CN2240531Y - Vacuum furnace body of ion-bombardment furnace - Google Patents

Abstract

The utility model relates to a vacuum furnace body (4) of an ion-bombardment furnace, which is used for strengthening surface in the metal heat processing field. The utility model is composed of a furnace cover (3), a furnace cylinder (5), a furnace bottom (6), a base (12), hanging cathode power transmission devices (1) and piling cathode power transmission devices (11). The utility model is characterized in that a plurality of hanging cathode power transmission devices capable of operating dependently are arranged on the furnace cover; the piling cathode power transmission devices which are reclined below a cathode dish do not load bearing, and are all added with anti-splash sleeves; the furnace cylinder uses a water cooling layer, an air layer, a vacuum layer and a filler layer for heat insulation; the furnace bottom forms an arc shape; various pipe joints are all arranged at the lateral surface of the furnace bottom. The utility model has the advantages that in the same furnace, working pieces with the requirement of various thicknesses of penetration can be accomplished simultaneously once; the energy is saved; the vacuum furnace body does not stray flash, and the maintenance is convenient.

Description

A kind of ion bombarding furnace vacuum furnace body

The utility model relates to workpiece surface and strengthens specific equipment, belongs to the Equipment for Heating Processing field.

Ion nitriding and ion multi element copermeation are a kind ofly can significantly improve steel-iron components surface abrasion resistance damage, antifatigue, corrosion-resistant, resistance to high temperature oxidation and an emerging metal surface enhanced technology in raising workpiece life-span.It is that processed workpiece is placed in the vacuum vessel, is evacuated to 66.7Pa, then, fills with thin nitrogenous gas and other common permeation bodies, as ammonia or nitrogen hydrogen mixeding gas to 133～1333Pa.After adding high voltage direct current between negative electrode and the anode, gas is ionized to and is the positive ion of nitrogen and hydrogen and electronics, at this moment, workpiece (negative electrode) produces optical radiation owing to return the nitrogen and the hydrogen atom of ground state after being excited, thereby is covered by the aura of this purple of generation on its surface.Nitrogen and hydrogen ion are under the high-voltage electric field effect, surface with very big energy bombarding cathode (workpiece), produce a large amount of heats workpiece is heated to needed temperature, simultaneously, the positive ion of nitrogen produces compound at workpiece surface, chemical reaction and absorption, the physics of diffusion, chemical process have formed the nitride layer of high rigidity and the chemical combination layer of multielement faster.

Ionitriding has that infiltration rate is fast, infiltration layer is fine and close, thermo-efficiency is high, save energy, little, the nuisanceless pollution of workpiece deformation, labor condition are good, not oxidation of workpiece is handled in antiseepage easily, in a vacuum, not decarburization, advantage such as the workpiece surface quality after the processing is good.Therefore, extensively paid attention in recent years by people.Be used to finish the specific equipment of this workpiece surface reinforcing process, generally claim ion nitriding furnace, the utility model to be referred to as the ion nitriding electron-beam furnace.It can be used for to carbon steel, steel alloy, stainless steel, Refractory Steel, cast iron, spheroidal graphite cast iron, titanium or titanium alloy etc. carry out ionitriding, ion carbonitriding (ion soft-nitriding), art breading such as the ion nitrogen carbon titanium is ternary co-osmosized, nitrogen carbon titanium sulphur oozes altogether.

Existing ion nitriding furnace, from its type of furnace, bell furnace, pit furnace and general form stove can be arranged, and according to the requirement of ion nitriding technology, its whole plant comprises vacuum furnace body [4], vacuum acquiring system [62], airing system [63], power supply system [64] and cooling system [65].

In order to guarantee the quality of ion nitriding, usually require vacuum furnace body to have: 1. good air-tightness, to adapt to ionization of gas was produced in the ion nitriding process ion when the bombardment workpiece, to reach 133～1333Pa vacuum requirements in the stove, 2. good insulation performance, during ion nitriding, at the moon, 500～1000 volts volts DS is arranged between the anode, therefore, when cathode leg is passed body of heater, must high pressure could be introduced the inner chamber of vacuum furnace body with the body of heater insulation, 3. because the sealed insulating material heat resisting temperature of body of heater is lower, generally have only 60～90 ℃, and furnace temperature is 500～650 ℃ during nitrogenize, therefore, body of heater will have good thermal insulation.

