CN212391301U - Low boiling point electronic gas closed sampling system - Google Patents
Low boiling point electronic gas closed sampling system Download PDFInfo
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- CN212391301U CN212391301U CN202022333949.7U CN202022333949U CN212391301U CN 212391301 U CN212391301 U CN 212391301U CN 202022333949 U CN202022333949 U CN 202022333949U CN 212391301 U CN212391301 U CN 212391301U
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Abstract
The utility model discloses a low boiling point electronic gas airtight sampling system relates to low boiling point gas sampling technical field. The low-boiling point electronic gas closed sampling system comprises a sampling bottle, a purging and replacing system and a cooling system; the cooling system comprises a cooling cylinder, the wall of the cooling cylinder is provided with an interlayer communicated with an external pipeline, a refrigerant is filled in the interlayer, a circulating pump is arranged on the external pipeline, and a sampling bottle is filled in the cooling cylinder; the sampling bottle both sides are equipped with intake pipe and outlet duct respectively, and intake pipe and outlet duct are connected with the replacement system that sweeps through the three-way valve respectively, sweep the replacement system and include high-purity gas sweep system, sample gas introducing system, sweep gas detecting system, exhaust gas discharge system and vacuum system. The utility model provides a sampling system realizes the airtight sample of the low boiling point electron gas of different kinds, prevents effectively that the air from causing the pollution to the product. The sampling system adopts a cooling cylinder to carry out cooling liquefaction and enrichment on the low-boiling-point electronic gas, so that the sampling quantity is increased.
Description
Technical Field
The utility model relates to a low boiling point electronic gas sample technical field especially relates to a low boiling point electronic gas airtight sampling system.
Background
Electronic gases refer to chemical gases used in semiconductor extension, ion implantation, doping, etching, scrubbing, and the like. Some of the electronic gases have low boiling points, are highly corrosive, toxic, react with certain components in the air, and the like. Chemical reaction occurs in the sampling process, so that the sampling device is very easy to be polluted, and the leakage causes pollution to the environment and influences the health of personnel. The low boiling point electron gas is gaseous at normal temperature and must be sampled in a sealed manner. Since very small amounts of contamination have a great influence on electronic-grade materials, the sampling system must be clean and free of contamination.
The closed sampling is suitable for sampling various medium and low pressure gas and liquid media with dangers of toxicity, harm, flammability, explosiveness and the like in a petrochemical device. The authenticity of sample collection is strong, and no residual liquid or residual gas is discharged, thereby effectively preventing the damage of toxic and harmful media to users, and simultaneously avoiding causing environmental pollution and dangerous accidents possibly caused by flammable and explosive media during sampling. The general airtight sampling sample of gas is gaseous, because need a large amount of samples to detect, and the gas sample generally liquefies through the pressurization, and too high potential safety hazard of pressure is great, and is higher to sample bottle intensity requirement.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a low boiling point electronic gas airtight sampling system adopts simple cooling system to liquefy the sample under normal atmospheric temperature and pressure condition, carries out the enrichment to gaseous sample, and the device security is strong.
In order to realize the technical purpose, the utility model adopts the following scheme: a low-boiling point electronic gas closed sampling system comprises a sampling bottle, a purging and replacing system and a cooling system; the cooling system comprises a cooling cylinder, the wall of the cooling cylinder is provided with an interlayer communicated with an external pipeline, a refrigerant is filled in the interlayer, a circulating pump is arranged on the external pipeline, and a sampling bottle is filled in the cooling cylinder; the sampling bottle comprises a bottle cap and a bottle body, wherein an air inlet pipe and an air outlet pipe are respectively arranged on two sides of the bottle cap, air pipe switch valves are respectively arranged on the air inlet pipe and the air outlet pipe, the air inlet pipe and the air outlet pipe are respectively connected with a main pipeline of the purging and replacing system through three-way valves, and the two three-way valves are connected through a pipeline; a mass flowmeter is arranged outside a three-way valve of the sampling bottle air inlet pipe; a pneumatic valve and a pressure sensor are arranged on a main pipeline of the purging and replacing system, a purging gas detection system is arranged on the main pipeline between the pneumatic valve and the pressure sensor, a sample gas introducing system and a high-purity gas purging system are arranged on the main pipeline between the pneumatic valve and the mass flowmeter, and a waste gas discharging system and a vacuum system are arranged on the right side of the pressure sensor; the high-purity gas purging system, the sample gas introducing system, the purging gas detecting system, the waste gas discharging system and the vacuum system are respectively provided with a pneumatic valve, and the high-purity gas purging system is provided with a gas filter and a pneumatic micro-leakage valve in front of the pneumatic valve.
Compared with the prior art, the beneficial effects of the utility model reside in that: the utility model provides a sampling system realizes the airtight sample of the low boiling point electron gas of different kinds, prevents effectively that the air from causing the pollution to the product. The sampling system adopts a cooling cylinder to carry out cooling liquefaction and enrichment on the low-boiling-point electronic gas, so that the sampling quantity is increased; meanwhile, the purging and replacing system is provided with a mass flow meter, so that the sampling accuracy is ensured; the pressure sensor is arranged to monitor the system pressure in real time, so that the system is prevented from being damaged by overlarge pressure; and a pneumatic valve is adopted, so that the remote control of the sampling process is convenient to realize, and the operation safety is improved.
The utility model discloses an optimal scheme does:
an air inlet branch pipe communicated with the air inlet pipe is arranged in the sampling bottle, and an outlet of the air inlet branch pipe is positioned at the lower part of the bottle body.
The sampling bottle body is perfluor alkoxy resin material, and the bottle is corrosion-resistant, and the sample liquid is difficult for polluting to the little less outward seepage volume of bottle, and the bottle is transparent simultaneously, is convenient for observe the condition of sample liquid.
The refrigerant is glycol refrigerating fluid or liquid nitrogen, and the refrigerants with different temperatures are configured according to different boiling points of the sampled gas.
The inlet of the purging and replacing system is provided with a gas purifier, so that the purity of the purging gas entering the system is ensured, and the pipeline pollution is prevented.
The cooling cylinder is made of stainless steel, a liquid inlet pipeline communicated with the interlayer is arranged at the lower part of one side of the cooling cylinder, a liquid outlet pipeline communicated with the interlayer is arranged at the upper part of the other side of the cooling cylinder, a circulating pump and an inlet valve are arranged on the liquid inlet pipeline, the circulating pump is positioned outside the inlet valve, and an outlet valve is arranged on the liquid outlet pipeline. The stainless steel material has long service life and is not easy to damage.
The inlet ends of the high-purity gas purging system and the sample gas introducing system, and the outlet ends of the purging gas detection system, the waste gas discharge system and the vacuum system are respectively provided with a manual valve, and the manual valves are used for emergency when the pneumatic valves are in failure, so that the system safety is improved.
And a check valve is arranged on the pipeline at the outlet end of the manual diaphragm valve of the waste gas discharge system.
The pneumatic valve and the manual valve respectively adopt diaphragm valves, and key parts of the diaphragm valves are not contacted with sampling gas and are not easy to corrode.
Drawings
Fig. 1 is a schematic view of a low boiling point electronic gas closed sampling system according to an embodiment of the present invention;
fig. 2 is a schematic diagram of a cooling system provided by an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a cooling system and a sampling bottle provided by an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a sampling bottle according to an embodiment of the present invention;
fig. 5 is a schematic view of a purge replacement system provided by an embodiment of the present invention;
labeled as: 1-a sampling bottle, 11-a bottle cap, 111-an inlet three-way valve, 112-an inlet switch valve, 113-an outlet three-way valve, 114-an outlet switch valve, 115-an air inlet branch pipe, 12-a bottle body, 2-a purging and replacing system, 21-a high-purity air purging system, 211-a manual diaphragm valve I, 212-an air filter, 213-an air microleak valve, 214-a pneumatic diaphragm valve I, 22-a sample air introducing system, 221-a manual diaphragm valve II, 222-a pneumatic diaphragm valve II, 23-a purging air detecting system, 231-a manual diaphragm valve III, 232-a pneumatic diaphragm valve III, 24-a waste gas discharging system, 241-a one-way valve, 242-a manual diaphragm valve IV, 243-a pneumatic diaphragm valve IV, 25-a vacuum pumping system, 251-a manual diaphragm valve V, 252-a pneumatic diaphragm valve five, 26-a pneumatic diaphragm valve six, 27-a pressure sensor, 28-a mass flow meter, 3-a cooling system, 31-a cooling cylinder, 32-a circulating pump, 33-a refrigerant, 311-an inlet valve and 312-an outlet valve.
Detailed Description
The present invention will be described in detail with reference to the following embodiments in order to fully understand the objects, features and functions of the present invention, but the present invention is not limited thereto.
Referring to fig. 1 and fig. 2, the present invention provides a low boiling point electronic gas closed sampling system, which is composed of a sampling bottle 1, a purging and replacing system 2, a cooling system 3, etc.; the cooling system 3 is composed of a cooling cylinder 31 and a circulating pump 32, etc., an interlayer communicated with an external pipeline is arranged in the cooling cylinder 31, a refrigerant 33 is arranged in the interlayer, and the circulating pump 32 is arranged on the external pipeline. Preferably, the cooling cylinder 31 is a stainless steel jacket, a liquid inlet pipeline communicated with the interlayer is arranged at the lower part of one side of the stainless steel jacket, a liquid outlet pipeline communicated with the interlayer is arranged at the upper part of the other side of the stainless steel jacket, a circulating pump 32 and an inlet valve 311 are arranged on the liquid inlet pipeline, the circulating pump 32 is positioned at the outer side of the inlet valve 311, and an outlet valve 312 is arranged on the liquid outlet pipeline. The refrigerant 33 is selected according to the boiling point of the sample, and preferably, glycol is mixed with water to prepare glycol refrigerating fluids with different freezing points. When the boiling point of the sampled electron gas is lower, liquid nitrogen is selected as the refrigerant 33. The utility model discloses tested a boiling point 10 ℃ gas, can carry out the sample collection operation well at refrigerant 33 temperature-5 ℃.
Referring to fig. 3 and 4, a sampling bottle 1 is placed in a cooling cylinder 31, the sampling bottle 1 is composed of a bottle cap 11, a bottle body 12 and the like, an air inlet pipe and an air outlet pipe are respectively installed on two sides of the bottle cap 11, an inlet switch valve 112 is installed on the air inlet pipe, an outlet switch valve 114 is installed on the air outlet pipe, the air inlet pipe and the air outlet pipe are respectively connected with a main pipeline of a purging and replacing system 2 through three-way valves, the three-way valve on the air inlet pipe is an inlet three-way valve 111, the three-way valve on the air outlet pipe is an; the mass flowmeter 28 is arranged outside the outlet three-way valve 111, so that the accurate measurement of the sample is realized, and the influence on the final experiment due to the fluctuation of the sampling amount is prevented. An air inlet branch pipe 115 communicated with an air inlet pipe is arranged in the sampling bottle cap 11, and an outlet of the air inlet branch pipe 115 is positioned at the lower part of the sampling bottle 1. Preferably, the sampling bottle body 12 is made of perfluoroalkoxy resin, the body 12 is corrosion-resistant, has a small amount of external permeation, and is not easy to pollute the sampling liquid, and the body 12 is transparent, so that the condition of the sampling liquid can be observed conveniently.
Referring to fig. 5, a manual valve and a pneumatic valve are installed in the purging and replacing system 2, in order to increase the service life of the valves, diaphragm valves are respectively adopted for the pneumatic valve and the manual valve, and key parts of the diaphragm valves are not in contact with sampled gas and are not easy to corrode. Six pneumatic diaphragm valves 26 and a pressure sensor 27 are arranged on a main pipeline of the purging and replacing system 2, and the pressure sensor 27 monitors the system pressure in real time to prevent the system from being damaged due to overlarge pressure. A scavenging gas detection system 23 is arranged on the main pipeline between the six pneumatic diaphragm valves 26 and the pressure sensor 27, a sample gas introduction system 22 and a high-purity gas scavenging system 21 are arranged on the main pipeline between the six pneumatic diaphragm valves 26 and the mass flow meter 28, and a waste gas discharge system 24 and a vacuum system 25 are arranged on the right side of the pressure sensor 27; the high-purity gas purging system 21, the sample gas introducing system 22, the purge gas detecting system 23, the waste gas discharging system 24 and the vacuum system 25 are respectively provided with a manual diaphragm valve and a pneumatic diaphragm valve, and the manual diaphragm valves are in a normally open state and are used when the pneumatic diaphragm valves are in failure.
A gas filter 212 and a pneumatic micro-leakage valve 213 are arranged between a first manual diaphragm valve 211 and a first pneumatic diaphragm valve 214 of the high-purity gas purging system 21, and the installation sequence of the valves is as follows according to the gas flow direction: a first manual diaphragm valve 211, a gas filter 212, a pneumatic microleak valve 213 and a first pneumatic diaphragm valve 214. The pneumatic microleakage valve 213 ensures that trace air flow blows during bottle receiving, preventing outside air from entering the system. The sample gas introducing system 22 is provided with a second manual diaphragm valve 221 and a second pneumatic diaphragm valve 222 according to the gas flow direction. And the purge gas detection system 23 is sequentially provided with a pneumatic diaphragm valve III 232 and a manual diaphragm valve III 231 according to the gas flow direction. The exhaust gas discharge system 24 is provided with a pneumatic diaphragm valve four 243, a manual diaphragm valve four 242, and a check valve 241 in this order in the gas flow direction. The vacuum system 25 is provided with a pneumatic diaphragm valve five 252 and a manual diaphragm valve five 251 in sequence according to the gas flow direction. Each sub-system of the purging and replacing system 2 is provided with a pneumatic valve respectively, and the online sampling of the low-boiling-point electronic gas is realized through remote control, so that the harm of toxic and harmful corrosive gas to human bodies is avoided.
The sampling bottle 1 is arranged at the tail end of the high-purity gas purging system 21, and the sample gas enters the sampling bottle 1 from a pipeline after purging and replacement and is condensed into liquid under the action of the cooling cylinder 31. The inlet manifold 115 of the sampling bottle 1 extends to the lower position of the sampling bottle 1, and the liquefied sample is collected. When the pressure in the sampling bottle 1 is overlarge, the air outlet pipe on the other side of the sampling bottle 1 is opened to release the pressure.
Preferably, a gas purifier is provided at the inlet of the purge-and-replace system 2 to ensure the purity of the purge gas entering the system and prevent contamination of the piping.
The sampling method using the low-boiling point electronic gas closed sampling system comprises the following steps:
s1, connecting the sampling bottle 1: opening a manual switch valve in the purging and replacing system 2, and closing a pneumatic valve of the low-boiling-point electronic gas closed sampling system;
s1-1, system replacement:
s1-1-1, pressurizing operation: opening an inlet three-way valve 111 and an outlet three-way valve 113 on two sides of the mass flow meter 28 and the sampling bottle to enable the gas to reach the outlet three-way valve 113 from the inlet three-way valve 111 through a pipeline, simultaneously opening a pneumatic diaphragm valve I214 and a pneumatic micro-leakage valve 213 of the high-purity gas purging system 21 to perform pressurizing operation, waiting for the pressure sensor 27 to reach a pressurizing set value, and completing pressurizing to close the pneumatic valve of the high-purity gas purging system 21; preferably, the pressure sensor 27 sets a pressure value to alarm after exceeding the set value.
S1-1-2, pressure relief operation: opening a pneumatic diaphragm valve IV 243 of the waste gas exhaust system 24, performing pressure relief operation, waiting for the pressure sensor 27 to reach a pressure relief set value, and closing the pneumatic diaphragm valve IV 243 of the waste gas exhaust system 24 after pressure relief is finished;
s1-1-3, vacuum-pumping operation: opening a pneumatic diaphragm valve five 252 of the vacuum system 25, performing vacuumizing operation, waiting for the pressure sensor 27 to reach a vacuum set value, and closing the pneumatic diaphragm valve five 252 of the vacuum system 25 after vacuumizing is completed;
repeatedly circulating the operations for 7 times, closing all pneumatic valves of the sampling system, and completing the replacement operation of the low-boiling-point electronic gas closed sampling system;
s1-2, replacement gas analysis: and (4) performing pressurization operation according to the step S1-1-1, opening a pneumatic diaphragm valve III 232 of the purge gas detection system 23 after the pressure sensor 27 reaches a pressurization set value, analyzing opposite ventilation, and determining that an analysis result is unqualified, repeating the step S1-1 system replacement operation until the analysis result is qualified, performing pressure relief operation according to the step S1-1-2, and closing all pneumatic valves of the sampling system after pressure relief is completed.
