CN2396388Y - Capacitive type force sensor - Google Patents
Capacitive type force sensor Download PDFInfo
- Publication number
- CN2396388Y CN2396388Y CN 99250693 CN99250693U CN2396388Y CN 2396388 Y CN2396388 Y CN 2396388Y CN 99250693 CN99250693 CN 99250693 CN 99250693 U CN99250693 U CN 99250693U CN 2396388 Y CN2396388 Y CN 2396388Y
- Authority
- CN
- China
- Prior art keywords
- elastic body
- type
- force sensor
- electric capacity
- type force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Abstract
The utility model relates to a capacitive type force sensor which is composed of an elastic body and a capacitor. The utility model is characterized in that the elastic body (20) has a hollow tubular structure; the end part of the elastic body (20) is provided with an upper cover and a lower cover (30) (40); the capacitor is arranged in the elastic body (20); an upper electrode (70) on the capacitor is fixedly connected with the upper cover (30); a lower electrode (80) of the capacitor is fixedly connected with the lower cover (40). The utility model has the advantages of simple structure, easy fabrication, and high sensitivity.
Description
The utility model relates to sensor technology, and a kind of capacitance-type force sensor is provided especially.
Force transducer is mainly based on resistance-strain type of dynamometer sensor at present, and it mainly comprises elastic sensing element and two parts of strain ga(u)ge.Strain ga(u)ge sticks on the elastic sensing element, and tested power at first is converted to elastomeric strain value, synchronously is converted to the variation of power then by strain ga(u)ge.Utilize this principle can make the sensor of the various physical quantitys of measuring weight, power, pressure, acceleration, displacement and moment of torsion.Difference according to elastomer structure, the typical structure of resistance strain weighing transducer has column type elastomer, ring type elastic body, beam type elastic body, shear stress type elastic body, torsion circle formula elastic body, power mark machine high precision elastic body, force sensor for multiple components elastic body etc., kind is more, but some problems are not solved yet well.It is bigger that its precision is subjected to hysteresis, creep and Temperature Influence, is difficult to work in than rugged environment, and it is strict simultaneously barbola work etc. to be taken into account in elastic body, strain.Capacitive sensor structure is simple, the sensitivity coefficient height has good dynamic characteristics, can stand severe environmental conditions such as very big temperature variation and radiation, being widely used in the measurement of parameters such as pressure, displacement, vibration, liquid level, is one of principal mode of present pressure transducer.United States Patent (USP) 4448085,4649759, capacitance-type force sensor such as report such as 4558600,4463614 grades, these sensors have been continued to use the structure of traditional strain gauge transducer basically, are connected together by the method for welding by two elastic bodys that are coated with electrode.
The purpose of this utility model is to provide a kind of capacitance-type force sensor, and it is simple in structure, is easy to processing, and has very high sensitivity.
The utility model provides a kind of capacitance-type force sensor, is made up of elastic body and electric capacity, it is characterized in that: elastic body (20) is a hollow tubular structure; The end of elastic body (20) is provided with upper and lower cover (30) (40), and electric capacity is placed in the elastic body (20), and electric capacity top electrode (70) is affixed with loam cake (30), and capacitor lower electrode (80) is affixed with lower cover (40).
Elastic body described in the utility model (20) can be the rigid tubular body that has 1～10 5～1000 wide helix of μ m on body wall, number of total coils 1～30 integer circle of helix; The section of elastic body (20) can be circle, or polygon; The material of elastic body (20) can be metal, pottery or quartzy; The number of total coils of helix is 1～10 integer circle preferably.Described electric capacity can be for becoming spacing type, changed area or becoming the medium type.
The utility model tubular elastomer end is stressed, and elastic body produces elastic deformation vertically, and electric capacity in the elastic body is changed with the variation of external force size and Orientation, thereby by measuring the size and Orientation that capacitance obtains external force.For improving the sensitivity of sensor, tubular elastomer is cut to the helix of a live width about 5～1000 μ m.Parameter such as the pitch by changing helix, live width, the spiral number of turns and select the elastic body of different wall, material, size can design indexs such as the range of sensor, sensitivity easily.
In a word, the utility model capacitive sensor structure is simple, highly sensitive, is easy to processing and quality control, is easy to form produce in batches.Measure electric capacity and be shielded in the metallic elastic body, avoided extraneous electromagnetic interference (EMI).Simultaneously by selecting different elastomeric materials, wall thickness, helix pitch etc. can regulate range and other performances of sensor easily.The elastic body helix can adopt the method preparation of Laser Processing, because laser processing ceramic, quartz etc. easily can adopt pottery or quartz to make elastic body.Because pottery and quartzy have very little creep and hysteresis, can prepare the more sensor of high precision and long-time stability.Can adopt conventional processing technology to be processed into sheet material to the polygon elastic body, link together by welding technology then.
Below by embodiment in detail the utility model is described in detail.
Accompanying drawing 1 is a capacity plate antenna type force transducer structural representation.
Accompanying drawing 2 is a tubulose capacitance-type force sensor structural representation.
Accompanying drawing 3 is an I type elastomer structure synoptic diagram.
Accompanying drawing 4 is an II type elastomer structure synoptic diagram.
Accompanying drawing 5 is an III type elastomer structure synoptic diagram.
Accompanying drawing 6 is an IV type elastomer structure synoptic diagram.
Accompanying drawing 7 is a V-type elastomer structure synoptic diagram.
Accompanying drawing 8 is a VI type elastomer structure synoptic diagram.
Accompanying drawing 9 is a VII type elastomer structure synoptic diagram.
Accompanying drawing 10 is a VIII type elastomer structure synoptic diagram.
Embodiment 1:
As shown in Figure 1, capacitance-type force sensor 10 is made up of elastic body 20, loam cake 30, lower cover 40, electric capacity top electrode, capacitor lower electrode etc.It is two helix (see figure 4) that the method for elastic body 20 usefulness cuies processes a number of turns, and perhaps other shapes are shown in Fig. 3～10.There are circular protrusions and perforate 130,140 in loam cake 30 and lower cover 40 centers.Circular protrusions is respectively applied for the connecting pipe 50 of connection electric capacity top electrode and the connecting pipe 60 of bottom electrode.Perforate 130 utmost point lead-in wire 110 that is used to Connect Power, perforate 140 is used to connect bottom electrode lead-in wire 120.Top electrode comprises connecting pipe 50, plate electrode 70, and plate electrode selects for use insulating material such as pottery to make, on be coated with conducting film 90.Bottom electrode comprises connecting pipe 60, plate electrode 80, and plate electrode selects for use insulating material such as pottery to make, on be coated with conducting film 100.Plate electrode 70 has projection to be used to connect connecting pipe 50, and plate electrode 80 has projection to be used to connect connecting pipe 60.Connecting pipe 50 and loam cake 30 and plate electrode 70, connecting pipe 60 and loam cake 40 and plate electrode 80 etc. are connected the method that adopts low temperature brazing and connect.Loam cake 30, lower cover 40 adopt technologies such as the little laser bonding in heat-affected zone, MICROBEAM PLASMA WELDING to be connected with elastic body 20.Tested power is added in loam cake 30, and changes in capacitance is connected with test circuit by lead-in wire 110, lead-in wire 120, and sensor has very high sensitivity.
Embodiment 2:
As shown in Figure 2, capacitance-type force sensor 10 is made up of elastic body 20, loam cake 30, lower cover 40, electric capacity top electrode, capacitor lower electrode etc.It is two helix (see figure 4) that the method for elastic body 20 usefulness cuies processes a number of turns, and perhaps other shapes are shown in Fig. 3～10.There are circular protrusions and perforate 130,140 in loam cake 30 and lower cover 40 centers.Circular protrusions is respectively applied for and connects electric capacity top electrode 70 and bottom electrode 80.Perforate 130 utmost point lead-in wire 110 that is used to Connect Power, perforate 140 is used to connect bottom electrode lead-in wire 120.Electric capacity is the tubulose changed area, comprises top electrode 70 and bottom electrode 80.Top electrode 70 is connected with the method for employing low temperature brazings such as lower cover with loam cake 30, bottom electrode 80.Loam cake 30, lower cover 40 adopt technologies such as the little laser bonding in heat-affected zone, MICROBEAM PLASMA WELDING to be connected with elastic body 20.Tested power is added in loam cake 30, and changes in capacitance is connected with test circuit by lead-in wire 110, lead-in wire 120, and sensor capacitance variation and tested power have extraordinary linear dependence.
Claims (6)
1. a capacitance-type force sensor is made up of elastic body and electric capacity, it is characterized in that: elastic body (20) is a hollow tubular structure; The end of elastic body (20) is provided with upper and lower cover (30) (40), and electric capacity is placed in the elastic body (20), and electric capacity top electrode (70) is affixed with loam cake (30), and capacitor lower electrode (80) is affixed with lower cover (40).
2. according to the described capacitance-type force sensor of claim 1, it is characterized in that: described elastic body (20) is the rigid tubular body that has the wide helix of 1-10 root 5～1000 μ m on body wall, the number of total coils 1-30 integer circle of helix.
3. according to claim 1 or 2 described capacitance-type force sensors, it is characterized in that: the section of elastic body (20) is for circular, or polygon.
4. according to the described capacitance-type force sensor of claim 2, it is characterized in that: number of total coils 1～10 integer circle of helix.
5. according to claim 1 or 2 described capacitance-type force sensors, it is characterized in that: electric capacity is for becoming spacing type, changed area or becoming the medium type.
6. according to the described capacitance-type force sensor of claim 3, it is characterized in that: electric capacity is for becoming spacing type, changed area or becoming the medium type.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 99250693 CN2396388Y (en) | 1999-12-17 | 1999-12-17 | Capacitive type force sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 99250693 CN2396388Y (en) | 1999-12-17 | 1999-12-17 | Capacitive type force sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2396388Y true CN2396388Y (en) | 2000-09-13 |
Family
ID=34035381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 99250693 Expired - Lifetime CN2396388Y (en) | 1999-12-17 | 1999-12-17 | Capacitive type force sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2396388Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954382A (en) * | 2014-05-14 | 2014-07-30 | 合肥工业大学 | Dielectric-varied capacitive flexible three-dimensional force tactile sensor |
-
1999
- 1999-12-17 CN CN 99250693 patent/CN2396388Y/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954382A (en) * | 2014-05-14 | 2014-07-30 | 合肥工业大学 | Dielectric-varied capacitive flexible three-dimensional force tactile sensor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN212807437U (en) | Core body of differential pressure sensor | |
| CN101348233A (en) | Microstructure resonant beam pressure sensor | |
| CN1144030C (en) | Strain gauge strip and applications thereof | |
| CN101982864A (en) | Movable electrode of variable capacitor, pressure sensor and blood pressure measuring equipment | |
| CN102928131A (en) | Quartz resonance beam type micro-pressure sensor chip | |
| CN1034060A (en) | Dual sided pressure sensor | |
| CN1124476C (en) | Capacitance-type force sensor | |
| Kamble et al. | Overview of load cells | |
| CN2396388Y (en) | Capacitive type force sensor | |
| CN102168994B (en) | Silicon capacitance differential pressure transducer with multi-parameter and compensation method of static pressure influence | |
| CN1179203C (en) | All SiNx microstructure resonance beam pressure sensor | |
| CN113340487A (en) | Earth pressure cell | |
| CN205120283U (en) | Tension appearance sensor | |
| CN109231157B (en) | Pressure and displacement integrated MEMS sensor combining four-beam circular membrane and coaxial cylinder | |
| Randall et al. | A pressure transducer using a metallic triple-beam tuning fork | |
| CN206787742U (en) | For measuring the new strain piece of steel bridge deck focus stress | |
| CN2884162Y (en) | Capacitive weighing sensor | |
| CN103954306B (en) | Miniaturization high precision micro journey sensor and flowmeter | |
| CN2387520Y (en) | High precision capacitive sensing liquid level measurer | |
| CN100410640C (en) | Sensibility variable load sensing unit | |
| CN1301399C (en) | Three-parameter integration capacitance sensor for automobile fuel oil meter | |
| CN201096561Y (en) | Strain type square tube pressure sensor | |
| CN110082011A (en) | A kind of multistage dynamometry location displacement sensor | |
| CN2249892Y (en) | Resistance strain sensor for portable electronic hook scale | |
| CN208721303U (en) | Novel thin film union pressure sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| C20 | Patent right or utility model deemed to be abandoned or is abandoned |