CN221065876U - Multifunctional clamp for magnetic grinding of wafer materials - Google Patents
Multifunctional clamp for magnetic grinding of wafer materials Download PDFInfo
- Publication number
- CN221065876U CN221065876U CN202322770192.1U CN202322770192U CN221065876U CN 221065876 U CN221065876 U CN 221065876U CN 202322770192 U CN202322770192 U CN 202322770192U CN 221065876 U CN221065876 U CN 221065876U
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- Prior art keywords
- shaped clamping
- clamping piece
- sliding
- wafer
- base
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- 239000000463 material Substances 0.000 title claims abstract description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 20
- 229920001568 phenolic resin Polymers 0.000 claims abstract description 12
- 230000000149 penetrating effect Effects 0.000 claims abstract description 7
- 229910000838 Al alloy Inorganic materials 0.000 claims 1
- 238000012545 processing Methods 0.000 abstract description 7
- 235000012431 wafers Nutrition 0.000 description 37
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000007547 defect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000008093 supporting effect Effects 0.000 description 2
- 241000252254 Catostomidae Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
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- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
A multifunctional clamp for magnetic grinding of wafer materials relates to the technical field of chip wafer processing, in particular to a multifunctional clamp for magnetic grinding of wafer materials. The novel V-shaped clamping device comprises a base, fixed aluminum blocks, a sliding rail, a first V-shaped clamping piece and a second V-shaped clamping piece, wherein the fixed aluminum blocks are arranged on the periphery of the top of the base, the sliding rail is arranged in the fixed aluminum blocks in a penetrating manner, the first V-shaped clamping piece is arranged on the left side of the top of the sliding rail, and the second V-shaped clamping piece is arranged on the right side of the top of the sliding rail; a plurality of support columns are arranged above the base, and phenolic plastics are arranged at the tops of the support columns. The bottoms of the first V-shaped clamping piece and the second V-shaped clamping piece are respectively provided with a sliding block, the upper part of the sliding block penetrates through the first sliding rod, the lower part of the sliding block penetrates through the second sliding rod, and the first V-shaped clamping piece and the second V-shaped clamping piece are used for clamping a wafer workpiece; the phenolic plastic has higher mechanical strength and excellent insulativity, and can keep stable performance in high-temperature, humid and corrosive environments.
Description
Technical Field
The utility model relates to the technical field of chip wafer processing, in particular to a multifunctional clamp for magnetic grinding of wafer materials.
Background
Wafer refers to a silicon wafer used for manufacturing silicon semiconductor circuits, the original material of which is silicon. The high-purity polycrystalline silicon is dissolved and then doped with silicon crystal seed, and then slowly pulled out to form cylindrical monocrystalline silicon. The silicon ingot is ground, polished, and sliced to form a silicon wafer, i.e., a wafer. Domestic wafer lines are mainly 8 inches and 12 inches. The main processing modes of the wafer are wafer processing and batch processing, namely 1 wafer or a plurality of wafers are processed simultaneously. As semiconductor feature sizes become smaller and smaller, processing and measurement equipment becomes more advanced, so that new data features appear in wafer processing. Meanwhile, the characteristic size is reduced, so that the influence of the particle number in the air on the quality and reliability of the processed wafer is increased when the wafer is processed, and along with the improvement of the cleanliness, the particle number also has new data characteristics.
The clamps commonly used in the market are four-jaw chucks, suckers and the like, the clamping force is high, the alignment is time-consuming, and the back surface of the wafer is not a polished surface but a frosted surface, so that the wafer needs to be subjected to a double-sided polishing process in order to ensure the particle performance. If the double-sided polishing process is not performed on the wafer, particles are easily adsorbed on the rough surface after the back-sealing process of polysilicon and the like, and the conventional wafer cleaning process is not easy to remove such adsorbed particle defects, the particles remain on the back surface of the wafer. The fixed installation is inconvenient to adjust the position of the wafer workpiece, and the yield of chips is affected.
Disclosure of utility model
The utility model aims to overcome the defects and shortcomings of the prior art, provides a multifunctional clamp for magnetic grinding of wafer materials, designs a clamp which can be used for clamping a workpiece by utilizing a first V-shaped clamping piece and a second V-shaped clamping piece, and can be adjusted through a sliding rail, and the bottom of the wafer is supported by phenolic plastics, so that good insulativity can be achieved. The wafer placement can be more stable.
In order to achieve the above purpose, the utility model adopts the following technical scheme: the multifunctional clamp comprises a base 1, a fixed aluminum block 2, a sliding rail 3, a first V-shaped clamping piece 4 and a second V-shaped clamping piece 5, wherein the periphery of the top of the base 1 is provided with the fixed aluminum block 2, the sliding rail 3 is penetrated and arranged in the fixed aluminum block 2, the left side of the top of the sliding rail 3 is provided with the first V-shaped clamping piece 4, and the right side of the top of the sliding rail 3 is provided with the second V-shaped clamping piece 5; a plurality of support columns 6 are arranged above the base, and phenolic plastics 7 are arranged at the tops of the support columns 6.
