CN221076180U

CN221076180U - Special gas supply and conveying equipment, system and semiconductor process system

Info

Publication number: CN221076180U
Application number: CN202322906643.XU
Authority: CN
Inventors: 纪雪峰; 陈亮; 范威威
Original assignee: Shanghai Liangwei Electromechanical Engineering Co ltd
Current assignee: Shanghai Liangwei Electromechanical Engineering Co ltd
Priority date: 2023-10-27
Filing date: 2023-10-27
Publication date: 2024-06-04
Anticipated expiration: 2033-10-27

Abstract

The utility model relates to special gas supply and conveying equipment, a special gas supply and conveying system and a semiconductor process system. The special gas supply and conveying equipment comprises a first gas supply module, a first heating module, a first filtering module, a first pressure regulating module, a second heating module, a second pressure regulating module, an overflow protection module, a second filtering module, a first discharging module and a detection module. The device has the advantages that the special gas is subjected to secondary filtration by the first filter module and the second filter module, and the special gas is subjected to secondary pressure regulation by the first pressure regulation module and the second pressure regulation module, so that the high-pressure special gas can be converted into the low-pressure special gas, and the use requirement of a process chamber is met; the detection module is used for detecting the low-pressure special gas, judging whether the gas components, the concentration and the like of the special gas meet the use requirements, improving the gas treatment efficiency and improving the yield of the subsequent process; the first discharge module is utilized to ensure that the special gas which does not meet the detection requirement does not enter the subsequent process chamber.

Description

Special gas supply and conveying equipment, system and semiconductor process system

Technical Field

The present utility model relates to the field of semiconductor manufacturing technology, and in particular, to a special gas supply and delivery apparatus, a special gas supply and delivery apparatus system, and a semiconductor processing system.

Background

The ultra-high flow gas supply device BSGS is mainly applied to the industries such as semiconductors and the like and is used for conveying process gas to a process machine. The gas source of the ultra-high flow gas supply device BSGS is typically stored in a steel cylinder. The small storage volume of the cylinders results in the need to replace the cylinders frequently during the delivery of process gases. However, during the replacement of the cylinders, it is often necessary to interrupt the process flow, resulting in low production efficiency.

In order to solve the above problems, chinese patent No. CN214369272U discloses an apparatus for ultra-high flow delivery of special gases. The process gas supply unit is additionally arranged in design, so that the supply switching and bottle changing process is realized, and the pneumatic valve is controlled by a program to complete work, thereby avoiding equipment damage and personal hazard caused by manual misoperation. However, this solution still has the following drawbacks:

1) The air source is still provided by the steel cylinder, so that the steel cylinder still needs to be replaced frequently, namely the deep purge box needs to be switched frequently;

2) The main cabinet body is integrated with the purging unit, and the purging unit is required to purge the main cabinet body and the deep purging box, so that the purging length is longer, the gas emission is more, and the environment is easy to pollute;

3) The process gas and the purge gas are discharged from the same outlet, so that the pressure of the tail gas treatment procedure is high;

4) When the pipeline pressure of the main cabinet body is large, active pressure relief cannot be performed, and explosion risks are easy to generate;

5) Only the gas source gas is tested, the process gas subjected to pressure regulation and filtration is not tested, and the process gas is easy to be out of compliance with the process requirements, so that the production yield is low;

6) Only can output single standard process gas, and can not meet different process requirements;

7) The purge gas and the pressure maintaining gas are not distinguished, so that the purge pressure maintaining effect is poor.

At present, aiming at the problems that in the related technology, an air source needs to be frequently switched, the purging length is long, the air emission is large, the tail gas treatment procedure pressure is large, the process gas after pressure regulation and filtration cannot be detected, different process requirements cannot be met, the purging gas and the pressure maintaining gas are not distinguished, and the like, no effective solution is proposed.

Disclosure of utility model

The utility model aims to overcome the defects in the prior art, and provides special gas supply and conveying equipment, a special gas supply and conveying equipment system and a semiconductor process system, so as to solve the problems that in the related art, a gas source needs to be frequently switched, the purging length is long, the gas emission is large, the tail gas treatment process pressure is high, the process gas after pressure regulation and filtration cannot be detected, different process requirements cannot be met, the purging gas and the pressure maintaining gas are not distinguished, and the like.

In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:

in a first aspect, there is provided a special gas supply delivery apparatus for ultra-high flow delivery of a special gas to a tank car system, comprising:

The first end of the first gas supply module is communicated with a special gas source, and the second end of the first gas supply module is communicated with the process chamber;

The first heating module is connected with the first gas supply module and is used for performing a first heating procedure on special gas;

the first filtering module is communicated with the first gas supply module, is positioned at the downstream of the first heating module and is used for performing a first filtering process on the special gas subjected to the first heating process;

The first pressure regulating module is communicated with the first gas supply module, is positioned at the downstream of the first filtering module and is used for carrying out a first pressure regulating process on the special gas subjected to the first filtering process;

The second heating module is connected with the first gas supply module, is positioned at the downstream of the first pressure regulating module and is used for performing a second heating process on the special gas subjected to the first pressure regulating process;

The second pressure regulating module is communicated with the first gas supply module, is positioned at the downstream of the second heating module and is used for carrying out a second pressure regulating process on the special gas subjected to the second heating process;

The overflow protection module is communicated with the first gas supply module, is positioned at the downstream of the second pressure regulating module and is used for performing overflow protection on the special gas subjected to the second pressure regulating procedure;

the second filtering module is communicated with the first gas supply module, is positioned at the downstream of the overflow protection module and is used for carrying out a second filtering process on the special gas subjected to the second pressure regulating process;

A first exhaust module in communication with the first gas supply module for exhausting gas;

And the detection module is communicated with the first gas supply module and is positioned at the downstream of the second filtering module and used for detecting the special gas subjected to the second filtering process.

In some of these embodiments, further comprising:

the second discharge module is communicated with the first discharge module and is used for discharging special gas;

wherein the first exhaust module is used for exhausting general gas.

In some of these embodiments, further comprising:

The first pressure relief module is communicated with the first gas supply module and the first discharge module respectively and is used for pressure relief.

In some of these embodiments, further comprising:

The purification module is communicated with the first gas supply module and positioned at the downstream of the second filtering module, and is used for carrying out a purification process on the special gas subjected to the second filtering process;

the detection module is also used for detecting the special gas subjected to the purification process.

In some of these embodiments, further comprising:

And the purging module is communicated with the purification module and is used for purging.

In a second aspect, there is provided a special gas supply delivery system comprising:

the special gas supply and delivery apparatus as described in the first aspect;

And the purging equipment is respectively communicated with the special gas supply and conveying equipment and the tank car and is used for acquiring the special gas transmitted by the tank car and conveying the special gas to the special gas supply and conveying equipment.

In some of these embodiments, the purge apparatus comprises:

A second gas supply module, the first end of the second gas supply module is communicated with the tank car, the second end of the second gas supply module is communicated with the first end of the first gas supply module of the special gas supply and conveying equipment, and the second gas supply module is used for acquiring special gas transmitted by the tank car and conveying the special gas to the special gas supply and conveying equipment;

the low-pressure purging module is communicated with the second gas supply module and is used for low-pressure purging;

The high-pressure maintaining module is communicated with the low-pressure purging module and is used for maintaining pressure at high pressure;

And a third discharge module in communication with the second gas supply module for discharging gas.

In some of these embodiments, the purge apparatus further comprises:

A fourth discharge module in communication with the third discharge module for discharging a special gas;

wherein the third exhaust module is used for exhausting general gas.

In some of these embodiments, the purge apparatus further comprises:

The second pressure relief module is communicated with the second gas supply module and the third discharge module respectively and is used for pressure relief.

In some of these embodiments, further comprising:

and the weight detection device is used for detecting the weight of the tank wagon.

In a third aspect, a semiconductor processing system is provided, comprising:

The special gas supply and delivery apparatus as described in the first aspect.

In a fourth aspect, a semiconductor processing system is provided, comprising:

The special gas supply and transportation system according to the second aspect.

