CN221566319U

CN221566319U - Transmission mechanism and coating equipment

Info

Publication number: CN221566319U
Application number: CN202323187100.3U
Authority: CN
Inventors: 余仲; 黄武松; 程培勇; 赵步举; 张海涛; 籍龙占; 谭晓华; 张向东
Original assignee: Shenzhen Headquarter SC New Energy Technology Corp
Current assignee: Shenzhen Headquarter SC New Energy Technology Corp
Priority date: 2023-11-24
Filing date: 2023-11-24
Publication date: 2024-08-20
Anticipated expiration: 2033-11-24

Abstract

The utility model discloses a transmission mechanism and a coating device, wherein the transmission mechanism comprises: the transmission assembly comprises a mounting frame, a transmission unit arranged on the mounting frame and in transmission connection with the transmission unit, wherein the transmission unit comprises a transmission wheel which is rotatably arranged on the mounting frame, the axial direction of the transmission wheel is perpendicular to the transportation direction of the transmission unit, and the transmission wheel drives the transmission unit to operate when rotating around the axis of the transmission wheel, and a transmission rod which is arranged in parallel with the axis of the transmission wheel is fixedly connected with the transmission wheel; the driving assembly is provided with a transmission hole, the transmission rod penetrates through the transmission hole so that the transmission assembly can axially move along the transmission rod relative to the driving assembly, and the driving assembly is used for driving the transmission rod to rotate so that the transmission wheel rotates around the axis of the transmission wheel. In the transmission mechanism, even in the process that the driving assembly drives the transmission assembly to operate, the position of the transmission assembly can be adjusted without stopping operation.

Description

Transmission mechanism and coating equipment

Technical Field

The utility model relates to the technical field of coating equipment, in particular to a transmission mechanism and coating equipment.

Background

The hot filament chemical vapor deposition technology has the advantages of high utilization rate of process gas, high growth rate, no plasma bombardment damage, good passivation effect, suitability for large-area film growth and other process characteristics, and has strong advantages in the aspects of film preparation cost, compound semiconductor, stability and the like.

In the hot wire chemical vapor deposition equipment, high voltage is introduced into the hot wire assembly to enable the hot wire assembly to generate high temperature, and under lower pressure, thermal energy is used for activating process gas, so that the process gas can be subjected to thermal decomposition or chemical reaction, and a required film is formed on the surface of the substrate.

In the vertical hot wire chemical vapor deposition equipment, when other conditions are the same, the distances between the hot wire component and the substrate are different, namely, different process deposition distances can lead to different film material deposition rates, deposition quality and the like, however, most of the vertical hot wire chemical vapor deposition equipment still cannot adjust the process deposition distances at present, even if some of the vertical hot wire chemical vapor deposition equipment can adjust the process deposition distances, the process deposition distances cannot be adjusted while transporting a substrate, and when the process deposition distances are adjusted, the equipment must be stopped.

Disclosure of utility model

The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides a conveying mechanism which can realize the process deposition distance adjustment while conveying a substrate.

The utility model further provides coating equipment with the transmission mechanism.

A transport mechanism according to an embodiment of the first aspect of the present utility model includes: the transmission assembly comprises a mounting frame, a transmission unit arranged on the mounting frame and in transmission connection with the transmission unit, wherein the transmission unit comprises a transmission wheel rotationally arranged on the mounting frame, the axial direction of the transmission wheel is perpendicular to the transportation direction of the transmission unit, the transmission wheel drives the transmission unit to operate when rotating around the axis of the transmission wheel, and the transmission wheel is fixedly connected with a transmission rod which is arranged in parallel with the axis of the transmission wheel; the driving assembly is provided with a transmission hole, the transmission rod penetrates through the transmission hole so that the transmission assembly can move relative to the driving assembly along the axial direction of the transmission rod, and the driving assembly is used for driving the transmission rod to rotate so that the transmission wheel rotates around the axis of the transmission wheel.

The transmission mechanism provided by the embodiment of the utility model has at least the following beneficial effects:

In the transmission mechanism, the transmission unit is used for bearing the carrying disc loaded on the silicon wafer, and the driving assembly can drive the transmission rod to rotate, so that the transmission wheel is driven to rotate around the axis of the transmission wheel, and then the whole transmission unit is operated to drive the transmission unit to operate, so that the transmission unit drives the carrying disc to move.

