CN221085117U - Purification system of electronic grade nitrous oxide - Google Patents
Purification system of electronic grade nitrous oxide Download PDFInfo
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- CN221085117U CN221085117U CN202322590256.XU CN202322590256U CN221085117U CN 221085117 U CN221085117 U CN 221085117U CN 202322590256 U CN202322590256 U CN 202322590256U CN 221085117 U CN221085117 U CN 221085117U
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- purification system
- nitrous oxide
- ultraviolet light
- condenser
- electronic grade
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- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 title claims abstract description 114
- 239000001272 nitrous oxide Substances 0.000 title claims abstract description 53
- 238000000746 purification Methods 0.000 title claims abstract description 48
- 238000006243 chemical reaction Methods 0.000 claims abstract description 34
- 238000006303 photolysis reaction Methods 0.000 claims abstract description 20
- 238000001914 filtration Methods 0.000 claims abstract description 14
- 230000015843 photosynthesis, light reaction Effects 0.000 claims abstract description 11
- 238000000926 separation method Methods 0.000 claims description 11
- 238000001179 sorption measurement Methods 0.000 claims description 8
- 239000012752 auxiliary agent Substances 0.000 claims description 6
- 239000003381 stabilizer Substances 0.000 claims description 6
- 238000004821 distillation Methods 0.000 claims description 5
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical group [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000002425 crystallisation Methods 0.000 claims description 3
- 230000008025 crystallization Effects 0.000 claims description 3
- 238000000502 dialysis Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 claims description 3
- 239000001488 sodium phosphate Substances 0.000 claims description 3
- 229910000162 sodium phosphate Inorganic materials 0.000 claims description 3
- 238000012432 intermediate storage Methods 0.000 claims description 2
- 229910000030 sodium bicarbonate Inorganic materials 0.000 claims description 2
- 235000017557 sodium bicarbonate Nutrition 0.000 claims description 2
- 238000009833 condensation Methods 0.000 claims 1
- 230000005494 condensation Effects 0.000 claims 1
- 239000012535 impurity Substances 0.000 abstract description 19
- 238000000034 method Methods 0.000 abstract description 18
- 238000005516 engineering process Methods 0.000 abstract description 4
- 230000007613 environmental effect Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 16
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 11
- 238000004891 communication Methods 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 235000013842 nitrous oxide Nutrition 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 3
- 239000003463 adsorbent Substances 0.000 description 3
- 229910002091 carbon monoxide Inorganic materials 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000002808 molecular sieve Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- UIIMBOGNXHQVGW-DEQYMQKBSA-M Sodium bicarbonate-14C Chemical compound [Na+].O[14C]([O-])=O UIIMBOGNXHQVGW-DEQYMQKBSA-M 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000010170 biological method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
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- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The utility model relates to a purification system of electronic grade nitrous oxide, which comprises a first condenser and an ultraviolet light reactor, wherein raw gas is condensed by the first condenser and then is input into the ultraviolet light reactor for ultraviolet light irradiation to generate photodecomposition reaction, and the purification system also comprises a second condenser communicated with the ultraviolet light reactor through a pipeline and a filtering and separating device communicated with the second condenser through a pipeline. The purification system of the utility model utilizes ultraviolet photolysis technology to purify nitrous oxide, can efficiently remove impurities in nitrous oxide, improves the purity of products, and has the characteristics of simple operation, stable process, low cost, environmental protection and the like.
Description
Technical Field
The utility model relates to the technical field of electronic grade nitrous oxide purification, in particular to a purification system of electronic grade nitrous oxide.
Background
Nitrous oxide (commonly known as laughing gas) is a gas widely used in the high-tech fields, such as wafer manufacturing, optical lens manufacturing, synthesis for preparing high-purity metals and high-energy materials, etc. in the semiconductor industry. In these applications, it is desirable to use high purity nitrous oxide. However, the conventional nitrous oxide production method has problems such as insufficient purity, other impurities contained in the product, and the like. These impurities may be caused by incomplete reactions or contaminated raw materials during the reaction, and generally include gases such as nitric oxide, oxygen, water vapor, carbon dioxide, etc., as well as metal ions, organic compounds, etc.
The current common impurity removal methods include adsorption, membrane separation, distillation and the like. Adsorption refers to passing a gas through a selective adsorbent to remove impurities therefrom. The adsorbent can be activated carbon, molecular sieve, molecular net, etc. The membrane separation is to separate out the components in the mixed gas by a membrane with high selective permeability. Distillation is performed by separation and purification through the difference in boiling points of different components. However, these methods often have problems of high cost, high energy consumption, complex operation, and the like.
Chinese patent CN1827524a discloses an electronic grade laughing gas purifying process, which is to produce electronic grade laughing gas by chemical purification, molecular sieve purification and other processes, but the working pressure of the purifying process is 0.3-1.0MPa, belonging to low pressure adsorption, under the process condition, the adsorption performance of the adsorbent cannot be improved. The technical index of the product produced by the process is not mentioned as the index of key impurity water in the electronic grade laughing gas, the carbon dioxide content is 2PPm and is also at a higher content level, and meanwhile, the impurity content in the product is greatly in and out of the technical index of the product of the existing national standard of 'electronic industrial gas nitrous oxide' and foreign similar level, and the purity requirement of the existing high-purity electronic grade gas for the electronic industry cannot be met.
Disclosure of Invention
Aiming at the problems of high cost, complex operation or substandard purity requirement of the purification method in the prior art, the utility model provides a high-efficiency, economical and environment-friendly purification system for electronic grade nitrous oxide.
In order to solve the technical problems, the utility model adopts the following technical scheme:
The purification system of electronic grade nitrous oxide comprises a first condenser and an ultraviolet light reactor, wherein raw gas is input into the ultraviolet light reactor after being condensed by the first condenser for ultraviolet light irradiation to generate photodecomposition reaction, and the purification system also comprises a second condenser communicated with the ultraviolet light reactor through a pipeline and a filtering and separating device communicated with the second condenser through a pipeline.
The utility model utilizes ultraviolet photolysis technology to purify nitrous oxide, can efficiently remove impurities in nitrous oxide, improves the purity of products, and has the characteristics of simple operation, stable process and the like.
Ultraviolet photolysis can mainly remove organic impurities and trace oxides in nitrous oxide. Organic impurities are typically contaminants from the raw materials, the manufacturing process or the storage process, while trace oxides may be caused by instability of the product itself. Ultraviolet photolysis can decompose these impurities into harmless small molecules at lower temperatures, thereby increasing the purity of nitrous oxide.
According to some embodiments of the utility model, the ultraviolet light reactor comprises a reaction kettle body, an ultraviolet light source arranged in the reaction kettle body and a heater for heating materials in the reaction kettle body, wherein the reaction kettle body is connected with the first condenser and the second condenser through pipelines respectively.
Further, the ultraviolet light source is arranged at the top of the reaction kettle body, and the heater is arranged at the bottom of the reaction kettle body.
Further, the purification system also comprises a controller electrically connected with the ultraviolet light source and the heater respectively.
Further, the power of the ultraviolet light source is 10-1000 watts, and the wavelength is 100-400 nm; the internal temperature of the reaction kettle is 15-50 ℃, the pressure is 0.5-1 MPa, and the time for the gas to be irradiated by the ultraviolet light is 20-40 min.
According to some implementation aspects of the utility model, the reaction kettle body is further added with an auxiliary agent for improving ultraviolet photolysis effect and protecting the purity of nitrous oxide.
Further, the auxiliary agent is a stabilizer, and the stabilizer is sodium bicarbonate or phosphate.
According to some embodiments of the utility model, the filtration separation device is an adsorption device, a filtration device, a dialysis separation device, a distillation device, or a crystallization device.
According to some embodiments of the utility model, the purification system further comprises an intermediate storage tank in communication with the first condenser and the ultraviolet light reactor, respectively, via a conduit.
According to further embodiments of the present utility model, the purification system further comprises an air compressor in communication with the first condenser and the ultraviolet light reactor, respectively, via a conduit.
According to some embodiments of the utility model, the raw gas is technical grade nitrous oxide having a purity of greater than 99%. The raw gas contains other impurity gases such as oxygen, water vapor, nitrogen dioxide, carbon monoxide, nitric oxide and the like besides nitrous oxide.
Due to the application of the technical scheme, compared with the prior art, the utility model has the following advantages:
The purification system of the utility model utilizes ultraviolet photolysis technology to purify nitrous oxide, can efficiently remove impurities in nitrous oxide, improves the purity of products, and has the characteristics of simple operation, stable process, low cost, environmental protection and the like.
Drawings
FIG. 1 is a schematic diagram of an electronic grade nitrous oxide purification system according to an exemplary embodiment of the present utility model;
FIG. 2 is a flow chart of a purification method employing the purification system of FIG. 1;
in the figure: 100. a first condenser; 200. a second condenser; 300. an ultraviolet light reactor; 310. an ultraviolet light source; 320. a heater; 330. a reaction kettle body; 400. an air compressor; 500. and filtering and separating the device.
