CN2310405Y - Laser resonant cavity with mutation reflectivity reflective mirror - Google Patents

Laser resonant cavity with mutation reflectivity reflective mirror Download PDF

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Publication number
CN2310405Y
CN2310405Y CN 97248504 CN97248504U CN2310405Y CN 2310405 Y CN2310405 Y CN 2310405Y CN 97248504 CN97248504 CN 97248504 CN 97248504 U CN97248504 U CN 97248504U CN 2310405 Y CN2310405 Y CN 2310405Y
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CN
China
Prior art keywords
reflectivity
district
sudden change
mirror
change
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Expired - Fee Related
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CN 97248504
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Chinese (zh)
Inventor
王绍民
朱精敏
陆璇辉
林强
赵道木
沈卫根
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HANZHOU UNIV
Zhejiang University ZJU
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HANZHOU UNIV
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Priority to CN 97248504 priority Critical patent/CN2310405Y/en
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Publication of CN2310405Y publication Critical patent/CN2310405Y/en
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  • Optical Elements Other Than Lenses (AREA)

Abstract

The utility model relates to a laser resonant cavity with a mutation reflectivity reflecting mirror, which is composed of a tail mirror and an output mirror, wherein the output mirror is the mutation reflectivity reflecting mirror. The reflecting mirror is composed of an inner reflecting zone and an outer reflecting zone, wherein the reflectivity of the inner reflecting zone is smaller than that of the outer reflecting zone. The tail mirror can adopts a mutation phase reflecting mirror. The mutation phase reflector is composed of a phase changing zone and a common reflecting zone, wherein the phase changing zone is arranged in the center of a step of certain optical thickness, and the common reflecting zone is arranged around the center of the step. The laser resonant cavity can output light beams with special light intensity distribution, and is suitable for various types of lasers.

Description

The laserresonator that has the reflectivity mirrors of suddenling change
The utility model relates to a kind of laserresonator, particularly has the laserresonator of the reflectivity mirrors of suddenling change.
Speculum is a main element of forming laserresonator, and the power of Laser Output Beam, pattern and beam quality are mainly determined by speculum.Existing laserresonator mainly contains two classes, and a class is that the speculum by even reflectivity constitutes, and this class resonant cavity is exported Gaussian beam, Ermy-Gaussian beam or Laguerre-Gaussian beam when constraint stablize; Output spherical wave when unconfinement is stablized.Another kind of is the resonant cavity that has the gradual change reflectivity mirrors, the functional form major part of gradual change is a Gaussian, the advantage of this class resonant cavity is: exportable fundamental-mode gaussian beam, more stable, easy adjustment, shortcoming are that making is difficult, fragile, the power output reduction is more, can not obtain the light beam of special light distribution.Chinese patent ZL94205955.7 discloses a kind of " high brightness superdiffraction limit light beam producer ", and this light beam generator utilizes λ/2 position photos to produce high brightness beam.But for some practical application, do not need very integrated light beam of energy, but need have the light beam of special light distribution.
It is easy that the utility model purpose provides a kind of making, and power output reduces less, the laserresonator of exportable special light intensity distribution light beam.
The laserresonator that the utility model provides, constitute by tail mirror and outgoing mirror, described outgoing mirror is the sudden change reflectivity mirrors, described sudden change reflectivity mirrors has internal reflection district and external reflectance district, two echo areas have different reflectivity, have sudden change on the border, the reflectivity in internal reflection district must be less than the reflectivity in external reflectance district.The laserresonator that has the reflectivity mirrors of suddenling change that the utility model provides, its tail mirror also can adopt sudden change position phase speculum.Described sudden change position phase speculum has centre bit to change district and peripheral common echo area mutually, its centre bit changes the district mutually and is made up of one or more steps, the optical thickness d of each step satisfies 0<± d<λ, λ is the operation wavelength of corresponding laser in the formula, "+" expression is outstanding, and "-" expression is recessed.Centre bit changes the spot size of the physical dimension in district less than the basic mode at place, position mutually.The geometry that the centre bit of interior (outward) echo area of sudden change reflectivity mirrors, sudden change phase speculum changes the district mutually can be different shapes such as circle, ellipse, square, rectangle, annular, oval ring, square frame shape, square shaped as frame.Reflectivity by adjusting two echo areas and geometry thereof, size can obtain the output beam of various light distribution.Described sudden change reflectivity mirrors and sudden change position mutually speculum according to the specific requirement of various types of lasers, can adopt that dielectric substance, metal material or semi-conducting material that transmitted spectrum or reflectance spectrum are satisfied corresponding optical maser wavelength overlap on substrate that plating, photoetching, ion are carved, deposition, corrosion, directly metalworking or utilize a kind of method of self-characteristic of optical element or several method makings that combine forms the laser mirror with sudden change reflectivity or sudden change phase.
Laserresonator provided by the utility model, it is relevant Coupling Control principle according to zlasing mode, make the laser that uses described resonant cavity produce Mode Coupling, thereby output is fit to the special light beam that application-specific requires, such as material cutting, punching, material welding, heat treatment etc.Laserresonator provided by the utility model is not compared with conventional resonant cavity can obviously reduce power output, compares with the resonant cavity that has the gradual change reflectivity mirrors, makes easily.
Description of drawings:
Fig. 1 is the structural representation of the utility model laserresonator.1 is outgoing mirror, and 2 is the tail mirror.
Fig. 2 is the structural representation of the utility model outgoing mirror for sudden change reflectivity mirrors echo area.3 are the internal reflection district, and 4 is the external reflectance district.
Fig. 3 is the laserresonator schematic diagram of tail mirror for sudden change position phase speculum.5 are a sudden change position phase speculum, and 6 change the district mutually for centre bit, and 7 is common echo area.
Below in conjunction with accompanying drawing embodiments of the invention are described in detail.Embodiment 1: referring to accompanying drawing 1 and accompanying drawing 2, the laserresonator that has the reflectivity mirrors of suddenling change that present embodiment provides is made of tail mirror 2 and outgoing mirror 1.Its outgoing mirror is the sudden change reflectivity mirrors, the reflectivity in the internal reflection district 3 of this speculum is 40%-85%, geometry is circular, diameter is the 6-20 millimeter, the reflectivity in external reflectance district 4 is 95%-100%, geometry is an annular, and the inner and outer diameter of annulus is respectively 6-20 millimeter and 6-50 millimeter.The reflectivity in internal reflection district can be controlled with the plating multilayer dielectric film, and the reflectivity in external reflectance district can add the method for plating deielectric-coating with metal-coated membrane to be realized.The laser beam that the laser that present embodiment provides produces is suitable for laser welding and cutting usefulness, and caused power loss is less than 10%.Embodiment 2: referring to accompanying drawing 3, the laserresonator that present embodiment provides is used for CO 2Laser.The chamber length of resonant cavity is 1.64 meters, outgoing mirror is the sudden change reflectivity mirrors, the reflectivity in its internal reflection district is 50%, geometry is circular, and diameter is 9 millimeters, and the reflectivity in external reflectance district is 99%, geometry is an annular, the inner and outer diameter of annulus is respectively 9 millimeters and 14 millimeters, and the reflectivity in internal reflection district can be controlled with the plating multilayer dielectric film, and the reflectivity in external reflectance district can add the method for plating deielectric-coating with metal-coated membrane to be realized.The tail mirror is a sudden change position phase speculum 5, and it is that the step of λ/2 constitutes by optical thickness that its centre bit changes district 6 mutually, and the diameter of step is 0.1 millimeter.The laser beam that the laser that present embodiment provides produces is an annular beam, is suitable for laser welding usefulness, and caused power loss is less than 10%.Embodiment 3: referring to Fig. 3, the laserresonator that present embodiment provides is used for solid batten laser.Outgoing mirror is the sudden change reflectivity mirrors, and the reflectivity in its internal reflection district is 80%, and geometry is square, and the length of side is 5 millimeters, and the reflectivity in external reflectance district is 99%, is shaped as square frame shape, and the length of side is 10 millimeters.The tail mirror is a sudden change position phase speculum, and it is that the step of λ/2 constitutes by optical thickness that its centre bit changes the district mutually, and the geometry of step is square, and the length of side is 0.05 millimeter.