In existing technology, most typical ion nitriding furnace is the general form ion nitriding furnace.This stove mainly be by at the bottom of arc bell, garden shape stove tube, the flattening oven and the hang cathode electricity transmission device, bottom by furnace bottom that are located on the bell be located at the bottom of the flattening oven and the body of heater that stacking cathode electricity transmission device, base constituted [4] and vacuum system [62], airing system [63], power supply system [64] and the cooling system [65] stacked between the cathode disc that workpiece uses are constituted.This versatible furnace is applicable to handles elongated and short and thick workpiece, highly versatile, but also exist the some shortcomings part: 1. on bell, only be provided with a cathode electricity transmission device, therefore, can not in a stove, finish the workpiece that requires multiple different alloying layer thicknesses simultaneously, 2. vacuum system, airing system, power supply system and water cooling system all will be installed between furnace bottom and the base, maintenance is inconvenient, 3. body of heater all adopts water-cooled, consumes the great energy, 4. cathode electricity transmission device, unreasonable structure, the rigidity deficiency often occurs and beat the arc phenomenon, 5. furnace bottom is a plate armature, therefore, bearing capacity is low, waste material is unfavorable for gas circulation, the dead angle often occurs.

In order to solve the above-mentioned deficiency of prior art, and provide a kind of and be convenient to maintenance, voltage endurance capability height, the furnace gas circulation is unimpeded, energy-conservation, the cathode electricity transmission device rigidity is strong, do not produce and beat arc, the vacuum furnace body that can handle the ion bombarding furnace of different alloying layer thickness requirements in same stove simultaneously (is called for short body of heater, down together), special proposition technical solution of the present utility model.

Basic design of the present utility model is; furnace bottom is designed to arc; with the joining various pipe fittings of vacuum furnace body; design is in the side of arc furnace bottom; the garden shape stove tube of forming body of heater is designed to multistage; the inboard thermoscreen that keeps; sidewall adopts water-cooled layer and vacuum layer; or and gas cloud; or and packing layer; and water-cooled layer and vacuum layer; gas cloud; or and gas cloud; packing layer; or and vacuum layer; the heat insulation method that packing layer is formed; adopt a plurality of cathode electricity transmission devices of hanging; increase the rigidity of hanging negative electrode, stack negative electrode and change not load-bearing of horizontal type structure into, increase Antisplash machanism in the outside of air gap protective layer.

A kind of ion bombarding furnace body of heater [4] that the utility model is designed, mainly be by bell [3], garden shape stove tube [5], furnace bottom [6], hang cathode electricity transmission device [1], stack cathode transmission [11] and base [2] and constitute, it is characterized in that, arc bell [3] go up design have a plurality of can independent operation hang cathode electricity transmission device [1]; By the round kiln tube [5] that double-layer plate is made, in the middle of its two-layered steel plates, accompany water-cooled layer [21] and vacuum layer [19] or with gas cloud [20] with packing layer [25] and water-cooled layer [21] and vacuum layer, gas cloud or with gas cloud, packing layer or with vacuum layer, thermofin that packing layer constituted; Furnace bottom [6] is designed to the arcuate structure that the inboard has a plurality of cathode blocks [14]; By the side of arc furnace bottom [6], design has stacking cathode electricity transmission device [11], vacuum system joint [8], heating pipe joint [10], water-cooled tube joint [7] and thermopair [9]; Cathode disc [16] is placed on the cathode block [14] by the supporting of cathode branch bolster [15]; Hang cathode electricity transmission device [1] and stack cathode electricity transmission device [11], all designed conduction rack [47] in its end that puts in stove the inner.