Compared with the prior art, the utility model has the following technical effects:

According to the special gas supply and conveying equipment, the special gas supply and conveying equipment system and the semiconductor process system, the special gas is subjected to secondary filtration by the first filter module and the second filter module, and the special gas is subjected to secondary pressure regulation by the first pressure regulation module and the second pressure regulation module, so that the high-pressure special gas can be converted into the low-pressure special gas, and the use requirement of a process chamber is met; the detection module is used for detecting the low-pressure special gas, judging whether the gas components, the concentration and the like of the special gas meet the use requirements, effectively improving the gas treatment efficiency and improving the yield of the subsequent process; and the first discharge module is used for discharging the special gas, so that the special gas which does not meet the detection requirement is ensured not to enter the subsequent process chamber.

Drawings

FIG. 1 is a schematic view of a special gas delivery supply apparatus according to an embodiment of the present utility model;

FIG. 2 is a schematic diagram of a special gas delivery and supply system according to an embodiment of the present utility model;

FIG. 3 is a schematic view of a purge apparatus according to an embodiment of the present utility model.

Wherein the reference numerals are as follows: 100. special gas supply and conveying equipment; 101. a first gas supply module; 102. a first heating module; 103. a first filtration module; 104. a first voltage regulating module; 105. a second heating module; 106. a second voltage regulating module; 107. an overcurrent protection module; 108. a second filtration module; 109. a first discharge module; 110. a detection module; 111. a second discharge module; 112. the first pressure relief module; 113. a purification module; 114. a purge module;

200. A purge device; 201. a second gas supply module; 202. a low pressure purge module; 203. a high-pressure maintaining module; 204. a third discharge module; 205. a fourth discharge module; 206. the second pressure relief module;

300. a weight detection device;

400. and (5) a tank car.

Detailed Description

The present application will be described and illustrated with reference to the accompanying drawings and examples in order to make the objects, technical solutions and advantages of the present application more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application. All other embodiments, which can be made by a person of ordinary skill in the art based on the embodiments provided by the present application without making any inventive effort, are intended to fall within the scope of the present application.

It is apparent that the drawings in the following description are only some examples or embodiments of the present application, and it is possible for those of ordinary skill in the art to apply the present application to other similar situations according to these drawings without inventive effort. Moreover, it should be appreciated that while such a development effort might be complex and lengthy, it would nevertheless be a routine undertaking of design, fabrication, or manufacture for those of ordinary skill having the benefit of this disclosure, and thus should not be construed as having the benefit of this disclosure.

Reference in the specification to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the application. The appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is to be expressly and implicitly understood by those of ordinary skill in the art that the described embodiments of the application can be combined with other embodiments without conflict.

Unless defined otherwise, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this application belongs. The terms "a," "an," "the," and similar referents in the context of the application are not to be construed as limiting the quantity, but rather as singular or plural. The terms "comprising," "including," "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those listed or may include additional steps or elements not expressly listed or inherent to such process, method, article, or apparatus. The terms "connected," "coupled," and the like in connection with the present application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The term "plurality"/"a plurality" as used herein means two or more. "and/or" describes an association relationship of an association object, meaning that there may be three relationships, e.g., "a and/or B" may mean: a exists alone, A and B exist together, and B exists alone. The character "/" generally indicates that the context-dependent object is an "or" relationship. The terms "first," "second," "third," and the like, as used herein, are merely distinguishing between similar objects and not representing a particular ordering of objects.

Example 1

This embodiment relates to a special gas delivery supply apparatus of the present utility model.

As shown in fig. 1, a special gas supply and delivery device 100 for ultra-high flow delivery of special gas for a tank car system includes a first gas supply module 101, a first heating module 102, a first filtering module 103, a first pressure regulating module 104, a second heating module 105, a second pressure regulating module 106, an over-flow protection module 107, a second filtering module 108, a first discharge module 109, and a detection module 110. Wherein a first end of the first gas supply module 101 is in communication with a special gas source, and a second end of the first gas supply module 101 is in communication with the process chamber; the first heating module 102 is connected with the first gas supply module 101 and is used for performing a first heating process on the special gas; the filtering module is communicated with the first gas supply module 101 and is positioned at the downstream of the first heating module 102, and is used for performing a first filtering process on the special gas subjected to the first heating process; the first pressure regulating module 104 is communicated with the first gas supply module 101 and is positioned at the downstream of the first filtering module 103, and is used for performing a first pressure regulating process on the special gas subjected to the first filtering process; the second heating module 105 is connected to the first gas supply module 101 and located downstream of the first pressure regulating module 104, and is used for performing a second heating process on the special gas subjected to the first pressure regulating process; the second pressure regulating module 106 is communicated with the first gas supply module 101 and is positioned at the downstream of the second heating module 105, and is used for performing a second pressure regulating procedure on the special gas subjected to the second heating procedure; the over-flow protection module 107 is communicated with the first gas supply module 101 and is positioned at the downstream of the second pressure regulating module 106, and is used for performing over-flow protection on the special gas subjected to the second pressure regulating procedure; the second filtering module 108 is communicated with the first gas supply module 101 and is positioned at the downstream of the overflow protection module 107, and is used for performing a second filtering process on the special gas subjected to the second pressure regulating process; the first exhaust module 109 communicates with the first gas supply module 101 for exhausting gas; the detection module 110 is in communication with the first gas supply module 101 and is located downstream of the second filter module 108 for detecting the specific gas passing through the second filter process.

In the present utility model, the special gas obtained by the first gas supply module 101 is high-pressure gas, and cannot be directly applied to the process chamber. Therefore, a depressurization process is required through the first pressure regulating module 104 and the second pressure regulating module 106 to obtain a low pressure gas that can be directly applied to the process chamber.

In the present utility model, the flow path of the special gas in the first gas supply module 101 is as follows:

The device comprises a first heating module 102, a first filtering module 103, a first pressure regulating module 104, a second heating module 105, a second pressure regulating module 106, an overflow protection module 107, a second filtering module 108 and a detection module 110.

In the case that the specific gas detected by the detection module 110 meets the requirement, if the concentration of the specific gas reaches a preset concentration (e.g., 99.9999%) or the pressure of the specific gas reaches a preset pressure, the specific gas is delivered to the process chamber through the first gas supply module 101.

In the case that the specific gas detected by the detection module 110 does not meet the requirement, if the concentration of the specific gas does not reach the preset concentration (e.g., 99.9999%) or the pressure of the specific gas does not reach the preset pressure, the specific gas is discharged (e.g., recycled) through the first discharge module 109.

In the present utility model, the number of the first gas supply modules 101 is several. A plurality of first gas supply modules 101 are arranged in parallel.

In the present utility model, the number of the first heating modules 102 is several. The number of first heating modules 102 matches the number of first gas supply modules 101. Generally, the number of the first heating modules 102 is equal to the number of the first gas supply modules 101, i.e. the first heating modules 102 are in one-to-one correspondence with the first gas supply modules 101.

In the present utility model, the number of the first filtering modules 103 is several. The number of first filter modules 103 matches the number of first gas supply modules 101. Generally, the number of the first filtering modules 103 is equal to the number of the first gas supply modules 101, i.e. the first filtering modules 103 are in one-to-one correspondence with the first gas supply modules 101.

In the present utility model, the number of the first voltage regulating modules 104 is a plurality. The number of first voltage regulating modules 104 matches the number of first gas supply modules 101. Generally, the number of the first pressure regulating modules 104 is equal to the number of the first gas supply modules 101, that is, the first pressure regulating modules 104 are in one-to-one correspondence with the first gas supply modules 101.

In the present utility model, the number of the second heating modules 105 is several. The number of second heating modules 105 matches the number of first gas supply modules 101. Generally, the number of the second heating modules 105 is equal to the number of the first gas supply modules 101, i.e. the second heating modules 105 are in one-to-one correspondence with the first gas supply modules 101.

In the present utility model, the number of the second voltage regulating modules 106 is several. The number of second voltage regulating modules 106 matches the number of first gas supply modules 101. Generally, the number of the second pressure regulating modules 106 is equal to the number of the first gas supplying modules 101, that is, the second pressure regulating modules 106 are in one-to-one correspondence with the first gas supplying modules 101.

