CN101280416B - Plasma oxidation device for preparing alpha-Al2O3 coating on surface of steel/aluminum composite pipe - Google Patents
Plasma oxidation device for preparing alpha-Al2O3 coating on surface of steel/aluminum composite pipe Download PDFInfo
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- CN101280416B CN101280416B CN2008100248482A CN200810024848A CN101280416B CN 101280416 B CN101280416 B CN 101280416B CN 2008100248482 A CN2008100248482 A CN 2008100248482A CN 200810024848 A CN200810024848 A CN 200810024848A CN 101280416 B CN101280416 B CN 101280416B
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- Prior art keywords
- plasma oxidation
- furnace cavity
- negative electrode
- anode
- digital signal
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- 230000003647 oxidation Effects 0.000 title claims abstract description 31
- 238000007254 oxidation reaction Methods 0.000 title claims abstract description 31
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims abstract description 20
- 229910052782 aluminium Inorganic materials 0.000 title claims abstract description 20
- 229910000831 Steel Inorganic materials 0.000 title claims abstract description 12
- 239000010959 steel Substances 0.000 title claims abstract description 12
- 239000002131 composite material Substances 0.000 title claims abstract description 11
- 239000011248 coating agent Substances 0.000 title claims description 24
- 238000000576 coating method Methods 0.000 title claims description 24
- 229910052594 sapphire Inorganic materials 0.000 title 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910052786 argon Inorganic materials 0.000 claims abstract description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000001301 oxygen Substances 0.000 claims abstract description 16
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 16
- 238000002360 preparation method Methods 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 2
- 239000011247 coating layer Substances 0.000 abstract 2
- 229910052593 corundum Inorganic materials 0.000 abstract 2
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 2
- 210000002381 plasma Anatomy 0.000 description 17
- 239000004411 aluminium Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 230000008595 infiltration Effects 0.000 description 6
- 238000001764 infiltration Methods 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000005269 aluminizing Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- -1 oxonium ion Chemical class 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
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Abstract
The invention relates to a plasma oxidation device for preparing an Alpha Al2O3 coating layer on the surface of a steel/aluminum composite tube, which belongs to a plasma oxidation device. The device is a plasma oxidation device on which the temperature and the impulse can be controlled. The device comprises a temperature sensor (1), a furnace chamber body (2), an anode (3), a cathode (5), a digital signal processor (6), a power source (7), a vacuum pump (8), a computer (9), an oxygen tank (10) and a single cathode plasma oxidation device of an argon tank (11), and also comprises a multi-cathode plasma oxidation device of a source electrode (12). An Alpha Al2O3 coating layer which is compact and uniform, is prepared on the surface of the steel/aluminum composite tube and ensures the ellipticity of the tube can be realized through utilizing the device under the condition that the temperature is lower than 600 DEG C, the tube diameter is phi 5 to phi 200 mm, and the length is 5 mm to 5000 mm.
Description
Technical field:
A kind of at steel/aluminum composite pipe surface preparation α-Al
2O
3The plasma oxidation device of coating is applicable to that the steel surface preparation hinders the plasma oxidation device of hydrogen and hydrogen isotope coating and wear-and corrosion-resistant coating.
Background technology:
α-Al
2O
3Be Al stable on the thermodynamics
2O
3Phase.It has a lot of good performances, as has performances such as high intensity, hardness, wear resistance, solidity to corrosion.And resistance hydrogen and hydrogen isotope penetrating quality excellence can be used as various clad materials.Prepare α-Al at the tubing surfaces externally and internally
2O
3Coating generally is divided into direct depositing Al
2O
3Coating and elder generation's preparation aluminium lamination rear oxidation are handled two class methods.Method commonly used has MOCVD method and hot aluminizing and carries out the thermal oxidative treatment method.The tubing that these class methods are big at the processing diameter or internal diameter is tiny is difficulty, be difficult to the ovality of assurance tubing, and preparation temperature is higher.
