CN221684785U - Electromagnetic induction type high-purity gas heating and humidifying device - Google Patents

Electromagnetic induction type high-purity gas heating and humidifying device Download PDF

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Publication number
CN221684785U
CN221684785U CN202323471660.1U CN202323471660U CN221684785U CN 221684785 U CN221684785 U CN 221684785U CN 202323471660 U CN202323471660 U CN 202323471660U CN 221684785 U CN221684785 U CN 221684785U
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gas
electromagnetic induction
type high
induction type
humidifying device
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CN202323471660.1U
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徐元
江磊
何天能
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Fujifilm Electronic Materials Suzhou Co Ltd
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Fujifilm Electronic Materials Suzhou Co Ltd
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Abstract

An electromagnetic induction type high-purity gas heating and humidifying device comprises a gas transmission pipeline, wherein a gas filter, an induction heater, a gas humidifier, a gas buffer tank and an outlet electromagnetic valve are sequentially connected to the gas transmission pipeline; the porous magnetic conductive metal column solves the problem that stainless steel for high-cleanliness gas cannot conduct magnetic and can not be heated in an electromagnetic induction mode, and increases the heat transfer contact area. The application solves the problems of low energy conversion efficiency, low temperature regulating speed, narrow temperature regulating interval and low upper limit of gas flow in the prior art; through installing induction heater and gas humidifier on the pipeline in proper order, heat the gas earlier, then carry out the humidification again, avoided the influence of vapor to electromagnetic induction heating gas, the super pure water atomizer of annular reverse setting also makes gaseous humidification effect more abundant more even.