The hot wire assembly is arranged in parallel with the space right above the transmission unit, and the arrangement direction of the space right above the hot wire assembly and the transmission unit is parallel to the axial direction of the transmission rod.

It will be appreciated that when the transfer unit transports the carrier plate loaded with silicon wafers, the carrier plate may pass through the space directly above the transfer unit, and when the transfer assembly is operated to move axially along the transmission rod relative to the drive assembly, the distance between the carrier plate and the hot wire assembly disposed on the transfer unit may be changed, thereby adjusting the process deposition distance. In addition, in the transmission mechanism, even in the process that the driving assembly drives the transmission assembly to operate, the position of the transmission assembly can be adjusted without stopping operation.

According to some embodiments of the utility model, the driving wheel is fixedly connected with a plurality of driving rods, the driving assembly is provided with a plurality of driving holes, and the driving rods are correspondingly arranged in the driving holes in a penetrating manner.

According to some embodiments of the utility model, the transmission unit comprises a plurality of rollers arranged at intervals, and the interval direction of the rollers is perpendicular to the axial direction of the transmission rod;

The transmission unit further comprises a transmission shaft rotatably arranged on the mounting frame and a plurality of first transmission members arranged at intervals along the axial direction of the transmission shaft, the axial direction of the transmission shaft is parallel to the interval direction of the plurality of rollers, the plurality of first transmission members are in transmission fit with the plurality of rollers in a one-to-one correspondence manner, and the transmission wheel is in transmission fit with one of the first transmission members;

When the driving wheel rotates around the axis of the driving wheel, the driving shaft is driven to rotate through the first driving part, so that the first driving parts respectively drive the rollers to rotate.

According to some embodiments of the present utility model, a second transmission member is fixed on each roller, and the plurality of first transmission members are in transmission fit with the second transmission members on the plurality of rollers in a one-to-one correspondence manner.

According to some embodiments of the utility model, the driving wheel, the first driving member and the second driving member are bevel gears, the axial direction of the first driving member is perpendicular to the axial direction of the driving wheel, the axial direction of the second driving member is perpendicular to the axial direction of the first driving member, and the second driving member is coaxially arranged with the roller.

According to some embodiments of the utility model, the driving assembly comprises a driving source and a transmission module in driving connection with the driving source, the transmission hole is formed in the transmission module, and the driving source is used for driving the transmission module to rotate so as to drive the transmission rod to rotate.

According to some embodiments of the utility model, the transmission module comprises magnetic fluid driven by the driving source to rotate, and a connecting flange fixedly connected with the magnetic fluid, wherein the connecting flange is provided with the transmission hole.

According to some embodiments of the utility model, the transmission module further comprises a transition flange provided with mounting holes for the rotational arrangement of the connection flange.

According to some embodiments of the utility model, the transport assembly further comprises a guide wheel set fixed to the mounting frame and located above the transport unit;

The guide wheel group comprises two guide wheels which are arranged at intervals, and the interval direction of the two guide wheels is parallel to the axial direction of the driving wheel.

According to an embodiment of the second aspect of the present utility model, a plating apparatus includes: the above-mentioned transmission mechanism, the upper side of the transmission unit forms a space for the carrier plate to pass through; the hot wire assembly is arranged in parallel with the space, and the arrangement direction of the hot wire assembly and the space is parallel to the axial direction of the transmission rod.

The film plating equipment provided by the embodiment of the utility model has at least the following beneficial effects:

In the film plating equipment, the transmission unit is used for bearing the carrying disc loaded on the silicon wafer, and the driving assembly can drive the transmission rod to rotate, so that the transmission wheel is driven to rotate around the axis of the transmission wheel, and then the whole transmission unit is operated to drive the transmission unit to operate, so that the transmission unit drives the carrying disc to move.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The utility model is further described with reference to the accompanying drawings and examples, in which:

FIG. 1 is a schematic view showing a structure of a plating apparatus according to an embodiment of the present utility model;

FIG. 2 is a schematic diagram of a transmission mechanism according to an embodiment of the present utility model;

FIG. 3 is an enlarged view of a portion of FIG. 2;

FIG. 4 is a schematic view of a part of a transmission mechanism according to an embodiment of the present utility model;

FIG. 5 is a schematic view of a partially exploded structure of a transmission mechanism according to an embodiment of the present utility model;

Fig. 6 is another enlarged partial view of fig. 2.