In the present utility model, the number of the over-flow protection modules 107 is several. The number of over-flow protection modules 107 matches the number of first gas supply modules 101. Generally, the number of the over-flow protection modules 107 is equal to the number of the first gas supply modules 101, i.e. the over-flow protection modules 107 are in one-to-one correspondence with the first gas supply modules 101.

In the present utility model, the number of the second filter modules 108 is several. The number of second filter modules 108 matches the number of first gas supply modules 101. Generally, the number of second filter modules 108 is equal to the number of first gas supply modules 101, i.e. the second filter modules 108 are in one-to-one correspondence with the first gas supply modules 101.

The first gas supply module 101 includes a first gas supply line, a first gas input interface, and a first gas output interface. The first gas supply pipeline is respectively communicated with the special gas source and the process chamber; the first gas input interface is arranged at the first end of the first gas supply pipeline and is connected with a special gas source; the first gas output interface is arranged at the second end of the first gas supply pipeline and is connected with the process chamber.

Further, the first gas supply module 101 further includes a first control valve and a second control valve. The first control valve is disposed in the first gas supply pipeline and located downstream of the first gas input interface and upstream of the first heating module 102, for controlling opening and closing of the first gas supply pipeline; the second control valve is disposed in the first gas supply line and located downstream of the second filter module 108 and upstream of the first gas output port, for controlling the opening and closing of the first gas supply line.

In some of these embodiments, the first control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

In some of these embodiments, the second control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

Further, the first gas supply module 101 further comprises a second gas output interface. The second gas output interface is arranged at the second end of the first gas supply pipeline and is used for supplying special gas.

The second gas output interface can be used for conveying low-pressure special gas to other storage equipment.

Further, the first gas supply module 101 further includes a third control valve. The third control valve is disposed on the first gas supply line and located downstream of the second filter module 108 and upstream of the second gas output port, for controlling the opening and closing of the first gas supply line.

In some of these embodiments, the third control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

In some embodiments, where the number of first gas supply modules 101 is several, the several first gas supply modules 101 may share the same first gas output interface, the same second gas output interface. The same second control valve and the same third control valve may be shared.

The first heating module 102 includes a first heating module. The first gas supply module 101 is embedded in the first heating module, and is used for performing a first heating process on the special gas.

Specifically, a first gas supply pipeline is embedded in the first heating module.

In some of these embodiments, the first heating module heats the special gas by heat exchange.

The first filter module 103 comprises a first filter. The first filter is in communication with the first gas supply module 101, and is located downstream of the first heating module 102 and upstream of the first pressure regulating module 104, and is used for performing a first filtering process on the special gas subjected to the first heating process.

Specifically, the first filter is disposed in the first gas supply line and downstream of the first heating module.

Further, the first filtration module 103 also includes a fourth control valve. The fourth control valve is disposed on the first gas supply module 101 and located upstream of the first filter and downstream of the first heating module 102, for controlling the opening and closing of the first gas supply module 101.

Specifically, the fourth control valve is disposed in the first gas supply line and downstream of the first heating module.

In some of these embodiments, the fourth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

The first voltage regulation module 104 includes a first voltage regulator. The first pressure regulator is in communication with the first gas supply module 101, and is located downstream of the first filtering module 103 and upstream of the second heating module 105, and is used for performing a first pressure regulating process on the special gas subjected to the first filtering process.

Specifically, the first pressure regulator is disposed in the first gas supply line and downstream of the first filter.

In some of these embodiments, the first voltage regulator includes, but is not limited to, 250PSIG REG.

The second heating module 105 includes a second heating module. The second heating module is embedded with the first gas supply module 101, and is located downstream of the first pressure regulating module 104 and upstream of the second pressure regulating module 106, so as to perform the second heating process on the special gas passing through the first pressure regulating process.

Specifically, a first gas supply pipeline is embedded in the second heating module and is positioned at the downstream of the first pressure regulator.

In some of these embodiments, the second heating module heats the special gas by heat exchange.

The second voltage regulation module 106 includes a second voltage regulator. The second pressure regulator is in communication with the first gas supply module 101, and is located downstream of the second heating module 105 and upstream of the over-flow protection module 107, and is used for performing a second pressure regulating process on the special gas subjected to the second heating process.

Specifically, the second pressure regulator is disposed in the first gas supply pipeline and is located downstream of the second heating module.

Further, the second pressure regulating module 106 also includes a first pressure monitor. Wherein the first pressure monitor is in communication with the first gas supply module 101 and is located upstream of the second pressure regulator and downstream of the second heating module 105 for monitoring the pressure (i.e. the pressure of the specific gas).

Specifically, the first pressure monitor is disposed in the first gas supply line and downstream of the second heating module.

In some of these embodiments, the first pressure monitor includes, but is not limited to, a pressure gauge.

The over-flow protection module 107 includes an over-flow protector. The over-flow protector is communicated with the first gas supply module 101, is positioned downstream of the second pressure regulating module 106 and upstream of the second filtering module 108, and is used for protecting the over-flow of the special gas subjected to the second pressure regulating process.

Specifically, the over-flow protector is arranged on the first gas supply pipeline and is positioned at the downstream of the second pressure regulator.

In some of these embodiments, the over-flow protector includes, but is not limited to, an over-flow protection switch.

The second filter module 108 includes a second filter. The second filter is in communication with the first gas supply module 101 and located downstream of the over-flow protection module 107, and is configured to perform a second filtering process on the special gas subjected to the second pressure regulating process.

Specifically, the second filter is disposed in the first gas supply line downstream of the over-flow protector.

Further, the second filter module 108 also includes a fifth control valve, a sixth control valve, and a seventh control valve. The fifth control valve is disposed on the first gas supply module 101 and located upstream of the second filter and downstream of the over-flow protection module 107, and is used for controlling the opening and closing of the first gas supply module 101; the sixth control valve is disposed on the first gas supply module 101 and downstream of the second filter, and is used for controlling the opening and closing of the first gas supply module 101; the seventh control valve is disposed on the first gas supply module 101 and downstream of the sixth control valve, for controlling the opening and closing of the first gas supply module 101.

Specifically, the fifth control valve is arranged on the first gas supply pipeline and is positioned at the downstream of the overflow protector; the sixth control valve is arranged on the first gas supply pipeline; the seventh control valve is arranged on the first gas supply pipeline.

More specifically, the sixth control valve is disposed upstream of the position where the detection module 110 communicates with the first gas supply line; the seventh control valve is disposed downstream of the location where the detection module 110 communicates with the first gas supply line.

In some of these embodiments, the fifth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

In some of these embodiments, the sixth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

In some of these embodiments, the seventh control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

Further, the second filtration module 108 also includes a second pressure monitor. Wherein a second pressure monitor is in communication with the first gas supply module 101 and is located upstream of the second filter and downstream of the over-flow protection module 107 for monitoring the pressure (i.e. the pressure of the specific gas).

Specifically, the second pressure monitor is disposed in the first gas supply line and downstream of the over-flow protector.

In some of these embodiments, the second pressure monitor includes, but is not limited to, a pressure gauge.

The first exhaust module 109 includes a first vacuum generator, a first gas input line, and a first gas exhaust line. Wherein the first vacuum generator is in communication with the first gas supply module 101; the first gas input pipeline is communicated with the first vacuum generator and is positioned at the upstream of the first vacuum generator; a first gas exhaust line communicates with and is downstream of the first vacuum generator for exhausting gas.

Specifically, the first vacuum generator is in communication with a first gas supply line.

More specifically, the location at which the first vacuum generator communicates with the first gas supply line is located between the over-flow protector and the second filter.

In some of these embodiments, the first vacuum generator is VGBV/V.G/CV.

Further, the first drain module 109 also includes an eighth control valve, a first check valve, a ninth control valve, and a tenth control valve. The eighth control valve is disposed on the first gas supply module 101 and located upstream of the first vacuum generator, and is used for controlling the opening and closing of the first gas supply module 101; the first check valve is arranged on the first gas supply module 101 and is positioned downstream of the eighth control valve and upstream of the first vacuum generator; the ninth control valve is disposed on the first gas supply module 101 and downstream of the first check valve and upstream of the first vacuum generator; the tenth control valve is arranged on the first gas discharge pipeline and used for controlling the opening and closing of the first gas discharge pipeline.