Description

Electromagnetic induction type high-purity gas heating and humidifying device
Technical Field
The application relates to the technical field of gas heating, in particular to an electromagnetic induction type high-purity gas heating and humidifying device.
Background
In many industrial processes and manufacturing, heating of the gas is required.
In the prior art, thermocouple heating or fluid heat exchange is mostly adopted for gas heating, however, the thermocouple heating has high energy consumption, low energy conversion efficiency and limited maximum temperature; the heating speed of fluid heat exchange is low, the gas temperature is controlled slowly, and the temperature adjustable interval is narrow. At the same time, the low heating rate of the above technique also limits the application of high flow gas heating. The electromagnetic induction type induction heating device can utilize electromagnetic induction phenomenon to efficiently generate heat, has high heating efficiency, high heating rate and high upper temperature limit, and is characterized in that the electromagnetic induction is used for rapidly heating the metal medium, and then gas fluid passes through the cavity of the metal medium to realize heating. However, for heating and humidifying high-purity gas, the high-purity gas has high requirements on the cleanliness of equipment, and generally, the high-purity gas can only be in contact with a stainless steel pipe with high purity, but the electromagnetic induction performance of the steel pipe is poor, and the steel pipe cannot be used as a medium for electromagnetic induction for heating.
Therefore, the inventor needs to design a new electromagnetic induction type high-purity gas heating and humidifying device to overcome the above problems.
Disclosure of Invention
The application mainly aims to provide an electromagnetic induction type high-purity gas heating and humidifying device, which is used for solving the problem that a stainless steel pipe with high cleanliness cannot be heated in an electromagnetic induction mode in the related art.
In order to achieve the above purpose, the application provides an electromagnetic induction type high-purity gas heating and humidifying device, which comprises a gas transmission pipeline, wherein a gas filter, an induction heater, a gas humidifier, a gas buffer tank and an outlet electromagnetic valve are sequentially connected to the gas transmission pipeline.
Preferably, the induction heater comprises a first tank body, wherein the two ends of the first tank body are respectively provided with an air inlet and an air outlet, and an induction coil is fixedly arranged in the first tank body.
Preferably, the first tank body is also fixedly provided with a porous magnetic conductive metal column, and a plurality of gas through holes are formed in the porous magnetic conductive metal column in a penetrating manner.
Preferably, all the gas through holes are internally and fixedly provided with stainless steel pipes.
Preferably, an insulating layer is also fixedly arranged between the inductance coil and the porous magnetic conductive metal column.
Preferably, an insulation layer is further fixedly arranged between the inductance coil and the shell of the first tank body.
Preferably, a gas distributor is fixedly installed in the first tank body, and the gas distributor is close to the gas inlet and is fixedly connected with the porous magnetic conductive metal column.
Preferably, the gas humidifier comprises a second tank body, an ultrapure water atomizing nozzle is fixedly arranged in the second tank body, and the ultrapure water atomizing nozzle is reversely arranged on the inner wall of the second tank body in a ring shape.
Preferably, the outlet end of the gas buffer tank is also fixedly provided with a temperature and humidity sensor.
Preferably, the device further comprises a control panel, wherein the control panel is electrically connected with the induction heater, the gas humidifier, the gas buffer tank and the outlet electromagnetic valve.
Compared with the prior art, the electromagnetic induction type high-purity gas heating and humidifying device provided by the utility model has the beneficial effects that:
1. the porous magnetic conductive metal column solves the problem that stainless steel for high-cleanliness gas cannot conduct magnetic and can not be heated in an electromagnetic induction mode, and increases the heat transfer contact area. The application solves the problems of low energy conversion efficiency, low temperature regulating speed, narrow temperature regulating interval and low upper limit of gas flow in the prior art.
2. Through installing induction heater and gas humidifier on the pipeline in proper order, heat the gas earlier, then carry out the humidification again, avoided the influence of vapor to electromagnetic induction heating gas, the super pure water atomizer of annular reverse setting also makes gaseous humidification effect more abundant more even.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application, are incorporated in and constitute a part of this specification. The drawings and their description are illustrative of the application and are not to be construed as unduly limiting the application. In the drawings:
FIG. 1 is an overall block diagram of the present utility model;
FIG. 2 is a block diagram of an induction heater of the present utility model;
FIG. 3 is a cross-sectional view of an induction heater of the present utility model;
FIG. 4 is an exploded view of an induction heater of the present utility model;
Fig. 5 is a cross-sectional view of a gas humidifier of the utility model.
Wherein: 1. a gas line; 2. a gas filter; 3. an induction heater; 4. a gas humidifier; 5. a gas buffer tank; 6. an outlet solenoid valve; 7. an air inlet; 8. an air outlet; 9. a first tank; 10. an inductance coil; 11. porous magnetic conductive metal column; 12. a gas through hole; 13. stainless steel tube; 14. an insulating layer; 15. a heat preservation layer; 16. a gas distributor; 17. a second tank; 18. an ultrapure water atomizing nozzle; 19. a temperature and humidity sensor.
Detailed Description
In order that those skilled in the art will better understand the present application, a technical solution in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, shall fall within the scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate in order to describe the embodiments of the application herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In the present application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate an azimuth or a positional relationship based on that shown in the drawings. These terms are only used to better describe the present application and its embodiments and are not intended to limit the scope of the indicated devices, elements or components to the particular orientations or to configure and operate in the particular orientations.
Also, some of the terms described above may be used to indicate other meanings in addition to orientation or positional relationships, for example, the term "upper" may also be used to indicate some sort of attachment or connection in some cases. The specific meaning of these terms in the present application will be understood by those of ordinary skill in the art according to the specific circumstances.
In addition, the term "plurality" shall mean two as well as more than two.
It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other. The application will be described in detail below with reference to the drawings in connection with embodiments.
As shown in fig. 1 to 5, an electromagnetic induction type high-purity gas heating and humidifying device comprises a gas pipeline 1, wherein a gas filter 2, an induction heater 3, a gas humidifier 4, a gas buffer tank 5 and an outlet electromagnetic valve 6 are sequentially connected to the gas pipeline 1. During operation, gas flows in the gas transmission pipeline 1, firstly flows through the gas filter 2, impurities doped in the gas are filtered, then the gas enters the induction heater 3, flows into the gas humidifier 4 after being rapidly heated by the induction heater 3, is humidified in the gas humidifier 4, flows into the gas buffer tank 5 after being humidified, flows into the gas end from the outlet electromagnetic valve 6 after the pressure fluctuation of the gas is regulated by the gas buffer tank 5, and the whole flow of heating and humidifying the gas is completed.
The induction heater 3 comprises a first tank body 9 with an air inlet 7 and an air outlet 8 at two ends, and an induction coil 10 is fixedly arranged in the first tank body 9; when the electromagnetic induction type electromagnetic induction heating device works, a high-frequency alternating current is supplied to the induction coil 10 to generate a continuously-changing magnetic field, and eddy current is generated in the porous magnetic conduction metal column 11 due to the electromagnetic induction phenomenon, so that the metal column is directly heated from the inside, the heating efficiency is high, and the upper temperature limit is high.
A porous magnetic conductive metal column 11 is fixedly arranged in the first tank body 9, and a plurality of gas through holes 12 are formed in the porous magnetic conductive metal column 11 in a penetrating manner; stainless steel pipes 13 are fixedly arranged in all the gas through holes 12; in operation, the heated porous magnetically conductive metal column 11 heats the stainless steel tube 13 by heat conduction and heat radiation, and the heated stainless steel tube 13 heats the high purity gas passing through the tube by heat conduction and heat radiation.
The first tank body 9 is also fixedly provided with a gas distributor 16, and the gas distributor 16 is close to the gas inlet 7 and is fixedly connected with the porous magnetic conductive metal column 11. When the gas distributor works, gas entering from the gas inlet 7 needs to flow into the gas through holes 12 on the porous magnetic conductive metal column 11, and the gas is split into a plurality of stainless steel pipes by arranging the gas distributor 16, so that the heating area can be greatly increased, the heat transfer efficiency is further improved, and the gas heating is more uniform.
An insulating layer 14 is fixedly arranged between the inductance coil 10 and the porous magnetic conductive metal column 11; the insulating layer 14 prevents the risk caused by leakage phenomenon when the inductance coil 10 is electrified; the insulating layer 14 may be made of an insulating material that is compatible with the operating temperature.
An insulating layer 15 is fixedly arranged between the inductance coil 10 and the shell of the first tank body 9; the heat after the gas heating needs to be insulated, and the heat loss can be reduced by arranging the heat insulation layer 15, and the layer can be a vacuum layer or an insulating heat insulation material consistent with the working temperature during manufacturing.
The gas humidifier 4 comprises a second tank body 17, an ultrapure water atomizing nozzle 18 is fixedly arranged in the second tank body 17, and the ultrapure water atomizing nozzle 18 is reversely arranged on the inner wall of the second tank body 17 in a ring shape; in operation, ultrapure water is atomized by the ultrapure water atomizer 18 and then sprayed into the heated gas for humidification.
The outlet end of the gas buffer tank 5 is also fixedly provided with a temperature and humidity sensor 19; whether the temperature and humidity of the gas in the buffer tank meet the requirements or not is detected by a temperature and humidity sensor 19.
The air conditioner further comprises a control panel, wherein the control panel is electrically connected with the induction heater 3, the air humidifier 4, the air buffer tank 5 and the outlet electromagnetic valve 6; during operation, the power of the induction heater 3, the water quantity of the ultrapure water sprayed by the gas humidifier 4 and the opening and closing of the outlet electromagnetic valve 6 can be controlled through the control panel, the data of the temperature and humidity sensor 19 in the gas buffer tank 5 are fed back to the control panel, and an operator operates through the data on the control panel, so that it is noted that the control mode is not the core creation point of the embodiment, and any mode capable of realizing the control effect can be applied.
The above description is only of the preferred embodiments of the present application and is not intended to limit the present application, but various modifications and variations can be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (10)

