CN221065876U - Multifunctional clamp for magnetic grinding of wafer materials - Google Patents

Abstract

A multifunctional fixture for magnetic grinding of wafer materials, it relates to the technical field of chip wafer processing, and in particular to a multifunctional fixture for magnetic grinding of wafer materials. It includes a base, a fixed aluminum block, a slide rail, a first V-shaped clamp and a second V-shaped clamp. A fixed aluminum block is arranged around the top of the base, and a slide rail is arranged inside the fixed aluminum block. A first V-shaped clamp is arranged on the left side of the top of the slide rail, and a second V-shaped clamp is arranged on the right side of the top of the slide rail; a plurality of support columns are arranged above the base, and phenolic plastic is arranged on the top of the support column. A slider is arranged at the bottom of the first V-shaped clamp and the second V-shaped clamp, a first slide rod is passed through the top of the slider, and a second slide rod is passed through the bottom of the slider, and the first V-shaped clamp and the second V-shaped clamp are used to tighten the wafer workpiece; phenolic plastic has high mechanical strength and excellent insulation, and can maintain stable performance in a high temperature, humid and corrosive environment.

Description

A multifunctional fixture for magnetic grinding of wafer materials

Technical Field

The utility model relates to the technical field of chip wafer processing, in particular to a multifunctional clamp for magnetic grinding of wafer materials.

Background technique

Wafer refers to the silicon wafer used to make silicon semiconductor circuits, and its original material is silicon. After high-purity polycrystalline silicon is dissolved, silicon crystal seeds are added, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing, and slicing, the silicon crystal rod is formed into a silicon wafer, that is, a wafer. Domestic wafer production lines are mainly 8 inches and 12 inches. The main processing methods of wafers are sheet processing and batch processing, that is, processing one or more wafers at the same time. As the feature size of semiconductors becomes smaller and smaller, and the processing and measurement equipment becomes more and more advanced, new data characteristics have emerged in wafer processing. At the same time, the reduction in feature size increases the impact of the number of particles in the air on the quality and reliability of the wafer after processing during wafer processing, and as the cleanliness improves, the number of particles also has new data characteristics.

Commonly used fixtures on the market include four-claw chucks, suction cups, etc., which have strong clamping force, but the disadvantage is that alignment is time-consuming. Since the back of the wafer is not polished but frosted, in order to ensure the performance of the particles, the wafer needs to be double-sided polished. If the wafer is not double-sided polished, after the polysilicon back seal and other treatments, the particles are easily adsorbed on the rough surface, and the conventional wafer cleaning process is not easy to remove such adsorbed particle defects, so the particles will be retained on the back of the wafer. Fixed installation is not convenient for adjusting the position of the wafer workpiece, which in turn affects the yield of the chip.

Utility Model Content

The purpose of the utility model is to provide a multifunctional fixture for magnetic grinding of wafer materials in view of the defects and shortcomings of the prior art, which is designed to use a first V-shaped clamp and a second V-shaped clamp to tighten the workpiece, and the fixture can be adjusted by a slide rail, and the bottom of the wafer is supported by phenolic plastic, which can play a good insulation role, and can make the wafer placement more stable.

To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a multifunctional fixture for magnetic grinding of wafer materials, which includes a base 1, a fixed aluminum block 2, a slide rail 3, a first V-shaped clamp 4 and a second V-shaped clamp 5. A fixed aluminum block 2 is arranged on all sides of the top of the base 1, and a slide rail 3 is arranged through the inside of the fixed aluminum block 2. The first V-shaped clamp 4 is arranged on the left side of the top of the slide rail 3, and the second V-shaped clamp 5 is arranged on the right side of the top of the slide rail 3; a plurality of support columns 6 are arranged above the base, and phenolic plastic 7 is arranged on the top of the support columns 6.

The slide rail 3 includes a slider 31, a first slide bar 32, and a second slide bar 33. A slider 31 is disposed at the bottom of each of the first V-shaped clamp 4 and the second V-shaped clamp 5. The first slide bar 32 is disposed above the two sliders 31, and the second slide bar 33 is disposed below the two sliders 31. Placing the wafer on the top of the phenolic plastic can play a supporting role; adjusting the two sliders 31 can adjust the distance between the first V-shaped clamp 4 and the second V-shaped clamp 5, thereby clamping and fixing the wafer.

The top of the base 1 and the bottom of the fixing block 2 are fixed by a bolt group 11. The first slide bar 32 and the second slide bar 33 are passed through the fixing block 3 to make the slide rail 3 more stable when in use.

The first V-shaped clip 4 and the second V-shaped clip 5 are connected to the slider 31 and fixed by a plurality of first bolts 41. The first bolts 41 penetrate the first V-shaped clip 4 and the second V-shaped clip 5 and are fixedly connected to the slider 31 to ensure that they will not loosen during use.

A plurality of second bolts 12 are arranged above the base 1. The second bolts 12 can mount the base 1 on other equipment, thereby achieving refined processing.

The left sides of the first slide bar 32 and the second slide bar 33 penetrate the fixed aluminum block 2 and are fixedly connected by a nut 321. The nut 321 is sleeved on the left side of the slide rail 3 and is rotated and tightened.

The working principle of the utility model: when in use, the nuts on the right side of the first slide bar and the second slide bar are rotated and tightened to fix the first slide bar and the second slide bar with the left slide bar. The bolt group is inserted into the slide bar from top to bottom, and the slide bar can be firmly fixed on the top of the base. The base is fixed on the wafer grinding equipment and fixed by the second bolt. The wafer is placed on the top of the phenolic plastic, the distance between the two slide bars is adjusted, and the displacement is performed by the slide bar. The first V-shaped clip and the second V-shaped clip are inserted and fixed by the first bolt, and the bottom of the first bolt is connected to the slide bar. The two slide bars are adjusted to move the first V-shaped clip and the second V-shaped clip, so that the first V-shaped clip and the second V-shaped clip are kept in contact with the wafer, and the first V-shaped clip and the second V-shaped clip are used to tighten the workpiece, and the fixture is adjusted according to the workpiece for processing.

After adopting the above technical scheme, the beneficial effects of the utility model are as follows: a slider is arranged at the bottom of the first V-shaped clamp and the second V-shaped clamp, the first slide bar passes through the top of the slider, and the second slide bar passes through the bottom of the slider, and the first V-shaped clamp and the second V-shaped clamp are used to tighten the wafer workpiece; phenolic plastic has high mechanical strength and excellent insulation, and can maintain stable performance in high temperature, humid and corrosive environment.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

Fig. 1 is a front view of the utility model;

FIG2 is a top view of FIG1;

FIG. 3 is a left side view of FIG. 1 .

Explanation of the reference numerals: 1. base; 2. fixed aluminum block; 3. slide rail; 4. first V-shaped clip; 5. second V-shaped clip; 6. support column; 7. phenolic plastic; 11. bolt group; 12. second bolt; 31. slider; 32. first slide rod; 33. second slide rod; 41. first bolt; 321. nut.

Detailed ways

Referring to FIGS. 1-3 , the technical solution adopted in this specific embodiment is: a multifunctional fixture for magnetic grinding of wafer materials, which includes a base 1, a fixed aluminum block 2 is arranged around the top of the base 1, and a bolt group 11 is arranged on the top of the fixed aluminum block 2 to fix the fixed aluminum block 2 to the base 1. A first slide bar 32 and a second slide bar 33 are arranged inside the fixed aluminum block 2, and a nut 321 is arranged on the right side of the first slide bar 32 and the second slide bar 33, so that the first slide bar 32 and the second slide bar 33 are more firmly connected to the fixed aluminum block 2. The first slide bar 32 passes through the top of the two sliders 31, and the second slide bar 33 passes through the bottom of the two sliders 31. A first V-shaped clip 4 is arranged on the top of the left slider 31, and a second V-shaped clip 5 is arranged on the top of the right slider 31. The two sliders 31 can slide left and right on the first slide bar 32 and the second slide bar 33. By adjusting the position of the slider 31, the distance between the first V-shaped clip 4 and the second V-shaped clip 5 can be adjusted at the same time. The top of the base 1 is provided with a plurality of support columns 6, and the top of the support columns 6 is provided with phenolic plastic 7, which has high mechanical strength, good insulation effect, and is resistant to high temperature, moisture and corrosion. The top of the base 1 is provided with a plurality of second bolts 12.