S1-3, connecting a sampling bottle: opening the mass flow meter 28, the pneumatic microleakage valve 213 and the pneumatic diaphragm valve 214 of the high-purity gas purging system 21, the inlet three-way valve 111, the outlet three-way valve 113 and the pneumatic diaphragm valve six 26 of the main pipeline of the purging and replacing system 2, respectively connecting the air inlet pipe and the air outlet pipe of the sampling bottle 1 with the three-way valves on two sides of the sampling bottle 1, and closing all the pneumatic valves of the sampling system. Before connecting the sampling bottle 1, the sampling bottle 1 is cleaned with ultrapure water in a grade 100 clean room and dried.
S1-4, pressure maintaining operation: and closing a pneumatic diaphragm valve six 26 of the main pipeline of the purging and replacing system 2, opening a mass flowmeter 28, a pneumatic microleakage valve 213 and a pneumatic diaphragm valve 214 of the high-purity gas purging system 21, an inlet three-way valve 111, an outlet three-way valve 113, an inlet switch valve 112 of a sampling bottle air inlet pipe and an outlet switch valve 114 of an air outlet pipe, performing pressurization operation, performing positive pressure maintaining operation after pressurization, observing the pressure difference value of the pressure sensor 27, wherein the pressure difference value does not exceed a pressure maintaining set value, and the pressure maintaining is qualified. And (3) detecting whether a leak point exists at the joint of the pipeline when the pressure difference value is not within the pressure maintaining set range, and after the leak point is repaired, performing pressure maintaining operation again until the value of the pressure sensor 27 is qualified. The positive pressure maintaining time is 1h, after the pressure maintaining is finished, the pneumatic micro-leakage valve 213 and the pneumatic diaphragm valve 214 of the high-purity gas purging system 21 are closed, the pneumatic diaphragm valve four 243 of the waste gas exhaust system 24 is opened to perform pressure relief operation, the pneumatic diaphragm valve four 243 of the waste gas exhaust system 24 is closed after the pressure relief is finished, the pneumatic diaphragm valve five 252 of the vacuum system 25 is opened to perform vacuum pumping operation, the pneumatic diaphragm valve five 252 of the vacuum system 25 is closed after the pressure sensor 27 reaches a vacuum setting value, and negative pressure maintaining is performed. During the vacuum pumping operation, the pressure difference of the pressure sensor 27 does not exceed the vacuum setting value, the pressure maintaining is qualified, the unqualified pipeline joint is checked to determine whether a leakage point exists, and the pressure maintaining is carried out again after the treatment until the pressure is qualified. And maintaining the pressure for 1h under negative pressure.
S1-5, after the pressure maintaining operation is passed, the system replacement operation of S1-1 and the analysis operation of S1-2 replacement gas are carried out.
S2, sampling: opening an inlet valve 311, an outlet valve 312 and a circulating pump 32 of the cooling system 3, and placing the sampling bottle 1 into the cooling cylinder 31; and opening the mass flow meter 28, setting the sampling amount, opening the second pneumatic diaphragm valve 222 of the sample gas introduction system 22 for sampling, and closing the second pneumatic diaphragm valve 222, the inlet switch valve 112 and the outlet switch valve 114 after sampling is finished, so that sampling is finished. All pneumatic valves of the sampling system are closed.
S3, disassembling the sampling bottle:
s3-1, performing system replacement according to the step S1-1, and then performing replacement gas analysis according to the step S1-2;
s3-2, closing the gas microleakage valve 213 of the high-purity gas purging system 21, opening the pneumatic diaphragm valve I214 of the high-purity gas purging system, detaching the sampling bottle 1 from the joint of the three-way valves at two sides, immediately plugging the outlets of the two three-way valves by plugs after detaching, closing the pneumatic diaphragm valve I214 of the high-purity gas purging system 21, and closing all the valves of the system.
For the safety of the sampling operation, the system is provided with a pneumatic valve which is automatically closed every time one operation is completed, so that the pneumatic valve needs to be opened again when the next operation is carried out. When the system is not provided with the pneumatic valve which is automatically closed, the required valve is directly opened when the next operation is carried out.