Specifically, the eighth control valve is disposed in the first gas supply line; the first check valve is arranged on the first gas supply pipeline; the ninth control valve is arranged on the first gas supply pipeline.

In some of these embodiments, the eighth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

In some of these embodiments, the ninth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

In some of these embodiments, the tenth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

Further, the first exhaust module 109 also includes an eleventh control valve. The eleventh control valve is arranged on the first gas discharge pipeline and is positioned at the downstream of the tenth control valve and used for controlling the opening and closing of the first gas discharge pipeline.

In this case, one of the tenth control valve and the eleventh control valve is a manual valve and the other is an automatic valve.

In some of these embodiments, the eleventh control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

Further, the first exhaust module 109 also includes a third pressure monitor. Wherein a third pressure monitor is in communication with the first gas supply module 101 and is located upstream of the first vacuum generator for monitoring the pressure.

Specifically, the third pressure monitor is disposed on the first gas supply line.

In some of these embodiments, the third pressure monitor includes, but is not limited to, a pressure gauge.

The detection module 110 includes a first gas detection circuit. The first gas detection pipeline is communicated with the first gas supply module 101 and is located at the downstream of the second filtering module 108, and is used for detecting the special gas subjected to the second filtering process.

Specifically, the first gas detection line communicates with the first gas supply line and is located downstream of the second filter.

Further, the detection module 110 also includes a twelfth control valve. The twelfth control valve is arranged on the first gas detection pipeline and used for controlling the opening and closing of the first gas detection pipeline.

In some of these embodiments, the twelfth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

Further, the special gas supply and delivery apparatus 100 further includes a first safety assurance module. The first safety protection module is disposed in the special gas supply and delivery device 100 and is used for monitoring environmental information.

The first safety guarantee module comprises a first smoke monitor, a first liquid sprayer and a first blower. The first smoke monitor is arranged at the top of the environment where the special gas supply and conveying equipment 100 is positioned and is used for monitoring smoke information of the environment; the first liquid sprayer is arranged at the top of the environment where the special gas supply and delivery equipment 100 is positioned and is used for spraying liquid to the environment; the first blower is disposed at the top of the environment where the special gas supply and delivery apparatus 100 is located, and is used for exhausting the gas of the environment.

Under the condition that special gas supply and conveying equipment leaks and burns, a first smoke monitor is used for early warning; spraying by using a first liquid sprayer to reduce the concentration of relevant gases in the environment and prevent explosion; the first blower can rapidly discharge the gas in the environment to the exhaust gas treatment system.

In some of these embodiments, the first smoke monitor includes, but is not limited to, a smoke detector.

In some of these embodiments, the first liquid sprayer includes, but is not limited to, a showerhead.

In some of these embodiments, the first blower includes, but is not limited to, an exhaust fan.

For the special gas supply and delivery apparatus 100 of the present utility model, it includes several embodiments as follows:

First embodiment

The first gas supply module 101, the first heating module 102, the first filtering module 103, the first pressure regulating module 104, the second heating module 105, the second pressure regulating module 106, the over-flow protection module 107 and the second filtering module 108 are all one.

The transport paths of the special gases are as follows:

The device comprises a first gas input interface, a first heating module, a first filter, a first pressure regulator, a second heating module, a second pressure regulator, an overflow protector, a second filter and a first gas detection pipeline;

The device comprises a first gas input interface, a first heating module, a first filter, a first pressure regulator, a second heating module, a second pressure regulator, an overflow protector, a second filter and a first gas output interface or a second gas output interface.

(Second) second embodiment

The number of the first gas supply module 101, the first heating module 102, the first filtering module 103, the first pressure regulating module 104, the second heating module 105, the second pressure regulating module 106, the over-flow protection module 107 and the second filtering module 108 is two.

The transport paths of the special gases are as follows:

1) First gas input interface, first heating module, first filter, first pressure regulator, first second heating module, first second pressure regulator, first overflow protector, first second filter and first gas detection pipeline;

First gas input interface → first heating module first filter first voltage regulator →

First second heating module- & gtfirst second voltage regulator- & gtfirst over-flow protector- & gtfirst second filter- & gtfirst gas output interface or second gas output interface.

2) Second first gas input interface-second first heating module-second first filter-second first pressure regulator-second heating module-second pressure regulator-second overflow protector-second filter-first gas detection pipeline;

Second first gas input interface, second first heating module, second first filter, second first pressure regulator, second heating module, second pressure regulator, second overflow protector, second filter, first gas output interface or second gas output interface.

Typically, only one of 1) and 2) is performed at the same time.

The utility model has the following technical effects:

1) The special gas is subjected to secondary filtration by the first filtration module and the second filtration module, and is subjected to secondary pressure regulation by the first pressure regulation module and the second pressure regulation module, so that the high-pressure special gas can be converted into the low-pressure special gas, and the use requirement of the process chamber is met;

2) The detection module is used for detecting the low-pressure special gas, judging whether the gas components, the concentration and the like of the special gas meet the use requirements, effectively improving the gas treatment efficiency and improving the yield of the subsequent process;

3) And the first discharge module is used for discharging the special gas, so that the special gas which does not meet the detection requirement is ensured not to enter the subsequent process chamber.

Example 2

This embodiment is a modified embodiment of embodiment 1.

As shown in fig. 1, the special gas supply and delivery apparatus 100 further includes a second exhaust module 111. Wherein the second discharge module 111 communicates with the first discharge module 109 for discharging the special gas.

In this embodiment, the first exhaust module 109 is used to exhaust a general gas.

The second exhaust module 111 includes a second gas exhaust line. Wherein the second gas discharge line communicates with the first discharge module 109 for discharging the special gas.

Specifically, the second gas discharge line is in communication with the first vacuum generator and is disposed in parallel with the first gas discharge line.

Further, the second exhaust module 111 also includes a thirteenth control valve. The thirteenth control valve is arranged on the second gas discharge pipeline and used for controlling the opening and closing of the second gas discharge pipeline.

In some of these embodiments, the thirteenth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

Further, the second exhaust module 111 also includes a fourteenth control valve. The fourteenth control valve is arranged on the second gas discharge pipeline and is positioned at the downstream of the thirteenth control valve and used for controlling the opening and closing of the second gas discharge pipeline.

In this case, one of the thirteenth control valve and the fourteenth control valve is a manual valve and one is an automatic valve.

In some of these embodiments, the fourteenth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

The technical effects of this embodiment are as follows:

the first and second discharge modules are used for respectively discharging the common gas and the special gas, so that the discharge is controlled in a partitioned manner, the cost is reduced, and the pollution is reduced.

Example 3

This embodiment is a modified embodiment of embodiments 1 to 2.

As shown in fig. 1, the special gas supply delivery apparatus 100 further includes a first pressure relief module 112. The first pressure relief module 112 is respectively communicated with the first gas supply module 101 and the first discharge module 109 for pressure relief.

In some embodiments, the number of first pressure relief modules 112 is several. The number of first pressure relief modules 112 matches the number of first gas supply modules 101. Generally, the number of the first pressure relief modules 112 is equal to the number of the first gas supply modules 101, that is, the first pressure relief modules 112 are in one-to-one correspondence with the first gas supply modules 101.

The first pressure relief module 112 includes a first pressure relief line, a second pressure relief line, and a first pressure relief valve. Wherein, the first pressure relief pipeline is respectively communicated with the first gas supply module 101 and the first discharge module 109; the second pressure relief pipeline is respectively communicated with the first gas supply module 101 and the first discharge module 109; the first pressure relief valve is arranged on the first pressure relief pipeline and used for relieving pressure.

Specifically, the first pressure relief pipeline is respectively communicated with the first gas supply pipeline and the first vacuum generator; the second pressure relief pipeline is respectively communicated with the first gas supply pipeline and the first vacuum generator.