When in use, first fix the base 1 on the grinding device by the second bolt 12, adjust the nut 321 on the left side of the first slide bar 32 and the second slide bar 33, so that the nut 321 and the fixed aluminum block 2 remain in a tightened state. Place the wafer on the top of the phenolic plastic 7, adjust the distance between the first V-shaped clamp 4 and the second V-shaped clamp 5 by the two sliders 31 set on the top of the first slide bar 32 and the second slide bar 33, and keep them in close contact with the wafer workpiece, and adjust the first V-shaped clamp 4 and the second V-shaped clamp 5 at any time according to the size of the wafer workpiece. The phenolic plastic 7 supports the wafer workpiece.

The materials used for the clamp are mostly 303 stainless steel and aluminum blocks. The first V-shaped clamp 4, the second V-shaped clamp 5, the first slide bar 32 and the second slide bar 33 are made of 303 stainless steel, which has good hardness and is not easy to rust.

The above description is only used to illustrate the technical solution of the utility model rather than to limit it. Other modifications or equivalent substitutions made to the technical solution of the utility model by ordinary technicians in this field should be included in the scope of the claims of the utility model as long as they do not depart from the spirit and scope of the technical solution of the utility model.

Claims (6)

1. A multifunctional clamp for magnetic grinding of wafer materials is characterized in that: the novel aluminum alloy seat comprises a base (1), fixed aluminum blocks (2), sliding rails (3), first V-shaped clamping pieces (4) and second V-shaped clamping pieces (5), wherein the fixed aluminum blocks (2) are arranged around the top of the base (1), the sliding rails (3) are arranged in the fixed aluminum blocks (2) in a penetrating mode, the first V-shaped clamping pieces (4) are arranged on the left side of the top of the sliding rails (3), and the second V-shaped clamping pieces (5) are arranged on the right side of the top of the sliding rails (3); a plurality of support columns (6) are arranged above the base, and phenolic plastics (7) are arranged at the tops of the support columns (6).

2. The multifunctional fixture for magnetic grinding of wafer materials according to claim 1, wherein: the sliding rail (3) comprises sliding blocks (31), first sliding rods (32) and second sliding rods (33), one sliding block (31) is arranged at the bottoms of the first V-shaped clamping piece (4) and the second V-shaped clamping piece (5), the first sliding rods (32) are arranged above the two sliding blocks (31) in a penetrating mode, and the second sliding rods (33) are arranged below the two sliding blocks (31).

3. The multifunctional fixture for magnetic grinding of wafer materials according to claim 1, wherein: the top of the base (1) and the bottom of the fixed aluminum block (2) are fixed through a bolt group (11).

4. The multifunctional fixture for magnetic grinding of wafer materials according to claim 1, wherein: the first V-shaped clamping piece (4) and the second V-shaped clamping piece (5) are connected with the sliding block (31) and are fixed in a penetrating mode through a plurality of first bolts (41).

5. The multifunctional fixture for magnetic grinding of wafer materials according to claim 1, wherein: a plurality of second bolts (12) are arranged above the base (1).

6. The multifunctional fixture for magnetic grinding of wafer materials according to claim 2, wherein: the left sides of the first sliding rod (32) and the second sliding rod (33) penetrate through the fixed aluminum block (2) and are fixedly connected through nuts (321).