It is further characterized in that, on arc bell [3], is equiped with one along its axis and hangs cathode electricity transmission device [1], also is provided with a plurality of cathode electricity transmission devices [1] of hanging symmetrically around this axis around it, and they generally are and equidistantly distribute; Every joint stove tube [5] of forming body of heater [4], end face also designs the dovetail-indent [23] that " O " sealing-ring [26] can be installed and the anode posts eyelet [24] that supports anode joint pin [30] with spring [29] can be installed thereon; In the inboard bottom of arc furnace bottom [6], be provided with three and be mutually cathode block [14] hexagonal angle and support cathode disc [16] usefulness by cathode branch bolster [15]; Hanging cathode electricity transmission device [1] is a screw thread that passes through cross negative electrode conducting rod [40] end with metal coupling nut [45], with negative electrode guide pin bushing [32], cross negative electrode conducting rod [40], surround cross negative electrode conducting rod [40] insulation layer (comprise external insulation pad [35], go up pressure pad [37], go up insulating mat [39], bench insulator [41], down bench insulator [42] and locate bench insulator [43]), splash-proof casing [50], gasket [38] and air gap protective layer [46] tighten together and form an integral rigidity structure; Hang air gap protective layer [46] structure of cathode electricity transmission device [1], constituted, be added with splash-proof casing [50] in its outside by metal coupling nut [45] that increases the rigidity effect and metallic shield cover [44]; Stack cathode electricity transmission device [11], the outside of formed air gap protective layer [46] structure is added with splash-proof casing [50] between its metal inner shield cover [51] and metallic shield cover [44]; Stack cathode electricity transmission device [11], be horizontally placed on the below certain distance of cathode disc [16] by the side of lonely shape furnace bottom [6], it does not bear the weight of workpiece and cathode disc [16]; Be placed on the top cathode branch bolster [15] of cathode block [14], design has bolt [58], in order to the levelness of adjusting cathode disc [16], this cathode branch bolster 15] with supporting base [60] and as lonely shape furnace bottom [6] the insulating splashproof of anodic member.

The utility model compared with the prior art, its technical feature difference is listed table 1 in.Major advantage is: 1. since the required circuit design of body of heater in the side of the outside of arc furnace bottom.Therefore; easy to maintenance; 2. because furnace bottom is designed to arc; so voltage endurance capability height; under similarity condition, can save material 50%, 3. because foul is deposited on the bottommost of arc furnace bottom, so can not enter in the off-gas pump; 4. the furnace gas circulation does not have the dead angle; 5. the furnace insulation performance is good, can save the energy 15%, 6. owing to constitute the member of air gap protective layer both sides; all are hardwares; therefore, do not produce " beating arc " phenomenon, 7. since on the bell design have a plurality of can independent operation hang cathode electricity transmission device; so can in same stove, once can finish the workpiece of multiple infiltration layer requirement.

Be description of drawings of the present utility model below:

Fig. 1 is that its vacuum furnace body of the designed ion bombarding furnace of the utility model [4] is faced the semi-section structural representation.It is by bell [3], round kiln tube [5], arc furnace bottom [6], base [12] and be installed in a plurality of on the bell [3] and hang cathode electricity transmission device [1] and be horizontally placed on the lateral stacking cathode electricity transmission device of arc furnace bottom [6] [11] and constitute, round kiln tube [5] is the multi-segment structure form that the requirement according to the workpiece size fits together, finish the vacuum adapter [8] that the ion bombardment workpiece is used, air connector [10], thermopair [9], warter connection [7], stacking cathode electricity transmission device [11] all is located at the side of arc furnace bottom [6], all designed viewing window [2] in the top of bell [3] and the side of every joint stove tube [5], the stove tube [5] of vacuum furnace body [4] adopts by water-cooled layer [21], gas cloud [20] and vacuum layer [19] structure, in burner hearth, still be provided with thermoscreen [22], workpiece [17] is hung on the hook of hanging cathode electricity transmission device [1], bell [3], stove tube [5], between furnace bottom [6], be lifted on together by flange [18].Cathode disc [16] is supported by the cathode branch bolster [15] that is placed on the cathode block [14], and vapor pipe [13] is located at the bottom of furnace bottom [6].

Fig. 2 is the utility model ion bombarding furnace whole plant synoptic diagram.This ion bombarding furnace whole plant is made of vacuum furnace body [4], vacuum acquiring system [62], airing system [63], power supply system [64], cooling system [65].