Claims (6)

1. laserresonator that has the reflectivity mirrors of suddenling change, constitute by tail mirror and outgoing mirror, it is characterized in that described outgoing mirror is the sudden change reflectivity mirrors, described sudden change reflectivity mirrors has internal reflection district (3) and external reflectance district (4), two echo areas have different reflectivity, and the reflectivity of internal reflection district (3) is lower than the reflectivity of external reflectance district (4).
2. the laserresonator with sudden change reflectivity mirrors according to claim 1, a kind of for circular, oval, square, rectangle, annular, oval ring, square frame shape, square shaped as frame regular shape of the geometry in internal reflection district that it is characterized in that described sudden change reflectivity mirrors, the geometry in described external reflectance district is a kind of of annular, oval ring, square frame shape, square shaped as frame.
3. the laserresonator that has the reflectivity mirrors of suddenling change according to claim 1, it is characterized in that described tail mirror is sudden change position phase speculum, described sudden change position phase speculum has centre bit to change district (6) and peripheral common echo area (7) mutually, described centre bit change mutually the district by optical thickness d satisfy 0<± step of d<λ forms, λ is the operation wavelength of corresponding laser in the formula, "+" expression is outstanding, and "-" expression is recessed.
4. according to claim 1 and the 3 described laserresonators that have the reflectivity mirrors of suddenling change, it is characterized in that the optical thickness that the described centre bit that suddenlys change position phase speculum changes the district mutually is d=λ/2.
5. according to claim 1 and the 3 described laserresonators that have the reflectivity mirrors of suddenling change, it is characterized in that the centre bit of described sudden change position phase speculum changes the spot size of the physical dimension in district (6) less than the basic mode at place, position mutually.
6. according to claim 1 and the 3 described laserresonators that have the reflectivity mirrors of suddenling change, the geometry that the centre bit that it is characterized in that described sudden change position phase speculum changes district (6) mutually is a kind of of circular, oval, square, rectangle, annular, oval ring, square frame shape, square shaped as frame.
CN 97248504 1997-08-22 1997-08-22 Laser resonant cavity with mutation reflectivity reflective mirror Expired - Fee Related CN2310405Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 97248504 CN2310405Y (en) 1997-08-22 1997-08-22 Laser resonant cavity with mutation reflectivity reflective mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 97248504 CN2310405Y (en) 1997-08-22 1997-08-22 Laser resonant cavity with mutation reflectivity reflective mirror

Publications (1)

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CN2310405Y true CN2310405Y (en) 1999-03-10

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CN 97248504 Expired - Fee Related CN2310405Y (en) 1997-08-22 1997-08-22 Laser resonant cavity with mutation reflectivity reflective mirror

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103904539A (en) * 2012-12-26 2014-07-02 清华大学 Laser device
CN103904538A (en) * 2012-12-26 2014-07-02 清华大学 Laser device
CN103996964A (en) * 2014-06-10 2014-08-20 鞍山华科大激光科技有限公司 Hollow mirror laser resonant cavity

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103904539A (en) * 2012-12-26 2014-07-02 清华大学 Laser device
CN103904538A (en) * 2012-12-26 2014-07-02 清华大学 Laser device
CN103904539B (en) * 2012-12-26 2017-02-22 清华大学 Laser device
CN103996964A (en) * 2014-06-10 2014-08-20 鞍山华科大激光科技有限公司 Hollow mirror laser resonant cavity

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