Reference numerals:

100. A transmission mechanism; 110. a transmission assembly; 111. a mounting frame; 112. a transmission unit; 1121. a roller; 11211. a second transmission member; 113. a transmission unit; 1131. a driving wheel; 1132. a transmission rod; 1133. a transmission shaft; 1134. a first transmission member; 114. a guide wheel set; 1141. a guide wheel; 115. a vertical rod; 116. a top plate; 120. a drive assembly; 121. a driving source; 122. a transmission module; 1221. magnetic fluid; 1222. a connecting flange; 1223. a transition flange; 12231. an assembly groove; 1224. a seal ring; 1225. a sleeve; 123. a transmission belt;

200. A distance adjusting mechanism;

300. a cavity.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and to simplify the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model. Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

As shown in fig. 1, the coating apparatus provided by the utility model comprises a transmission mechanism 100, wherein the transmission mechanism 100 is used for conveying a carrier plate.

As shown in fig. 2, the transport mechanism 100 includes a transport assembly 110 and a drive assembly 120, wherein the drive assembly 120 is configured to drive the transport assembly 110 to operate, and the transport assembly 110 is configured to carry and transport a carrier tray.

The carrier tray is used for loading silicon wafers, and the silicon wafers move synchronously with the carrier tray when the carrier tray is transported by the transmission assembly 110.

It will be appreciated that the carrier plate may also be used to carry other components requiring plating.

Referring to fig. 2 and 3, the transmission assembly 110 includes a mounting frame 111, a transmission unit 112, and a transmission unit 113, wherein the transmission unit 112 is disposed on the mounting frame 111, and the transmission unit 113 is disposed on the mounting frame 111 and is in transmission connection with the transmission unit 112.

It will be appreciated that the transmission unit 113 is capable of transmitting power from the drive assembly 120 to the transmission unit 112 to operate the transmission unit 112, the transmission unit 112 being configured to carry and transport the carrier plate.

Referring to fig. 3 and 4, the transmission unit 113 includes a transmission wheel 1131 rotatably disposed on the mounting frame 111, an axial direction of the transmission wheel 1131 is perpendicular to a transportation direction of the transmission unit 112, and the transmission wheel 1131 drives the transmission unit 112 to operate when rotating around an axis thereof.

It can be appreciated that the driving wheel 1131 is used as one of the components of the driving unit 113, and when it is rotated around its axis by an external force, the driving unit 113 can be operated, so as to drive the transmission unit 112 to operate, and the transmission unit 112 can drive the carrier disc to move when operating.

Further, the driving wheel 1131 is fixedly connected with a driving rod 1132 disposed parallel to the axis thereof, so that the driving wheel 1131 can be driven to rotate around the axis of the driving wheel 1131 by driving the driving rod 1132 to rotate, thereby driving the whole driving unit 113 to operate and driving the transmission unit 112 to operate.

Referring to fig. 3 and fig. 4, the driving assembly 120 is provided with a transmission hole, and the transmission rod 1132 is inserted into the transmission hole, so that the transmission assembly 110 can move along the axial direction of the transmission rod 1132 relative to the driving assembly 120, and the driving assembly 120 is used for driving the transmission rod 1132 to rotate, so that the transmission wheel 1131 rotates around the axis of the transmission wheel 1131.

It can be appreciated that the transmission rod 1132 is disposed through the transmission hole, so that the driving assembly 120 is in transmission connection with the transmission rod 1132, so that the driving assembly 120 can drive the transmission rod 1132 to rotate, thereby driving the transmission wheel 1131 to rotate around the axis of the transmission wheel 1131, and then driving the whole transmission unit 113 to operate to drive the transmission unit 112 to operate. In addition, the transmission rod 1132 is disposed through the transmission hole, so that the transmission rod 1132 can move along the axial direction of the transmission rod 1132 relative to the transmission hole, and thus, the transmission assembly 110 can move along the axial direction of the transmission rod 1132 relative to the driving assembly 120.

In some embodiments, the driving wheel 1131 is fixedly connected with a plurality of driving rods 1132, the driving assembly 120 is provided with a plurality of driving holes, and the plurality of driving rods 1132 are correspondingly arranged through the plurality of driving holes one by one. In this manner, power provided by drive assembly 120 may be transferred to drive wheel 1131 via a plurality of drive rods 1132, which may reduce the risk of drive rods 1132 being damaged.

In addition, a plurality of transmission rods 1132 are arranged, the transmission rods 1132 are correspondingly arranged in the transmission holes in a penetrating mode, and under the condition that the cross sections of the transmission rods 1132 and the transmission holes are circular, the problem that the transmission power cannot be transmitted due to relative rotation of the transmission rods 1132 in the transmission holes can be avoided.

Of course, in other embodiments, the cross-sectional shape of the transmission rod 1132 may be configured as a triangle or other polygons such as a quadrilateral, and the cross-sectional shape of the transmission hole is adapted to the cross-sectional shape of the transmission rod 1132, so that the problem that the transmission power cannot be transmitted due to the relative rotation of the transmission rod 1132 in the transmission hole can be avoided.

In the transmission mechanism 100 of the present utility model, the transmission unit 112 is used for carrying a carrier disc loaded on a silicon wafer, and the driving assembly 120 can drive the transmission rod 1132 to rotate, so as to drive the transmission wheel 1131 to rotate around the axis of the transmission wheel 1131, and then the whole transmission unit 113 is operated to drive the transmission unit 112 to operate, so that the transmission unit 112 drives the carrier disc to move.

The hot wire assembly is arranged in parallel with the space right above the transmission unit 112, and the arrangement direction of the space right above the hot wire assembly and the transmission unit 112 is parallel to the axial direction of the transmission rod 1132.

It will be appreciated that the carrier plate may pass through the space directly above the carrier plate 112 when the carrier plate is transported by the transport unit 112, and the distance between the carrier plate and the hot wire assembly disposed on the transport unit 112 may be changed when the transport assembly 110 is operated to move relative to the drive assembly 120 in the axial direction of the transmission rod 1132, thereby adjusting the process deposition distance. In addition, in the transfer mechanism 100 of the present utility model, even in the course of driving the transfer assembly 110 by the driving assembly 120, the position of the transfer assembly 110 can be adjusted without performing a stop operation.

Referring to fig. 1 and 3, in some embodiments, the plating apparatus further includes a distance adjustment mechanism 200, where the distance adjustment mechanism 200 is in driving connection with the mounting frame 111, and the distance adjustment mechanism 200 can drive the mounting frame 111 toward or away from the driving assembly 120, so that the transmission assembly 110 is moved toward or away from the driving assembly 120, thereby adjusting the process deposition distance.

The distance adjusting mechanism 200 may be an electric screw, an air cylinder, or a hydraulic cylinder.

As shown in fig. 3, in some embodiments, the transmission unit 112 includes a plurality of rollers 1121 disposed at intervals, and the interval direction of the plurality of rollers 1121 is perpendicular to the axial direction of the transmission rod 1132.

It is understood that the driving assembly 120 may drive all the rollers 1121 to rotate through the transmission unit 113, so as to drive the carrier plate disposed on the rollers 1121 to move, and the spacing direction of the rollers 1121 is perpendicular to the axial direction of the transmission rod 1132, so that the transporting direction of the transmission unit 112 is perpendicular to the axial direction of the transmission rod 1132.

Further, the transmission unit 113 further includes a transmission shaft 1133, and a plurality of first transmission members 1134 disposed at intervals along an axial direction of the transmission shaft 1133, where the axial direction of the transmission shaft 1133 is parallel to the interval direction of the plurality of rollers 1121, the plurality of first transmission members 1134 are in driving fit with the plurality of rollers 1121 in a one-to-one correspondence, and the transmission wheel 1131 is in driving fit with one of the first transmission members 1134; when the driving wheel 1131 rotates around the axis thereof, the driving wheel 1133 is driven to rotate by the first driving member 1134, so that the plurality of first driving members 1134 respectively drive the plurality of rollers 1121 to rotate.