Summary of the invention:
The objective of the invention is to, develop a kind of at steel/aluminum composite pipe surface preparation α-Al
2O
3The plasma oxidation device of coating.Be implemented under the temperature that is lower than 600 ℃, at caliber Φ 5mm～Φ 200mm, in length 5mm～5000mm scope, it is evenly fine and close to utilize this device to go out coating in the steel/aluminum composite pipe surface preparation, guarantees the α-Al of tubing ovality
2O
3Coating.
Device of the present invention is: temperature controllable, pulse plasma oxidation unit comprise two kinds of structures of single cathode plasma oxidation unit or many cathode plasmas oxidation unit:
1. one kind at steel/aluminum composite pipe surface preparation α-Al
2O
3The plasma oxidation device of coating is characterized in that, comprises 3～5 temperature sensors, furnace cavity, anode, negative electrode, digital signal processor, power supply, vacuum pump, computer, oxygen canister, argon tanks.3～5 temperature sensors wherein, anode, negative electrode all places in the furnace cavity, 3～5 temperature sensors are installed in the upper, middle and lower section of workpiece with dividing equally respectively, be connected in the input terminus of digital signal processor, workpiece hangs in the furnace cavity, be fixed on the negative electrode by support, anode links to each other with the positive pole of power supply, negative electrode links to each other in power cathode, the output of digital signal processor links to each other with computer, and vacuum pump communicates with furnace cavity by pipeline, and oxygen canister and argon gas are irritated and communicated with furnace cavity by pipeline respectively.
2. one kind at steel/aluminum composite pipe surface preparation α-Al
2O
3The plasma oxidation device of coating is characterized in that, comprises 3～5 temperature sensors, furnace cavity, anode, negative electrode, digital signal processor, power supply, vacuum pump, computer, oxygen canister, argon tanks, source electrode.3～5 temperature sensors wherein, anode, negative electrode, source electrode all places in the furnace cavity, 3～5 temperature sensors be installed in with dividing equally respectively workpiece on, in, hypomere, be connected in the input terminus of digital signal processor, workpiece hangs in the furnace cavity, be fixed on the negative electrode by support, anode links to each other with the positive pole of two power supplys simultaneously, and negative electrode is connected in first negative pole in two power supplys, source electrode is connected in second negative pole in two power supplys, the output of digital signal processor links to each other with computer, and vacuum pump communicates with furnace cavity by pipeline, and oxygen canister and argon gas are irritated and communicated with furnace cavity by pipeline respectively.
Principle of work of apparatus of the present invention and working process:
1. single cathode ion oxidation unit
The single cathode plasma oxidation unit, utilize the plasma oxidation technology, make oxonium ion in the corresponding increase of space motion free path, the ion energy loss that arrives workpiece surface reduces, simultaneously owing to the ionization aggravation of ion bombardment to oxygen, cause very high oxygen gesture, a large amount of Sauerstoffatoms is adsorbed on the active surface of coating inwardly diffuses to form thicker infiltration layer then.
Device implementation process of the present invention is as follows: take hang to be fixed on the negative electrode tubing of the aluminium coat that obtains, infiltration layer, film, paper tinsel, material etc., be positioned in the furnace chamber, utilize vacuum pump to vacuumize and reach 10
-3Behind the Pa, charge into argon gas.Opening power adds heater voltage between workpiece and anode, in 100～600 ℃ of scopes, aerating oxygen is incubated 1～6 hour, drops to room temperature then, the taking-up tubing of coming out of the stove by temperature sensor and DSP CONTROL temperature.Can obtain the surface and be α-Al
2O
3The tubing of coating.
2. many cathode plasmas oxidation unit
Many cathode plasmas oxidation unit increases a source electrode when possessing single cathode plasma oxidation advantage, aluminium source material is provided in oxidation, makes it to workpiece surface sputter diffusion, has increased the thickness of preparation coating.It is higher that its preparation temperature is compared single cathode oxidation device.