The sliding rail 3 comprises sliding blocks 31, a first sliding rod 32 and a second sliding rod 33, one sliding block 31 is arranged at the bottoms of the first V-shaped clamping piece 4 and the second V-shaped clamping piece 5, the first sliding rod 32 is arranged above the two sliding blocks 31 in a penetrating mode, and the second sliding rod 33 is arranged below the two sliding blocks 31. The wafer is placed on the top of the phenolic plastic, so that the supporting effect can be achieved; the distance between the first V-shaped clamping piece 4 and the second V-shaped clamping piece 5 can be adjusted by adjusting the two sliding blocks 31, so that the wafer is clamped and fixed.
The top of the base 1 and the bottom of the fixed block 2 are fixed by a bolt group 11. The first slide bar 32 and the second slide bar 33 penetrate through the inside of the fixed block 3, so that the slide rail 3 is more stable in use.
The first V-shaped clamping piece 4 and the second V-shaped clamping piece 5 are connected with the sliding block 31 and are fixed in a penetrating manner through a plurality of first bolts 41. The first bolt 41 penetrates through the first V-shaped clamping piece 4 and the second V-shaped clamping piece 5 and is fixedly connected with the sliding block 31, so that looseness cannot be generated during use.
A plurality of second bolts 12 are arranged above the base 1. The second bolts 12 can mount the base 1 on other equipment, thereby realizing fine machining.
The left sides of the first sliding rod 32 and the second sliding rod 33 penetrate through the fixed aluminum block 2 and are fixedly connected through a nut 321. The nut 321 is sleeved on the left side of the sliding rail 3 and is screwed down in a rotating way.
The working principle of the utility model is as follows: when the sliding block is used, nuts on the right sides of the first sliding rod and the second sliding rod are rotated and screwed, so that the first sliding rod and the second sliding rod are fixedly connected with the left sliding block. The bolt group is inserted into the sliding block from top to bottom, and the sliding block can be firmly fixed at the top end of the base. The base is fixed on the wafer polishing equipment and is fixed through a second bolt. The wafer is placed on top of the phenolic plastic, the distance between the two sliding blocks is adjusted, and the wafer is shifted through the sliding rod. The first V-shaped clamping piece and the second V-shaped clamping piece are fixedly inserted through a first bolt, and the bottom of the first bolt is connected with the sliding block. The two sliding blocks are adjusted to move the first V-shaped clamping piece and the second V-shaped clamping piece, so that the first V-shaped clamping piece and the second V-shaped clamping piece are kept attached to the wafer, the workpiece is clamped by the first V-shaped clamping piece and the second V-shaped clamping piece, and the workpiece is machined according to the workpiece adjusting clamp.
After the technical scheme is adopted, the utility model has the beneficial effects that: the bottoms of the first V-shaped clamping piece and the second V-shaped clamping piece are respectively provided with a sliding block, the upper part of the sliding block penetrates through the first sliding rod, the lower part of the sliding block penetrates through the second sliding rod, and the first V-shaped clamping piece and the second V-shaped clamping piece are used for clamping a wafer workpiece; the phenolic plastic has higher mechanical strength and excellent insulativity, and can keep stable performance in high-temperature, humid and corrosive environments.
Drawings
In order to more clearly illustrate the embodiments of the utility model or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the utility model, and that other drawings can be obtained according to these drawings without inventive faculty for a person skilled in the art.
FIG. 1 is a front view of the present utility model;
FIG. 2 is a top view of FIG. 1;
Fig. 3 is a left side view of fig. 1.
Reference numerals illustrate: 1. a base; 2. fixing an aluminum block; 3. a slide rail; 4. a first V-clip; 5. a second V-clip; 6. a support column; 7. phenolic plastics; 11. a bolt group; 12. a second bolt; 31. a slide block; 32. a first slide bar; 33. a second slide bar; 41. a first bolt; 321. and (3) a nut.
