetic materials.
The present invention is a kind of design on silicon chip level, be can be realized by structure design in preparation process, is single
Core is integrated, can integrated level height.Using in magnetic flux guiding device gap mistor and the magnetosensitive electricity that is covered by magnetic flux guiding device
Resistance constitutes two groups of wheatstone bridge configurations and forms difference output, and the previous two-dimensional magnetic field sensor that compares has higher essence
Degree, strong antijamming capability are easier to miniaturization, are integrated, simultaneously because two groups of bridge structures allow the design effective
Inhibit temperature drift.
Description of the drawings
Fig. 1 is a kind of overall structure diagram of the present invention；
Fig. 2 is another overall structure diagram of the present invention；
Fig. 3 is the overall structure diagram of the embodiment of the present invention 1；
Fig. 4 is the overall structure diagram of the embodiment of the present invention 2；
Fig. 5 is the electric bridge connection figure of the embodiment of the present invention；
Fig. 6 is that analogous diagram is decomposed in the magnetic field of the embodiment of the present invention 1.
Specific implementation mode
The present invention is further described below in conjunction with the accompanying drawings.
As illustrated in fig. 1 and 2, a kind of two-dimensional magnetic field sensor, including magnetic flux guiding device 1.Magnetic flux guiding device 1 is arranged in substrate
On, 1 external frame of magnetic flux guiding device is side's annular or cirque structure, two diagonal lines or two vertical symmetry axis by magnetic flux
Guiding device is divided into four regions；Each region is provided with identical mistor and places gap 2.Each region is provided with a pair of of magnetic
Quick resistance 3, mistor are respectively provided on substrate, and a mistor is covered by magnetic flux guiding device, another mistor setting
It is placed in gap in mistor.
It is in be more than 0 ° of inclination angle for being less than 90 ° that mistor on wherein four regions, which places the both sides in gap 2 and trimming,
Four mistors place gap 2 symmetrically configuration or asymmetric arrangement；Mistor places 2 liang of gap on magnetic flux guiding device
Side trimming is the inclination angle for being less than 90 ° more than 0 °.When four mistors placement gaps 2 are diagonal about magnetic flux guiding device 1 two
The vertical symmetrical axial symmetry of line or two, and when inclination angle is 45 °, two-dimensional magnetic field sensor performance is optimal；Draw in magnetic flux
It is parallel with the trimming in gap or have angle to lead the mistor placed in each gap of device 1.
As shown in figure 3, magnetic flux guiding device 1 is square annular in embodiment one, be provided with both sides in each edge is in trimming
Gap 2 is placed for the mistor at 45 ° of inclinations angle, four mistors place gap 2 about 1 two diagonal lines of magnetic flux guiding device
It is symmetrical.
The mistor placed in mistor placement gap 2 is parallel with gap trimming, is covered by magnetic flux guiding device 1
Mistor, which is arranged, to be placed in mistor beside the mistor placed in gap 2；Magnetic flux guiding device, which uses, has high magnetic conductance
The soft magnetic materials of rate characteristic, such as ferronickel, ferro-silicium (silicon steel sheet).
As shown in figure 4, magnetic flux guiding device 1 is two mutually perpendicular sides of square annular in embodiment two.Each edge
Structure is in the same manner as in Example 1.
Four magnetic resistance of 1 two groups of opposite side of magnetic flux guiding device separately constitute two Wheatstone bridges in embodiment 1.Two favours this
Logical bridge structure is identical, and the resistance in upper mistor placement gap is the first magnetic resistance resistance R1 on one side, another resistance is second
Magnetic resistance resistance R2；Resistance on another side in mistor placement gap is third magnetic resistance resistance R3, another resistance is the 4th magnetic
Hinder resistance R4.
As shown in figure 5, one end of the first magnetic resistance resistance R1 is connect with one end of the second magnetic resistance resistance R2 is followed by VCC input electricity
Source；One end of third magnetic resistance resistance R3 is grounded after being connect with one end of the 4th magnetic resistance resistance R4；First magnetic resistance resistance R1's is another
End is used as the first output end, the other end and the second magnetic of third magnetic resistance resistance R3 after being connect with the other end of the 4th magnetic resistance resistance R4
It is used as second output terminal after hindering the other end connection of resistance R2；It is defeated that two output ends of each Wheatstone bridge are respectively formed difference
Go out Vout1 and Vout2.
As shown in fig. 6, the in-plane magnetic field measured by sensor can be decomposed into X-axis and Y-axis both direction by magnetic flux guiding device
Flux component.
Operation principle is as follows, since the high permeability characteristic of magnetic flux guiding device is induced to pass through inside magnetic flux guiding device
Gap, the mistor in gap can experience the magnetic-field component by gap, and magneto-resistor changes with outfield, and by magnetic
The mistor of logical guiding device covering by soft magnetism due to being shielded, therefore magneto-resistor does not change with outfield, therefore respectively by two groups of electric bridges
To two difference outputs, to realize the measurement to the magnetic field intensity of two-dimensional magnetic field.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case of without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Profit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent requirements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
Claims (9)
1. a kind of two-dimensional magnetic field sensor, including magnetic flux guiding device；It is characterized in that：The magnetic flux guiding device is arranged in substrate
On, magnetic flux guiding device external frame is side's annular or cirque structure, two diagonal lines or two vertical symmetry axis by magnetic flux
Guiding device is divided into four regions；Each region is provided with mistor and places gap；Each region is provided with a pair of of mistor,
Mistor is respectively provided on substrate, and a mistor is covered by magnetic flux guiding device, and another mistor setting is in magnetosensitive electricity
Resistance is placed in gap；Two pairs of mistors in diagonal two regions are linked to be two groups of wheatstone bridge configurations respectively.