Device implementation process of the present invention is as follows: take hang to be fixed on the negative electrode tubing of the aluminium coat that obtains, infiltration layer, film, paper tinsel, material etc., the aluminium source electrode is fixed on the source electrode, be positioned in the furnace chamber, utilize vacuum pump to vacuumize and reach 10
-3Behind the Pa, charge into argon gas.Opening power, at first between negative electrode and anode, add heater voltage preheating half an hour, add voltage between source electrode and the anode then, by temperature sensor and DSP CONTROL temperature in 100～600 ℃ of scopes, aerating oxygen, be incubated 1～6 hour, drop to room temperature then, the taking-up tubing of coming out of the stove.Can obtain the surface and be α-Al
2O
3The tubing of coating.
Advantage of the present invention:
1. obtain aluminium coat, infiltration layer, film, paper tinsel, material etc. in tube surfaces and all can on this device, prepare α-Al
2O
3
2. this device can prepare α-Al under the temperature that is lower than 600 degree
2O
3Coating, the tubing distortion is little, and oxide covering thickness can arrive 20 μ m in 3 hours;
3. prepare Al in the oxidation of multiple-unit tube surface in situ
2O
3Coating can guarantee that coating and matrix have good bonding properties;
4 can prepare caliber Φ 5～Φ 200mm, the tubing of length 5mm～5000mm;
5 adopt the hang layout processing, can guarantee the ovality of tubing;
6 because material is in the Ionized atmosphere, and energy distribution is even, can guarantee that the oxide coating of preparing is even;
7 can carry out sectional temperature-controlledly, can guarantee to be heated evenly.Different section tubing thickness differences are no more than 5%.
Description of drawings
Fig. 1 single cathode plasma oxidation unit synoptic diagram
Many cathode plasmas of Fig. 2 oxidation unit synoptic diagram
Label title among Fig. 1 and Fig. 2: 1.3～5 temperature sensors, 2. furnace cavity, 3. anode, 4. workpiece, 5. negative electrode, 6. digital signal processor, 7. power supply, 8. vacuum pump, 9. computer, 10. oxygen canister, 11. argon tanks, 12. source electrodes.
Embodiment:
Example 1
Accompanying drawing 1 is the single cathode ion oxidation unit of the present invention structure iron
Device examples of implementation of the present invention are as follows: as shown in Figure 1, take hang to be fixed on the negative electrode 5 tubing of the aluminium coat that obtains, infiltration layer, film, paper tinsel, material etc., be positioned in the furnace chamber 2, utilize vacuum pump 8 to vacuumize and reach 10
-3Behind the Pa, open argon tanks 11 and charge into argon gas.Opening power 7 adds heater voltage between workpiece 4 and anode 3, by temperature sensor 1 and digital signal processor 6 controlled temperature in 100～600 ℃ of scopes, open oxygen canister 10 aerating oxygens, be incubated 1～6 hour, drop to room temperature then, the taking-up tubing of coming out of the stove.Can obtain the surface and be α-Al
2O
3The tubing of coating.
Example 2
Accompanying drawing 2 is many cathode plasmas of the present invention oxidation unit structure iron
Device examples of implementation of the present invention are as follows: as shown in Figure 2, take hang to be fixed on the negative electrode 5 tubing of the aluminium coat that obtains, infiltration layer, film, paper tinsel, material etc., aluminium source material is fixed on the source electrode 12, is positioned in the furnace chamber 2, utilize vacuum pump 8 to vacuumize and reach 10
-3Behind the Pa, open argon tanks 11 and charge into argon gas.Opening power 7, at first between negative electrode 4 and anode 3, add heater voltage preheating half an hour, add voltage between source electrode 12 and the anode 3 then, passing through temperature sensor 1 and digital signal processor 6 controlled temperature in 100～600 ℃ of scopes, open oxygen canister 10 aerating oxygens, be incubated 1～6 hour, drop to room temperature then, the taking-up tubing of coming out of the stove.Can obtain the surface and be α-Al
2O
3The tubing of coating.