Detailed Description
Referring to fig. 1-3, the technical scheme adopted in the specific embodiment is as follows: the utility model provides a multi-functional anchor clamps of wafer material magnetic force grinding, it includes base 1, and base 1 top all is provided with a fixed aluminum block 2 all around, and fixed aluminum block 2 top runs through and is provided with bolt group 11, is fixed aluminum block 2 and base 1 fixed connection. The fixed aluminum block 2 is internally penetrated and provided with a first sliding rod 32 and a second sliding rod 33, and the right sides of the first sliding rod 32 and the second sliding rod 33 are respectively provided with a nut 321, so that the first sliding rod 32 and the second sliding rod 33 are firmer when being connected with the fixed aluminum block 2. The first slide bar 32 runs through the top of two sliders 31, the second slide bar 33 runs through the below of two sliders 31, the top of the left slider 31 is provided with a first V-shaped clamping piece 4, and the top of the right slider 31 is provided with a second V-shaped clamping piece 5. The two sliders 31 can slide left and right on the first slide bar 32 and the second slide bar 33, and the distance between the first V-shaped clip 4 and the second V-shaped clip 5 can be adjusted simultaneously by adjusting the positions of the sliders 31. The base 1 top is provided with a plurality of support columns 6, and the top of support column 6 is provided with phenolic plastic 7, and phenolic plastic 7 mechanical strength is high, has good insulating effect, has high temperature resistant, dampproofing, anticorrosive characteristics. A plurality of second bolts 12 are arranged on the top of the base 1 in a penetrating way.
When the grinding machine is used, the base 1 is fixed on the grinding equipment through the second bolt 12, and the nuts 321 on the left sides of the first slide bar 32 and the second slide bar 33 are adjusted, so that the nuts 321 and the fixed aluminum blocks 2 are kept in a screwed state. The wafer is placed on the top of the phenolic plastic 7, the distance between the first V-shaped clamping piece 4 and the second V-shaped clamping piece 5 is adjusted through two sliding blocks 31 arranged on the top of the first sliding rod 32 and the second sliding rod 33, the wafer is attached and fixed with the wafer workpiece, and the first V-shaped clamping piece 4 and the second V-shaped clamping piece 5 are adjusted at any time according to the size of the placed wafer workpiece. The phenolic 7 plays a role in supporting the wafer workpiece.
The majority of the material used for the clamps is 303 stainless steel and aluminum blocks. The first V-shaped clamping piece 4, the second V-shaped clamping piece 5, the first sliding rod 32 and the second sliding rod 33 are made of 303 stainless steel, so that the V-shaped clamping piece has the characteristics of good hardness and difficult rusting.
The foregoing is merely illustrative of the present utility model and not restrictive, and other modifications and equivalents thereof may occur to those skilled in the art without departing from the spirit and scope of the present utility model.
Claims (6)
1. A multifunctional clamp for magnetic grinding of wafer materials is characterized in that: the novel aluminum alloy seat comprises a base (1), fixed aluminum blocks (2), sliding rails (3), first V-shaped clamping pieces (4) and second V-shaped clamping pieces (5), wherein the fixed aluminum blocks (2) are arranged around the top of the base (1), the sliding rails (3) are arranged in the fixed aluminum blocks (2) in a penetrating mode, the first V-shaped clamping pieces (4) are arranged on the left side of the top of the sliding rails (3), and the second V-shaped clamping pieces (5) are arranged on the right side of the top of the sliding rails (3); a plurality of support columns (6) are arranged above the base, and phenolic plastics (7) are arranged at the tops of the support columns (6).
2. The multifunctional fixture for magnetic grinding of wafer materials according to claim 1, wherein: the sliding rail (3) comprises sliding blocks (31), first sliding rods (32) and second sliding rods (33), one sliding block (31) is arranged at the bottoms of the first V-shaped clamping piece (4) and the second V-shaped clamping piece (5), the first sliding rods (32) are arranged above the two sliding blocks (31) in a penetrating mode, and the second sliding rods (33) are arranged below the two sliding blocks (31).
3. The multifunctional fixture for magnetic grinding of wafer materials according to claim 1, wherein: the top of the base (1) and the bottom of the fixed aluminum block (2) are fixed through a bolt group (11).
4. The multifunctional fixture for magnetic grinding of wafer materials according to claim 1, wherein: the first V-shaped clamping piece (4) and the second V-shaped clamping piece (5) are connected with the sliding block (31) and are fixed in a penetrating mode through a plurality of first bolts (41).
5. The multifunctional fixture for magnetic grinding of wafer materials according to claim 1, wherein: a plurality of second bolts (12) are arranged above the base (1).
6. The multifunctional fixture for magnetic grinding of wafer materials according to claim 2, wherein: the left sides of the first sliding rod (32) and the second sliding rod (33) penetrate through the fixed aluminum block (2) and are fixedly connected through nuts (321).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322770192.1U CN221065876U (en) | 2023-10-16 | 2023-10-16 | Multifunctional clamp for magnetic grinding of wafer materials |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322770192.1U CN221065876U (en) | 2023-10-16 | 2023-10-16 | Multifunctional clamp for magnetic grinding of wafer materials |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221065876U true CN221065876U (en) | 2024-06-04 |
Family
ID=91265982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322770192.1U Active CN221065876U (en) | 2023-10-16 | 2023-10-16 | Multifunctional clamp for magnetic grinding of wafer materials |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221065876U (en) |
-
2023
- 2023-10-16 CN CN202322770192.1U patent/CN221065876U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |