CN207609991U - A kind of TMA buffer units effectively removing bubble - Google Patents
A kind of TMA buffer units effectively removing bubble Download PDFInfo
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- CN207609991U CN207609991U CN201721149047.XU CN201721149047U CN207609991U CN 207609991 U CN207609991 U CN 207609991U CN 201721149047 U CN201721149047 U CN 201721149047U CN 207609991 U CN207609991 U CN 207609991U
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Abstract
The utility model provides a kind of TMA buffer units effectively removing bubble, including：Explosion-proof cabinet,Surge tank is equipped in the anti-explosion cabinet body,Heating layer is equipped on the outside of the surge tank,The buffering upper end, which is equipped with, pushes entrance,Material outlet,Material inlet,The pushing gas access, which is equipped with, pushes manual diaphragm valve MVP,Material outlet manual diaphragm valve MVO,Material inlet manual diaphragm valve MVI,The pushing gas manual diaphragm valve upper end is connected to pneumatic diaphragm valve AV1 by pipeline,The upper ends the pneumatic diaphragm valve AV1 are connected to pressure reducing valve REG by pipeline,Pressure gauge PG1,The upper ends the pressure reducing valve REG are connected to manual diaphragm valve MV5 by pipeline,Filter device GF1,The filter device GF1 is connected to from purifying Ar or purifying N2 pipeline input interfaces,The surge tank that the utility model is separately configured,There are independent push air source and pressure control device,It can be according to board actual operation parameters,Carry out micro-adjustment push pressure,So that board process operation reaches optimum state.
Description
Technical field
The utility model is related to PV photovoltaic industry crystal-silicon battery slices to carry on the back passivation technology technical field, specially a kind of effectively to go
The TMA buffer units of bubble removing.
Background technology
The TMA centralizedly supply systems of the double source bottle switching designed at present, during dismounting, purging source bottle, unavoidably
Meeting the sources pigtail bottle connecting pipe in remain minute quantity gas, when source bottle liquid-phase outlet valve open after, residual gas can mix
In TMA liquid, by pipe network, it is slowly transported to back of the body passivation board, when flowing through flowmeter, not due to gas liquid density
Together, big flowed fluctuation will be measured, and can actually influence technological parameter and cell piece yield.
Back of the body passivation board needs to do a PM maintaining, maintaining after about 120 hours continuous processings produce
When, it needs TMA in the cavity and pipeline in board all to replace purging only, and at the end of maintaining, the technique in board
High vacuum environment is in inside pipeline, production restoration TMA is supplied at once, due to needing vacuum breaker, TMA instantaneous flows pole when answering a pager's call
Greatly, because TMA uses centralizedly supply system, by more back of the body passivation boards of pipe network responsible supply simultaneously, therefore any back of the body is passivated
Board is switched on instantaneous super-flow after maintenance, the fluctuation that can all cause the TMA flows of other normal process production board big,
These are all the case where cell piece manufacturing enterprise are unwilling to encounter.Therefore the bubble introduced in TMA liquid how is effectively removed, and
TMA flows influence each other between eliminating each back of the body passivation board, are those skilled in the art's urgent problems.
Utility model content
The technical issues of the utility model is solved is to provide a kind of TMA buffer units effectively removing bubble, with solution
Certainly the problems mentioned above in the background art.
The technical issues of the utility model is solved is realized using following technical scheme：A kind of bubble of effectively removing
TMA buffer units, including：Explosion-proof cabinet, the anti-explosion cabinet body is interior to be equipped with surge tank, and heating layer is equipped on the outside of the surge tank,
The buffering upper end, which is equipped with, pushes gas access, material outlet, material inlet, and the pushing gas access, which is equipped with, pushes gas
Body manual diaphragm valve MVP, material outlet manual diaphragm valve MVO, material inlet manual diaphragm valve MVI, the pushing manual diaphragm
Valve upper end is connected to pneumatic diaphragm valve AV1 by pipeline, the upper ends pneumatic diaphragm valve AV2, the pneumatic diaphragm valve AV1 pass through pipeline
It is connected to pressure reducing valve REG, pressure gauge PG1, the upper ends the pressure reducing valve REG are connected to manual diaphragm valve MV5 by pipeline, filtering fills
GF1 is set, the filter device GF1 is connected to from purifying Ar or purifying N2 pipeline input interfaces, the upper ends the pneumatic diaphragm valve AV2
It is connected to manual diaphragm valve MV6 by pipeline, the upper ends manual diaphragm valve MV6 are connected to check-valves CV1, check-valves by pipeline
The upper ends CV1 are connected to filter device GF2 by pipeline, and filter device GF2 is connected to from purifying N2 pipelines, the material outlet hand
The dynamic upper ends diaphragm valve MVO are connected to pressure sensor PT, manual diaphragm valve MV1 by pipeline, and the upper ends pressure sensor PT pass through
Pipeline is connected to pneumatic diaphragm valve AV3, manual diaphragm valve MV2, and technique board is connected on manual diaphragm valve MV2, described manual
Diaphragm valve MV1 is connected to by pipeline on the pipeline between pneumatic diaphragm valve AV2 and manual diaphragm valve MV6, manual diaphragm valve MV1
Pressure gauge PG2 is connected to by pipeline on the pipeline of upper end, pressure gauge PG2 is connected to manual diaphragm valve MV7, non-return by pipeline
The pipeline of the upper end valve CV2, check-valves CV2 is equipped with Manual air-release valves MBV, and the upper ends Manual air-release valves MBV are connected to by pipeline
Vacuum pump, the upper ends material inlet manual diaphragm valve MVI are connected to manual diaphragm valve MV3, pneumatic diaphragm valve by pipeline
AV4, the upper ends pneumatic diaphragm valve AV4 are connected to manual diaphragm valve MV4 by pipeline, and the upper ends manual diaphragm valve MV4 are connected to TMA concentrations
Supply system, the upper ends manual diaphragm valve MV3 are connected to by pipeline on the pipeline between pressure gauge PG2 and manual diaphragm valve MV7,
It is equipped with manual diaphragm valve MV8 between technique feed supplement branch and technique discharging branch.
Heating layer, the pipeline outside of the upper ends manual diaphragm valve MV4 are equipped on the outside of the pipeline of the upper ends the manual diaphragm valve MV2
Equipped with heating layer, heating layer, material inlet manual diaphragm valve are equipped on the outside of the pipeline of the upper ends material outlet manual diaphragm valve MVO
Heating layer is equipped on the outside of the pipeline of the upper ends MVI.
The anti-explosion cabinet body operating surface is equipped with implosion guard, and top is equipped with exhaust outlet, positive lower part installation band filter screen
Air inlet, top exhaust outlet is connected to the suction pressures such as centrifugal blower source, the spy of UV/IR flame light sensations is configured at the top of explosion-proof cabinet
Head, high-temperature probe, Smoke Detector, cabinet top install CO2 spray heads, independent CO2 fire extinguishing systems, anti-explosion cabinet are configured outside system
Body bottom is provided with hydrops slot.
Compared with prior art, the utility model has the beneficial effects that：The surge tank that the utility model is separately configured has solely
Vertical push air source and pressure control device can carry out micro-adjustment push pressure according to board actual operation parameters, so that
Board process operation reaches optimum state.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model.
Specific implementation mode
In order to make implement technical means, creation characteristic, reached purpose and effect of the utility model be easy to understand, under
Face combines and is specifically illustrating, and the utility model is expanded on further.
As shown in Figure 1, a kind of TMA buffer units effectively removing bubble, including：Explosion-proof cabinet 1, the explosion-proof cabinet 1
It is interior to be equipped with surge tank 2, it is equipped with heating layer 3 on the outside of the surge tank,
The buffering upper end, which is equipped with, pushes gas access, material outlet, material inlet, is set on the pushing gas access
Have and push manual diaphragm valve MVP, material outlet manual diaphragm valve MVO, material inlet manual diaphragm valve MVI, the pushing is manual
Diaphragm valve upper end is connected to pneumatic diaphragm valve AV1, pneumatic diaphragm valve AV2 by pipeline,
The upper ends the pneumatic diaphragm valve AV1 are connected to pressure reducing valve REG, pressure gauge PG1, the pressure reducing valve REG by pipeline
Upper end is connected to manual diaphragm valve MV5 by pipeline, filter device GF1, the filter device GF1 are connected to purifying Ar or pure certainly
Change N2 pipeline input interfaces,
The upper ends the pneumatic diaphragm valve AV2 are connected to manual diaphragm valve MV6 by pipeline, and the upper ends manual diaphragm valve MV6 are logical
Piping is connected to check-valves CV1, and the upper ends check-valves CV1 are connected to filter device GF2, filter device GF2 connections by pipeline
In purifying N2 pipelines certainly
The upper ends material outlet manual diaphragm valve MVO are connected to pressure sensor PT, manual diaphragm valve by pipeline
MV1, the upper ends pressure sensor PT are connected to pneumatic diaphragm valve AV3, manual diaphragm valve MV2 by pipeline, on manual diaphragm valve MV2
Be connected to technique board, the manual diaphragm valve MV1 by pipeline be connected to pneumatic diaphragm valve AV2 and manual diaphragm valve MV6 it
Between pipeline on, pressure gauge PG2 is connected to by pipeline on the pipeline of the upper ends manual diaphragm valve MV1, pressure gauge PG2 passes through pipeline
It is connected to manual diaphragm valve MV7, check-valves CV2, the pipeline of the upper ends check-valves CV2 is equipped with Manual air-release valves MBV, deflates manually
The upper ends valve MBV are connected to vacuum pump by pipeline,
The upper ends material inlet manual diaphragm valve MVI are connected to manual diaphragm valve MV3, pneumatic diaphragm valve by pipeline
AV4, the upper ends pneumatic diaphragm valve AV4 are connected to manual diaphragm valve MV4 by pipeline, and the upper ends manual diaphragm valve MV4 are connected to TMA concentrations
Supply system, the upper ends manual diaphragm valve MV3 are connected to by pipeline on the pipeline between pressure gauge PG2 and manual diaphragm valve MV7,
It is equipped with manual diaphragm valve MV8 between technique feed supplement branch and technique discharging branch,
Heating layer, the pipeline outside of the upper ends manual diaphragm valve MV4 are equipped on the outside of the pipeline of the upper ends the manual diaphragm valve MV2
Equipped with heating layer, heating layer, material inlet manual diaphragm valve are equipped on the outside of the pipeline of the upper ends material outlet manual diaphragm valve MVO
Heating layer is equipped on the outside of the pipeline of the upper ends MVI.
The utility model configures a surge tank with push gas, and TMA liquid is conveyed by centralizedly supply system through pipe network
Into this tank, by dead weight realize gas-liquid separation, before any mixed gas of reason been separated in storage tank top, through storage tank gas
Phase mouth is discharged by vent exhaust outlets；Tank volume 10L is placed in a closed anti-explosion cabinet body, can be mounted on nearby
Near back of the body passivation board, TMA supplies route from source centralizedly supply cabinet->Distribute pipe network->Terminal suspending tank->Back of the body passivation board, it is real
The advantages of existing centralizedly supply and one-to-one independent supply are combined pattern, make full use of this 2 kinds of supplying modes.
The utility model is realized the independent supply to back of the body passivation board by surge tank, has been isolated between each back of the body passivation board
TMA flows influence each other, and any back of the body passivation board is switched on instantaneous super-flow after maintenance, all will not be to other normal process
The TMA flows of production board impact.The 10L designs of surge tank dischargeable capacity may be implemented separate unit back of the body passivation board and persistently supply
It answers 120 hours or more, it is ensured that producing line continuous production improves production efficiency, ensures yield.In board PM maintainings, execute
Surge tank automatic feeding step, feed supplement to high liquid level.One continuous processing batch, actual consumption 500mg/min*60min*120h,
The TMA liquid of total 3.6kg, is converted into volume about 4.8L.The surge tank being separately configured has independent push air source and pressure control
Device processed can carry out micro-adjustment push pressure, so that board process operation reaches best according to board actual operation parameters
State.
The utility model vacuumizes the pipe valve design of the functions such as displacement by reasonably purging, it can be ensured that is needing
When removing surge tank and being safeguarded, connecting tube pigtail inner walls liquid source is clean by complete purging displacement, ensures removing
Pigtail and absolute safety when surge tank connector.
The TMA liquid methods of supplying of this programme are using high-purity Ar or N2 as push gas, are the relatively low gas with 2-3bar
Body pressure goes out the TMA feeding liquid under pressure in centralizedly supply cabinet carrying shield, by distribution pipe network, by feed regimes automatic feeding into
Terminal suspending tank；Push gas is used as by independent high-purity Ar or N2 air sources again, the relatively low of passivation board needs is carried on the back to meet
Gas pressure goes out the TMA liquid constant pressure and flow force feeds in surge tank, by a small nipple road, force feed to carry on the back passivation
Board TMA imports.
1 operating surface of explosion-proof cabinet is equipped with implosion guard, and top is equipped with exhaust outlet, positive lower part installation with filter screen into
Air port, top exhaust outlet are connected to the suction pressures such as centrifugal blower source so that kept in entire anti-explosion cabinet body negative pressure 100-200pa it
Between, independent pessimistic securit space is formd in cabinet.1. being configured with UV/IR flame light sensations probe at the top of cabinet, high temperature is visited
Head, Smoke Detector, this 3 kinds of safety monitoring devices, when the micro- leakage smoke in part, leakage burning, after temperature increases, above-mentioned probe detection
After arriving, dry contact signal is sent out immediately, cuts off the supply of whole system, realizes that safety interlock, audible-visual annunciator send out alarm, together
When provide remote alarm signal to user's central monitoring system；CO2 spray heads are installed at the top of cabinet, are configured outside system independent
CO2 fire extinguishing systems, when flame light sensation probe detection to flame or high-temperature probe and Smoke Detector detect high temperature and hair simultaneously
When cigarette, the automatic air-valve of exhaust outlet at the top of cabinet is closed immediately, stops exhausting, and starts external independent CO2 fire extinguishings system immediately
System sprays a large amount of CO2 by CO2 spray heads, and CO2 can persistently be retained in cabinet lower area to suppress flare, control
Danger source；Bottom of cabinet bulk is provided with the hydrops slot not less than surge tank liquid volume, and built-in vermiculite, when there is leakage, CO2 makes
TMA liquid air-isolation and can not burn, liquid can flow in accumulating at lower part liquid bath, be adsorbed by vermiculite, vermiculite adsorption swelling so that
TMA is with very slow microgravity combustion.
The surge tank is Stainless steel pressure vessels, and for inner surface through electrobrightening, there are (and included 3,3 interfaces in tank top
Manual diaphragm valve), wherein 2 gas phase mouths, 1 liquid phase mouth, liquid phase mouth are discharge port, liquid-phase tube is inserted into inside tank (away from pot bottom
5mm), in this way during normal feed, liquid-phase tube is always positioned at liquid level lower part, and bubble is effectively prevent to enter liquid-phase tube；Wherein 1
A gas phase mouth can be used as push gas push gas inlets and vent exhaust outlets；Another 1 gas phase mouth can be used as TMA feed supplements
Mouthful, it may contain after bladdery TMA liquid enters surge tank by feed supplement, realize that gas-liquid separation, gas are detached by dead weight
On storage tank top, it is discharged by vent exhaust outlets through above-mentioned gas phase mouth；
Technique feed supplement branch and discharging branch need to safeguard if by-passing valve MV8 when surge tank is faulty in the utility model
When, this valve can be opened, is directly fed by TMA centralizedly supply systems.
Purge gas branch, it is mainly mono- including GF2 gasket types filter, CV1 as the purge gas access of surge tank cabinet
To valve, MV6 hand-operated valves, pass through AV2 pneumatic diaphragm valves, AV3 pneumatic diaphragm valves, MV3 manual diaphragm valves and push gas branch respectively
Road, technique discharging branch, the connection of technique feed supplement branch.
Be vacuum-evacuated branch, as the vacuumizing and exhausting access of surge tank cabinet, it is main include by AV2 pneumatic diaphragm valves,
AV3 pneumatic diaphragm valves, MV3 manual diaphragm valves are connected to purging branch, technique discharging branch, technique feed supplement branch, (above-mentioned valve
Shared with purge gas branch with pipeline), MV7 manual diaphragm valves, CV2 check valves, the manual microleak valves of MBV.
Influence of the temperature change to fluid flow pressure in order to prevent, while in order to avoid temperature is low and causes not conveying
The case where, system configuration surge tank heating blanket, the electric-heating belt of process technique branches, the conveying of TMA whole process heat tracing constant temperature,
Temperature control is adjusted between 30-35 DEG C；
Since TMA is liquid, the weighing sensor installed by bottom comes liquid weight in real time measure surge tank, root
Low liquid level warning or automatic feeding are provided according to weight setpoint value；(normal operating is to execute buffering in board PM maintainings
Tank automatic feeding step, feed supplement to high liquid level, if intermediate omit feed supplement, when liquid level is down to low liquid level, surge tank can be automatically strong
Feed supplement processed is simultaneously stopped outside feed)
The advantages of basic principles and main features and the utility model of the utility model have been shown and described above.One's own profession
The technical staff of industry is it should be appreciated that the present utility model is not limited to the above embodiments, described in above embodiments and description
Only illustrate the principles of the present invention, on the premise of not departing from the spirit and scope of the utility model, the utility model is also
It will have various changes and improvements, these various changes and improvements fall within the scope of the claimed invention.The utility model
Claimed range be defined by the appending claims and its equivalent thereof.
Claims (3)
1. a kind of TMA buffer units effectively removing bubble, including：Explosion-proof cabinet, it is characterised in that：In the one anti-explosion cabinet body
Equipped with surge tank, be equipped with heating layer on the outside of the surge tank, the buffering upper end be equipped with pushing gas access, material outlet,
Material inlet, the pushing gas access are equipped with pushing manual diaphragm valve MVP, material outlet manual diaphragm valve MVO, material and enter
Mouth manual diaphragm valve MVI, the pushing manual diaphragm valve upper end is connected to pneumatic diaphragm valve AV1, pneumatic diaphragm valve by pipeline
AV2, the upper ends the pneumatic diaphragm valve AV1 are connected to pressure reducing valve REG, the upper ends pressure gauge PG1, the pressure reducing valve REG by pipeline
It is connected to manual diaphragm valve MV5, filter device GF1 by pipeline, the filter device GF1 is connected to from purifying Ar or purifying certainly
N2 pipeline input interfaces, the upper ends the pneumatic diaphragm valve AV2 are connected to manual diaphragm valve MV6, manual diaphragm valve MV6 by pipeline
Upper end is connected to check-valves CV1 by pipeline, and the upper ends check-valves CV1 are connected to filter device GF2, filter device by pipeline
GF2 is connected to from purifying N2 pipelines, and the upper ends material outlet manual diaphragm valve MVO are connected to pressure sensor by pipeline
PT, manual diaphragm valve MV 1, the upper ends pressure sensor PT are connected to pneumatic diaphragm valve AV3, manual diaphragm valve MV2 by pipeline,
Be connected to technique board on manual diaphragm valve MV2, the manual diaphragm valve MV 1 by pipeline be connected to pneumatic diaphragm valve AV2 with
On pipeline between manual diaphragm valve MV6, pressure gauge PG2 is connected to by pipeline on the pipeline of 1 upper ends manual diaphragm valve MV,
Pressure gauge PG2 is connected to manual diaphragm valve MV7, check-valves CV2 by pipeline, and the pipeline of the upper ends check-valves CV2 is equipped with manually
Vent valve MBV, the upper ends Manual air-release valves MBV are connected to vacuum pump, the upper ends material inlet manual diaphragm valve MVI by pipeline
It is connected to manual diaphragm valve MV3, pneumatic diaphragm valve AV4 by pipeline, the upper ends pneumatic diaphragm valve AV4 are connected to manually by pipeline
The upper end diaphragm valve MV4, manual diaphragm valve MV4 is connected to TMA centralizedly supply systems, and the upper ends manual diaphragm valve MV3 are connected by pipeline
On pipeline between pressure gauge PG2 and manual diaphragm valve MV7, it is equipped between technique feed supplement branch and technique discharging branch manual
Diaphragm valve MV8.
2. a kind of TMA buffer units effectively removing bubble according to claim 1, it is characterised in that：It is described manually every
It is equipped with heating layer on the outside of the pipeline of the upper ends film valve MV2, is equipped with heating layer on the outside of the pipeline of the upper ends manual diaphragm valve MV4, material goes out
Heating layer is equipped on the outside of the pipeline of the upper ends mouth manual diaphragm valve MVO, the pipeline outside of the upper ends material inlet manual diaphragm valve MVI is set
There is heating layer.
3. a kind of TMA buffer units effectively removing bubble according to claim 1, it is characterised in that：The anti-explosion cabinet
Body operating surface is equipped with implosion guard, and top is equipped with exhaust outlet, and the air inlet with filter screen, top exhaust outlet are installed in positive lower part
It is connected to the suction pressures such as centrifugal blower source, UV/IR flames light sensation probe, high-temperature probe, cigarette sense spy are configured at the top of explosion-proof cabinet
Head, cabinet top install C02 spray heads, configure independent C02 fire extinguishing systems outside system, explosion-proof bottom of cabinet bulk is provided with hydrops
Slot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721149047.XU CN207609991U (en) | 2017-09-08 | 2017-09-08 | A kind of TMA buffer units effectively removing bubble |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721149047.XU CN207609991U (en) | 2017-09-08 | 2017-09-08 | A kind of TMA buffer units effectively removing bubble |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207609991U true CN207609991U (en) | 2018-07-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201721149047.XU Active CN207609991U (en) | 2017-09-08 | 2017-09-08 | A kind of TMA buffer units effectively removing bubble |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114870291A (en) * | 2022-06-14 | 2022-08-09 | 安徽博泰电子材料有限公司 | Safety device for leakage protection of trimethyl aluminum container |
-
2017
- 2017-09-08 CN CN201721149047.XU patent/CN207609991U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114870291A (en) * | 2022-06-14 | 2022-08-09 | 安徽博泰电子材料有限公司 | Safety device for leakage protection of trimethyl aluminum container |
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