More specifically, the communication position of the first pressure relief pipeline and the first gas supply pipeline is located upstream of the first filter; the communication position of the second pressure relief pipeline and the first gas supply pipeline is positioned at the upstream of the first filter.

Further, the first pressure relief module 112 also includes a fifteenth control valve, a second check valve, a sixteenth control valve, and a third check valve. The fifteenth control valve is arranged on the first pressure relief pipeline and is positioned at the upstream of the first pressure relief valve and used for controlling the opening and closing of the first pressure relief pipeline; the second one-way valve is arranged on the first pressure relief pipeline and is positioned at the downstream of the first pressure relief valve; the sixteenth control valve is arranged on the second pressure relief pipeline and used for controlling the opening and closing of the second pressure relief pipeline; the third check valve is arranged on the second pressure relief pipeline and is positioned at the downstream of the sixteenth control valve.

In some of these embodiments, the fifteenth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

In some of these embodiments, the sixteenth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

Further, the first pressure relief module 112 also includes a fourth pressure monitor. Wherein a fourth pressure monitor is in communication with the first gas supply module 101 and upstream of the first pressure relief valve for monitoring pressure.

Specifically, the fourth pressure monitor is disposed in the first gas supply line.

More specifically, the fourth pressure monitor is located upstream of the first filter.

In some of these embodiments, the fourth pressure monitor includes, but is not limited to, a pressure gauge.

The technical effects of this embodiment are as follows:

The first pressure relief module can realize partition control emission of common gas and special gas, so that the cost is reduced and the pollution is reduced.

Example 4

This embodiment is a modified embodiment of embodiments 1 to 3.

As shown in fig. 1, the special gas supply and delivery apparatus 100 further includes a purification module 113. Wherein the purification module 113 is in communication with the first gas supply module 101 and downstream of the second filtration module 108 for performing a purification process on the special gas subjected to the second filtration process.

In this embodiment, the detection module 110 is further configured to detect the special gas subjected to the purification process.

In some of these embodiments, purification module 113 is a number. Several purification modules 113 are arranged in parallel.

For the relationship of the first gas supply module 101 to the purification module 113, comprising:

1) The first gas supply module 101 and the purification modules 113 are in a one-to-many relationship, i.e. a first gas supply module 101 is respectively communicated with a plurality of purification modules 113;

2) The first gas supply module 101 and the purification module 113 are in a many-to-one relationship, i.e., one purification module 113 is respectively communicated with a plurality of first gas supply modules 101;

3) The first gas supply module 101 and the purification module 113 are in a many-to-many relationship, i.e. a first gas supply module 101 is respectively connected to a plurality of purification modules 113, and a purification module 113 is respectively connected to a plurality of first gas supply modules 101.

Further, the first gas supply module 101 further includes a seventeenth control valve. The seventeenth control valve is disposed in the first gas supply line and located upstream of the second control valve and downstream of the purification module 113, for controlling opening and closing of the first gas supply line.

In this case, one of the second control valve and the seventeenth control valve is a manual valve and the other is an automatic valve.

In some of these embodiments, the seventeenth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

Further, the first gas supply module 101 further includes an eighteenth control valve. The seventeenth control valve is disposed in the first gas supply line and located upstream of the third control valve and downstream of the purification module 113, for controlling opening and closing of the first gas supply line.

In some of these embodiments, the eighteenth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

In this case, one of the third control valve and the eighteenth control valve is a manual valve and one is an automatic valve.

In some embodiments, in the case that the first gas supply modules 101 are plural, the plural first gas supply modules 101 may share the same seventeenth control valve, the same eighteenth control valve.

Further, the detection module 110 further includes a second gas detection line. The second gas detection pipeline is communicated with the first gas supply module 101 and is located downstream of the purification module 113 and used for detecting the special gas subjected to the purification process.

Specifically, the second gas detection line communicates with the first gas supply line.

Further, the detection module 110 also includes a nineteenth control valve. The nineteenth control valve is arranged on the second gas detection pipeline and is used for controlling the opening and closing of the second gas detection pipeline.

In some embodiments thereof, the nineteenth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

The purification module 113 includes a purification module. The purification module is in communication with the first gas supply module 101 and located downstream of the second filter module 108, and is configured to perform a purification process on the special gas subjected to the second filter process.

Specifically, the purification module is in communication with the first gas supply line and downstream of the second filter.

In addition, the purification module 113 is also in communication with the first discharge module 109.

Further, purification module 113 also includes a twenty-first control valve, a twenty-second control valve, a twenty-third control valve, and a twenty-fourth control valve. The twentieth control valve is disposed on the first gas supply module 101 and located upstream of the purification module and downstream of the second filter module 108, and is used for controlling the opening and closing of the first gas supply module 101; the twenty-first control valve is disposed in the first gas supply module 101 and downstream of the twentieth control valve; the twenty-second control valve is disposed on the first gas supply module 101 and downstream of the twentieth control valve and upstream of the purification module; the twenty-third control valve is disposed in the first gas supply module 101 and downstream of the purification module; the twenty-fourth control valve is disposed in the first gas supply module 101 downstream of the purification module and upstream of the first discharge module 109.

Specifically, the twentieth control valve is disposed in the first gas supply line downstream of the second filter; the twenty-first control valve is arranged on the first gas supply pipeline; the twenty-second control valve is arranged on the first gas supply pipeline; the twenty-third control valve is arranged on the first gas supply pipeline; the twenty-fourth control valve is disposed in the first gas supply line upstream of the first vacuum generator.

In some of these embodiments, the twentieth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

In some of these embodiments, the twenty-first control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

In some of these embodiments, the twenty-second control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

In some of these embodiments, the twenty-third control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

In some of these embodiments, the twenty-fourth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

In some of these embodiments, where there are several purification modules 113, several purification modules 113 may share the same twentieth control valve, the same twenty-first control valve.

Further, the special gas supply delivery apparatus 100 also includes a purge module 114. Wherein the purge module 114 communicates with the purification module 113 for purging.

In some of these embodiments, the purge module 114 is a number. The number of purge modules 114 matches the number of purification modules 113. Typically, the number of purge modules 114 is equal to the number of purification modules 113, i.e. purge modules 114 are in one-to-one correspondence with purification modules 113.

The purge module 114 includes a purge line. Wherein the purge line is in communication with the purification module 113 for purging.

Specifically, the purge line communicates with the purification module.

Further, the purge module 114 also includes a twenty-fifth control valve and a fourth check valve. The twenty-fifth control valve is arranged on the purging pipeline and used for controlling the opening and closing of the purging pipeline; the fourth check valve is disposed in the purge line downstream of the twenty-fifth control valve.

In some of these embodiments, the twenty-fifth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

For the special gas supply and delivery apparatus 100 of the present embodiment, it includes the following several implementations:

First embodiment

The purification module 113 is one.

The transport paths of the special gases are as follows:

1) The device comprises a first gas input interface, a first heating module, a first filter, a first pressure regulator, a second heating module, a second pressure regulator, an overflow protector, a second filter and a first gas detection pipeline;

2) The device comprises a first gas input interface, a first heating module, a first filter, a first pressure regulator, a second heating module, a second pressure regulator, an overflow protector, a second filter and a first gas detection pipeline;

The device comprises a first gas input interface, a first heating module, a first filter, a first pressure regulator, a second heating module, a second pressure regulator, an overflow protector, a second filter, a purification module and a second gas detection pipeline;

The device comprises a first gas input interface, a first heating module, a first filter, a first pressure regulator, a second heating module, a second pressure regulator, an overflow protector, a second filter, a purification module and a first gas output interface or a second gas output interface.

(Second) second embodiment

The number of purification modules 113 is two.

The transport paths of the special gases are as follows:

The device comprises a first gas input interface, a first heating module, a first filter, a first pressure regulator, a second heating module, a second pressure regulator, an overflow protector, a second filter, a first purification module and a second gas detection pipeline;

First gas input interface, first heating module, first filter, first pressure regulator, second heating module, second pressure regulator, overflow protector, second filter, first purifying module, first gas output interface or second gas output interface.

3) The device comprises a first gas input interface, a first heating module, a first filter, a first pressure regulator, a second heating module, a second pressure regulator, an overflow protector, a second filter and a first gas detection pipeline;

the device comprises a first gas input interface, a first heating module, a first filter, a first pressure regulator, a second heating module, a second pressure regulator, an overflow protector, a second filter, a second purifying module and a second gas detection pipeline;

First gas input interface, first heating module, first filter, first pressure regulator, second heating module, second pressure regulator, overflow protector, second filter, second purifying module, first gas output interface or second gas output interface.

Typically, only one of 2) and 3) is performed at the same time.

The technical effects of this embodiment are as follows:

And the purification module is used for purifying the special gas subjected to secondary filtration and secondary pressure regulation, so that the purity of the special gas is further improved, the impurity content is reduced, and the yield of the subsequent process is improved.

Example 5

This embodiment relates to a special gas supply and delivery system of the present utility model.

As shown in fig. 2, a special gas supply and delivery system includes the special gas supply and delivery apparatus 100 and the purge apparatus 200 as described in any one of embodiments 1 to 4. Wherein the purge device 200 is respectively communicated with the special gas supply and delivery device 100 and the tank car 400, and is used for acquiring the special gas transmitted by the tank car 400 and delivering the special gas to the special gas supply and delivery device 100.

In some of these embodiments, the number of purge devices 200 is several. A number of purge devices 200 are arranged in parallel.

The number of purge devices 200 matches the number of first gas supply modules 101 of the special gas supply delivery device 100. Generally, the number of purge devices 200 is equal to the number of first gas supply modules 101, i.e., the purge devices 200 are in one-to-one correspondence with the first gas supply modules 101.

Further, the special gas supply and delivery system further includes a weight detecting device 300. Wherein the weight detection device 300 is used for detecting the tank car 400.

In some of these embodiments, the number of weight detection devices 300 is several.

The number of weight detecting devices 300 matches the number of purge devices 200. Generally, the number of weight detecting devices 300 is equal to the number of purge devices 200, i.e., the weight detecting devices 300 are in one-to-one correspondence with the purge devices 200.

In some of these embodiments, the weight detection device 300 is a scale.

As shown in fig. 3, the purge apparatus 200 includes a second gas supply module 201, a low pressure purge module 202, a high pressure dwell module 203, and a third exhaust module 204. Wherein the first end of the second gas supply module 201 is communicated with the tank car 400, and the second end of the second gas supply module 201 is communicated with the first end of the first gas supply module 101 of the special gas supply and conveying device 100, so as to obtain the special gas transmitted by the tank car 400 and convey the special gas to the special gas supply and conveying device 100; the low pressure purge module 202 communicates with the second gas supply module 201 for low pressure purging; the high-pressure maintaining module 203 is communicated with the low-pressure purging module 202 and is used for maintaining pressure at high pressure; the third exhaust module 204 communicates with the second gas supply module 201 for exhausting gas.

The second gas supply module 201 includes a second gas supply line, a second gas input interface, and a third gas output interface. Wherein the second gas supply pipeline is respectively communicated with the tank car 400 and the first gas supply module 101; the second gas input interface is disposed at the first end of the second gas supply line and is connected to the tank car 400; the third gas output port is disposed at the second end of the second gas supply pipeline and is connected to the first gas supply module 101.

Specifically, the second gas supply line communicates with the first gas supply line; the third gas output interface is communicated with the first gas input interface through a pipeline.

Further, the second gas supply module 201 further includes a twenty-sixth control valve and a twenty-seventh control valve. The twenty-sixth control valve is arranged on the second gas supply pipeline and positioned at the downstream of the second gas input interface and is used for controlling the opening and closing of the second gas supply pipeline; the twenty-seventh control valve is arranged on the second gas supply pipeline and is positioned at the upstream of the third gas output interface and used for controlling the opening and closing of the second gas supply pipeline.

In some of these embodiments, the twenty-sixth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

In some of these embodiments, the twenty-seventh control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

The low pressure purge module 202 includes a low pressure purge line. Wherein the low pressure purge line is in communication with the second gas supply module 201 for low pressure purging.

Specifically, the low pressure purge line communicates with the second gas supply line.

Further, the low pressure purge module 202 also includes a micro drain valve, a fifth check valve, and a twenty eighth control valve. Wherein, the micro-leakage valve is arranged on the low-pressure purging pipeline; the fifth one-way valve is arranged on the low-pressure purging pipeline and is positioned at the downstream of the micro-leakage valve; the twenty-eighth control valve is arranged on the low-pressure purging pipeline and is positioned at the downstream of the fifth one-way valve and used for controlling the opening and closing of the low-pressure purging pipeline.

In some of these embodiments, the twenty-eighth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

Further, the low pressure purge module 202 also includes a fifth pressure monitor. The fifth pressure monitor is communicated with the low-pressure purging pipeline and is used for monitoring the pressure of the pipeline.

Specifically, the fifth pressure monitor is in communication with the low pressure purge line, the second gas supply line, respectively.

In some of these embodiments, the fifth pressure monitor includes, but is not limited to, a pressure gauge.

The high-pressure maintaining module 203 includes a high-pressure maintaining pipeline. The high-pressure maintaining pipeline is communicated with the low-pressure purging module 202 and is used for high-pressure maintaining.

Specifically, the high pressure maintaining pipeline is communicated with the low pressure purging pipeline.

More specifically, the communication position of the high-pressure maintaining pipeline and the low-pressure purging pipeline is located between the fifth one-way valve and the twenty-eighth control valve.

Further, the high-pressure maintaining module 203 further includes a twenty-ninth control valve and a sixth check valve. The twenty-ninth control valve is arranged on the high-pressure maintaining pipeline and used for controlling the opening and closing of the high-pressure maintaining pipeline; the sixth one-way valve is arranged on the high-pressure maintaining pipeline and is positioned at the downstream of the twenty-ninth control valve.

In some of these embodiments, the twenty-ninth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

The third exhaust module 204 includes a second vacuum generator, a second gas input line, and a third gas exhaust line. Wherein the second vacuum generator is in communication with the second gas supply module 201; the second gas input pipeline is communicated with the second vacuum generator and is positioned at the upstream of the second vacuum generator; a third gas discharge line communicates with the second vacuum generator and is located downstream of the second vacuum generator for discharging gas.

Specifically, the second vacuum generator is in communication with a second gas supply line.

More specifically, the position at which the second vacuum generator communicates with the second gas supply line is located between the twenty-sixth control valve and the twenty-seventh control valve.

In some of these embodiments, the second vacuum generator is VGBV/V.G/CV.

Further, the third drain module 204 also includes a thirty-first control valve, a thirty-second control valve, and a thirty-first check valve. The thirty-second control valve is disposed on the second gas supply module 201 and upstream of the second vacuum generator, and is used for controlling the second gas supply module 201 to be opened and closed; the seventh one-way valve is disposed in the second gas supply module 201 downstream of the thirty-first control valve and upstream of the second vacuum generator; a thirty-first control valve is disposed in the second gas supply module 201 downstream of the seventh one-way valve and upstream of the second vacuum generator; the thirty-second control valve is arranged on the third gas discharge pipeline and used for controlling the opening and closing of the third gas discharge pipeline.

Specifically, the thirty-first control valve is disposed in the second gas supply line; the seventh one-way valve is arranged on the second gas supply pipeline; the thirty-first control valve is disposed in the second gas supply line.

In some of these embodiments, the thirty-first control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

In some of these embodiments, the thirty-second control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

Further, the third exhaust module 204 also includes a thirty-third control valve. The thirty-third control valve is arranged on the third gas discharge pipeline and is positioned at the downstream of the thirty-second control valve and used for controlling the opening and closing of the third gas discharge pipeline.

In this case, one of the thirty-second control valve and the thirty-third control valve is a manual valve and one is an automatic valve.

In some of these embodiments, the thirty-third control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

Further, the third venting module 204 also includes a sixth pressure monitor. Wherein a sixth pressure monitor is in communication with the second gas supply module 201 and is located upstream of the second vacuum generator for monitoring pressure.

Specifically, the sixth pressure monitor is disposed in the second gas supply line.

In some of these embodiments, the sixth pressure monitor includes, but is not limited to, a pressure gauge.

Further, the purge apparatus 200 further comprises a second safety assurance module. The second safety guarantee module is disposed on the purge device 200 and is used for monitoring environmental information.

The second safety guarantee module comprises a second smoke monitor, a second liquid sprayer, a second blower, an ultraviolet-infrared switch and a temperature monitor. The second smoke monitor is arranged at the top of the environment where the purging device 200 is located and is used for monitoring smoke information of the environment; the second liquid sprayer is arranged at the top of the environment where the purging device 200 is positioned and is used for spraying liquid to the environment; the second blower is arranged at the top of the environment where the purging device 200 is positioned and is used for exhausting the air of the environment; the ultraviolet-infrared switch is arranged at the top of the environment where the purging device 200 is positioned and is used for monitoring whether open fire exists in the environment; the temperature monitor is disposed on top of the environment in which the purge apparatus 200 is located for monitoring the temperature of the environment.

Under the condition that the purging equipment leaks and burns, a second smoke monitor is used for early warning; spraying by using a second liquid sprayer to reduce the concentration of relevant gases in the environment and prevent explosion; the gas in the environment can be quickly discharged to the exhaust gas treatment system by the second blower.

In some of these embodiments, the second smoke detector is a smoke detector.

In some of these embodiments, the second liquid sprayer is a showerhead.

In some of these embodiments, the second blower includes, but is not limited to, an exhaust fan.

In some of these embodiments, the ultraviolet-infrared Switch is an infrared-ultraviolet Switch (IR Switch).

In some of these embodiments, the temperature monitor includes, but is not limited to, a temperature sensor.

The utility model has the following technical effects:

through setting up low pressure and sweep module and high pressure pressurize module, can effectively protect the pipeline, improve production efficiency.

Example 6

This embodiment is a modified embodiment of embodiment 5.

As shown in fig. 3, the purge apparatus 200 further includes a fourth exhaust module 205. Wherein the fourth discharge module 205 communicates with the third discharge module 204 for discharging the special gas.

In this embodiment, the third exhaust module 204 is used for exhausting the general gas.

The fourth exhaust module 205 includes a fourth gas exhaust line. Wherein the fourth gas discharge line communicates with the third discharge module 204 for discharging the special gas.

Specifically, the fourth gas discharge line is in communication with the second vacuum generator and is disposed in parallel with the third gas discharge line.

Further, the fourth exhaust module 205 also includes a thirty-fourth control valve. The thirty-fourth control valve is arranged on the fourth gas discharge pipeline and used for controlling the opening and closing of the fourth gas discharge pipeline.

In some of these embodiments, the thirty-fourth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

Further, the fourth exhaust module 205 also includes a thirty-fifth control valve. The thirty-fifth control valve is arranged on the fourth gas discharge pipeline and is positioned at the downstream of the thirty-fourth control valve and used for controlling the opening and closing of the fourth gas discharge pipeline.

In this case, one of the thirty-fourth control valve and the thirty-fifth control valve is a manual valve and one is an automatic valve.

In some of these embodiments, the thirty-fifth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

The technical effects of this embodiment are as follows:

And the third and fourth discharge modules are used for respectively discharging the common gas and the special gas, so that the discharge is controlled in a partitioned manner, the cost is reduced, and the pollution is reduced.

Example 7

This embodiment is a modified embodiment of each of embodiments 5 to 6.

As shown in fig. 3, the purge apparatus 200 further includes a second pressure relief module 206. The second pressure relief module 206 is respectively communicated with the second gas supply module 201 and the third discharge module 204, and is used for pressure relief.

The second pressure relief module 206 includes a third pressure relief line and a second pressure relief valve. Wherein, the third pressure relief pipeline is respectively communicated with the second gas supply module 201 and the third discharge module 204; the second pressure relief valve is arranged on the third pressure relief pipeline and used for relieving pressure.

Specifically, the third pressure relief pipeline is respectively communicated with the second gas supply pipeline and the second vacuum generator.

Further, the second pressure relief module 206 also includes a thirty-sixth control valve and an eighth one-way valve. The thirty-sixth control valve is arranged on the third pressure relief pipeline and is positioned at the upstream of the second pressure relief valve and used for controlling the opening and closing of the third pressure relief pipeline; the eighth one-way valve is arranged on the third pressure relief pipeline and is positioned at the downstream of the second pressure relief valve.

In some of these embodiments, the thirty-sixth control valve includes, but is not limited to, a diaphragm valve, such as a manual diaphragm valve, a pneumatic diaphragm valve.

The technical effects of this embodiment are as follows:

The second pressure relief module can realize partition control emission of common gas and special gas, thereby reducing cost and pollution.

Example 8

This embodiment relates to a semiconductor processing system of the present utility model.

A semiconductor processing system comprising the special gas delivery supply apparatus 100 as described in embodiments 1 to 4.

Further, the semiconductor processing system also includes a special purge apparatus 200. I.e., the semiconductor processing system includes the special gas delivery supply system as described in examples 5-7.

Example 9

This example relates to one embodiment of the present utility model.

As shown in fig. 2, a special gas ultra-high flow delivery system (corresponding to a special gas delivery supply system) suitable for a tank car system (corresponding to a tank car 400) comprises a special gas ultra-high flow delivery cabinet (corresponding to a special gas delivery supply device 100), at least one front-mounted purge bin (corresponding to a purge device 200), and at least one scale (corresponding to a weight detection device 300).

The tank car comprises A pneumatic valve ISO-A/ISO-B.

The front purge tank includes pneumatic valves SI-1/SI-2, pneumatic valves SI-A/SI-B, pneumatic diaphragm valves PV1-L/PV1-R, check valves CV7, manual diaphragm valves MIV, VGBV2/V.G/CV, pressure display units PTS4, pneumatic micro-leakage valves PGBVL/PGBVR, check valves CV5, pneumatic diaphragm valves PGIL/PGIR, pressure display units PTS3, pneumatic diaphragm valves HPAL/HPAR, check valves CV6, manual diaphragm valves MSIV2, angle valves SV2, check valves CV8, pneumatic diaphragm valves PI1/PI2, manual diaphragm valves MIVV/MIVV.

Wherein, PV1-L/PV1-R, CV, MIV, VGBV2/V.G/CV, PTS4, PI1/PI2, MIVV1/MIVV2 form a discharge pipeline; PGBVL/PGBVR, CV5, PGIL/PGIR, PTS3 constitute a low pressure purge line (HPAL/HPAR, CV6 constitute a high pressure hold line; MSIV2, SV2, CV8 constitute a safety relief line).

Typically MIVV and MIVV are normally open.

The special gas ultra-high flow delivery cabinet comprises a manual diaphragm valve MIL/MIR, a HEAT BLOCK, a pressure display unit PTS1, a pneumatic diaphragm valve HPIL/HPIR, a filter FILITER, a 250PSIG REG, a pressure display unit PT1L/PT1R, REG, EFS, a pressure display unit PT2L/PT2R, a pneumatic diaphragm valve LPIL/LPIR, a filter FILITER, a pneumatic diaphragm valve ASL/ASR, a manual diaphragm valve PLI, a manual diaphragm valve MIV1, a manual diaphragm valve MIV2, a manual diaphragm valve MIV3, a purifier PURIFIER, a manual diaphragm valve MIV4, a manual diaphragm valve MPV, a manual diaphragm valve MPPV, a check valve CV4, a pneumatic diaphragm valve PVP, a manual diaphragm valve MIV5, a pneumatic diaphragm valve PVE, a manual diaphragm valve EXP, a manual diaphragm valve TEV, a manual diaphragm valve TEVP, a pneumatic diaphragm valve LPVL/LPVR, a check valve CV1, a manual diaphragm valve MIV6, a VGBV CV 1/V.G/CV, a manual diaphragm valve PI 1/2, a manual diaphragm valve MIVV/CV 2, a manual diaphragm valve MIV 2/74, a manual diaphragm valve MSV 74/V4, a manual diaphragm valve PSV 3/CV 3, a manual diaphragm valve PSIV/V3, a manual diaphragm valve PSV 4/V3, and a one-way valve PSV 3/V.

Wherein, TEV and TEVP form a detection pipeline; PVP and MIV5 form a process chamber gas output pipeline; PVEs and EVPs form an EXP output pipeline; LPVL/LPVR, CV1, MIV6, VGBV1/V.G/CV, PT3, PI1/PI2, MIVV1/MIVV2 constitute the exhaust line; MIV3, PURIFIER, MIV4 and MPV form a purification pipeline; MPVV, CV4 constitute the purge line; MSIV3/MSIV4, SV3/SV4, CV3 constitute the safety relief pipeline.

Typically, MIV5 and EXP are normally open; MIVV1 and MIVV are normally open.

Wherein, special gas output pipeline is as follows:

1)ISO-A→SI-1/SI-2→SI-A/SI-B→MIL/MIR→HPIL/HPIR→FILITER→250PSIF REG→REG→EFS→LPIL/LPIR→ASL/ASR→PLI→MIV1→MIV3→PURIFIER→MIV4→PVP→MIV5;

2)ISO-A→SI-1/SI-2→SI-A/SI-B→MIL/MIR→HPIL/HPIR→FILITER→250PSIF REG→REG→EFS→LPIL/LPIR→ASL/ASR→PLI→MIV1→MIV2→PVP→MIV5;

3)ISO-A→SI-1/SI-2→SI-A/SI-B→MIL/MIR→HPIL/HPIR→FILITER→250PSIF REG→REG→EFS→LPIL/LPIR→ASL/ASR→PLI→MIV1→MIV3→PURIFIER→MIV4→PVE→EXP;

4)ISO-A→SI-1/SI-2→SI-A/SI-B→MIL/MIR→HPIL/HPIR→FILITER→250PSIF REG→REG→EFS→LPIL/LPIR→ASL/ASR→PLI→MIV1→MIV2→PVE→EXP.

the application method of the utility model is as follows:

special gas ultrahigh flow delivery cabinet

1) Delivering special gases to process chambers

HEAT BLOCK primary heating→ FILITER primary filtration→250PSIG REG primary pressure regulation (depressurization) →reg secondary pressure regulation (depressurization) → FILITER secondary filtration→process chamber.

HEAT BLOCK primary heating→ FILITER primary filtration→250PSIG REG primary pressure regulation (depressurization) →reg secondary pressure regulation (depressurization) → FILITER secondary filtration→ PURIFIER purification→process chamber.

After FILITER secondary filtration, the special gas needs to be detected to judge whether the special gas meets a first preset standard. Continuing to convey the special gas under the condition that the special gas accords with a first preset standard; in case the special gas does not meet the first preset criterion VGBV1/V.G/CV exhausts the special gas (via PI1, MIVV 1).

After PURIFIER purification, the special gas needs to be detected to determine whether the special gas meets a second preset standard. Continuing to convey the special gas under the condition that the special gas meets a second preset standard; in case the special gas does not meet the second preset criterion VGBV1/V.G/CV discharges the special gas (via PI1, MIVV 1).

2) Gas discharge

VGBV1/V.G/CV, MIV2, LPVL, HPIL, LPIL, ASL, PLI, PSV-L, MPV are opened, special gases are vented through PI1, MIVV1, and general gases (e.g., purge gases) are vented through PI2, MIVV 2. The remaining irrelevant valves are closed.

In general, PI1 is on and PI2 is off with the special gas ultra-high flow delivery system in gas supply; under the condition that the special gas ultrahigh flow delivery system is in purging/pressure maintaining, PI1 is closed and PI2 is opened.

3) Pressure relief

When the pressure is too high, MSIV3 and SV3 are opened, and the special gas is discharged through PI1 and MIVV 1. The remaining irrelevant valves are closed.

4) Handover detection

In the event that the weight of the specialty gas of the first tank wagon device 400 reaches the warning threshold, the associated piping of the second tank wagon device 400 is opened and the specialty gas of the second tank wagon device 400 is detected. At this time, the special gas of the second tank wagon device 400 is supplied to the subsequent process.

(II) front-mounted purge box

1) Special gas is conveyed to a special gas ultrahigh-flow conveying cabinet

And opening SI-1 and SI-A. The remaining irrelevant valves are closed.

2) Purging

PGBVL, PGIL, SI-1L, SI-A was opened. The remaining, unrelated valves are closed for purging the piping connecting the tray face with the tank car.

3) Pressure maintaining

PGIL, HPAL, SI-A was opened. The remaining, unrelated valves are closed to ensure that the line connecting the disc to the tank car is not pressure dropping.

4) Discharge of

VGBV2/V.G/CV, MIV, PV L is opened, special gas is discharged through PI1, MIVV, and general gas (such as purge gas) is discharged through PI2, MIVV 2. The remaining irrelevant valves are closed.

5) Pressure relief

When the pressure is too high, MSIV2 and SV2 are opened, and the special gas is discharged through PI1 and MIVV 1. The remaining irrelevant valves are closed.

The utility model has the following technical effects:

1) The pressure relief structures are newly added in the special gas ultrahigh-flow conveying cabinet and the front-mounted purging box respectively, so that redundant pressure can be removed, and a pipeline is protected;

2) The low-pressure purging structure and the high-pressure maintaining structure which are separated are arranged in the front purging box, so that trace nitrogen can be continuously provided for the pipeline by utilizing the low-pressure purging structure, and the pipeline is ensured to be clean;

3) The purifying structure capable of being bypassed is arranged in the special gas ultrahigh flow delivery cabinet, so that special gases with different purities can be output according to the requirements of different process machines;

4) The integrated detection structure of the ultra-high flow delivery cabinet for the special gas can detect the special gases with different purities respectively, so that the special gases which do not reach the standard are prevented from being delivered to the process machine, and the yield is improved;

5) The integrated detection structure of the ultra-high flow delivery cabinet for the special gas can detect the special gas of the standby tank car before switching different tank cars, thereby shortening the process preparation time and improving the efficiency;

6) The special gas ultrahigh flow conveying cabinet and the front purge box are respectively provided with a general gas discharge pipeline and a special gas discharge pipeline, so that the gas discharge is controlled in a partition mode, the treatment pressure of a tail gas treatment procedure is reduced, and the environmental pollution is reduced;

7) Only the front-end purging box is subjected to a purging process, so that the purging length is shortened, and pipelines of the tank wagon device and the front-end purging box and pipelines of the front-end purging box and the special gas ultrahigh-flow delivery cabinet are not required to be purged, so that the gas emission is reduced, and the environmental hazard is reduced;

8) Through the setting of leading case that sweeps more, can realize stable, uninterrupted supply special gas, save time improves production efficiency, reduction in production cost.

The foregoing description is only illustrative of the preferred embodiments of the present utility model and is not to be construed as limiting the scope of the utility model, and it will be appreciated by those skilled in the art that equivalent substitutions and obvious variations may be made using the description and illustrations of the present utility model, and are intended to be included within the scope of the present utility model.

Claims

1. A special gas supply delivery apparatus for ultra-high flow delivery of a special gas to a tank car system, comprising:

2. The special gas supply and delivery apparatus of claim 1, further comprising:

wherein the first exhaust module is used for exhausting general gas.

3. The special gas supply and delivery apparatus of claim 1, further comprising:

4. The special gas supply and delivery apparatus of claim 1, further comprising:

5. The special gas supply and delivery apparatus according to claim 4, further comprising:

6. A special gas supply delivery system, comprising:

a special gas supply and delivery apparatus as claimed in any one of claims 1 to 5;

7. The special gas supply delivery system of claim 6, wherein the purge apparatus comprises:

And a third exhaust module in communication with the second gas supply module for exhausting gas.

8. The special gas supply delivery system of claim 7, wherein the purge apparatus further comprises:

wherein the third exhaust module is used for exhausting general gas; and/or

9. The special gas supply and delivery system according to any one of claims 6 to 8, further comprising:

10. A semiconductor processing system, comprising:

A special gas supply and delivery apparatus as claimed in any one of claims 1 to 5; or (b)

The special gas supply and delivery system according to any one of claims 6 to 9.