CN221460493U - Structure of graphite boat sheet - Google Patents
Structure of graphite boat sheet Download PDFInfo
- Publication number
- CN221460493U CN221460493U CN202322972168.6U CN202322972168U CN221460493U CN 221460493 U CN221460493 U CN 221460493U CN 202322972168 U CN202322972168 U CN 202322972168U CN 221460493 U CN221460493 U CN 221460493U
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- Prior art keywords
- boat
- graphite boat
- graphite
- clamping point
- clamping
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 121
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 121
- 239000010439 graphite Substances 0.000 title claims abstract description 121
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 38
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 38
- 239000010703 silicon Substances 0.000 claims abstract description 38
- 239000000919 ceramic Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 17
- 230000005684 electric field Effects 0.000 abstract description 5
- 238000004080 punching Methods 0.000 abstract description 4
- 239000012528 membrane Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 42
- 238000007747 plating Methods 0.000 description 6
- 238000000576 coating method Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Photovoltaic Devices (AREA)
Abstract
The utility model relates to the technical field of positioning equipment, in particular to a graphite boat sheet structure, two groups of graphite boat graphite blocks, wherein a plurality of graphite boat sheets are arranged in parallel between the two groups of graphite boat graphite blocks, boat holes are formed in the outer wall of one side of each graphite boat sheet, the boat holes are square holes, four clamping points are formed in the outer wall of one side of each graphite boat sheet, five clamping points are formed in the outer wall of one side of each graphite boat sheet, and the four clamping points and the five clamping points are respectively arranged at the outer ends of two right-angle sides of each boat hole. This graphite boat piece through addding the stuck point, can carry out the change of stuck point at any time, need not to fix a position the punching, practices thrift the cost, ensures the normal production of production line, through reducing graphite boat inside casing size, increases graphite boat and silicon chip area of contact, reduces the probability that the boat frame seal takes place, promotes solar cell product high-quality rate, reduction in production cost, through moving down with graphite boat frame, comes balanced electric field, improves membrane color homogeneity.
Description
Technical Field
The utility model relates to the technical field of positioning equipment, in particular to a graphite boat sheet structure.
Background
Photovoltaic power generation is an important technology for converting solar energy into electric energy, and is widely used as a clean energy source at present.
At present, a graphite boat is made of high-purity graphite in the solar cell coating process, and the graphite boat has the excellent characteristics of high temperature resistance, corrosion resistance, difficult deformation, high conductivity and the like, and is very suitable for being used as a carrier under the high-temperature condition of 400-600 ℃. In the manufacturing process of the solar cell, a fixed clamping point is arranged on a graphite boat unit boat piece, a silicon wafer is fixed, and then the graphite boat is placed into a furnace tube for coating, so that the deposition of a passivation film on the front surface or the back surface of the silicon wafer is realized.
Firstly, the common clamping points in the industry are designed into 3 supporting silicon wafer point designs, the design can fix the silicon wafer when dealing with square silicon wafers with side length dimensions such as 15Xmm (X is 1-9 unequal and is the same as below), 16Xmm,18Xmm and the like, but when dealing with rectangular wafers such as 18Xmm X19 Xmm,18Xmm X21 Xmm and the like, three clamping points are fixed in practical application, deformation occurs due to high Wen Guipian, so that the silicon wafer cannot be well fixed, in order to avoid the problem, the problem can be solved by adding the clamping points, and the problem needs to re-punch the original boat wafer so as to facilitate the installation of the clamping points; therefore, the graphite boat sheets are required to be all sent back to manufacturers for redesign and perforating, the graphite boat is insufficient in the redesign and perforating process, the production is seriously affected, and meanwhile, the damage to the graphite boat sheets is easily caused.
Secondly, two boat sheets at the outermost side of the graphite boat are designed in a full-area mode, the boat sheets at the inner side are designed in a hollowed-out mode, namely, a boat frame is designed, the hollowed-out part is called a boat hole, the area of the boat hole of the graphite boat in the industry is large at present, and especially for 21Xmm square or 18Xmm 21Xmm large-size silicon wafers, the bad proportion of the appearance of a solar cell or the hole printing of an electroluminescent lower boat can be greatly increased, the high-quality yield of the solar cell is affected, and the manufacturing cost is increased.
Disclosure of Invention
Aiming at the problems existing in the prior art, the utility model aims to provide a graphite boat sheet structure, which is characterized in that through reserving a clamping point hole site, the clamping point is replaced at any time so as to adapt to the requirements of silicon wafers with different sizes, positioning and punching are not needed, the time of redesigning, punching and the like is saved, and the normal production of a production line is ensured; the contact area of the graphite boat and the silicon wafer is increased by reducing the size of the boat holes of the graphite boat, the probability of occurrence of the boat hole mark is reduced, the high quality rate of solar cell products is improved, the production cost is reduced, and the electric field is balanced and the uniformity of the film color is improved by downwards moving the boat holes of the graphite boat.
In order to solve the problems, the utility model adopts the following technical scheme:
A graphite boat sheet structure, comprising:
The graphite boat comprises two groups of graphite boat graphite blocks, wherein a plurality of graphite boat sheets are arranged in parallel between the two groups of graphite boat graphite blocks, boat holes are formed in the outer wall of one side of each graphite boat sheet, the boat holes are square holes, four clamping points are formed in the outer wall of one side of each graphite boat sheet, five clamping points are formed in the outer wall of one side of each graphite boat sheet, and the four clamping points and the five clamping points are respectively arranged at the outer ends of two right-angle sides of each boat hole;
and the fourth clamping point and the fifth clamping point are respectively matched with a graphite filling block or a supporting silicon wafer block.
As a further improvement of the utility model, a plurality of through holes are formed on the outer wall of one side of the graphite boat piece.
As a further improvement of the utility model, a plurality of through holes corresponding to each other of the graphite boat sheets are respectively connected through graphite boat ceramic rings.
As a further improvement of the utility model, the graphite boat piece is also provided with a first clamping point, a second clamping point and a third clamping point;
The first clamping point and the second clamping point are respectively positioned at the inner ends of right-angle edges corresponding to the fourth clamping point and the fifth clamping point;
and the fourth clamping point and the third clamping point are respectively arranged at the outer sides of two opposite right-angle sides of the boat hole.
As a further improvement of the utility model, the boat holes are square with sides of 145 mm.
As a further improvement of the utility model, the top angle of the boat hole is an arc angle.
Compared with the prior art, the utility model has the following advantages:
according to the graphite boat sheet structure, the fourth clamping point and the fifth clamping point are additionally arranged, so that positioning and punching are not required to be sent back to a manufacturer again when the silicon wafers with the sizes of 18X 19X and 18X 21X are produced, the cost is greatly saved, and the normal production of a production line is ensured;
When the graphite boat piece structure needs to produce a silicon wafer with the conventional size of 18X or 18X, filling the open pore positions with the number four clamping points and the number five clamping points by filling graphite blocks with the same thickness as the boat piece, so that air flow marks left by open pores in the process can be effectively avoided, and poor products can not be generated;
According to the graphite boat piece structure, the size of the boat holes of the graphite boat is reduced, so that the pressure of air flow on a silicon wafer during film plating is reduced, the contact area of the graphite boat and the silicon wafer is increased, the probability of occurrence of boat hole printing is reduced, the high-quality rate of solar cell products is improved, and the production cost is reduced.
Drawings
FIG. 1 is a top view of a graphite boat sheet structure of the present utility model.
Fig. 2 is a schematic structural view of a graphite boat sheet according to the present utility model.
FIG. 3 is a schematic view of a support wafer block of the present utility model.
Fig. 4 is a schematic view of a filled graphite block of the present utility model.
Reference numerals illustrate: 1. graphite boat graphite blocks; 2. graphite boat sheets; 3. a graphite boat ceramic ring; 4. 145mm boat holes; 5. a fourth stuck point; 6. fifth stuck point; 7. a first stuck point; 8. a second stuck point; 9. a third stuck point; 10. supporting a silicon wafer block; 11. filling graphite blocks.
Detailed Description
The utility model will be further described with reference to examples of embodiments in the accompanying drawings, in which:
As shown in fig. 1 to 4, the graphite boat sheet of the present utility model comprises: the graphite boat comprises a plurality of groups of graphite boat sheets 2, wherein a plurality of graphite boat sheets 2 are fixedly connected between the outer walls of one sides of two groups of graphite boat graphite blocks 1, square boat holes 4 with the side length of 145mm are formed in the outer walls of one sides of the graphite boat sheets 2, and the top angles of the boat holes 4 are arc angles. A fourth clamping point 5 is formed on the outer wall of one side of the graphite boat pieces 2, and a fifth clamping point 6 is formed on the outer wall of one side of the graphite boat pieces 2. The fourth clamping point 5 and the fifth clamping point 6 are respectively arranged at the outer ends of the two intersecting right-angle sides of the boat hole 4, and in actual working, the fourth clamping point 5 and the fifth clamping point 6 can be filled with the supporting silicon wafer blocks 10 or the graphite blocks 11 according to working requirements.
In the specific embodiment of the utility model, a graphite boat structure is formed by a graphite boat graphite block 1, a plurality of graphite boat sheets 2, a graphite boat ceramic ring 3 and electrode blocks, and has no difference with the external surface of the graphite boat structure in industry, 5 holes are reserved on the graphite boat sheets 2 in advance, and the original graphite boat structure is respectively: first stuck point 7, second stuck point 8, third stuck point 9 and newly added: fourth stuck point 5 and fifth stuck point 6. The first clamping point 7 and the second clamping point 8 are respectively positioned at the inner ends of right-angle edges corresponding to the fourth clamping point 5 and the fifth clamping point 6; and the fourth clamping point 5 and the third clamping point 9 are respectively arranged at the outer sides of two opposite right-angle sides of the boat hole 4.
Normally using the first clamping point 7, the second clamping point 8 and the third clamping point 9, normally installing the supporting silicon wafer block 10, and constructing supporting seats symmetrically arranged on two sides of the axial direction of the supporting silicon wafer block 10, wherein the inner side of the supporting seat is a conical surface, and an included angle of 30 degrees is formed between the conical surface and the middle cylindrical part of the supporting silicon wafer block 10.
The clamping points 5 and 6 are filled with the same thickness as the silicon wafer, when 5 clamping points are needed, the filling graphite blocks 11 of the four clamping points 5 and 6 are removed, then the supporting silicon wafer blocks 10 which are the same as the clamping points 7, 8 and 9 are installed, and after the holes are drilled, the graphite points are needed to be filled, otherwise, the air current mess is caused, the silicon wafer coating effect is affected, the size of 145mm boat holes 4 is reduced, the 145mm boat holes 4 move downwards, the distance between the 145mm boat holes 4 (the point which is positioned below in the two points above) is 8.4mm away from the upper edge of the graphite boat 2, the distance between the point which is positioned above in the two points above) is 8.4mm, the contact surface of the silicon wafer is increased, the electric field is balanced, the uniformity of the film coating is improved, the 145mm holes 4 move downwards to the upper edge and lower edge of the silicon wafer on the original basis, the symmetrical boat is reduced, the air current uniformity of the 145mm boat is improved, the air current uniformity of the silicon wafer can be generated, and the air current uniformity of the wafer can be improved, and the film coating effect can be improved, and the air current uniformity can be generated by reducing the boat size of the wafer film can be achieved by the wafer.
Specifically, a plurality of through holes are formed in the outer wall of one side of each of the graphite boat pieces 2.
In this embodiment, the graphite boat ceramic ring 3 is provided through the through hole, thereby completing the mounting and fixing operation.
Specifically, the through holes corresponding to the graphite boat sheets 2 are respectively connected through the graphite boat ceramic rings 3.
In this embodiment, the mounting and fixing is accomplished by the graphite boat ceramic ring 3 without affecting the production.
Specifically, a first clamping point 7 is formed on the outer wall of one side of each graphite boat piece 2.
In this embodiment, the existing basic production requirements are completed through the first clip point 7, the second clip point 8 and the third clip point 9.
Specifically, the outer walls of one sides of the graphite boat pieces 2 are provided with second clamping points 8.
In this embodiment, the existing basic production requirements are completed through the first clip point 7, the second clip point 8 and the third clip point 9.
Specifically, no. three clamping points 9 are respectively arranged on the outer walls of one sides of the graphite boat pieces 2.
In this embodiment, the existing basic production requirements are completed through the first clip point 7, the second clip point 8 and the third clip point 9.
Working principle: the graphite boat is composed of a graphite boat graphite block 1, a plurality of graphite boat sheets 2, a graphite boat ceramic ring 3 and an electrode block, and has no difference with the external surface of the graphite boat in the industry, and 5 holes are reserved in advance on the boat sheets, which are respectively original: first stuck point 7, second stuck point 8, third stuck point 9 and newly added: the fourth clamping point 5 and the fifth clamping point 6 are normally used, the first clamping point 7, the second clamping point 8 and the third clamping point 9 are normally used, the supporting silicon wafer block 10 is normally installed, the fourth clamping point 5 and the fifth clamping point 6 are used for filling the same thickness as a boat piece, the filling graphite block 11 of the same material is filled, when 5 clamping points are needed, the filling graphite block 11 of the fourth clamping point 5 and the fifth clamping point 6 is removed, then the supporting silicon wafer block 10 which is the same as the first clamping point 7, the second clamping point 8 and the third clamping point 9 is installed, and the supporting silicon wafer block 10 which is the same as the first clamping point 7, the second clamping point 8 and the third clamping point 9 is needed to be filled after holes are drilled, otherwise, air current is disordered, the silicon wafer coating effect is affected, the size of the 145mm boat holes 4 is reduced and the 145mm boat holes 4 are moved downwards, the 145mm boat holes 4 (the points located below in the two points above) in the industry are moved to the position 8.4mm away from the upper edge of the graphite boat piece 2 on the basis of 8.4mm away from the upper edge of the graphite boat piece 2, the contact surface of the silicon wafer is increased, the electric field is balanced, the uniformity of the film plating is improved, the 145mm boat holes 4 are moved downwards to the symmetrical positions of the upper edge and the lower edge of the boat piece on the basis of the original, the boat holes in the industry are reduced from 157mm to 145mm (the graphite boat used in 182mm silicon wafer size), the pressure of air flow in the film plating on the silicon wafer can be reduced, the contact surface is larger, the electric field is beneficial to acting on the silicon wafer, the generation of boat marks can be improved, and the uniformity of the film plating of the silicon wafer can be improved.
According to the graphite boat piece, through fixation of multiple clamping points, the winding plating of air flow on the silicon wafer during film plating is reduced, the contact area of a graphite boat and the silicon wafer is stabilized, the probability of occurrence of boat hole printing is reduced, the high-quality rate of solar cell products is improved, and the production cost is reduced.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical solution and the modified concept thereof, within the scope of the present utility model.
Claims (6)
1. A graphite boat sheet structure, comprising:
the graphite boat comprises two groups of graphite boat graphite blocks (1), a plurality of graphite boat sheets (2) are arranged between the two groups of graphite boat graphite blocks (1) in parallel, boat holes (4) are formed in the outer wall of one side of each graphite boat sheet (2), the boat holes (4) are square holes, four clamping points (5) are formed in the outer wall of one side of each graphite boat sheet (2), five clamping points (6) are formed in the outer wall of one side of each graphite boat sheet (2), and the four clamping points (5) and the five clamping points (6) are respectively arranged at the outer ends of two right-angle sides of each boat hole (4);
And the fourth clamping point (5) and the fifth clamping point (6) are respectively matched with a graphite filling block (11) or a supporting silicon wafer block (10).
2. The graphite boat sheet structure as set forth in claim 1, wherein: a plurality of through holes are formed in the outer wall of one side of the graphite boat piece (2).
3. The graphite boat sheet structure as set forth in claim 2, wherein: the through holes corresponding to the graphite boat sheets (2) are respectively connected through the graphite boat ceramic rings (3).
4. The graphite boat sheet structure as set forth in claim 1, wherein: a first clamping point (7), a second clamping point (8) and a third clamping point (9) are also arranged on the graphite boat sheet (2);
The first clamping point (7) and the second clamping point (8) are respectively positioned at the inner ends of right-angle sides corresponding to the fourth clamping point (5) and the fifth clamping point (6);
The fourth clamping point (5) and the third clamping point (9) are respectively arranged on the outer sides of two opposite right-angle sides of the boat hole (4).
5. The graphite boat sheet structure as set forth in claim 1, wherein: the boat hole (4) is square with the side length of 145 mm.
6. The graphite boat sheet structure as set forth in claim 1, wherein: the top angle of the boat hole (4) is an arc angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322972168.6U CN221460493U (en) | 2023-11-03 | 2023-11-03 | Structure of graphite boat sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322972168.6U CN221460493U (en) | 2023-11-03 | 2023-11-03 | Structure of graphite boat sheet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221460493U true CN221460493U (en) | 2024-08-02 |
Family
ID=92370133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322972168.6U Active CN221460493U (en) | 2023-11-03 | 2023-11-03 | Structure of graphite boat sheet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221460493U (en) |
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2023
- 2023-11-03 CN CN202322972168.6U patent/CN221460493U/en active Active
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