Fig. 3 is that bell [3] is faced cross-sectional view.In the technical solutions of the utility model, still keep water-cooled layer [21] structure and inboard thermoscreen [22] structure of bell [3].But upward be provided with a plurality of cathode electricity transmission devices [1] of hanging by water-cooled layer [21] at bell [3].Flange [18] will be used for linking by bolt with stove tube [5].

Fig. 4 is the schematic top plan view of bell [3].Be provided with above it six with the symmetric cathode electricity transmission device [1] of hanging of body of heater axis, one is in the body of heater axial location, they are and equidistantly distribute.The top of bell is provided with viewing window [2] and water-cooled tube joint [7] and heating pipe joint [10].

Fig. 5 is the cross-sectional view of the another kind of form of the designed stove tube of the utility model [5] side structure, and its outside is water-cooled layer [21], inwardly is gas cloud [20], vacuum layer [19], and the inside still keeps thermoscreen [22].On the flange [18] of the upper surface of stove tube [5], be provided with dovetail-indent [23].In order to installing " O " RunddichtringO, and be provided with and lay the anode posts eyelet [24] that spring and anode joint pin are used, become the anode of ion bombarding furnace body of heater so that respectively save stove bamboo [5] energy UNICOM, also be provided with and bell the flange [18] that connects with furnace bottom or stove tube at stove tube [5] end face.

Fig. 6 is the cross-sectional view of designed stove tube [5] another form of sidewall of the utility model.Outermost layer is an insulation packing layer [25], is provided with water-cooled layer [21] in two end, and packing layer [25] inwardly is the thermoscreen [22] of prior art, the same Fig. 5 of other symbol.

Fig. 7 is that the utility model arc furnace bottom [6] structure is faced diagrammatic cross-section.Furnace bottom [6] the inside is provided with a plurality of cathode blocks [14] (being generally three), is placed with the cathode branch bolster [15] of supporting cathode disc [16] usefulness above it, is provided with annular dovetail slot [23] on flange [18], lays " O " RunddichtringO [26] in it.Stacking cathode electricity transmission device [11] puts in the burner hearth from the side of arc furnace bottom [6], and is in the below of cathode disc [16], and the conduction rack of its end [47] is connected on the cathode disc [16], the top place work piece on request of cathode disc [16].Bottommost design at furnace bottom [6] has vapor pipe [13], and it stretches to the elsewhere by base [12].

Fig. 8 is this arc furnace bottom [6] schematic top plan view.Be built-in with " O " RunddichtringO [26] at annular dovetail slot [23], each is provided with three cathode blocks [14] at a distance of hexagonal angle at furnace bottom [6], in the design of the center of the bottommost of furnace bottom vapor pipe [13] is arranged, in furnace bottom [6] side, about by sidewall at a distance of 15 ° of angular distances, respectively design positive contact [27] arranged, stack cathode electricity transmission device [11], thermopair [9], vacuum adapter [8], air connector [10], cooling tube joint [7] and at the anode joint pin [30] of the upper surface of furnace bottom [6] design, cathode disc [16] is just on cathode block [14].Supporting by the cathode branch bolster.

Fig. 9 is that the A-A section of Fig. 8 is to view.On the flange [18] of furnace bottom upper end, be provided with in annular dovetail slot [23] and the anode posts eyelet [24] spring [29] be housed, its anode joint pin [30] just be contained in it above, can not go out by the effect of steady brace [31].

Figure 10 be the utility model designed hang cathode electricity transmission device [1] cross-sectional view.On with water-cooled layer [21] refrigerative bell [3], be welded with negative electrode guide pin bushing [32]; bench insulator [41] just is placed in its inside; then; by the center of bench insulator [41] cross negative electrode conducting rod [40] is installed again; last insulating mat [39]; and add gasket [38]; afterwards; install pressure pad [37]; external insulation pad [35] is installed at cross negative electrode conducting rod [40] top; at last; tighten together with hold-down nut [36] and negative electrode guide pin bushing [32]; its end of negative electrode guide pin bushing [32] that is in the inboard end of bell [3] is equipped with splash-proof casing [50]; following insulating mat [42]; location insulating mat [43]; bell housing [44], last, with metal coupling nut [45]; by the screw threads for fastening on the cross negative electrode conducting rod [40] together; and form an integral rigidity structure, between metal coupling nut [45] and bell housing [44], form the air gap protective layer [46] of a regulation, in cross negative electrode conducting rod [40] lower end.By connecting the screw thread on suspension rod [48] and the metal coupling nut [45], conduction rack [47] and connection suspension rod [48] are fastened on the metal coupling nut [45].

Figure 11 is designed stacking cathode electricity transmission device [11] cross-sectional view of the utility model.In the side of passing through with water-cooled layer [21] refrigerative arc furnace bottom [6]; be connected with negative electrode guide pin bushing [32]; along its axis bench insulator [41] is installed in negative electrode guide pin bushing [32] lining; cross negative electrode conducting rod [40]; splash-proof casing [50]; shielding pad [49]; metal inner shield cover [51]; location insulating mat [43] and metallic shield cover [44]; then; compress with nut [52]; between metal inner shield cover [51] and metallic shield cover [44]; just formed the air gap protective layer [46] of a regulation; afterwards; use nut [52] that conduction rack [47] is fastened on the cross negative electrode conducting rod [40] again, conduction rack [47] will be connected with workpiece or cathode disc.Stretch out an end in arc furnace bottom [6] outside again by negative electrode guide pin bushing [32], gasket [53], interior insulation covering [54], packing ring [55], nut [56], insulcrete [57] are installed in it, then, attaching plug [33], external insulation pad [35] are installed in termination at cross negative electrode conducting rod [40], insert supply lead [34], at last, fastening with clamping nut [36], like this, electric current just passes through supply lead [34], power-line plug [33], cross negative electrode conducting rod [40], conduction rack [47] and reaches workpiece at last and got on.

Figure 12 is that the designed cathode branch bolster [15] of the utility model is faced cross-sectional view.It places cathode disc [16] and is fixed between the cathode block [14] on the arc furnace bottom [6]; cathode branch bolster [15] is made of the bolt [58] of adjustable cathode dish [16] height, external shroud [59], location insulating mat [43], inner shield cover [51], supporting base [60], splashproof supporting base [61]; between external shroud [59] and inner shield cover [51], form the air gap protective layer [46] of specified dimension.

The utility model further specifies as follows in conjunction with the embodiments

Embodiment 1:

The die surface made from the 38CrMoAl material requires to have the thick nitride layer of 0.2mm, uses the utility model equipment to handle, and follows these steps to carry out:

1. equipment inspection.

Check that with 1000 volts of megohmmeters the cathode and anode insulativity is not less than 10 megaohms and just can adorns workpiece.Before the external power source that closes, each switch should be in the position of " breaking " on electrical control cubicles and the control enclosure panel.

2. workpiece is prepared.

Workpiece is wanted strict burr removal, and rusty stain lacquer trace, greasy dirt etc. are beaten the arc root, clean with clean-out system, and clear water washes down, dries, positions such as the hole of obstruction antiseepage, eye, groove.

3. shove charge nitrogenize.

Mould is deposited on the cathode disc [16], between workpiece at a distance of 20mm.Then, stove tube [5] is hung on the furnace bottom [6], adorns two joint stove tubes altogether, with flange [18] by bolted together, the stove tube is as anode, and workpiece keeps the distance about 50mm as negative electrode between the anode and cathode.The conduction rack of stacking on the cathode electricity transmission device [11] [47] is connected on the cathode disc [16].The bell [3] that closes connects water-cooled tube, closes purging valve.External power switch, all signal lamp bright (being that red light is bright) in the stop button close.Starting resistance vacuumometer power switch, preheating half an hour, the zero point of having aligned resistance vacuum gauge again.Check airing system, send water cooling to body of heater, the pump housing.Restart vacuum pump, vacuumize, measurement of vacuum greater than 6.7Pa after, connect direct supply, increase the high direct voltage build-up of luminance and beat arc, treat that aura is stable gradually after, regulate air-supplying valve, control air pressure is 1090Pa, voltage is 800V, current density is 2.0mA/cm ², then, progressively be warming up to 620 ℃, after temperature, be incubated 120 minutes.