Finally, it is noted that: the preferred embodiments of the present invention have been shown and described, and it will be understood that modifications and variations may be made by those skilled in the art without departing from the scope of the invention.
Claims (9)
1. A low-boiling point electronic gas closed sampling system comprises a sampling bottle, a purging and replacing system and a cooling system; the cooling system is characterized by comprising a cooling cylinder, wherein the wall of the cooling cylinder is provided with an interlayer communicated with an external pipeline, a refrigerant is filled in the interlayer, the external pipeline is provided with a circulating pump, and a sampling bottle is filled in the cooling cylinder;
the sampling bottle comprises a bottle cap and a bottle body, wherein an air inlet pipe and an air outlet pipe are respectively arranged on two sides of the bottle cap, air pipe switch valves are respectively arranged on the air inlet pipe and the air outlet pipe, the air inlet pipe and the air outlet pipe are respectively connected with a main pipeline of the purging and replacing system through three-way valves, and the two three-way valves are connected through a pipeline;
a mass flowmeter is arranged outside a three-way valve of the sampling bottle air inlet pipe; a pneumatic valve and a pressure sensor are arranged on a main pipeline of the purging and replacing system, a purging gas detection system is arranged on the main pipeline between the pneumatic valve and the pressure sensor, a sample gas introducing system and a high-purity gas purging system are arranged on the main pipeline between the pneumatic valve and the mass flowmeter, and a waste gas discharging system and a vacuum system are arranged on the right side of the pressure sensor;
the high-purity gas purging system, the sample gas introducing system, the purging gas detecting system, the waste gas discharging system and the vacuum system are respectively provided with a pneumatic valve, and the high-purity gas purging system is provided with a gas filter and a pneumatic micro-leakage valve in front of the pneumatic valve.
2. A closed sampling system for low boiling point electronic gas as claimed in claim 1, wherein the sampling bottle is provided with a gas inlet branch pipe communicated with the gas inlet pipe, and the outlet of the gas inlet branch pipe is located at the lower part of the bottle body.
3. The low boiling point electronic gas containment sampling system of claim 1 wherein the sampling bottle body is made of perfluoroalkoxy resin.
4. The closed sampling system for low boiling point electronic gas of claim 1, wherein the refrigerant is glycol refrigerant fluid or liquid nitrogen.
5. The closed sampling system for low boiling point electronic gas as claimed in claim 1, wherein the inlet of the purge replacement system is provided with a gas purifier.
6. The system of claim 1, wherein the cooling cylinder is made of stainless steel, a liquid inlet line is disposed at a lower portion of one side of the cooling cylinder and communicated with the interlayer, a liquid outlet line is disposed at an upper portion of the other side of the cooling cylinder and communicated with the interlayer, the liquid inlet line is provided with a circulating pump and an inlet valve, the circulating pump is disposed at an outer side of the inlet valve, and the liquid outlet line is provided with an outlet valve.
7. The closed electronic gas sampling system with low boiling point according to claim 1, wherein the inlet ends of the high purity gas purging system and the sample gas introducing system, and the outlet ends of the purging gas detecting system, the waste gas discharging system and the vacuum system are respectively provided with a manual valve.
8. The closed sampling system for low boiling point electronic gas as claimed in claim 7, wherein the outlet pipeline of the manual valve of the waste gas discharging system is provided with a one-way valve.
9. The low boiling point electronic gas closed sampling system of claim 7, wherein the pneumatic valve and the manual valve are diaphragm valves respectively.
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| CN202022333949.7U CN212391301U (en) | 2020-10-20 | 2020-10-20 | Low boiling point electronic gas closed sampling system |
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| CN202022333949.7U CN212391301U (en) | 2020-10-20 | 2020-10-20 | Low boiling point electronic gas closed sampling system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113567223A (en) * | 2021-07-29 | 2021-10-29 | 湖南五凌电力科技有限公司 | Constant-temperature negative-pressure dynamic headspace oil-gas separation device and method |
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2020
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113567223A (en) * | 2021-07-29 | 2021-10-29 | 湖南五凌电力科技有限公司 | Constant-temperature negative-pressure dynamic headspace oil-gas separation device and method |
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