Further, a second driving member 11211 is fixed on each roller 1121, and the plurality of first driving members 1134 are in driving fit with the second driving members 11211 on the plurality of rollers 1121 in a one-to-one correspondence.

Specifically, the driving wheel 1131, the first driving member 1134 and the second driving member 11211 are bevel gears, and the driving wheel 1131 is meshed with one of the first driving members 1134, and the first driving member 1134 is meshed with the corresponding second driving member 11211.

More specifically, the axial direction of the first transmission member 1134 is perpendicular to the axial direction of the transmission wheel 1131, the axial direction of the second transmission member 11211 is perpendicular to the axial direction of the first transmission member 1134, and the second transmission member 11211 is coaxially disposed with the roller 1121, so, when the transmission wheel 1131 rotates, the first transmission member 1134 can be driven to rotate, thereby driving the transmission shaft 1133 to rotate, so that the transmission shaft 1133 drives all the first transmission members 1134 to rotate, and thus all the second transmission members 11211 drive the roller 1121 to rotate.

As shown in fig. 3 and 4, in some embodiments, the driving assembly 120 includes a driving source 121 and a transmission module 122 drivingly connected to the driving source 121, the transmission hole is formed on the transmission module 122, and the driving source 121 is used for driving the transmission module to rotate so as to drive the transmission rod 1132 to rotate.

Specifically, the drive source 121 is configured to provide power to the drive module 122, and the drive module 122 is configured to provide power to the drive rod 1132, and thus to the drive unit 113.

Referring to fig. 4 and 5, the transmission module 122 includes a magnetic fluid 1221 driven by the driving source 121 to rotate, and a connection flange 1222 fixedly connected to the magnetic fluid 1221, where the connection flange 1222 is provided with a transmission hole.

It will be appreciated that the driving source 121 is configured to drive the magnetic fluid 1221 to rotate, thereby driving the connection flange 1222 to rotate, and the connection flange 1222 can drive the driving wheel 1131 to rotate through the driving rod 1132 when rotating.

Further, the driving source 121 is a motor that transmits power to the magnetic fluid 1221 through the transmission belt 123, thereby rotating the magnetic fluid 1221.

In some of these embodiments, the transmission module 122 further includes a transition flange 1223, the transition flange 1223 being provided with mounting holes for the rotational arrangement of the connection flange 1222.

Specifically, the mounting holes extend through a transition flange 1223, and the attachment flange 1222 is rotatably disposed within the mounting holes, the transition flange 1223 being adapted to be secured to the cavity 300.

More specifically, referring to fig. 1, 2 and 5, the transmission assembly 110 is disposed inside the chamber 300, the driving source 121 is disposed outside the chamber 300, the magnetic fluid 1221 is disposed outside the chamber 300, the transition flange 1223 is fixed to an outer sidewall of the chamber 300 and used for supporting the connection flange 1222, and the transmission rod 1132 extends from the inside of the chamber 300 into the transmission hole of the connection flange 1222. In this way, the power of the driving source 121 outside the cavity 300 can be transferred to the transmission assembly 110 inside the cavity 300, and the driving assembly 120 outside the cavity 300 does not need to bear the high temperature environment inside the cavity 300, which is beneficial to prolonging the service life of the driving assembly 120.

Further, the exterior of the magnetic fluid 1221 is further sleeved with a sleeve 1225 fixedly connected with the transition flange 1223, and the sleeve 1225 can protect the magnetic fluid 1221.

Furthermore, the transition flange 1223 is provided with an assembling groove 12231 on a side close to the cavity 300, and a sealing ring 1224 is provided in the assembling groove 12231, and the sealing ring 1224 abuts against the outer wall of the cavity 300, so that the sealing effect can be improved.

Referring to fig. 2 and 6, in some embodiments, the transfer assembly 110 further includes a guide wheel set 114 secured to the mounting frame 111 and located above the transfer unit 112.

It will be appreciated that the guide wheel sets 114 serve to limit and guide the top of the carrier plate, thereby reducing the risk of the carrier plate tipping over.

Specifically, a vertical rod 115 is fixed on the mounting frame 111, a top plate 116 is fixed on the vertical rod 115, and a guiding wheel set 114 is arranged on the top plate 116.

Further, there are a plurality of the guide wheel sets 114, and the spacing direction of the plurality of guide wheel sets 114 is parallel to the transport direction of the transport unit 112.

In some embodiments, the guide wheel set 114 includes two guide wheels 1141 disposed at intervals, and the interval direction of the two guide wheels 1141 is parallel to the axial direction of the driving wheel 1131.

It will be appreciated that the bottom of the carrier tray may be supported by the transfer unit 112 and the top of the carrier tray may be interposed between the two guide wheels 1141, being restrained and guided by the two guide wheels 1141.

In the film plating equipment, the transmission unit 112 is used for bearing a carrying disc loaded on a silicon wafer, the driving assembly 120 can drive the transmission rod 1132 to rotate, so that the transmission wheel 1131 is driven to rotate around the axis of the transmission wheel 1131, and then the whole transmission unit 113 is operated to drive the transmission unit 112 to operate, so that the transmission unit 112 drives the carrying disc to move.

In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.

Claims

1. A transmission mechanism, comprising:

The transmission assembly comprises a mounting frame, a transmission unit arranged on the mounting frame and in transmission connection with the transmission unit, wherein the transmission unit comprises a transmission wheel rotationally arranged on the mounting frame, the axial direction of the transmission wheel is perpendicular to the transportation direction of the transmission unit, the transmission wheel drives the transmission unit to operate when rotating around the axis of the transmission wheel, and the transmission wheel is fixedly connected with a transmission rod which is arranged in parallel with the axis of the transmission wheel;

The driving assembly is provided with a transmission hole, the transmission rod penetrates through the transmission hole so that the transmission assembly can move relative to the driving assembly along the axial direction of the transmission rod, and the driving assembly is used for driving the transmission rod to rotate so that the transmission wheel rotates around the axis of the transmission wheel.

2. The transmission mechanism according to claim 1, wherein the driving wheel is fixedly connected with a plurality of driving rods, the driving assembly is provided with a plurality of driving holes, and the driving rods are correspondingly arranged in the plurality of driving holes in a penetrating manner.

3. The transmission mechanism according to claim 1, wherein the transmission unit includes a plurality of rollers arranged at intervals, the interval direction of the plurality of rollers being perpendicular to the axial direction of the transmission rod;

4. A transmission mechanism according to claim 3, wherein each roller is fixed with a second transmission member, and a plurality of the first transmission members are in one-to-one transmission engagement with the second transmission members on a plurality of the rollers.

5. The transmission mechanism according to claim 4, wherein the transmission wheel, the first transmission member, and the second transmission member are bevel gears, an axial direction of the first transmission member is perpendicular to an axial direction of the transmission wheel, an axial direction of the second transmission member is perpendicular to an axial direction of the first transmission member, and the second transmission member is coaxially disposed with the roller.

6. The transmission mechanism according to claim 1, wherein the driving assembly comprises a driving source and a transmission module in driving connection with the driving source, the transmission hole is formed in the transmission module, and the driving source is used for driving the transmission module to rotate so as to drive the transmission rod to rotate.

7. The transmission mechanism according to claim 6, wherein the transmission module includes a magnetic fluid driven to rotate by the driving source, and a connection flange fixedly connected to the magnetic fluid, the connection flange being provided with the transmission hole.

8. The transmission mechanism of claim 7, wherein the transmission module further comprises a transition flange provided with mounting holes for rotational placement of the connection flange.

9. The transport mechanism of claim 1, wherein the transport assembly further comprises a guide wheel set secured to the mounting frame above the transport unit;

10. A coating apparatus, characterized by comprising:

The transport mechanism according to any of the preceding claims 1 to 9, the transport unit forming a space above for the carrier plate to pass;

The hot wire assembly is arranged in parallel with the space, and the arrangement direction of the hot wire assembly and the space is parallel to the axial direction of the transmission rod.