4. cooling is come out of the stove.

Close the airing system valve, stop direct supply, each switch returns to zero-bit, after the workpiece furnace cooling to 150 ℃, bleeds off the gas in the stove, and the bell of slinging, stove tube take out Work inspection device.

5. quality inspection.

Its alloying layer thickness of metallographicinspection is 0.22mm, infiltration layer by the surface entad portion's metallographic structure be ε → ε+γ ' → γ '+α → α, its average hardness is Hv1050, all reaches requirement.

Embodiment 2:

The lathe leading screw Ф 50mm that 45 steels are done, long 4000mm requires total infiltration layer 0.1mm, Hv450～500, the car machine leading screw Ф 150mm that the 35CrMo steel is done, long 2500mm requires total infiltration layer 0.3 ± 0.1mm, requires Hv＞500.The plastics extruder screw that the 38CrMoAl steel is done requires total infiltration layer 〉=0.6mm, Hv 〉=900.Adopting the utility model to carry out the C-N confusion technology handles.

The part of above-mentioned three kinds of materials has different alloying layer thicknesses and hardness requirement, but because the soaking time difference that requires (because alloying layer thickness difference) can only divide three stoves to handle with prior art.Now adopt the utility model equipment, the part that can once three kinds of different infiltration layers be required is handled in the same stove of packing into by processing requirement, once finishes, and step is as follows:

1. preparation work.

With embodiment 1.

2. shove charge.

Requirement according to three kinds of different alloying layer thicknesses of workpiece divides three groups, hangs respectively on the hook of hanging cathode electricity transmission device [1], and every group of cathode wire all communicates with the power supply contactor.On request, the treatment temp of three kinds of materials identical (630 ℃), according to the requirement of alloying layer thickness, it is 1 hour that their soaking time is respectively 45 steel, and the 35CrMo steel is 10 hours, and 38CrMoAl then is 20 hours.

3. the control of different alloying layer thicknesses.

When furnace temperature reaches 580 ℃, in stove, feed ammonia and acetone mixed gas, its ratio is 8: 2, and furnace pressure maintains 1090Pa, and voltage maintains 850V, and electric current maintains 2.0mA/cm ², when furnace temperature reaches 630 ℃, begin insulation.

When being incubated 1 hour, be hung with the alternating current contactor outage of hanging cathode electricity transmission device [1] of 45 steel wire thick sticks, hang superincumbent leading screw and stop the ion cementation process, workpiece is treated furnace cooling, at this moment, all the other two kinds of workpiece still ooze carrying out ion in the stove, when soaking time reaches 10 hours, be connected in the contactor outage of hanging power transmitting device that is hung with the 35CrMo leading screw, and 38CrMoAl plastics extruder screw is still carried out ion and is oozed continuing insulation, after temperature reaches 20 hours, also the power supply failed to the cathode electricity transmission device of hanging that is hung with 38CrMoAl plastics extruder screw, arrive this, three kinds of parts all dispose, and prepare to come out of the stove by the order of implementing 1.

4. check.

45 steel wire thick sticks: total infiltration layer 0.12mm, Hv480, metallographic structure is qualified

The 35CrMo leading screw: total infiltration layer 0.32mm, Hv580, metallographic structure is qualified

The 35CrMoAl screw rod: total infiltration layer 0.65mm, Hv1000, metallographic structure is qualified

The fragility of three kinds of parts is 1 grade.The technology of the present invention and prior art performance are relatively

Table 1.

Furnace binding	The furnace wall go into water temp (℃)	The furnace wall leaving water temperature(LWT) (℃)	Heating-up time (H)	Temperature uniformity
					No thermofin	17	53	7	Bad
Vacuum layer+gas cloud	17	38	4.5	Better
					Vacuum layer+packing layer	17	21	3.2	Best
Remarks	Long-pending identical when handling workpiece surface, under processing condition the same terms, when adopting thermofin, thermo-efficiency can improve 1/3.