Detailed Description
Ultraviolet photolysis is a technique that uses ultraviolet energy to decompose molecules, typically by using photons of a shorter wavelength than the energy required to decompose the molecules, such that when ultraviolet light irradiates the decomposed molecules, the molecules can be excited and decomposed into smaller molecules or atoms.
It is known that the impurities in nitrous oxide mainly comprise oxygen, nitrogen dioxide, water vapor, carbon monoxide, nitric oxide, etc. Among them, oxygen and nitrogen dioxide are the most predominant impurities, and it is difficult to separate and purify by conventional separation methods because they have similar physical and chemical properties to nitrous oxide. In addition, water vapor and carbon monoxide also have an effect on the purity of nitrous oxide, and therefore they need to be removed in ultraviolet photolysis techniques.
The utility model is further described with reference to the drawings and specific examples in the specification:
Referring to the purification system of electronic grade nitrous oxide shown in fig. 1, the purification system comprises a first condenser 100, an air compressor 400 in communication with the first condenser 100 through a pipe, an ultraviolet light reactor in communication with the air compressor 400 through a pipe, a second condenser 200 in communication with the ultraviolet light reactor 300 through a pipe, and a filtering separation device 500 in communication with the second condenser 200 through a pipe.
Further, control valves may be installed on the respective pipes for controlling the flow direction and flow rate of the fluid in the pipes. In addition, the air compressor 400 is used to regulate the internal pressure of the ultraviolet light reactor 300.
In other implementations, nitrous oxide passing through the first condenser 100 may be stored in an intermediate tank, and then the gas in the intermediate tank may be input into the uv reactor 300 for photodecomposition.
In this implementation, the ultraviolet light reactor 300 includes a reaction kettle body 330, an ultraviolet light source 310 disposed inside the reaction kettle body 330, and a heater 320 for heating materials in the reaction kettle body 330, where the reaction kettle body 330 is connected to the air compressor 400 and the second condenser 200 through pipes, the ultraviolet light source 310 is disposed at the top of the reaction kettle body 330, and the heater 320 is disposed at the bottom of the reaction kettle body 330.
The purification system further comprises a controller (not shown in the figure) electrically connected to the ultraviolet light source 310 and the heater 320, respectively, and the controller is used for regulating and controlling the operation time and the operation time of the ultraviolet light source 310 and the heater 320.
The power of the ultraviolet light source 310 is 10-1000 watts, and the wavelength is 100-400 nm; the temperature in the reaction kettle body 330 is 15-50 ℃, the pressure is 0.5-1 MPa, and the time of the gas irradiated by ultraviolet light is 20-40 min.
In this example, the filtering separation device 500 is used to remove nitrous oxide gas passing through the uv reactor 300 and the second condenser 200 by physical, chemical or biological methods, such as filtration, adsorption, dialysis, distillation, crystallization, etc. In some implementations, such as filtration separation device 500 is an adsorption apparatus.
The method for purifying by adopting the purification system of electronic grade nitrous oxide, see fig. 2, specifically comprises the following steps:
Step S1, a cooling purification step
The industrial grade nitrous oxide is cooled by the first condenser 100, thereby removing impurities such as moisture and nitric oxide, and obtaining purer nitrous oxide. The purity of the nitrous oxide at this time may reach 99.99%.
Step S2, photodecomposition and purification step
The nitrous oxide after passing through the first condenser 100 is controlled by opening and closing a control valve, so that the nitrous oxide flows into the ultraviolet light reactor 300 after passing through the air compressor 400. At this time, the controller regulates the ultraviolet light source 310 and the heater 320 in the ultraviolet light reactor 300, for example, the power of the ultraviolet light source 310 is set to be 30 watts, the wavelength is 185 nanometers, the temperature in the ultraviolet light reactor 300 is controlled to be 25 ℃, and then the pressure in the ultraviolet light reactor 300 is regulated by the air compressor 400, so that the reaction pressure is 0.8MPa. The reaction time of the photodecomposition purification step may be set to 30 minutes.
In addition, in the chemical synthesis or separation and purification process, some auxiliary agents or stabilizers are often added to improve the reaction efficiency and protect the products from adverse environments such as heat, light, oxidation and the like. In the process of purifying the electronic grade nitrous oxide by ultraviolet photolysis technology, substances such as auxiliary agents or stabilizing agents, for example sodium bicarbonate, phosphate and the like can be added according to requirements, so that the ultraviolet photolysis effect is improved and the purity of the nitrous oxide is protected.
It is understood that the setting and control of the ultraviolet photolysis reaction conditions can be adjusted in time according to practical situations, including setting parameters such as power, wavelength, reaction temperature and pressure of the ultraviolet light source, so as to decompose and remove impurities in the nitrous oxide to the maximum extent and ensure the purity and integrity of the nitrous oxide. For example, the power of the UV light source can be 10-1000 Watts, the wavelength is 100-400 nanometers; the reaction temperature can be controlled to be between room temperature and 50 ℃; the reaction pressure can be controlled to be 0.5MPa to 1.0MPa.
Step S3, cooling and filtering
The gas after the photodecomposition and purification step is cooled by a second condenser 200 to condense impurities such as nitrogen oxides into a liquid state, and is discharged through a drain valve, and then the gas enters a filtering and separating device 500 to further remove impurities such as oxides, nitrates, organic matters, microorganisms and the like generated by ultraviolet photolysis reaction, thereby obtaining electronic grade nitrous oxide with the purity of 99.999%.
The purification system disclosed by the utility model can be used for efficiently obtaining high-purity electronic grade nitrous oxide. The purification method of the purification system is simple to operate, economical and environment-friendly, and has important application value for improving the preparation efficiency and purity of the electronic grade nitrogen.
The above embodiments are only for illustrating the technical concept and features of the present utility model, and are intended to enable those skilled in the art to understand the present utility model and to implement the same, but are not intended to limit the scope of the present utility model, and all equivalent changes or modifications made according to the spirit of the present utility model should be included in the scope of the present utility model.
Claims (10)
1. A purification system for electronic grade nitrous oxide, characterized by: the purification system comprises a first condenser and an ultraviolet light reactor, wherein raw gas is subjected to condensation treatment by the first condenser and then is input into the ultraviolet light reactor for ultraviolet light irradiation to generate photodecomposition reaction, and the purification system further comprises a second condenser communicated with the ultraviolet light reactor through a pipeline and a filtering and separating device communicated with the second condenser through a pipeline.
2. The purification system of electronic grade nitrous oxide as claimed in claim 1, wherein: the ultraviolet light reactor comprises a reaction kettle body, an ultraviolet light source arranged in the reaction kettle body and a heater for heating materials in the reaction kettle body, and the reaction kettle body is connected with the first condenser and the second condenser through pipelines respectively.
3. The purification system of electronic grade nitrous oxide as claimed in claim 2, wherein: the ultraviolet light source is arranged at the top of the reaction kettle body, and the heater is arranged at the bottom of the reaction kettle body.
4. The purification system of electronic grade nitrous oxide as claimed in claim 2, wherein: the purification system also comprises a controller which is respectively and electrically connected with the ultraviolet light source and the heater.
5. The purification system of electronic grade nitrous oxide as claimed in claim 2, wherein: the power of the ultraviolet light source is 10-1000 watts, and the wavelength is 100-400 nm; the internal temperature of the reaction kettle is 15-50 ℃, the pressure is 0.5-1 MPa, and the time for the gas to be irradiated by the ultraviolet light is 20-40 min.
6. The purification system of electronic grade nitrous oxide as claimed in claim 2, wherein: the reaction kettle body is also added with an auxiliary agent for improving ultraviolet photolysis effect and protecting the purity of nitrous oxide.
7. The purification system of electronic grade nitrous oxide as claimed in claim 6, wherein: the auxiliary agent is a stabilizer, and the stabilizer is sodium bicarbonate or phosphate.
8. The purification system of electronic grade nitrous oxide according to any one of claims 1 to 7, wherein: the filtering and separating device is an adsorption device, a filtering device, a dialysis and separation device, a distillation device or a crystallization device.
9. The purification system of electronic grade nitrous oxide according to any one of claims 1 to 7, wherein: the purification system further comprises an intermediate storage tank which is respectively communicated with the first condenser and the ultraviolet light reactor through pipelines; or alternatively
The purification system further comprises an air compressor which is respectively communicated with the first condenser and the ultraviolet light reactor through pipelines.
10. The purification system of electronic grade nitrous oxide as claimed in claim 1, wherein: the original gas is industrial grade nitrous oxide with purity of more than 99%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322590256.XU CN221085117U (en) | 2023-09-22 | 2023-09-22 | Purification system of electronic grade nitrous oxide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322590256.XU CN221085117U (en) | 2023-09-22 | 2023-09-22 | Purification system of electronic grade nitrous oxide |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221085117U true CN221085117U (en) | 2024-06-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322590256.XU Active CN221085117U (en) | 2023-09-22 | 2023-09-22 | Purification system of electronic grade nitrous oxide |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221085117U (en) |
-
2023
- 2023-09-22 CN CN202322590256.XU patent/CN221085117U/en active Active
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