CN2457586Y - Pressure drag type pressure oil filling core body - Google Patents
Pressure drag type pressure oil filling core body Download PDFInfo
- Publication number
- CN2457586Y CN2457586Y CN 00226918 CN00226918U CN2457586Y CN 2457586 Y CN2457586 Y CN 2457586Y CN 00226918 CN00226918 CN 00226918 CN 00226918 U CN00226918 U CN 00226918U CN 2457586 Y CN2457586 Y CN 2457586Y
- Authority
- CN
- China
- Prior art keywords
- pressure
- pedestal
- core body
- oil
- resistance type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The utility model belongs to a pressure blocking type pressure oil filling core body, which transforms a pressure signal into a voltage signal. The utility model adopts ion beam weld to weld a corrugated diaphragm, a pressing ring and a bottom base into integration to form a hollow cavity. The inner part of the hollow cavity is filled with silicone oil medium and a sensitive chip is arranged on a pipe base to be arranged in the hollow cavity. The utility model can be suitable for various media with a wide range.
Description
The utility model belongs to a kind of sensor, particularly a kind of can be with pressure; Conversion of signals becomes the oil-filled core body of pressure resistance type pressure of electric signal.
After the piezoresistive effect of semiconductor silicon material be it is found that, utilize contemporary integrated circuit technology, people have produced the pressure resistance type pressure-sensing device, have realized the conversion of pressure and voltage signal.But because the diversity of measuring media, the element that this suitable dry air and non-conductive, no corrosive medium are used seems powerless to other media applications.
The utility model aims to provide a kind of oil-filled core body of pressure that protection is arranged; to enlarge the pressure survey range and the medium scope of product; thereby adapt to the pressure survey of all gases, liquid, for pressure, the liquid level controlling of national economy every profession and trade facilitates, realizes industrial process automation and Information Technology Development.
The utility model design proposal: a kind of oil-filled core body of pressure resistance type pressure of realizing pressure and electrical signal conversion, comprise a pedestal (6), pedestal (6) upper end is fixedly connected with convoluted diaphragm (1), convoluted diaphragm (1) and pressure ring (3), pedestal (6) links together, be fixed with base (4) at pedestal (6) intermediate seal, solid-state pressure resistance type presser sensor chip (10) is fixed on the base (4), by lead chip electrode is connected on base (4) pin, be filled with liquid medium and sealing in the cavity between chip (10) and convoluted diaphragm (1), compensating circuit plate (8) is positioned at pedestal (6) and was worn by stem lead, and insulation sleeve (9) is between base (4) and compensating circuit plate (8).
On pedestal (6), be with O shape circle (7) so that install.
Fix the accidental damage that a protective cover (2) can prevent sensitive element on chip (10) top.
Liquid medium is silicone oil and uses pin (5) sealing in the plenum chamber.
Adopt ion beam or argon arc welding that diaphragm, pressure ring and pedestal are welded together.
Adopt gold ball bonding that lead is connected to chip electrode on the stem lead pin, lead is preferably spun gold.
The sensitive element that the utility model adopted (chip) is a solid-state pressure resistance type pressure-sensing device, has very high reliability and good repeatability, and sensitive chip is encapsulated in the Stainless Steel Shell of band convoluted diaphragm.Be filled with a small amount of silicone oil between sensitive chip and the convoluted diaphragm.When being affacted by measuring pressure on the stainless steel ripple diaphragm, pressure is delivered on the sensitive chip by silicone oil.Utilize the piezoresistive effect of semiconductor silicon material, realized the conversion of pressure and electric signal.Because the voltage signal of the output of the Wheatstone bridge on the sensitive chip is directly proportional with applied pressure, so can realize by the accurate measurement of measuring pressure.Simultaneously, the utility model also has range broad and the characteristics that are applicable to multiple measuring media.
Accompanying drawing is the utility model structural representation.
Embodiment: the employing ion beam welds or argon arc welding welds together convoluted diaphragm 1, pressure ring 3 and pedestal 6 and form a cavity.Chip 10 sticks with glue on base 4, adopts gold ball bonding that chip 10 electrodes are connected on base 4 terminal pins, and protective cover 2 is equipped with on its top.Pulse welding, with base 4 seal weldings 6 li of pedestals.Plenum chamber vacuum filling silicone oil, and with pin 5 sealing.The oil-filled hole of laser bonding.Performance test, and according to test data employing laser trimming thick film compensating circuit plate 8.Assembling compensating circuit plate 8 is positioned at pedestal 6 and was worn by stem lead.The selection of various materials should be compatible mutually with working medium.Convoluted diaphragm should have certain stiffness and elasticity.Product quality and silicone oil filling quality and sealing are closely related.Measurement range is relevant with sensitive chip range and structural strength.Properties of product depend on chip performance and compensation precision.
