CN2237857Y - A storage capacitor structure of a thin film transistor liquid crystal display - Google Patents

A storage capacitor structure of a thin film transistor liquid crystal display Download PDF

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CN2237857Y
CN2237857Y CN 95210817 CN95210817U CN2237857Y CN 2237857 Y CN2237857 Y CN 2237857Y CN 95210817 CN95210817 CN 95210817 CN 95210817 U CN95210817 U CN 95210817U CN 2237857 Y CN2237857 Y CN 2237857Y
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storage capacitor
liquid crystal
thin film
crystal display
film transistor
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陈彻
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Nanya Technology Corp
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Nan Ya Plastics Corp
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Abstract

本实用新型揭示一种设计成栅状的薄膜电晶体液晶显示器的储存电容的结构,一方面可增大其开口率,另一方面由于薄膜电晶体液晶显示器的栅状储存电容与扫描线和信号线邻近部分减少,可有效减少彼此短路现象和减小延迟电容效应。

The utility model discloses a grid-shaped storage capacitor structure of a thin film transistor liquid crystal display. On the one hand, the aperture ratio can be increased; The adjacent part of the line is reduced, which can effectively reduce the short circuit phenomenon and reduce the delay capacitance effect.

Description

一种薄膜电晶体液晶显示器的储存电容结构A storage capacitor structure of a thin film transistor liquid crystal display

本实用新型涉及一种薄膜电晶体液晶显示器的储存电容结构,尤其涉及将薄膜电晶体液晶显示器的储存电容的第一电极设计成栅状,且位于象素电极的中央部分,分别距象素电极上下各约1/4处,该栅状储存电容的纵向部分位于上层板遮光矩阵内,可有效减少短路现象及减少延迟电容效应。The utility model relates to a storage capacitor structure of a thin film transistor liquid crystal display, in particular to designing the first electrode of the storage capacitor of the thin film transistor liquid crystal display into a grid shape, and is located at the central part of the pixel electrode, respectively separated from the pixel electrode About 1/4 of the upper and lower places, the vertical part of the grid-shaped storage capacitor is located in the upper plate light-shielding matrix, which can effectively reduce the short circuit phenomenon and reduce the delay capacitance effect.

薄膜电晶体(以下简称TFT)已大量应用在液晶显示器上,在每一次扫描时间(约63.5μs)信号经TFT传送并储存在液晶电容中,到下一次扫描时(约16.7ms)更新信号。但一般目前液晶的电容值不大(约0.3pf),能够储存的信号电荷有限,在每次扫描间隔电荷的流失造成等效电压下降,使画面闪烁;此外薄膜电晶体不可避免地有一闸极与源极的重叠区域所形成的耦合电容Cgs,它会造成象素电极上的电压降ΔVgs(如图一) ΔVgs = Cgs Cls + Cgs · Vg Thin film transistors (hereinafter referred to as TFTs) have been widely used in liquid crystal displays. The signal is transmitted through the TFT and stored in the liquid crystal capacitor at each scan time (about 63.5 μs), and the signal is updated at the next scan (about 16.7 ms). But generally, the capacitance value of current liquid crystal is not large (about 0.3pf), and the signal charge that can be stored is limited. The loss of charge in each scanning interval causes the equivalent voltage to drop, causing the screen to flicker; in addition, the thin film transistor inevitably has a gate. The coupling capacitance Cgs formed by the overlapping area with the source electrode will cause a voltage drop ΔVgs on the pixel electrode (as shown in Figure 1) ΔVgs = Cgs Cls + Cgs &Center Dot; Vg

为减少上述的影响,各厂商设计出一储存电容Cs与液晶电容并联的结构以解决上述问题,这样一方面可增加信号电荷之储存量,另一方面可减小耦合电容的影响,此时电压降为 ΔVgs = Cgs Cls + Cs + Cgs · Vg In order to reduce the above-mentioned effects, various manufacturers have designed a structure in which the storage capacitor Cs is connected in parallel with the liquid crystal capacitor to solve the above-mentioned problems. downgraded to ΔVgs = Cgs Cls + Cs + Cgs &Center Dot; Vg

现有技术中已知的储存电容制作方式有三种,分别叙述如下:图2(a)中所示为第一种已知的薄膜电晶体液晶显示器的储存电容,储存电容14的组成由与闸极11同时形成的金属电极、闸极绝缘层12、ITO电极13三者构成,图二(b)为其俯视图,其斜线部分即储存电容的金属电极。由图中可见储存电容的金属电极横跨过象素电极,使薄膜电晶体液晶显示器的开口率降低。There are three kinds of storage capacitor manufacturing methods known in the prior art, which are described as follows: Fig. 2 (a) shows the storage capacitor of the first known thin film transistor liquid crystal display, and the storage capacitor 14 is composed of an AND gate The electrode 11 is composed of a metal electrode, a gate insulating layer 12, and an ITO electrode 13 formed at the same time. Figure 2(b) is its top view, and the oblique line part is the metal electrode of the storage capacitor. It can be seen from the figure that the metal electrode of the storage capacitor crosses the pixel electrode, which reduces the aperture ratio of the thin film transistor liquid crystal display.

图3(a)所示为第二种已知的薄膜电晶体液晶显示器的储存电容,其储存电容14利用闸极11的延伸部分与闸极绝缘层12、ITO电极13共同形成,虽然其储存电容位于上层遮光矩阵21内,提升了开口率,但若制作出现对位偏差,将使各曝光区的储存电容值发生改变,且此种设计方式使得储存电容无法与共同电极连接,当驱动此薄膜电晶体时,容易产生漏电或崩溃的现象,图3(b)为其俯视图。Fig. 3 (a) shows the storage capacitor of the second known thin film transistor liquid crystal display, its storage capacitor 14 utilizes the extended part of the gate 11 to form together with the gate insulating layer 12, ITO electrode 13, although its storage The capacitor is located in the upper layer shading matrix 21, which increases the aperture ratio, but if there is an alignment deviation in the production, the storage capacitor value of each exposure area will change, and this design method makes the storage capacitor unable to be connected to the common electrode. When driving this Thin film transistors are prone to leakage or collapse. Figure 3(b) is its top view.

图4(a)所示为第三种已知的薄膜电晶体液晶显示器的储存电容,它与第一种已知方式的储存电容组成相同,为避免影响开口率而将储存电容14安排在象素电极的四周,尽量使储存电容位在上层遮光矩阵21内,但这一结构将使储存电容与扫描线十分接近,易造成二者短路,且储存电容与扫描线和信号线因太接近易衍生出延迟电容效应,图4(b)为其俯视图。Fig. 4 (a) shows the storage capacitor of the third known thin film transistor liquid crystal display, and it is made up identical with the storage capacitor of the first kind of known mode, for avoiding affecting aperture ratio, storage capacitor 14 is arranged in the image Around the plain electrode, try to make the storage capacitor position in the upper layer light-shielding matrix 21, but this structure will make the storage capacitor very close to the scanning line, which will easily cause a short circuit between the two, and the storage capacitor is too close to the scanning line and the signal line. The delay capacitance effect is derived, and Figure 4(b) is its top view.

本实用新型的薄膜电晶体液晶显示器的储存电容如图5(a)所示,其储存电容14为与闸极11金属同时形成于基板上并作为储存电容的第一电极,与随后沉积的闸极介电层12和ITO电极13共同组成,储存电容的第一电极设计成栅状,其涵盖范围为象素电极的中央部分,距象素电极上下边缘各1/4处,参见图5(b)及图5(c),储存电容的纵向部分位于上层遮光矩阵范围内,这种结构与第一种已知结构相比较,在相同储存电容面积情况下,可获得较大的开口率,与第二种已知方式相比较其储存电容可和共同电极相接,不必担心会发生漏电或崩溃,与第三种已知方式相比较,储存电容减少了短路机会,降低延迟电容效应;根据本实用新型所制得的产品较已知技术更具新颖性及进步性。The storage capacitor of the thin film transistor liquid crystal display of the present utility model is as shown in Figure 5 (a), and its storage capacitor 14 is formed on the substrate simultaneously with the gate electrode 11 metal and is used as the first electrode of the storage capacitor, and the gate deposited subsequently Pole dielectric layer 12 and ITO electrode 13 are jointly formed, and the first electrode of storage capacitor is designed as grid shape, and its scope of coverage is the central part of pixel electrode, each 1/4 place apart from the upper and lower edge of pixel electrode, see Fig. 5 ( b) and Figure 5(c), the longitudinal part of the storage capacitor is located within the range of the upper shading matrix. Compared with the first known structure, this structure can obtain a larger aperture ratio under the same storage capacitor area. Compared with the second known method, the storage capacitor can be connected to the common electrode, so there is no need to worry about leakage or collapse. Compared with the third known method, the storage capacitor reduces the chance of short circuit and reduces the delay capacitance effect; according to The product made by the utility model is more novel and progressive than the known technology.

