CN2432562Y - Pressure differential pressure sensor without displacement and deformation device - Google Patents
Pressure differential pressure sensor without displacement and deformation device Download PDFInfo
- Publication number
- CN2432562Y CN2432562Y CN 00228913 CN00228913U CN2432562Y CN 2432562 Y CN2432562 Y CN 2432562Y CN 00228913 CN00228913 CN 00228913 CN 00228913 U CN00228913 U CN 00228913U CN 2432562 Y CN2432562 Y CN 2432562Y
- Authority
- CN
- China
- Prior art keywords
- pressure
- knife
- rigid
- pressure chamber
- circular plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The utility model discloses a pressure differential pressure sensor without a displacement and deformation device in the technical field of test. The pressure differential pressure sensor comprises a pressure chamber, a rigid lever, a fulcrum cutting edge, a piezoelectric resonance force sensor composed of piezoelectric crystals, etc., wherein, the inner end face of the pressure chamber is welded and formed into a sealed face by a pressure chamber body, an annular metal thin film piece and a rigid circular plate with a spherical surface or conical surface contact head. The utility model has the principle that the medium pressure in the pressure chamber is passed to one end of the rigid lever through the spherical surface or conical surface contact head on the rigid circular plate mutually connected with the annular metal thin film piece, and then is passed to the piezoelectric resonance force sensor in the mode of no displacement by the other end of the rigid lever; thus, the measurement of the medium pressure in the pressure chamber is realized. The utility model is used in pressure, differential pressure and liquid level measuring transducers.
Description
The utility model belongs to technical field of measurement and test, further relates to a kind of pressure transducer that does not rely on displacement and deformable means and principle.
Up to now, the sensor that is used for pressure, differential pressure and level gauging transmitter all is to obtain signal, gaging pressure by the principle of device micrometric displacement or little distortion.Such as bellows pressure sensor (U.S. Rosemount Inc patent, international publication number: W095/08757), exactly by producing micro-displacement behind the flexible lamp pole plate liquid body pressure, changed and fixed plate electrode between the gap so that changed electric capacity between pole plate.Diffuse si formula sensor then is that the resistance variations that the distortion by the diffuse si resistance bridge causes is come sensed pressure.The precision of these sensors mainly guarantees by technology and material.To depend on size, composition, elasticity, polar plate spacing, silica gel quality of plate material etc. such as the precision of bellows pressure sensor.The precision of diffuse si formula sensor then mainly depends on semiconductor technology.Obviously, these problems are difficult to try to achieve a consensus in batch process, and are difficult to guarantee long-time stability in the use afterwards.
The purpose of this utility model is to provide a kind of displacement and deformable means and principle of not relying on, and utilize the piezoelectric resonator force transducer of forming by piezoelectric crystal as base components, by rigid lever mechanism, the area pressure of media such as liquid, gas in pressure cavity is converted to the point pressure that acts on the piezoelectric resonator force transducer of being made up of piezoelectric crystal, thus can the measuring media uniaxial pressure and the sensor of bidirection press (differential pressure).
The utility model comprises a single pressure chamber or two pressure chambers of relative pressure is arranged, an end face is connected by the rigid circular plate that a belt metal foil diaphragm and has sphere or circular conical surface contact in the cavity, form sealing surface, the rigid lever of the contact of rigid circular plate by a variable pivot distance contacts with the stress point of a piezoelectric resonator force transducer of being made up of piezoelectric crystal or stress point bilateral on same axis of the piezoelectric resonator force transducer identical with two contacts, and the pressure of medium passes through rigid circular plate in the pressure chamber, act on the stress point of piezoelectric resonator force transducer the rigid lever non-displacement.
The utility model will be further described below in conjunction with accompanying drawing.
Fig. 1 is the utility model typical structure synoptic diagram.
Fig. 2 is the utility model embodiment 1 structural drawing.
Fig. 3 is the utility model embodiment 2 structural drawing.
As seen from Figure 1, end faces in the pressure chamber of the present utility model 13 are the belt metal foil diaphragm 8 of convex globoidal by pressure chamber body 9, surface and have sphere or 7 welding of the rigid circular plate of circular conical surface contact form sealing surface.Pressure chamber 13 has only an open channel to connect with pipeline.The one side of rigid circular plate 7 in pressure chamber 13 outsides has the contact that has sphere or circular conical surface of a projection, contact contacts with the one side of rigid lever 4 one ends, the another side of rigid lever 4 these ends contacts with spring 6, and spring 6 offers the contact of rigid circular plate 7 and the suitable pretightning force of contact point of rigid lever 4.The fulcrum edge of a knife 5 contacts in edge of a knife mode with rigid lever 4, the other end of the fulcrum edge of a knife 5 is a cylinder, can connect with the uniform one group of hole of the direction parallel on the parent plate 12 with rigid lever 4 length, make the fulcrum edge of a knife 5 adjustable, reach the purpose that changes lever ratio so that change range ability of the present utility model along rigid lever 4 lengthwise location.The other end of rigid lever 4 contacts with the stress point of the piezoelectric resonator force transducer of being made up of piezoelectric crystal 2 by a spheroid or cone 3.Piezoelectric resonator force transducer 2 is installed together with pretension location-plate 10, and can regulate pretightning force by the adjustment screw rod 11 that passes parent plate 12 and pretension location-plate 10.Signal lead 1 passes pretension location-plate 10 and draws.
Principle of the present utility model is by being the end that sphere on the rigid circular plate 7 that the belt metal foil diaphragm 8 of convex globoidal links to each other or circular conical surface contact pass to rigid lever 4 with the surface with the pressure medium in the pressure chamber 13, again by the other end non-displacement of rigid lever 4 pass to the piezoelectric resonator force transducer of forming by piezoelectric crystal 2, to realize measurement to the pressure medium in the pressure chamber 13.
Fig. 2 is the utility model embodiment 1 structural drawing.It has represented a kind of structure that can measure pressure at both sides cavity pressure difference of the present utility model.Pressure chamber is divided into high pressure chest 17 and 18 two pressure chambers of low-pressure cavity.End faces in the high pressure chest 17 are the belt metal foil diaphragm 8 of convex globoidal by high pressure chest body 15, surface and have sphere or 7 welding of the rigid circular plate of circular conical surface contact form sealing surface, and end faces in the low-pressure cavity 18 are the belt metal foil diaphragm 23 of convex globoidal by low-pressure cavity body 16, surface and have sphere or the rigid circular plate of circular conical surface contact 22 welds and forms sealing surface.High pressure chest 17 and low-pressure cavity 18 all have an open channel can connect with pipeline respectively.As the rigid circular plate 7 of high pressure chest 17 interior end face ingredients with as the sphere on rigid circular plate 22 outside surfaces of low-pressure cavity 18 interior end face ingredients or circular conical surface contact on same axis with relative contact the in two sides of rigid lever 4 one ends, suitable pretightning force is provided by screw rod 14.The uniform some V-shaped grooves facing each other in two sides, rigid lever 4 middle part, in a pair of therein V-shaped groove of the fulcrum edge of a knife 5 and the fulcrum edge of a knife 21 in edge of a knife mode with rigid lever 4 clampings.The fulcrum edge of a knife 5 and the fulcrum edge of a knife 21 along the position of rigid lever 4 length directions can by with matrix 19 and matrix 20 on different position, hole butt joint regulate, reach the purpose that changes lever ratio so that change range ability of the present utility model.The one side of the other end of rigid lever 4 contacts with the stress point of the piezoelectric resonator force transducer of being made up of piezoelectric crystal 2 by a spheroid or cone 3, another side contacts with spring 15, two pretension location-plates 10 are clamped spring 15 and piezoelectric resonator force transducer 2 by adjusting screw rod 11, and can regulate pretightning force by adjusting screw rod 11.Signal lead 1 passes pretension location-plate 10 and draws.
Fig. 3 is the utility model embodiment 2 structural drawing.It has represented that the utility model can measure the another kind of structure of pressure at both sides cavity pressure difference.Pressure chamber is divided into high pressure chest 17 and 18 two pressure chambers of low-pressure cavity.End faces in the high pressure chest 17 are the belt metal foil diaphragm 8 of convex globoidal by high pressure chest body 15, surface and have sphere or 7 welding of the rigid circular plate of circular conical surface contact form sealing surface, and end faces in the low-pressure cavity 18 are the belt metal foil diaphragm 23 of convex globoidal by low-pressure cavity body 16, surface and have sphere or the rigid circular plate of circular conical surface contact 22 welds and forms sealing surface.High pressure chest 17 and low-pressure cavity 18 all have an open channel can connect with pipeline respectively.As the rigid circular plate 7 of high pressure chest 17 interior end face ingredients with as the sphere on rigid circular plate 22 outside surfaces of low-pressure cavity 18 interior end face ingredients or circular conical surface contact on same axis with relative contact the in two sides of rigid lever 4 one ends, suitable pretightning force is provided by screw rod 14.The uniform some V-shaped grooves facing each other in rigid lever 4 middle parts, in a pair of therein V-shaped groove of the fulcrum edge of a knife 5 and the fulcrum edge of a knife 21 in edge of a knife mode with rigid lever 4 clampings.The fulcrum edge of a knife 5 and the fulcrum edge of a knife 21 along the position of rigid lever 4 length directions can by with matrix 19 and matrix 20 on different position, hole butt joint regulate, reach the purpose that changes lever ratio so that change range ability of the present utility model.The two sides of the other end of rigid lever 4 contacts by two spheroids or cone 3 stress point with two identical piezoelectric resonator force transducers of being made up of piezoelectric crystal 2, two pretension location-plates 10 are clamped two piezoelectric resonator force transducers 2 by adjusting screw rod 11, and can regulate pretightning force by adjusting screw rod 11.Signal lead 1 passes pretension location-plate 10 and draws.
The utility model is applied in pressure, differential pressure and the level gauging transmitter, its essential characteristic be with liquid, The area pressure of the media such as gas in pressure cavity by rigid lever member non-displacement be converted to and act on The point pressure of piezoelectric resonator power sensor stress point, piezoelectric resonator power sensor does not then have distortion with rigidity Piezo-electric crystal is core parts, thereby can measuring media uniaxial pressure and bidirection press (differential pressure). This reality Be with novel advantage: its precision and stability depends primarily on the character of piezo-electric crystal material itself, from And can obtain high precision and stability.
Claims (3)
1. the pressure of non-displacement and deformable means, differential pressure pick-up, it comprises pressure chamber, the metal foil diaphragm that goes in ring has the rigid circular plate of sphere or circular conical surface contact, rigid lever, the fulcrum edge of a knife, the piezoelectric resonator force transducer of being made up of piezoelectric crystal etc.It is characterized in that: an end face in the pressure chamber 13 is by pressure chamber body 9, the metal foil diaphragm 8 and have sphere or 7 welding of the rigid circular plate of circular conical surface contact form sealing surface of going in ring, and pressure chamber interior media and external agency and piezoelectric resonator force transducer is isolated; Rigid circular plate 7 contacts with the one side of an end of rigid lever 4 at the sphere or the circular conical surface contact of pressure chamber 13 outside one sides, and the other end of rigid lever 4 contacts with the stress point of the piezoelectric resonator force transducer of being made up of piezoelectric crystal 2 by a spheroid or cone 3; Rigid lever 4 contacts in edge of a knife mode with the fulcrum edge of a knife 5, and the fulcrum edge of a knife 5 can be adjustable by the different installation sites of the fulcrum edge of a knife 5 apart from the distance (being brake leverage) of 4 two stress points of rigid lever.
2. as the pressure of right 1 described non-displacement and deformable means, differential pressure pick-up, it is characterized in that: pressure chamber is divided into high pressure chest 17 and 18 two pressure chambers of low-pressure cavity, an end face in the high pressure chest 17 is by pressure chamber body 15, metal foil diaphragm 8 and have sphere or 7 welding of the rigid circular plate of circular conical surface contact form sealing surfaces goes in ring, an end face in the low-pressure cavity 18 is then by pressure chamber body 16, go in ring metal foil diaphragm 23 and have sphere or 22 welding of the rigid circular plate of circular conical surface contact form sealing surfaces, two pressure chamber interior medias and external agency and piezoelectric resonator force transducer is isolated; Rigid circular plate 7 and rigid circular plate 22 the sphere on the pressure chamber outer surface or circular conical surface contact on same axis with relative contact the in two sides of rigid lever 4 one ends; The one side of the other end of rigid lever 4 contacts with the stress point of the piezoelectric resonator force transducer of being made up of piezoelectric crystal 2 by a spheroid or cone 3; With rigid lever 4 clampings, and the fulcrum edge of a knife 5 and the fulcrum edge of a knife 21 can be adjustable by the different installation sites of the fulcrum edge of a knife 5 and the fulcrum edge of a knife 21 apart from the distance (being brake leverage) of 4 two stress points of rigid lever in edge of a knife mode for the fulcrum edge of a knife 5 and the fulcrum edge of a knife 21.
3. as the pressure of right 1 described non-displacement and deformable means, differential pressure pick-up, it is characterized in that: pressure chamber is divided into high pressure chest 17 and 18 two pressure chambers of low-pressure cavity, an end face in the high pressure chest 17 is by pressure chamber body 15, metal foil diaphragm 8 and have sphere or 7 welding of the rigid circular plate of circular conical surface contact form sealing surfaces goes in ring, an end face in the low-pressure cavity 18 is then by pressure chamber body 16, go in ring metal foil diaphragm 23 and have sphere or 22 welding of the rigid circular plate of circular conical surface contact form sealing surfaces, two pressure chamber interior medias and external agency and piezoelectric resonator force transducer is isolated; Rigid circular plate 7 and rigid circular plate 22 the sphere on the pressure chamber outer surface or circular conical surface contact on same axis with relative contact the in two sides of rigid lever 4 one ends; The two sides of the other end of rigid lever 4 contacts by two spheroids or cone 3 stress point with two piezoelectric resonator force transducers of being made up of piezoelectric crystal 2; With rigid lever 4 clampings, and the fulcrum edge of a knife 5 and the fulcrum edge of a knife 21 can be adjustable by the different installation sites of the fulcrum edge of a knife 5 and the fulcrum edge of a knife 21 apart from the distance (being brake leverage) of 4 two stress points of rigid lever in edge of a knife mode for the fulcrum edge of a knife 5 and the fulcrum edge of a knife 21.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00228913 CN2432562Y (en) | 2000-07-21 | 2000-07-21 | Pressure differential pressure sensor without displacement and deformation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00228913 CN2432562Y (en) | 2000-07-21 | 2000-07-21 | Pressure differential pressure sensor without displacement and deformation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2432562Y true CN2432562Y (en) | 2001-05-30 |
Family
ID=33592307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 00228913 Expired - Fee Related CN2432562Y (en) | 2000-07-21 | 2000-07-21 | Pressure differential pressure sensor without displacement and deformation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2432562Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101545815B (en) * | 2008-03-25 | 2011-04-20 | 爱普生拓优科梦株式会社 | Pressure sensor and method for manufacturing the same |
| CN103640025A (en) * | 2013-12-04 | 2014-03-19 | 深圳市桑谷医疗机器人有限公司 | Intelligent medical clamping mechanical arm |
| CN105509958A (en) * | 2014-10-20 | 2016-04-20 | 华记科技有限公司 | Ultra micro differential pressure gauge structure |
| CN106003730A (en) * | 2016-07-06 | 2016-10-12 | 陈立 | Automatic early-warning remote control type 3D printer |
-
2000
- 2000-07-21 CN CN 00228913 patent/CN2432562Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101545815B (en) * | 2008-03-25 | 2011-04-20 | 爱普生拓优科梦株式会社 | Pressure sensor and method for manufacturing the same |
| CN103640025A (en) * | 2013-12-04 | 2014-03-19 | 深圳市桑谷医疗机器人有限公司 | Intelligent medical clamping mechanical arm |
| CN103640025B (en) * | 2013-12-04 | 2016-05-11 | 深圳市桑谷医疗机器人有限公司 | The intelligent clamping mechanical hand of medical treatment |
| CN105509958A (en) * | 2014-10-20 | 2016-04-20 | 华记科技有限公司 | Ultra micro differential pressure gauge structure |
| CN106003730A (en) * | 2016-07-06 | 2016-10-12 | 陈立 | Automatic early-warning remote control type 3D printer |
| CN106003730B (en) * | 2016-07-06 | 2019-02-19 | 陕西恒通智能机器有限公司 | A kind of remote control type 3D printer of automatic early-warning |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA1232775A (en) | Fluid density measurement apparatus and method | |
| CN101672710B (en) | Beam-film combined micro-pressure sensor | |
| US7942062B2 (en) | Pressure sensor and method for manufacturing the same | |
| CN101273256B (en) | Tuning bi-fork piezoelectric oscillation element and pressure sensor | |
| US8015881B2 (en) | Pressure sensor | |
| US4984467A (en) | Transducer for pressures and/or vibrations and method for manufacturing thereof | |
| US7895896B2 (en) | Pressure sensor | |
| JP2002535643A (en) | Transducer with temperature compensation | |
| TW200306410A (en) | Pressure monitor incorporating saw device | |
| CN101191743A (en) | Vibration detecting probe | |
| US3942049A (en) | Piezoelectric pick-up device for measuring pressures within hollow bodies | |
| CN2432562Y (en) | Pressure differential pressure sensor without displacement and deformation device | |
| CN114705332B (en) | High-sensitivity low-nonlinearity pressure sensor and preparation method thereof | |
| CN112484900B (en) | Quartz resonant pressure sensor with integrated push-pull structure | |
| US3608370A (en) | Measurement transducer | |
| US20040129947A1 (en) | Capacitive pressure sensor | |
| CN108168817B (en) | A kind of MEMS micro-structure triple axle exciting device based on pedestal motivational techniques | |
| CN102507054A (en) | Y-shaped cavity orthogonal polarization laser-based force and mass measurement method and device | |
| Cromer | The Electronic Pressure Transmitter and Self Balancing Relay | |
| CN2432551Y (en) | Non-displacement target type flow sensor | |
| CN2457586Y (en) | Pressure drag type pressure oil filling core body | |
| CN2755581Y (en) | Ceramic pressure sensor with high overload performance | |
| SU508123A1 (en) | Pneumatic transducer of heat engineering parameter | |
| CN219573352U (en) | Pressure gauge movement with high stability | |
| CN108195536B (en) | A kind of four-axle type exciting device for MEMS micro-structure progress dynamically load |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |