CN210224592U

CN210224592U - Tunable vertical light path narrow linewidth external cavity laser easy for mass production

Info

Publication number: CN210224592U
Application number: CN201921736402.2U
Authority: CN
Inventors: Xiaoqi Zhu; 朱晓琪; Zhiru Duan; 段志儒; Jianping Li; 李建平; Haolin Wu; 吴昊林
Original assignee: Micro Source Photonics (shenzhen) Technology Co Ltd
Current assignee: Micro Source Photonics (shenzhen) Technology Co Ltd
Priority date: 2019-10-16
Filing date: 2019-10-16
Publication date: 2020-03-31
Anticipated expiration: 2029-10-16

Abstract

The utility model relates to a laser instrument technical field, and disclose a tunable perpendicular light path narrow linewidth external cavity laser of easy volume production, including the laser instrument casing, the inner wall left side fixed mounting of laser instrument casing has the VECSEL chip, and the right side fixed mounting of VECSEL chip has the diaphragm, and equal fixed mounting has the stopper that is located the diaphragm right side on the inner wall of both sides about the laser instrument casing, and the opposite side fixed mounting of stopper has collimating lens, and equal movable mounting has the tuning piece that is located the collimating lens right side on the inner wall of both sides about the laser instrument casing, and the opposite side fixed mounting of tuning piece has the light filter. This tunable vertical light path narrow linewidth external cavity laser of volume production, through the perpendicular external cavity light path of design based on VECSEL chip, for traditional limit emission laser, the external cavity light path is easily adjusted to reached the purpose of being convenient for adjust the light path, and carry out the volume production easily, the cost is reduced improves its economic benefits, and it is also more convenient to use, and the design of light path supports high output.

Description

Tunable vertical light path narrow linewidth external cavity laser easy for mass production

Technical Field

The utility model relates to a laser technical field specifically is an easy volume production's tunable perpendicular light path narrow linewidth external cavity laser.

Background

The laser is a device capable of emitting laser, and the tunable laser has a wide band tuning range from near ultraviolet to near infrared, and has a small size, a narrow line width and a high optical efficiency compared with other conventional solid-state lasers, which makes it have important application prospects in the fields of optical chip laboratories, communication, sensing, etc., and the external cavity technology is a very important means in the laser, and is widely applied in many fields of cold atomic physics, environmental monitoring, biological monitoring, industrial measurement, spectroscopy, etc., since the commonly used tuning and line width narrowing, and the laser of the external cavity structure easily generates high output power, among which the VECSEL laser is generally called a vertical external cavity surface emitting laser in chinese, and the vertical external cavity surface emitting laser is one of the lasers.

The existing external cavity laser structure at present, the FP laser of mostly using, the laser side is luminous after, return the laser chip in the exocoel terminal surface, form the oscillation, the light path of this kind of exocoel laser is adjusted and is required very much, the productivity and the cost have seriously been restricted, be difficult to carry out the volume production, economic benefits has been reduced, be not convenient for adjust the light path simultaneously, it is more loaded down with trivial details to adjust the process, it is very inconvenient to use, so propose the tunable vertical light path narrow linewidth exocoel laser of easy volume production and solve foretell problem.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The not enough to prior art, the utility model provides a tunable perpendicular light path narrow linewidth external cavity laser of easy volume production, possess advantages such as easy volume production, the current existing external cavity laser structure of having solved, the FP laser of many uses, the laser side is luminous after, return in the laser chip through the exocoel terminal surface, form the oscillation, the light path regulation requirement of this kind of external cavity laser is very high, productivity and cost have seriously been restricted, be difficult to carry out the volume production, economic benefits has been reduced, be not convenient for adjust the light path simultaneously, it is more loaded down with trivial details to adjust the process, use very inconvenient problem.

(II) technical scheme

For realizing the above-mentioned easy volume production purpose, the utility model provides a following technical scheme: a tunable vertical light path narrow linewidth external cavity laser easy for mass production comprises a laser shell, wherein a VECSEL chip is fixedly arranged on the left side of the inner wall of the laser shell, a diaphragm is fixedly arranged on the right side of the VECSEL chip, limiting blocks positioned on the right side of the diaphragm are fixedly arranged on the inner walls of the upper side and the lower side of the laser shell, the opposite side of the limiting block is fixedly provided with a collimating lens, the inner walls of the upper side and the lower side of the laser shell are respectively and movably provided with a tuning block positioned on the right side of the collimating lens, the opposite sides of the tuning blocks are fixedly provided with optical filters, the inner walls of the upper and lower sides of the laser shell are respectively and movably provided with a movable block positioned on the right side of the optical filter, the opposite side of the movable block is fixedly provided with a reflector, the right side of the reflector is fixedly provided with a piezoelectric ceramic piece, and a light-emitting outer cavity fixedly connected with the piezoelectric ceramic piece is movably arranged on the right side of the laser shell.