2. a kind of two-dimensional magnetic field sensor as described in claim 1, it is characterised in that：Two groups of Wheatstone bridges are complete
Bridge structure, two favour stone full-bridges are respectively formed two difference outputs.
3. a kind of two-dimensional magnetic field sensor as described in claim 1, it is characterised in that：Two groups of Wheatstone bridges are half
Bridge structure.
4. a kind of two-dimensional magnetic field sensor, including magnetic flux guiding device；It is characterized in that：The magnetic flux guiding device external frame is water
Square to or vertical direction diagonally magnetic flux guiding device is divided into two regions by symmetrical semicircular configuration, symmetry axis；Each
Region is provided with mistor and places gap；Each region is provided with a pair of of mistor, and mistor is respectively provided on substrate,
One mistor is covered by magnetic flux guiding device, and another mistor setting is placed in mistor in gap；The same area
A pair of of mistor is linked to be Wheatstone bridge half-bridge structure.
5. a kind of two-dimensional magnetic field sensor as described in claim 1 or 4, it is characterised in that：Between the mistor is placed
The both sides of gap are in be more than 0 ° of inclination angle for being less than 90 ° with trimming.
6. a kind of two-dimensional magnetic field sensor as described in claim 1 or 4, it is characterised in that：The magnetic flux guiding device induction
Two gaps or four gaps of the flat magnetic field by magnetic flux guiding device, the mistor in gap experience the magnetic by gap
Field component, magneto-resistor change with outfield, and by mistor that magnetic flux guiding device covers due to being shielded by soft magnetism, therefore magnetoelectricity
Resistance does not change with outfield, and mistor in the gap of magnetic flux guiding device and the mistor covered by magnetic flux guiding device form
Two pairs of Wheatstone bridges form difference output, to realize the measurement to two-dimensional magnetic field.
7. a kind of two-dimensional magnetic field sensor as described in claim 1 or 4, it is characterised in that：The mistor is by of the same race
Material forms, and is anisotropic magnetoresistance, giant magnetoresistance, magnetic tunnel-junction resistance.
8. a kind of two-dimensional magnetic field sensor as described in claim 1 or 4, it is characterised in that：In the same area, the magnetosensitive
The angle of inclination of resistance is identical as the mistor placement angle of inclination in gap, and the trimming on the both sides and gap of mistor is flat
Row.
9. a kind of two-dimensional magnetic field sensor as described in claim 1 or 4, it is characterised in that：The magnetic flux guiding device is selected
Soft magnetic materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810654001.6A CN108717169B (en) | 2018-06-22 | 2018-06-22 | Two-dimensional magnetic field sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810654001.6A CN108717169B (en) | 2018-06-22 | 2018-06-22 | Two-dimensional magnetic field sensor |
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| CN108717169A true CN108717169A (en) | 2018-10-30 |
| CN108717169B CN108717169B (en) | 2020-10-09 |
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| CN201810654001.6A Active CN108717169B (en) | 2018-06-22 | 2018-06-22 | Two-dimensional magnetic field sensor |
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Cited By (6)
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| CN108303660A (en) * | 2018-03-13 | 2018-07-20 | 海宁嘉晨汽车电子技术有限公司 | A kind of plug-type vertical sensitive Magnetic Sensor |
| CN110687485A (en) * | 2019-07-10 | 2020-01-14 | 杭州电子科技大学 | Wide-range vertical sensitive magnetic sensor with feedback on closed-loop core |
| CN110806529A (en) * | 2019-11-27 | 2020-02-18 | 云南电网有限责任公司电力科学研究院 | Capacitive type equipment insulation performance on-line monitoring system |
| CN113030804A (en) * | 2021-03-01 | 2021-06-25 | 歌尔微电子股份有限公司 | Sensor and electronic device |
| CN113419197A (en) * | 2021-06-02 | 2021-09-21 | 华中科技大学 | Voltage-reducing magnetic flux ring device and magnetic flux induction signal measuring method |
| CN114609560A (en) * | 2022-05-09 | 2022-06-10 | 四川永星电子有限公司 | Two-dimensional AMR magnetic sensor and preparation process thereof |
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| CN110687485A (en) * | 2019-07-10 | 2020-01-14 | 杭州电子科技大学 | Wide-range vertical sensitive magnetic sensor with feedback on closed-loop core |
| CN110806529A (en) * | 2019-11-27 | 2020-02-18 | 云南电网有限责任公司电力科学研究院 | Capacitive type equipment insulation performance on-line monitoring system |
| CN113030804A (en) * | 2021-03-01 | 2021-06-25 | 歌尔微电子股份有限公司 | Sensor and electronic device |
| CN113030804B (en) * | 2021-03-01 | 2022-12-23 | 歌尔微电子股份有限公司 | Sensor and electronic device |
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| CN113419197B (en) * | 2021-06-02 | 2022-02-15 | 华中科技大学 | Voltage-reducing magnetic flux ring device and magnetic flux induction signal measuring method |
| CN114609560A (en) * | 2022-05-09 | 2022-06-10 | 四川永星电子有限公司 | Two-dimensional AMR magnetic sensor and preparation process thereof |
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