Claims (4)
1, a kind of oil-filled core body of pressure resistance type pressure of realizing pressure and electrical signal conversion, comprise a pedestal (6), pedestal (6) upper end is fixedly connected with convoluted diaphragm (1), it is characterized in that: convoluted diaphragm (1) and pressure ring (3), pedestal (6) links together, be fixed with base (4) at pedestal (6) intermediate seal, solid-state pressure resistance type presser sensor chip (10) is fixed on the base (4), by lead chip electrode is connected on base (4) pin, be filled with liquid medium and sealing in the plenum chamber between chip (10) and convoluted diaphragm (1), compensating circuit plate (8) is positioned at pedestal (6) and was worn by stem lead, and insulation sleeve (9) is between base (4) and compensating circuit plate (8).
2, the oil-filled core body of pressure resistance type pressure according to claim 1 is characterized in that: be with O shape circle (7) on pedestal (6).
3, the oil-filled core body of pressure resistance type pressure according to claim 1 is characterized in that: fix a protective cover (2) on chip (10) top.
4, the oil-filled core body of pressure resistance type pressure according to claim 1 is characterized in that: liquid medium is silicone oil and uses pin (5) sealing in the plenum chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00226918 CN2457586Y (en) | 2000-10-20 | 2000-10-20 | Pressure drag type pressure oil filling core body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00226918 CN2457586Y (en) | 2000-10-20 | 2000-10-20 | Pressure drag type pressure oil filling core body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2457586Y true CN2457586Y (en) | 2001-10-31 |
Family
ID=33590651
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 00226918 Expired - Fee Related CN2457586Y (en) | 2000-10-20 | 2000-10-20 | Pressure drag type pressure oil filling core body |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2457586Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101804856A (en) * | 2010-03-30 | 2010-08-18 | 中国船舶重工集团公司第七〇二研究所 | Compensation-film oil-filled connection box for deep submergence vehicle |
| CN101464200B (en) * | 2008-12-31 | 2011-01-26 | 潮州市三江电子有限公司 | Metal connecting seat for pressure transmitter seal chamber |
| CN105021322A (en) * | 2015-07-10 | 2015-11-04 | 四川奇胜科技有限公司 | Integrated pressure sensor |
| CN106768592A (en) * | 2017-02-24 | 2017-05-31 | 中国电子科技集团公司第三十八研究所 | A kind of pressure transmitter oil filling core body of band signal processing function |
-
2000
- 2000-10-20 CN CN 00226918 patent/CN2457586Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101464200B (en) * | 2008-12-31 | 2011-01-26 | 潮州市三江电子有限公司 | Metal connecting seat for pressure transmitter seal chamber |
| CN101804856A (en) * | 2010-03-30 | 2010-08-18 | 中国船舶重工集团公司第七〇二研究所 | Compensation-film oil-filled connection box for deep submergence vehicle |
| CN105021322A (en) * | 2015-07-10 | 2015-11-04 | 四川奇胜科技有限公司 | Integrated pressure sensor |
| CN106768592A (en) * | 2017-02-24 | 2017-05-31 | 中国电子科技集团公司第三十八研究所 | A kind of pressure transmitter oil filling core body of band signal processing function |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103257007B (en) | Pressure sensor dielectric medium isolation packaging structure and packaging method of same | |
| CN100545583C (en) | A kind of differential pressure, pressure, temperature simultaneously measuring multi-parameter sensor | |
| CN202382900U (en) | Absolute pressure packaging structure for strain pressure transducer and strain pressure transducer | |
| CN102331323B (en) | Hydrodynamic pressure sensing apparatus and pressure sensing element | |
| CN212807437U (en) | Core body of differential pressure sensor | |
| CN111638002A (en) | MEMS pressure sensor oil-filled core and packaging method thereof | |
| CN201297972Y (en) | Pressure sensor | |
| CN212409938U (en) | MEMS pressure sensor oil-filled core | |
| CN102322893A (en) | Oil-filled temperature and pressure combined sensor | |
| CN202442825U (en) | Dielectric isolation encapsulating structure of pressure sensor | |
| CN208606927U (en) | It is a kind of for measuring the miniaturized pressure sensing element of differential pressure signal | |
| CN2833526Y (en) | Multi-parameter sensor for measuring differential pressure, pressure and temperature | |
| US20030205091A1 (en) | Sensor package | |
| CN200989838Y (en) | Pressure sensor | |
| CN110207885A (en) | Pressure sensor core, core manufacture and packaging method and pressure sensor based on upside-down mounting welding core | |
| CN2457586Y (en) | Pressure drag type pressure oil filling core body | |
| CN109534282A (en) | Production technology based on upside-down mounting welding core media isolation type pressure sensor | |
| CN206496861U (en) | A kind of dynamic pressure transducer encapsulated based on ceramic structures | |
| CN105021325B (en) | Capacitance pressure transducer, | |
| CN109341935A (en) | A kind of differential pressure sputtered film pressure-sensing device and its packaging method | |
| CN201673008U (en) | Novel high-stability pressure sensor | |
| CN209263895U (en) | A kind of electronic rheostat sensor for pile detection | |
| CN204679198U (en) | Easy assembling type sputtered thin film pressure transducer | |
| CN204679199U (en) | Split type sputtered thin film pressure transducer | |
| CN2718545Y (en) | Integrated assembling pressure sensor apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |