CN221280891U - Highly toxic tail gas adsorbent testing device - Google Patents
Highly toxic tail gas adsorbent testing device Download PDFInfo
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- CN221280891U CN221280891U CN202323162764.4U CN202323162764U CN221280891U CN 221280891 U CN221280891 U CN 221280891U CN 202323162764 U CN202323162764 U CN 202323162764U CN 221280891 U CN221280891 U CN 221280891U
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- highly toxic
- gas
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- tail gas
- testing
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- 239000003463 adsorbent Substances 0.000 title claims abstract description 46
- 238000012360 testing method Methods 0.000 title claims abstract description 34
- 231100000331 toxic Toxicity 0.000 title claims abstract description 21
- 230000002588 toxic effect Effects 0.000 title claims abstract description 21
- 238000001179 sorption measurement Methods 0.000 claims abstract description 50
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000005922 Phosphane Substances 0.000 claims abstract description 18
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910000064 phosphane Inorganic materials 0.000 claims abstract description 18
- 239000007789 gas Substances 0.000 claims description 89
- 238000001514 detection method Methods 0.000 claims description 41
- 239000010935 stainless steel Substances 0.000 claims description 25
- 229910001220 stainless steel Inorganic materials 0.000 claims description 25
- 239000002341 toxic gas Substances 0.000 claims description 24
- 229910000831 Steel Inorganic materials 0.000 claims description 21
- 239000010959 steel Substances 0.000 claims description 21
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 19
- 239000000203 mixture Substances 0.000 claims description 17
- 230000006837 decompression Effects 0.000 claims description 13
- 229910052734 helium Inorganic materials 0.000 claims description 12
- 239000001307 helium Substances 0.000 claims description 12
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 12
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 7
- 239000003517 fume Substances 0.000 claims description 5
- 229910000975 Carbon steel Inorganic materials 0.000 claims description 3
- JJLJMEJHUUYSSY-UHFFFAOYSA-L Copper hydroxide Chemical class [OH-].[OH-].[Cu+2] JJLJMEJHUUYSSY-UHFFFAOYSA-L 0.000 claims description 3
- FHIJMQWMMZEFBL-HLAPJUAOSA-N DISS Natural products COc1cc(C=CC(=O)OC[C@H]2O[C@H](O[C@]3(CO)O[C@H](CO)[C@@H](O)[C@@H]3OC(=O)C=Cc3cc(OC)c(O)c(OC)c3)[C@H](O)[C@@H](O)[C@@H]2O)cc(OC)c1O FHIJMQWMMZEFBL-HLAPJUAOSA-N 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 239000010962 carbon steel Substances 0.000 claims description 3
- 239000002594 sorbent Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 11
- 238000011156 evaluation Methods 0.000 abstract description 6
- 238000007689 inspection Methods 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000012216 screening Methods 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000004377 microelectronic Methods 0.000 description 2
- 238000003908 quality control method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000012372 quality testing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011076 safety test Methods 0.000 description 1
- PPMWWXLUCOODDK-UHFFFAOYSA-N tetrafluorogermane Chemical compound F[Ge](F)(F)F PPMWWXLUCOODDK-UHFFFAOYSA-N 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
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- Sampling And Sample Adjustment (AREA)
Abstract
The utility model belongs to the technical field of tail gas treatment, and provides a testing device for a highly toxic tail gas adsorbent. The technical problems that in the prior art, when the adsorption effect of the adsorbent is evaluated, the device is complex to connect, the operation difficulty is high, and the evaluation effect of the adsorbent is reduced are solved. Compared with the prior art, the utility model has the following beneficial effects: the flow of the multiple groups of adsorbents and the flow of the gas can be changed during the inspection, the residual phosphane and arsine in the air are indicated by the indicator, the quick screening of the high-risk chemical gas adsorbents such as the phosphane and the arsine can be realized, the judgment of the adsorption effect and the adsorption quantity evaluation of the adsorbents can be realized under the control of the controllable flow, and the test safety can be ensured to the greatest extent.
Description
Technical Field
The utility model belongs to the technical field of tail gas treatment, and particularly relates to a testing device for a highly toxic tail gas adsorbent.
Background
The electron gas is widely applied to high-tech industries such as semiconductors, microelectronics and related solar cells, and is an indispensable raw material for the process steps such as film deposition, etching, doping, passivation, cleaning and the like. The common electron special gas has more than 100 percent, and most of the electron special gas has high-risk properties such as extremely toxicity, inflammability, explosiveness and the like, such as phosphane and arsine; nitrogen trifluoride, germanium tetrafluoride and the like are corrosive and cannot be directly discharged.
In the actual use process of each process, the actual gas utilization rate is only about 15 percent, and a large amount of toxic and harmful tail gas is generated. Semiconductor and microelectronic technologies are evolving towards higher performance, higher integration levels, and the development of safe, portable exhaust gas treatment devices is critical, which requires a more rapid and accurate assessment of the actual effectiveness of the adsorbent.
The highly toxic inflammable and explosive tail gas needs to circulate in a vacuum environment, and generally needs to be matched with an analysis instrument to evaluate the adsorption performance, so that the operation difficulty is high. Therefore, the design of a high-vacuum and simple type adsorbent evaluation device is important.
Disclosure of utility model
The utility model aims to provide a testing device for a highly toxic tail gas adsorbent, and aims to solve the technical problems that in the prior art, when the adsorption effect of the adsorbent is evaluated, the device is complex to connect, the operation difficulty is high and the evaluation effect of the adsorbent is reduced.
The utility model discloses a testing device for a highly toxic tail gas adsorbent, which comprises a mixed gas steel cylinder, a vacuum holding component, an adsorption component, an indication component and a portable highly toxic gas detection equipment main body, wherein the gas outlet end of the mixed gas steel cylinder is connected with the adsorption component, the adsorption component is connected with the vacuum holding component, the gas outlet end of the adsorption component is connected with the indication component, and the gas outlet end of the indication component is connected with the portable highly toxic gas detection equipment main body.
The technical scheme is as follows: the mixed gas steel cylinder is made of carbon steel or aluminum, the interface of the mixed gas steel cylinder is DISS standard, the mixed gas steel cylinder is connected with the adsorption component through a stainless steel pipeline, and a first diaphragm valve is arranged on the stainless steel pipeline.
The technical scheme is as follows: the adsorption component comprises a stainless steel adsorption column and a vacuum mechanical meter, wherein the stainless steel adsorption column is connected with a gas mixture steel cylinder, the stainless steel adsorption column is connected with the vacuum mechanical meter, and the middle interface can be one of a VCR or a clamping sleeve.
The technical scheme is as follows: the vacuum maintaining assembly is communicated with a nitrogen inlet pipeline, a helium inlet pipeline, an evacuating pipeline and an evacuating pipeline, and the nitrogen inlet pipeline, the helium inlet pipeline, the evacuating pipeline and the evacuating pipeline are all communicated with the stainless steel adsorption column.
The technical scheme is as follows: the nitrogen gas inlet pipeline and the helium gas inlet pipeline are both provided with decompression meters, the high pressure ends of the decompression meters are close to the stainless steel adsorption columns, and the low pressure ends of the decompression meters are close to the vacuum maintaining assembly.
The technical scheme is as follows: and the evacuation pipeline are both provided with second diaphragm valves.
The technical scheme is as follows: the indication assembly comprises three groups of detection pipelines, the three groups of detection pipelines are connected in parallel and are connected with the vacuum mechanical meter, and the air outlet ends of the three groups of detection pipelines are connected with the main body of the portable highly toxic gas detection equipment.
The technical scheme is as follows: and a third diaphragm valve, a mass flowmeter, a tail gas indicator and a fourth diaphragm valve are sequentially arranged on the detection pipeline along the gas flow direction.
The technical scheme is as follows: the tail gas indicator is prepared from modified copper hydroxide, has the function of indicating phosphane and arsine, and is placed in a visible pipe connected with a detection pipeline.
The technical scheme is as follows: the portable highly toxic gas detection device main body is placed in a negative pressure fume hood.
Compared with the prior art, the utility model has the following beneficial effects:
1. The flow of the multiple groups of adsorbents and the flow of the gas can be changed during the inspection, the residual phosphane and arsine in the air are indicated by the indicator, the quick screening of the high-risk chemical gas adsorbents such as the phosphane and the arsine can be realized, the judgment of the adsorption effect and the adsorption quantity evaluation of the adsorbents can be realized under the control of the controllable flow, and the test safety can be ensured to the greatest extent.
2. The adsorption effect of the adsorbent on the toxic gas is detected through univariate control, the detection accuracy is improved, the effect of the adsorbent is convenient to judge, and the method is not only suitable for testing the adsorbent with the content of lower than 5% of phosphane or arsine tail gas, but also is widely suitable for testing the adsorbents of other highly toxic gases, and the application range is wide.
Drawings
Fig. 1 is a schematic diagram of the overall structure of the present utility model.
In the accompanying drawings: 1. a gas mixture steel cylinder; 2. a first diaphragm valve; 3. stainless steel adsorption column; 4. a vacuum mechanical gauge; 5. a nitrogen inlet pipeline; 6. a helium inlet line; 7. evacuating the pipeline; 8. a vent line; 9. a decompression meter; 10. a second diaphragm valve; 11. detecting a pipeline; 12. a third diaphragm valve; 13. a mass flowmeter; 14. an exhaust gas indicator; 15. a fourth diaphragm valve; 16. a portable highly toxic gas detection device body; 17. a negative pressure fume hood; 18. a vacuum hold assembly; 19. an adsorption assembly; 20. an indication assembly.
Detailed Description
The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
Specific implementations of the utility model are described in detail below in connection with specific embodiments.
As shown in fig. 1, the testing device for the highly toxic tail gas adsorbent provided by the utility model comprises a gas mixture steel bottle 1, a vacuum holding assembly 18, an adsorption assembly 19, an indication assembly 20 and a portable highly toxic gas detection equipment main body 16, wherein the gas outlet end of the gas mixture steel bottle 1 is connected with the adsorption assembly 19, the gas mixture steel bottle 1 is made of carbon steel or aluminum, the interface of the gas mixture steel bottle 1 is DISS standard, the gas mixture steel bottle 1 is connected with the adsorption assembly 19 through a stainless steel pipeline and a first diaphragm valve 2 is arranged on the stainless steel pipeline, the adsorption assembly 19 is connected with the vacuum holding assembly 18, the gas outlet end of the adsorption assembly 19 is connected with the indication assembly 20, and the gas outlet end of the indication assembly 20 is connected with the portable highly toxic gas detection equipment main body 16.
In practical application, nitrogen or helium is conveyed into the system through the vacuum holding assembly 18, thereby residual gas in the system is replaced, then gas in the gas mixture steel bottle 1 enters the adsorption assembly 19 through the stainless steel tube, phosphane and arsine are adsorbed through the adsorbent in the adsorption assembly 19, after the phosphane and arsine are adsorbed, the rest air enters the indicating assembly 20, the color change of the indicating assembly 20 and the time reaction of the content of the phosphane and arsine in the rest air are carried out, afterwards the air enters the portable highly toxic gas detection equipment main body 16 for detection, when the content of the phosphane and arsine reaches the set threshold value of the portable highly toxic gas detection equipment main body 16, the toxic gas is rapidly discharged, whether the air after adsorption contains the phosphane and arsine or not can be warned by the inspector through the indicating assembly 20 and the portable highly toxic gas detection equipment main body 16, the flow of a plurality of groups of adsorbents and the gas can be changed during inspection, the residual phosphane and arsine in the air can be indicated through the tail gas indicator 14, the high-quality control of the phosphane and arsine can be realized, the wide-quality control of the adsorbent can be realized, the wide-quality testing effect of the adsorbent can be realized under the condition that the adsorbent is not tested, the selective test of the adsorbent is easy, the selective effect of the adsorbent is applied to the most, the selective test device is applied to the high-quality, the safety test is realized, and the safety is only can be applied to the test, and the test of the safety is applied to the test of the adsorbent, and the safety is suitable for the test, and the quality of the test of the quality can be easily, and the quality can be easily tested, and the quality can be easily and the quality and the quality can be easily tested.
As shown in fig. 1, in order to provide a testing device for a highly toxic tail gas adsorbent, an adsorption component 19 comprises a stainless steel adsorption column 3 and a vacuum mechanical table 4, wherein the volume of the stainless steel adsorption column 3 is 0.1L, the stainless steel adsorption column 3 is connected with a gas mixture steel cylinder 1, the stainless steel adsorption column 3 is connected with the vacuum mechanical table 4, and an intermediate interface can be one of a VCR or a card sleeve.
Specifically, the vacuum maintaining assembly 18 is communicated with a nitrogen inlet pipeline 5, a helium inlet pipeline 6, an evacuating pipeline 7 and an evacuating pipeline 8, and the nitrogen inlet pipeline 5, the helium inlet pipeline 6, the evacuating pipeline 7 and the evacuating pipeline 8 are all communicated with the stainless steel adsorption column 3.
Specifically, the nitrogen gas inlet pipeline 5 and the helium gas inlet pipeline 6 are respectively provided with a decompression meter 9, the high-pressure end of the decompression meter 9 is close to the stainless steel adsorption column 3, and the low-pressure end of the decompression meter 9 is close to the vacuum maintaining assembly 18.
Specifically, the evacuation line 7 and the vent line 8 are each provided with a second diaphragm valve 10.
Specifically, the indication assembly 20 includes three groups of detection pipelines 11, the three groups of detection pipelines 11 are connected in parallel, the three groups of detection pipelines 11 are all connected with the vacuum mechanical meter 4, and the air outlet ends of the three groups of detection pipelines 11 are all connected with the portable highly toxic gas detection equipment main body 16.
Specifically, a third diaphragm valve 12, a mass flowmeter 13, a tail gas indicator 14 and a fourth diaphragm valve 15 are sequentially arranged on the detection pipeline 11 along the gas flow direction, the mass flowmeter 13 has the maximum controllable flow of 5L/min, and the controllable flow of 0.1-5L/min.
Specifically, the tail gas indicator 14 is prepared from modified copper hydroxide, has the function of indicating phosphane and arsine, and is placed in a visible tube connected with the detection pipeline 11.
In practical application, when testing the 5% phosphine mixture simulated tail gas adsorbent, three adsorbents can be replaced in the adsorption assembly 19 at one time, after all components are connected, testing is carried out, residual air in the system is required to be discharged before testing, first the second diaphragm valve 10 on the evacuation pipeline 7 is opened, then the first diaphragm valve 2 and the third diaphragm valve 12 on the multiple groups of detection pipelines 11 are sequentially opened, after 10 seconds of holding, the second diaphragm valve 10 on the evacuation pipeline 7 is closed, then the valve on the nitrogen gas inlet pipeline 5 or the valve on the nitrogen gas inlet pipeline 6 is opened, the pressure of the decompression table 9 on the corresponding pipeline is adjusted to the pressure of the outlet side 14psi, after 5 seconds of holding, the valve is closed again, after 15 seconds of holding, the second diaphragm valve 10 on the evacuation pipeline 7 is closed, the first diaphragm valve 2 and the third diaphragm valve 12 are closed, at this time, residual air in the system is discharged, pressure is controlled through the decompression table 9, purge gas is provided through the high purity helium gas pipeline, and vacuum holding is realized by vacuum pump and tail gas discharging;
The valve on the gas mixture steel cylinder 1 is opened, the mixed gas enters the stainless steel tube, the first diaphragm valve 2 is opened, the decompression meter 9 is adjusted to 14psi, the third diaphragm valve 12 and the fourth diaphragm valve 15 on one group of detection pipelines 11 are opened, the mass flowmeter 13 on the corresponding detection pipeline 11 is set to be 1L/min, then the time for the whole color change of the tail gas indicator 14 on the corresponding detection pipeline 11 is recorded, if the tail gas indicator 14 does not change color after 300min, the flow of the mass flowmeter 13 is adjusted to be 2L/min at the moment, the tail gas indicator 14 is replaced for retesting, the flow of the mass flowmeter 13 is gradually increased to 5L/min, the tail gas adsorbent can be rapidly screened according to the color change degree, the flow and the time of the tail gas indicator 14, the residual phosphane, arsine in the air can be rapidly screened through the tail gas indicator 14, the judgment of the adsorption effect of the adsorbent can be maximally realized under the control of the controllable flow, the adsorption quantity evaluation can be ensured, and the test safety can be ensured.
In one example of the present embodiment, the mass flowmeter 13 is selected from Horiba S600.
As shown in fig. 1, in order to provide a testing device for a highly toxic tail gas adsorbent, a main body 16 of a portable highly toxic gas detecting device is placed in a negative pressure fume hood 17.
In practical application, the tail gas detected by the tail gas indicator 14 enters the portable highly toxic gas detection equipment main body 16, and the primary alarm threshold value of the portable highly toxic gas detection equipment main body 16 is 10ppb, so that when the toxic gas threshold value in the tail gas reaches a set threshold value, the low-concentration toxic gas can be rapidly discharged through the negative pressure fume hood 17, and the use safety degree of the device is improved.
In one example of this embodiment, the portable highly toxic gas detection device body 16 is dedicated to phosphane arsine, model number DRAGER PAC8000.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (10)
1. The utility model provides a highly toxic tail gas adsorbent testing arrangement, includes gas mixture steel bottle (1), vacuum hold subassembly (18), adsorption component (19), instruct subassembly (20) and portable highly toxic gas detection equipment main part (16), its characterized in that, gas mixture steel bottle (1) end of giving vent to anger is connected with adsorption component (19), and adsorption component (19) are connected with vacuum hold subassembly (18), adsorption component (19) end of giving vent to anger is connected with instruct subassembly (20), instruct subassembly (20) end of giving vent to anger to be connected with portable highly toxic gas detection equipment main part (16).
2. The testing device for the highly toxic tail gas adsorbent according to claim 1, wherein the gas mixture steel cylinder (1) is made of carbon steel or aluminum, the interface of the gas mixture steel cylinder is a DISS standard, the gas mixture steel cylinder (1) is connected with the adsorption component (19) through a stainless steel pipeline, and the stainless steel pipeline is provided with the first diaphragm valve (2).
3. The device for testing the highly toxic tail gas adsorbent according to claim 2, wherein the adsorption assembly (19) comprises a stainless steel adsorption column (3) and a vacuum mechanical meter (4), the stainless steel adsorption column (3) is connected with the gas mixture steel cylinder (1), the stainless steel adsorption column (3) is connected with the vacuum mechanical meter (4), and the middle interface can be one of a VCR or a card sleeve.
4. The device for testing the highly toxic tail gas adsorbent according to claim 1, wherein the vacuum maintaining assembly (18) is communicated with a nitrogen gas inlet pipeline (5), a helium gas inlet pipeline (6), an evacuating pipeline (7) and an evacuating pipeline (8), and the nitrogen gas inlet pipeline (5), the helium gas inlet pipeline (6), the evacuating pipeline (7) and the evacuating pipeline (8) are all communicated with the stainless steel adsorption column (3).
5. The testing device for the highly toxic tail gas adsorbent according to claim 4, wherein the nitrogen gas inlet pipeline (5) and the helium gas inlet pipeline (6) are respectively provided with a decompression meter (9), the high-pressure end of the decompression meter (9) is close to the stainless steel adsorption column (3), and the low-pressure end of the decompression meter is close to the vacuum maintaining assembly (18).
6. The device for testing the highly toxic tail gas adsorbent according to claim 4, wherein the evacuation pipeline (7) and the emptying pipeline (8) are provided with second diaphragm valves (10).
7. A testing device for a highly toxic tail gas adsorbent according to claim 3, wherein the indication assembly (20) comprises three groups of detection pipelines (11), the three groups of detection pipelines (11) are connected in parallel, the three groups of detection pipelines (11) are connected with the vacuum mechanical meter (4), and the air outlet ends of the three groups of detection pipelines (11) are connected with the portable highly toxic gas detection equipment main body (16).
8. The device for testing the highly toxic tail gas adsorbent according to claim 7, wherein a third diaphragm valve (12), a mass flowmeter (13), a tail gas indicator (14) and a fourth diaphragm valve (15) are sequentially arranged on the detection pipeline (11) along the gas flow direction.
9. The device for testing the highly toxic tail gas adsorbent according to claim 8, wherein the tail gas indicator (14) is prepared from modified copper hydroxide and has the function of indicating phosphane and arsine, and the tail gas indicator (14) is placed in a visible tube connected with the detection pipeline (11).
10. The highly toxic tail gas sorbent testing apparatus of claim 1, wherein the portable highly toxic gas detection device body (16) is disposed within a negative pressure fume hood (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323162764.4U CN221280891U (en) | 2023-11-23 | 2023-11-23 | Highly toxic tail gas adsorbent testing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323162764.4U CN221280891U (en) | 2023-11-23 | 2023-11-23 | Highly toxic tail gas adsorbent testing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221280891U true CN221280891U (en) | 2024-07-05 |
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ID=91708691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323162764.4U Active CN221280891U (en) | 2023-11-23 | 2023-11-23 | Highly toxic tail gas adsorbent testing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221280891U (en) |
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- 2023-11-23 CN CN202323162764.4U patent/CN221280891U/en active Active
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