Preferably, the inner wall of the laser shell is provided with a sliding groove, and the movable block is movably connected with the shell through the sliding groove.

Preferably, a substrate of the VECSEL chip is fixedly provided with a VECSEL laser, the VECSEL laser structurally comprises a substrate, a backlight surface high-reflectivity Distributed Bragg Reflector (DBR), a light-emitting surface low-reflectivity Distributed Bragg Reflector (DBR), an active region, an oxidation-resistant layer and an electrode, compared with a common VCSEL laser chip, only one of two sides of the active layer is the DBR high-reflectivity region, and the other side of the active layer is only provided with a few layers of DBRs, so that the low-reflectivity and the medium-reflectivity are formed, and light is directly emitted after being protected by the oxidation-resistant layer.

Preferably, the cross section of the diaphragm is circular, and the diaphragm is positioned at the light-emitting position of the VECSEL chip.

Preferably, the optical filter is movably connected with the laser housing, and the optical filter is located on the same central line of the laser housing.

Preferably, the left side of the collimating lens is a plane, and the right side of the collimating lens is an arc.

Preferably, the reflecting mirror is plated with a reflecting film with a certain reflectivity, the reflecting film is uniformly distributed on the outer side of the reflecting mirror, and the inner side of the reflecting mirror is plated with an anti-reflection film with a high transmittance.

Preferably, the center of the piezoelectric ceramic piece is hollowed and light-transmitting, and the piezoelectric ceramic piece is annular.

Preferably, the outer side of the light-emitting outer cavity is designed to be smooth, and the light-emitting outer cavity is fixedly connected with the piezoelectric ceramic piece through threads.

(III) advantageous effects

Compared with the prior art, the utility model provides an easy volume production's tunable perpendicular light path narrow linewidth external cavity laser possesses following beneficial effect:

1. when the tunable vertical light path narrow-linewidth external cavity laser easy to produce in volume is used, the positive electrode and the negative electrode are connected with a power supply, the light emitting surface of the VECSEL chip is directly emitted after being protected by an oxidation resistant layer, the emitted light passes through a collimating lens, the collimated light is subjected to mode selection through a filter, then the light is vertically incident on a reflector, the light incident on the reflector is used as the emergent light of the final laser, the reflected light returns to the light emitting surface of the VECSEL chip in the original path to complete the oscillation of primary laser, and meanwhile, the longitudinal deformation of the piezoelectric ceramic chip can be generated by periodically driving the piezoelectric ceramic chip by electric signals, so that the equivalent cavity length of the oscillation light path of the laser is periodically changed to generate linear frequency modulation laser, and because the light emitting spot of the laser is circular, compared with the traditional edge emitting laser, the external cavity light path is easy to adjust, so that the purpose of conveniently adjusting the light path is achieved, the mass production is easy, the cost is reduced, the economic benefit is improved, and the use is more convenient.

2. This tunable vertical light path narrow linewidth external cavity laser of easy volume production, through setting up the piezoceramics piece, the center department of piezoceramics piece is hollowed out, when using, the piezoceramics piece can be seen through to the facula, non-light tight whole light path is luminous perpendicularly, this laser emitting optical signal is integrated with the optical waveguide easily, can regard as the on-chip light source, reduce the consumption of light source in the propagation process, improve the output intensity of light, and because the part of exocoel need not bear high energy density, therefore can bear very big light power output, thereby can improve the output of light power, can improve its suitability like this, can make the laser use in more circumstances, be worth using widely.

Drawings

Fig. 1 is the utility model provides an easy volume production's tunable perpendicular light path narrow linewidth external cavity laser structure sketch map.

In the figure: the device comprises a laser shell 1, a VECSEL chip 2, a diaphragm 3, a limiting block 4, a collimating lens 5, a tuning block 6, an optical filter 7, a movable block 8, a reflector 9, a piezoelectric ceramic plate 10 and an emergent light lens cone 11.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1, a tunable narrow linewidth external cavity laser with a vertical optical path, which is easy to mass-produce, includes a laser housing 1, a sliding groove is formed on the inner wall of the laser housing 1, and a movable block 8 is movably connected with the housing 1 through the sliding groove, a VECSEL chip 2 is fixedly installed on the left side of the inner wall of the laser housing 1, a VECSEL laser is fixedly installed on the substrate of the VECSEL chip 2, the VECSEL laser has a structure including a substrate, a high reflectivity distributed bragg reflector DBR on the backlight surface, a low reflectivity distributed bragg reflector DBR on the light exit surface, an active region, an anti-oxidation layer and electrodes, compared with a general VCSEL laser chip, only one of two sides of an active layer is a DBR high reflectivity region, the other side has only a few layers of DBR to form a low reflectivity, direct light emission is realized after the anti-oxidation layer is used for protection, a diaphragm 3 is fixedly installed on the right side of the VECSEL chip 2, and the cross section, the diaphragm 3 is positioned at the light-emitting position of the VECSEL chip 2, the inner walls of the upper side and the lower side of the laser shell 1 are fixedly provided with a limiting block 4 positioned at the right side of the diaphragm 3, the opposite side of the limiting block 4 is fixedly provided with a collimating lens 5, the left side of the collimating lens 5 is a plane, the right side of the collimating lens 5 is in a circular arc shape, the inner walls of the upper side and the lower side of the laser shell 1 are movably provided with a tuning block 6 positioned at the right side of the collimating lens 5, the opposite side of the tuning block 6 is fixedly provided with an optical filter 7, the optical filter 7 is movably connected with the laser shell 1, the optical filter 7 is positioned on the same central line of the laser shell 1, the inner walls of the upper side and the lower side of the laser shell 1 are movably provided with a movable block 8 positioned at the right side of the optical filter 7, the opposite side of the movable block 8 is fixedly provided, the inner side of a reflector 9 is plated with an anti-reflection film with high transmittance, the right side of the reflector 9 is fixedly provided with a piezoelectric ceramic piece 10, the center of the piezoelectric ceramic piece 10 is hollowed and light-transmitting, the piezoelectric ceramic piece 10 is in a circular ring shape, the right side of a laser shell 1 is movably provided with a light-emitting lens barrel 11 fixedly connected with the piezoelectric ceramic piece 10, the outer side of the light-emitting lens barrel 11 adopts a smooth design, the light-emitting lens barrel 11 is fixedly connected with the piezoelectric ceramic piece 10 through threads, a VECSEL chip 2 is arranged, when in use, a positive electrode and a negative electrode are connected with a power supply, the light-emitting surface of the VECSEL chip 2 is directly emitted through an anti-oxidation layer, the emitted light firstly passes through a collimating lens 5, the collimated light is subjected to mode selection through a filter 7 and then vertically enters the reflector 9, the light enters the reflector 9, and the transmitted, the reflected light returns to the light emitting surface of the VECSEL chip 2 in the original way to complete the oscillation of primary laser, and meanwhile, the piezoelectric ceramic piece 10 is driven by periodic electric signals to deform the longitudinal direction of the piezoelectric ceramic piece 10, so that the equivalent cavity length of the laser oscillation light path is periodically changed to generate linear frequency modulation laser.

To sum up, the tunable vertical light path narrow linewidth external cavity laser easy to mass-produce is provided with the VECSEL chip 2, when the laser is used, a positive electrode and a negative electrode are connected with a power supply, a light emitting surface of the VECSEL chip 2 is protected by an antioxidation layer and then directly emits light, the emitted light passes through the collimating lens 5, the collimated light passes through the filter 7 to be subjected to mode selection, then is vertically incident on the reflector 9 and is incident on the reflector 9, transmitted light of the light is taken as emergent light of the final laser, reflected light of the light returns to the light emitting surface of the VECSEL chip 2 in an original path to complete oscillation of primary laser, meanwhile, the piezoelectric ceramic piece 10 is subjected to periodic electric signal driving to generate deformation in the longitudinal direction of the piezoelectric ceramic piece 10, so that the equivalent cavity length of a laser oscillation light path is periodically changed, linear frequency modulation laser is generated, and light emitting spots of the laser are circular, compared with the traditional edge-emitting laser, the external cavity light path is easy to adjust, thereby achieving the purpose of conveniently adjusting the light path, the piezoelectric ceramic piece 10 is easy to be produced in mass, the cost is reduced, the economic benefit is improved, the use is more convenient, the center of the piezoelectric ceramic piece 10 is hollowed, when in use, the light spot can penetrate through the piezoelectric ceramic piece 10, the whole light path of the light transmission vertically emits light, the laser can easily integrate the emitted optical signal with the optical waveguide, can be used as an on-chip light source, reduces the consumption of the light source in the transmission process, improves the output intensity of light, and because portions of the external cavity do not need to withstand high energy densities, a very large optical power output can be tolerated, therefore, the output of the optical power can be improved, the applicability of the laser can be improved, the laser can be used under more conditions, and the laser is worthy of popularization and application.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides an easy volume production's tunable perpendicular light path narrow linewidth external cavity laser, includes laser casing (1), its characterized in that: the laser comprises a laser shell (1), wherein a VECSEL chip (2) is fixedly mounted on the left side of the inner wall of the laser shell (1), a diaphragm (3) is fixedly mounted on the right side of the VECSEL chip (2), a limiting block (4) positioned on the right side of the diaphragm (3) is fixedly mounted on the inner walls of the upper side and the lower side of the laser shell (1), a collimating lens (5) is fixedly mounted on the opposite side of the limiting block (4), a tuning block (6) positioned on the right side of the collimating lens (5) is movably mounted on the inner walls of the upper side and the lower side of the laser shell (1), an optical filter (7) is fixedly mounted on the opposite side of the tuning block (6), a movable block (8) positioned on the right side of the optical filter (7) is movably mounted on the inner walls of the upper side and the lower side of the laser shell (1), a reflector (9) is fixedly mounted on, and a light-emitting lens cone (11) fixedly connected with the piezoelectric ceramic piece (10) is movably mounted on the right side of the laser shell (1).

2. The tunable vertical optical path narrow linewidth external cavity laser of claim 1, which is easy to mass-produce, characterized in that: the inner wall of the laser shell (1) is provided with a sliding groove, and the movable block (8) is movably connected with the shell (1) through the sliding groove.

3. The tunable vertical optical path narrow linewidth external cavity laser of claim 1, which is easy to mass-produce, characterized in that: the light emitting device is characterized in that a VECSEL laser is fixedly mounted on a substrate of the VECSEL chip (2), the structure of the VECSEL laser comprises a substrate, a backlight surface high-reflectivity Distributed Bragg Reflector (DBR), a light-emitting surface low-reflectivity Distributed Bragg Reflector (DBR), an active region, an oxidation resistant layer and electrodes, compared with a common VCSEL laser chip, only one side of two sides of an active layer is the DBR high-reflectivity region, only a few layers of DBRs are arranged on the other side of the active layer, the low-reflectivity is formed, and light is directly emitted after being protected by the oxidation resistant layer.

4. The tunable vertical optical path narrow linewidth external cavity laser of claim 1, which is easy to mass-produce, characterized in that: the cross section of the diaphragm (3) is circular, and the diaphragm (3) is positioned at the light-emitting position of the VECSEL chip (2).

5. The tunable vertical optical path narrow linewidth external cavity laser of claim 1, which is easy to mass-produce, characterized in that: the optical filter (7) is movably connected with the laser shell (1), and the optical filter (7) is positioned on the same central line of the laser shell (1).

6. The tunable vertical optical path narrow linewidth external cavity laser of claim 1, which is easy to mass-produce, characterized in that: the left side of the collimating lens (5) is a plane, and the right side of the collimating lens (5) is arc-shaped.

7. The tunable vertical optical path narrow linewidth external cavity laser of claim 1, which is easy to mass-produce, characterized in that: the reflecting mirror (9) is plated with a reflecting film with a certain reflectivity, the reflecting film is uniformly distributed on the outer side of the reflecting mirror (9), and the inner side of the reflecting mirror (9) is plated with an anti-reflection film with high transmittance.

8. The tunable vertical optical path narrow linewidth external cavity laser of claim 1, which is easy to mass-produce, characterized in that: the center of the piezoelectric ceramic piece (10) is hollowed and light-transmitting, and the piezoelectric ceramic piece (10) is in a circular ring shape.

9. The tunable vertical optical path narrow linewidth external cavity laser of claim 1, which is easy to mass-produce, characterized in that: the outer side of the light-emitting lens cone (11) is designed to be smooth, and the light-emitting lens cone (11) is fixedly connected with the piezoelectric ceramic piece (10) through threads.