CN221684785U - An electromagnetic induction high-purity gas heating and humidification device - Google Patents

Abstract

An electromagnetic induction high-purity gas heating and humidifying device includes a gas pipeline, to which a gas filter, an induction heater, a gas humidifier, a gas buffer tank and an outlet electromagnetic valve are sequentially connected; the porous magnetic metal column solves the problem that stainless steel for high-purity gas cannot be magnetic and therefore cannot be heated by electromagnetic induction, and increases the heat transfer contact area. The present application solves the problems of low energy conversion efficiency, slow temperature adjustment speed, narrow temperature adjustment range and low upper limit of gas flow in the prior art; by installing the induction heater and the gas humidifier on the pipeline in sequence, the gas is first heated and then humidified, avoiding the influence of water vapor on the electromagnetic induction heating gas, and the ultrapure water atomizing nozzle arranged in reverse annularly also makes the gas humidification effect more sufficient and uniform.

Description

An electromagnetic induction high-purity gas heating and humidification device

Technical Field

The present application relates to the field of gas heating technology, and in particular to an electromagnetic induction high-purity gas heating and humidification device.

Background Art

In many industrial production and manufacturing processes, gases need to be heated.

Gas heating in the prior art mostly uses thermocouple heating or fluid heat exchange. However, thermocouple heating has high energy consumption, low energy conversion efficiency, and limited maximum temperature; fluid heat exchange has a slow heating speed, slow gas temperature control, and a narrow adjustable temperature range. At the same time, the low heating rate of the above technology also limits the application of large-flow gas heating. The induction heater can use the electromagnetic induction phenomenon to efficiently generate heat, with high heating efficiency, large heating rate, and high temperature limit. The principle is to quickly heat up the metal medium through electromagnetic induction, and then the gas flow passes through the cavity of the metal medium to achieve heating. However, for the heating and humidification of high-purity gas, high-purity gas has high requirements on the cleanliness of the equipment. Usually, it can only come into contact with high-purity stainless steel pipes, and the electromagnetic induction performance of such steel pipes is poor, and it cannot be used as a medium for electromagnetic induction for heating.

Therefore, it is necessary for the inventor to design a new electromagnetic induction high-purity gas heating and humidification device to overcome the above problems.

Summary of the invention

The main purpose of the present application is to provide an electromagnetic induction high-purity gas heating and humidification device to solve the problem in the related art that high-cleanliness stainless steel pipes cannot be heated by electromagnetic induction.

In order to achieve the above-mentioned purpose, the present application provides an electromagnetic induction high-purity gas heating and humidification device, including a gas pipeline, to which a gas filter, an induction heater, a gas humidifier, a gas buffer tank and an outlet solenoid valve are connected in sequence.

Preferably, the induction heater comprises a first tank body having an air inlet and an air outlet at two ends respectively, and an induction coil is fixedly installed inside the first tank body.

Preferably, a porous magnetic conductive metal column is fixedly installed inside the first tank body, and a plurality of gas through holes are opened through the porous magnetic conductive metal column.

Preferably, stainless steel tubes are fixedly installed inside all the gas through holes.

Preferably, an insulating layer is fixedly disposed between the inductor coil and the porous magnetic conductive metal column.

Preferably, a heat-insulating layer is fixedly disposed between the inductor coil and the outer shell of the first tank body.

Preferably, a gas distributor is also fixedly installed in the first tank body, and the gas distributor is close to the air inlet and fixedly connected to the porous magnetic metal column.

Preferably, the gas humidifier comprises a second tank body, an ultrapure water atomizing nozzle is fixedly installed inside the second tank body, and the ultrapure water atomizing nozzle is annularly arranged inversely on the inner wall of the second tank body.

Preferably, a temperature and humidity sensor is fixedly provided at the outlet end of the gas buffer tank.

Preferably, it also includes a control panel, which is electrically connected to the induction heater, the gas humidifier, the gas buffer tank and the outlet solenoid valve.