Claims (2)
1. one kind at steel/aluminum composite pipe surface preparation α-Al
2O
3The plasma oxidation device of coating, it is characterized in that, comprise 3～5 temperature sensors (1), furnace cavity (2), anode (3), negative electrode (5), digital signal processor (6), power supply (7), vacuum pump (8), computer (9), oxygen canister (10), argon tanks (11), 3～5 temperature sensors (1) wherein, anode (3), negative electrode (5) all places in the furnace cavity, 3～5 temperature sensors (1) be installed in with dividing equally respectively workpiece (4) on, in, hypomere, be connected in the input terminus of digital signal processor (6), workpiece (4) hangs in the furnace cavity (2), is fixed on the negative electrode (5) by support, and anode (3) links to each other with the positive pole of power supply (7), negative electrode (5) links to each other in power supply (7) negative pole, the output of digital signal processor (6) links to each other with computer (9), and vacuum pump (8) communicates with furnace cavity (2) by pipeline, and oxygen canister (10) and argon gas are irritated (11) and communicated with furnace cavity (2) by pipeline respectively.
2. one kind at steel/aluminum composite pipe surface preparation α-Al
2O
3The plasma oxidation device of coating, it is characterized in that, comprise 3～5 temperature sensors (1), furnace cavity (2), anode (3), negative electrode (5), digital signal processor (6), power supply (7), vacuum pump (8), computer (9), oxygen canister (10), argon tanks (11), source electrode (12), 3～5 temperature sensors (1) wherein, anode (3), negative electrode (5), source electrode (12) all places in the furnace cavity, 3～5 temperature sensors (1) be installed in with dividing equally respectively workpiece (4) on, in, hypomere, be connected in the input terminus of digital signal processor (6), workpiece (4) hangs in the furnace cavity (2), is fixed on the negative electrode (5) by support, anode (3) links to each other with the positive pole of two power supplys (7) simultaneously, negative electrode (5) is connected in first negative pole in two power supplys (7), and source electrode (12) is connected in second negative pole in two power supplys (7), and the output of digital signal processor (6) links to each other with computer (9), vacuum pump (8) communicates with furnace cavity (2) by pipeline, and oxygen canister (10) and argon gas are irritated (11) and communicated with furnace cavity (2) by pipeline respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100248482A CN101280416B (en) | 2008-05-08 | 2008-05-08 | Plasma oxidation device for preparing alpha-Al2O3 coating on surface of steel/aluminum composite pipe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100248482A CN101280416B (en) | 2008-05-08 | 2008-05-08 | Plasma oxidation device for preparing alpha-Al2O3 coating on surface of steel/aluminum composite pipe |
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| Publication Number | Publication Date |
|---|---|
| CN101280416A CN101280416A (en) | 2008-10-08 |
| CN101280416B true CN101280416B (en) | 2010-11-10 |
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| CN2008100248482A Expired - Fee Related CN101280416B (en) | 2008-05-08 | 2008-05-08 | Plasma oxidation device for preparing alpha-Al2O3 coating on surface of steel/aluminum composite pipe |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102127744B (en) * | 2010-01-19 | 2012-12-19 | 和舰科技(苏州)有限公司 | Ion implanter driving mechanism with alarm function and alarm method thereof |
| CN102345087A (en) * | 2011-06-17 | 2012-02-08 | 范犇 | Nanometer radiation treatment device for metal anticorrosion |
| CN104988466B (en) * | 2015-06-02 | 2017-06-09 | 淮阴工学院 | One kind is using double glow plasma surface alloying technology low temperature preparation α Al2O3The method of coating |
| CN113265609B (en) * | 2021-04-30 | 2022-04-19 | 北京科技大学 | Method for rapidly preparing aluminum oxide on surface of 316L stainless steel aluminide tritium-resistant coating |
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