1. The utility model provides an electromagnetic induction type high-purity gas heating humidification device, includes gas-supply pipeline (1), its characterized in that: the gas pipeline (1) is sequentially connected with a gas filter (2), an inductive heater (3), a gas humidifier (4), a gas buffer tank (5) and an outlet electromagnetic valve (6).
2. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 1, wherein: the induction heater (3) comprises a first tank body (9) with an air inlet (7) and an air outlet (8) at two ends, and an induction coil (10) is fixedly arranged in the first tank body (9).
3. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 2, wherein: the first tank body (9) is internally and fixedly provided with a porous magnetic conductive metal column (11), and a plurality of gas through holes (12) are formed in the porous magnetic conductive metal column (11) in a penetrating mode.
4. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 3, wherein: stainless steel pipes (13) are fixedly arranged in all the gas through holes (12).
5. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 3, wherein: an insulating layer (14) is fixedly arranged between the inductance coil (10) and the porous magnetic conductive metal column (11).
6. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 2, wherein: an insulating layer (15) is also fixedly arranged between the inductance coil (10) and the shell of the first tank body (9).
7. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 3, wherein: the first tank body (9) is also fixedly provided with a gas distributor (16), and the gas distributor (16) is close to the gas inlet (7) and is fixedly connected with the porous magnetic conductive metal column (11).
8. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 1, wherein: the gas humidifier (4) comprises a second tank body (17), an ultrapure water atomizing nozzle (18) is fixedly arranged in the second tank body (17), and the ultrapure water atomizing nozzle (18) is reversely arranged on the inner wall of the second tank body (17) in a ring shape.
9. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 1, wherein: the outlet end of the gas buffer tank (5) is also fixedly provided with a temperature and humidity sensor (19).
10. An electromagnetic induction type high purity gas heating and humidifying device as claimed in claim 1, wherein: the air conditioner further comprises a control panel, wherein the control panel is electrically connected with the induction heater (3), the air humidifier (4), the air buffer tank (5) and the outlet electromagnetic valve (6).
CN202323471660.1U 2023-12-19 2023-12-19 Electromagnetic induction type high-purity gas heating and humidifying device Active CN221684785U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202323471660.1U CN221684785U (en) 2023-12-19 2023-12-19 Electromagnetic induction type high-purity gas heating and humidifying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202323471660.1U CN221684785U (en) 2023-12-19 2023-12-19 Electromagnetic induction type high-purity gas heating and humidifying device

Publications (1)

Publication Number Publication Date
CN221684785U true CN221684785U (en) 2024-09-10

Family

ID=92617567

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202323471660.1U Active CN221684785U (en) 2023-12-19 2023-12-19 Electromagnetic induction type high-purity gas heating and humidifying device

Country Status (1)

Country Link
CN (1) CN221684785U (en)

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