The utility model provides an electromagnetic induction type high-purity gas heating and humidifying device, which has the following beneficial effects compared with the prior art:

1. The porous magnetic metal column solves the problem that stainless steel for high-purity gas cannot conduct magnetism and therefore cannot be heated by electromagnetic induction, and increases the heat transfer contact area. This application solves the problems of low energy conversion efficiency, slow temperature adjustment speed, narrow temperature adjustment range, and low upper limit of gas flow in the prior art.

Second, by installing the induction heater and the gas humidifier on the pipeline in sequence, the gas is heated first and then humidified, avoiding the influence of water vapor on the electromagnetic induction heating gas. The ultrapure water atomizing nozzles arranged in reverse annular directions also make the gas humidification effect more sufficient and uniform.

BRIEF DESCRIPTION OF THE DRAWINGS

The drawings constituting a part of this application are used to provide a further understanding of this application, so that other features, purposes and advantages of this application become more obvious. The schematic embodiment drawings and their descriptions of this application are used to explain this application and do not constitute an improper limitation on this application. In the drawings:

Figure 1 is an overall structural diagram of the utility model;

FIG2 is a structural diagram of the inductive heater of the utility model;

FIG3 is a cross-sectional view of the induction heater of the utility model;

FIG4 is an exploded view of the inductive heater of the present invention;

FIG5 is a cross-sectional view of the gas humidifier of the present invention.

Among them: 1. Gas pipeline; 2. Gas filter; 3. Inductive heater; 4. Gas humidifier; 5. Gas buffer tank; 6. Export solenoid valve; 7. Air inlet; 8. Air outlet; 9. First tank body; 10. Inductive coil; 11. Porous magnetic metal column; 12. Gas through hole; 13. Stainless steel pipe; 14. Insulating layer; 15. Thermal insulation layer; 16. Gas distributor; 17. Second tank body; 18. Ultrapure water atomizing nozzle; 19. Temperature and humidity sensor.

DETAILED DESCRIPTION

In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present application described here. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

In addition, the term "plurality" shall mean two or more.

It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

As shown in Figures 1 to 5, an electromagnetic induction type high-purity gas heating and humidifying device comprises a gas pipeline 1, to which a gas filter 2, an induction heater 3, a gas humidifier 4, a gas buffer tank 5 and an outlet electromagnetic valve 6 are sequentially connected. During operation, the gas flows in the gas pipeline 1, first flows through the gas filter 2 to filter the impurities mixed in the gas, then enters the induction heater 3, and flows to the gas humidifier 4 after being quickly heated by the induction heater 3, and then humidified in the gas humidifier 4, and then flows into the gas buffer tank 5 after humidification, and after the gas buffer tank 5 adjusts the gas pressure fluctuation, it is input into the gas end from the outlet electromagnetic valve 6, completing the entire gas heating and humidification process.

The induction heater 3 comprises a first tank body 9 with an air inlet 7 and an air outlet 8 at two ends respectively, and an induction coil 10 is fixedly installed inside the first tank body 9; when working, a constantly changing magnetic field is generated by passing a high-frequency alternating current through the induction coil 10, and the electromagnetic induction phenomenon causes eddy currents to be generated in the porous magnetic metal column 11, thereby directly heating the metal column from the inside, with high heating efficiency and a high temperature upper limit.

A porous magnetic metal column 11 is also fixedly installed inside the first tank body 9, and a plurality of gas through holes 12 are opened through the porous magnetic metal column 11; stainless steel pipes 13 are fixedly installed inside all the gas through holes 12; when working, the heated porous magnetic metal column 11 heats the stainless steel pipe 13 by heat conduction and heat radiation, and the heated stainless steel pipe 13 heats the high-purity gas passing through the pipe by heat conduction and heat radiation.