图1为显示元件的实际波形;Figure 1 shows the actual waveform of the display element;

图2(a)为第一种已知的薄膜电晶体液晶显示器的储存电容剖面图;Fig. 2 (a) is the sectional view of the storage capacitor of the first known thin film transistor liquid crystal display;

图2(b)为图2(a)的俯视图;Fig. 2 (b) is the top view of Fig. 2 (a);

图3(a)为第二种已知的薄膜电晶体液晶显示器的储存电容剖面图,它涉及以闸极电极当作储存电容第一电极的一部分;Fig. 3 (a) is the sectional view of the storage capacitor of the second known thin film transistor liquid crystal display, which involves using the gate electrode as a part of the first electrode of the storage capacitor;

图3(b)为图3(a)的俯视图;Fig. 3 (b) is the top view of Fig. 3 (a);

图4(a)为第三种已知的薄膜电晶体液晶显示器的储存电容剖面图,其储存电容设计成环状,位于象素电极的四周;Fig. 4 (a) is the sectional view of the storage capacitor of the third known thin film transistor liquid crystal display, and its storage capacitor is designed as a ring and is located around the pixel electrode;

图5(a)为本实用新型的储存电容剖面图;Fig. 5 (a) is the sectional view of the storage capacitor of the present utility model;

图5(b)为图5(a)的俯视图;Fig. 5 (b) is the top view of Fig. 5 (a);

图5(c)为本实用新型的另一实例俯视图。Fig. 5(c) is a top view of another example of the utility model.

以下详细说明本实用新型的薄膜电晶体液晶显示器的储存电容的结构及其制作工艺,并与已知的各种已知方式作一比较。The structure and manufacturing process of the storage capacitor of the thin film transistor liquid crystal display of the present invention will be described in detail below, and a comparison with various known methods will be made.

首先在玻璃基板上溅镀一层金属层,蚀刻出闸极电极11和储存电容第一电极14,然后,根据常规方式生长反转堆叠式簿膜电晶体,储存电容的第一电极设计成栅状,其涵盖范围为象素电极中央部分距象素电极上下边缘各1/4处,储存电容的纵向部分位于上层遮光矩阵范围内;图五(b)为其俯视图。First, a layer of metal is sputtered on the glass substrate, and the gate electrode 11 and the first electrode 14 of the storage capacitor are etched, and then, an inverted stacked thin film transistor is grown according to a conventional method, and the first electrode of the storage capacitor is designed as a gate electrode. shape, which covers the central part of the pixel electrode to 1/4 of the upper and lower edges of the pixel electrode, and the longitudinal part of the storage capacitor is located within the range of the upper layer shading matrix; Figure 5 (b) is its top view.

比较图2(b)的第一种已知方式的储存电容,本实用新型的储存电容纵向部分别位于上层遮光矩阵内,所以这一部分储存电容所占面积不影响开口率,以第一种已知技术的储存电容电极宽30μm,象素电极扣除上层遮光矩阵重叠部分长160μm,宽120μm,本实用新型的储存电容纵向部分宽5μm,则在相同储存电容面积情况下第一种已知技术的储存电容开口率约为45%而根据本实用新型所设计可达48%。Compared with the storage capacitor of the first known form in Fig. 2(b), the longitudinal parts of the storage capacitor of the utility model are respectively located in the upper layer light-shielding matrix, so the area occupied by this part of the storage capacitor does not affect the aperture ratio. The storage capacitor electrode of the known technology has a width of 30 μm, and the overlapping part of the pixel electrode deducting the upper layer light-shielding matrix is 160 μm long and 120 μm wide, and the storage capacitor longitudinal part of the utility model is 5 μm wide. The opening ratio of the storage capacitor is about 45% and can reach 48% according to the design of the utility model.

比较图3(b)的第二种已知技术的储存电容,因其储存电容为与闸极电极共用一电极,故无法与共同电极相接,有漏电或崩溃的可能,另一方面此种设计在光罩对准时若有偏差,则导致各曝光区的储存电容值不同,使液晶显示器影像出现偏差;而本实用新型所设计的储存电容与闸极电极不连在一起,所以储存电容可和共同电极相连,避免上述危险,另外栅状设计的储存电容即使在光罩对准上有所偏差亦不影响其总储存电容值。Compared with the storage capacitor of the second known technology in Fig. 3(b), because the storage capacitor shares an electrode with the gate electrode, it cannot be connected with the common electrode, and there is a possibility of leakage or collapse. On the other hand, this If there is a deviation in the alignment of the photomask in the design, the storage capacitor values in each exposure area will be different, causing deviations in the image of the liquid crystal display; and the storage capacitor designed in the utility model is not connected to the gate electrode, so the storage capacitor can be It is connected to the common electrode to avoid the above-mentioned dangers. In addition, even if there is a deviation in the alignment of the photomask in the grid-shaped storage capacitor, the total storage capacitance value will not be affected.

比较图4(b)的第三种已知技术的储存电容,其储存电容环绕在象素电极四周,因与横向的的扫描线和纵向的信号线十分接近,所以易有彼此短路的情形发生,另外,还易使延迟电容效应更加明显;而根据实用新型设计的储存电容只有在纵向一部分和信号线相近,大大减少了短路机会,同样延迟电容效应亦不明显。Compared with the storage capacitor of the third known technology in Fig. 4(b), the storage capacitor is surrounded by the pixel electrode, and because it is very close to the horizontal scanning line and the vertical signal line, it is easy to have a short circuit with each other. , In addition, it is easy to make the delay capacitance effect more obvious; and according to the utility model design, the storage capacitor is only close to the signal line in the longitudinal part, which greatly reduces the chance of short circuit, and the delay capacitance effect is also not obvious.

本实用新型的储存电容电极栅条数,在考虑到黄光工艺线宽解析度为3μm时,其储存电容的栅状条数不超过十条;图5(C)为本实用新型另一俯视图。The number of storage capacitor electrode grids of the utility model, when considering that the line width resolution of the yellow light process is 3 μm, the number of grid-shaped grids of the storage capacitor is no more than ten; FIG. 5(C) is another top view of the utility model.

综上所述,本实用新型揭示一种薄膜电晶体液晶显示器的储存电容结构,由于薄膜电晶体液晶显示器的储存电容设计成栅状,一方面可增大其开口率,另一方面由于薄膜电晶体液晶显示器的栅状储存电容与扫描和信号线邻近部部分减少,可明显有效减少彼此短路现象和减小延迟电容效应。In summary, the utility model discloses a storage capacitor structure of a thin film transistor liquid crystal display. Since the storage capacitor of a thin film transistor liquid crystal display is designed in a grid shape, on the one hand, the aperture ratio can be increased; The grid-shaped storage capacitance of the crystalline liquid crystal display and the adjacent parts of the scanning and signal lines are partially reduced, which can significantly and effectively reduce the short circuit phenomenon and the delay capacitance effect.

Claims (4)

1.一种薄膜电晶体液晶显示器的储存电容结构,其特征在于该储存电容的第一电极设计成栅状并位于象素电极的中央部分,距象素电极上下各约1/4处,薄膜电晶体液晶显示器的栅状储存电容的纵向部分位于上层遮光矩阵内,栅状条数为2至10条。1. A storage capacitor structure of a thin film transistor liquid crystal display, characterized in that the first electrode of the storage capacitor is designed to be grid-shaped and positioned at the central part of the pixel electrode, about 1/4 above and below the pixel electrode, and the thin film The longitudinal part of the grid-shaped storage capacitor of the transistor liquid crystal display is located in the upper layer light-shielding matrix, and the number of grid-shaped bars is 2 to 10. 2.根据权利要求1所述的薄膜电晶体液晶显示器的储存电容结构,其特征在于:栅状储存电容由2. The storage capacitor structure of the thin film transistor liquid crystal display according to claim 1, characterized in that: the grid-shaped storage capacitor is composed of (a)与闸极一起沉积蚀刻而成的储存电容第一电极;(a) the first electrode of the storage capacitor deposited and etched together with the gate; (b)闸极介电层;以及(b) a gate dielectric layer; and (c)象素电极ITO;(c) pixel electrode ITO; 三层结构构成。Three layers of structure. 3.根据权利要求2所述的薄膜电晶体液晶显示器的储存电容结构,其特征在于第一电极为不与闸极一起沉积的介电层。3. The storage capacitor structure of a thin film transistor liquid crystal display according to claim 2, wherein the first electrode is a dielectric layer not deposited together with the gate electrode. 4.根据权利要求2所述的薄膜电晶体液晶显示器的储存电容结构,其特征在于储存电容的介电层为不与闸极介电层一起沉积的介电层。4. The storage capacitor structure of a thin film transistor liquid crystal display according to claim 2, wherein the dielectric layer of the storage capacitor is a dielectric layer that is not deposited together with the gate dielectric layer.
CN 95210817 1995-05-16 1995-05-16 A storage capacitor structure of a thin film transistor liquid crystal display Expired - Lifetime CN2237857Y (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100383648C (en) * 2004-11-24 2008-04-23 鸿富锦精密工业(深圳)有限公司 Storage capacitor and liquid crystal display using the storage capacitor
CN100422806C (en) * 2003-08-29 2008-10-01 株式会社日立显示器 Liquid crystal display device
CN100426489C (en) * 1999-09-27 2008-10-15 株式会社半导体能源研究所 Semiconductor device and method of manufacturing thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100426489C (en) * 1999-09-27 2008-10-15 株式会社半导体能源研究所 Semiconductor device and method of manufacturing thereof
CN100422806C (en) * 2003-08-29 2008-10-01 株式会社日立显示器 Liquid crystal display device
CN100383648C (en) * 2004-11-24 2008-04-23 鸿富锦精密工业(深圳)有限公司 Storage capacitor and liquid crystal display using the storage capacitor

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