Claims (9)

1. an ion bombarding furnace vacuum furnace body [4] mainly is by arc bell [3], round kiln tube [5], furnace bottom [6], hang cathode electricity transmission device [1], stack cathode electricity transmission device [11] and base [12] and constitute, and it is characterized in that:

A) on arc bell [3], design have a plurality of can independent operation hang cathode electricity transmission device

[1]，

B) the round kiln tube of making by double-layer plate [5], in the middle of its two-layered steel plates, accompany water-cooled layer [21] with

Vacuum layer [19] or with gas cloud [20] or with packing layer [25], and water-cooled layer [21] is with true

Dead level, gas cloud or with gas cloud, packing layer or with vacuum layer, packing layer constituted

Thermofin,

C) furnace bottom [6] is designed to the arcuate structure that the inboard has a plurality of cathode blocks [14],

D) stack cathode electricity transmission device [11], the sidewall by arc furnace bottom [6] is horizontally placed on cathode disc [16]

The below certain distance, do not bear weight,

E) cathode disc [16] is placed on the cathode block [14] by the supporting of cathode branch bolster [15],

F) vacuum adapter [8], heating pipe joint [10], water-cooled tube joint [7] and thermopair [9] are all established

Meter is in the side of arc furnace bottom [6].

2. a kind of ion bombarding furnace vacuum furnace body according to claim 1 [4], it is characterized in that, on arc bell [3], be equiped with one along its axis and hang cathode electricity transmission device [1], around it around this axis symmetrically also design a plurality of cathode electricity transmission devices [1] of hanging are arranged, they generally are and equidistantly distribute.

3. a kind of ion bombarding furnace vacuum furnace body according to claim 1 [4], it is characterized in that, every joint stove tube [5] of forming body of heater [4], on the end face flange [18], also design has the dovetail-indent [23] that can adorn " O " RunddichtringO [26] and the anode posts eyelet [24] that spring [29] supports anode joint pin [30] can be housed thereon.

4. a kind of ion bombarding furnace vacuum furnace body according to claim 1 [4] is characterized in that, in the inboard bottom of arc furnace bottom [6], design has three cathode blocks [14] that are mutually hexagonal angle and support cathode disc [16] usefulness by cathode branch bolster [15].

5. a kind of ion bombarding furnace vacuum furnace body according to claim 1 [4]; it is characterized in that; stack cathode electricity transmission device [11], the outside of formed air gap protective layer [46] structure is added with splash-proof casing [50] between its metal inner shield cover [51] and metallic shield cover [44].

6. a kind of ion bombarding furnace vacuum furnace body according to claim 1 and 2 [4]; it is characterized in that; hang cathode electricity transmission device [1]; be one with metal coupling nut [45]; screw thread by cross negative electrode conducting rod [40] end; insulation layer, splash-proof casing [50], gasket [38] and the air gap protective layer [46] of negative electrode guide pin bushing [32], cross negative electrode conducting rod [40], encirclement cross negative electrode conducting rod [40] are tightened together, form an integral rigidity structure.

7. a kind of ion bombarding furnace vacuum furnace body according to claim 1 and 2 [4]; it is characterized in that; hang air gap protective layer [46] structure of cathode electricity transmission device [1]; constituted by metal coupling nut [45] that increases the rigidity effect and metallic shield cover [44], be added with splash-proof casing [50] in the outside of its air gap protective layer [46].

8. according to claim 1 or 4 described a kind of ion bombarding furnace vacuum furnace body [4], it is characterized in that, be placed on the cathode branch bolster [15] above the cathode block [14], design has bolt [58], in order to regulating the levelness of cathode disc [16], this cathode carrier [15] is with supporting base [60] and as anodic arc furnace bottom [6] insulating splashproof member.

9. according to claim 1 or 2 or 5 described a kind of ion bombarding furnace vacuum furnace body [4], it is characterized in that hang cathode electricity transmission device [1] and stack cathode electricity transmission device [11], it puts in the end of stove the inner, all design has conduction rack [47].

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