A gas distributor 16 is also fixedly installed in the first tank body 9, and the gas distributor 16 is close to the air inlet 7 and fixedly connected to the porous magnetic metal column 11. During operation, the gas entering from the air inlet 7 needs to flow into the gas through hole 12 on the porous magnetic metal column 11. By setting the gas distributor 16 to divert the gas to multiple stainless steel pipes, the heating area can be greatly increased, thereby improving the heat transfer efficiency and making the gas heating more uniform.

An insulating layer 14 is fixedly disposed between the inductor 10 and the porous magnetic metal column 11; the insulating layer 14 prevents leakage from occurring when the inductor 10 is energized, thereby causing danger; during manufacturing, the insulating layer 14 can be made of an insulating material that matches the working temperature.

An insulation layer 15 is also fixedly arranged between the inductor coil 10 and the outer shell of the first tank body 9; the heat after the gas is heated needs to be insulated, and the insulation layer 15 can reduce heat loss. During manufacturing, this layer can use a vacuum layer or an insulating and heat-preserving material that matches the working temperature.

The gas humidifier 4 includes a second tank body 17, inside of which an ultrapure water atomizing nozzle 18 is fixedly installed. The ultrapure water atomizing nozzle 18 is annularly and reversely arranged on the inner wall of the second tank body 17. When working, ultrapure water is atomized by the ultrapure water atomizing nozzle 18 and then sprayed into the heated gas for humidification.

The outlet end of the gas buffer tank 5 is also fixedly provided with a temperature and humidity sensor 19 ; the temperature and humidity sensor 19 is used to detect whether the temperature and humidity of the gas in the buffer tank meet the requirements.

It also includes a control panel, which is electrically connected to the induction heater 3, the gas humidifier 4, the gas buffer tank 5 and the outlet solenoid valve 6; when working, the power of the induction heater 3, the amount of ultrapure water sprayed by the gas humidifier 4 and the opening and closing of the outlet solenoid valve 6 can be controlled through the control panel, and the data of the temperature and humidity sensor 19 in the gas buffer tank 5 are fed back to the control panel, and the operator operates according to the data on the control panel. It should be noted that the control method here is not the core creation point of this embodiment, and any method that can achieve this control effect can be applied here.

The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (10)

1. The utility model provides an electromagnetic induction type high-purity gas heating humidification device, includes gas-supply pipeline (1), its characterized in that: the gas pipeline (1) is sequentially connected with a gas filter (2), an inductive heater (3), a gas humidifier (4), a gas buffer tank (5) and an outlet electromagnetic valve (6).

2. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 1, wherein: the induction heater (3) comprises a first tank body (9) with an air inlet (7) and an air outlet (8) at two ends, and an induction coil (10) is fixedly arranged in the first tank body (9).

3. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 2, wherein: the first tank body (9) is internally and fixedly provided with a porous magnetic conductive metal column (11), and a plurality of gas through holes (12) are formed in the porous magnetic conductive metal column (11) in a penetrating mode.

4. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 3, wherein: stainless steel pipes (13) are fixedly arranged in all the gas through holes (12).

5. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 3, wherein: an insulating layer (14) is fixedly arranged between the inductance coil (10) and the porous magnetic conductive metal column (11).

6. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 2, wherein: an insulating layer (15) is also fixedly arranged between the inductance coil (10) and the shell of the first tank body (9).

7. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 3, wherein: the first tank body (9) is also fixedly provided with a gas distributor (16), and the gas distributor (16) is close to the gas inlet (7) and is fixedly connected with the porous magnetic conductive metal column (11).

8. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 1, wherein: the gas humidifier (4) comprises a second tank body (17), an ultrapure water atomizing nozzle (18) is fixedly arranged in the second tank body (17), and the ultrapure water atomizing nozzle (18) is reversely arranged on the inner wall of the second tank body (17) in a ring shape.

9. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 1, wherein: the outlet end of the gas buffer tank (5) is also fixedly provided with a temperature and humidity sensor (19).

10. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 1, wherein: the air conditioner further comprises a control panel, wherein the control panel is electrically connected with the induction heater (3), the air humidifier (4), the air buffer tank (5) and the outlet electromagnetic valve (6).