CN221065876U - Multifunctional clamp for magnetic grinding of wafer materials - Google Patents
Multifunctional clamp for magnetic grinding of wafer materials Download PDFInfo
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- CN221065876U CN221065876U CN202322770192.1U CN202322770192U CN221065876U CN 221065876 U CN221065876 U CN 221065876U CN 202322770192 U CN202322770192 U CN 202322770192U CN 221065876 U CN221065876 U CN 221065876U
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- 239000000463 material Substances 0.000 title claims abstract description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 20
- 229920001568 phenolic resin Polymers 0.000 claims abstract description 12
- 230000000149 penetrating effect Effects 0.000 claims 3
- 229910000838 Al alloy Inorganic materials 0.000 claims 1
- 238000009413 insulation Methods 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 33
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000013078 crystal Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 101001121408 Homo sapiens L-amino-acid oxidase Proteins 0.000 description 1
- 102100026388 L-amino-acid oxidase Human genes 0.000 description 1
- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
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- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
一种晶圆材料磁力研磨的多功能夹具,它涉及芯片晶圆加工技术领域,尤其涉及一种晶圆材料磁力研磨的多功能夹具。它包括底座、固定铝块、滑轨、第一V形夹片和第二V形夹片,底座顶部四周均设置有一个固定铝块,固定铝块内部贯穿设置有滑轨,滑轨顶部左侧设置有第一V形夹片,滑轨顶部右侧设置有第二V形夹片;所述底座上方设置有多个支撑柱,支撑柱顶部设置有酚醛塑料。第一V形夹片和第二V形夹片底部均设置有一个滑块,滑块上方贯穿第一滑杆,滑块下方贯穿第二滑杆,利用第一V形夹片和第二V形夹片对晶圆工件加紧;酚醛塑料,有着较高的机械强度、优良的绝缘性,可以在高温潮湿、腐蚀的环境中保持着稳定性能。
A multifunctional fixture for magnetic grinding of wafer materials, it relates to the technical field of chip wafer processing, and in particular to a multifunctional fixture for magnetic grinding of wafer materials. It includes a base, a fixed aluminum block, a slide rail, a first V-shaped clamp and a second V-shaped clamp. A fixed aluminum block is arranged around the top of the base, and a slide rail is arranged inside the fixed aluminum block. A first V-shaped clamp is arranged on the left side of the top of the slide rail, and a second V-shaped clamp is arranged on the right side of the top of the slide rail; a plurality of support columns are arranged above the base, and phenolic plastic is arranged on the top of the support column. A slider is arranged at the bottom of the first V-shaped clamp and the second V-shaped clamp, a first slide rod is passed through the top of the slider, and a second slide rod is passed through the bottom of the slider, and the first V-shaped clamp and the second V-shaped clamp are used to tighten the wafer workpiece; phenolic plastic has high mechanical strength and excellent insulation, and can maintain stable performance in a high temperature, humid and corrosive environment.
Description
技术领域Technical Field
本实用新型涉及芯片晶圆加工技术领域,尤其涉及一种晶圆材料磁力研磨的多功能夹具。The utility model relates to the technical field of chip wafer processing, in particular to a multifunctional clamp for magnetic grinding of wafer materials.
背景技术Background technique
晶圆是指制作硅半导体电路所用的硅晶片,其原始材料是硅。高纯度的多晶硅溶解后掺入硅晶体晶种,然后慢慢拉出,形成圆柱形的单晶硅。硅晶棒在经过研磨,抛光,切片后,形成硅晶圆片,也就是晶圆。国内晶圆生产线以8英寸和12英寸为主。晶圆的主要加工方式为片加工和批加工,即同时加工1片或多片晶圆。随着半导体特征尺寸越来越小,加工及测量设备越来越先进,使得晶圆加工出现了新的数据特点。同时,特征尺寸的减小,使得晶圆加工时,空气中的颗粒数对晶圆加工后质量及可靠性的影响增大,而随着洁净的提高,颗粒数也出现了新的数据特点。Wafer refers to the silicon wafer used to make silicon semiconductor circuits, and its original material is silicon. After high-purity polycrystalline silicon is dissolved, silicon crystal seeds are added, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing, and slicing, the silicon crystal rod is formed into a silicon wafer, that is, a wafer. Domestic wafer production lines are mainly 8 inches and 12 inches. The main processing methods of wafers are sheet processing and batch processing, that is, processing one or more wafers at the same time. As the feature size of semiconductors becomes smaller and smaller, and the processing and measurement equipment becomes more and more advanced, new data characteristics have emerged in wafer processing. At the same time, the reduction in feature size increases the impact of the number of particles in the air on the quality and reliability of the wafer after processing during wafer processing, and as the cleanliness improves, the number of particles also has new data characteristics.
市面上常用夹具有四爪卡盘、吸盘等,夹紧力大,缺点是找正比较费时,由于晶圆的背面不是抛光面而是磨砂面,为了确保颗粒性能,晶圆需要进行双面抛光工艺。如果不对晶圆进行双面抛光工艺,在多晶硅背封等处理之后,由于颗粒容易在粗糙面吸附,而常规的晶圆清洗工艺不易去除这类吸附的颗粒缺陷,颗粒会在晶圆的背面滞留。固定式安装不方便调整晶圆工件的位置,进而影响芯片的良率。Commonly used fixtures on the market include four-claw chucks, suction cups, etc., which have strong clamping force, but the disadvantage is that alignment is time-consuming. Since the back of the wafer is not polished but frosted, in order to ensure the performance of the particles, the wafer needs to be double-sided polished. If the wafer is not double-sided polished, after the polysilicon back seal and other treatments, the particles are easily adsorbed on the rough surface, and the conventional wafer cleaning process is not easy to remove such adsorbed particle defects, so the particles will be retained on the back of the wafer. Fixed installation is not convenient for adjusting the position of the wafer workpiece, which in turn affects the yield of the chip.
实用新型内容Utility Model Content
本实用新型的目的在于针对现有技术的缺陷和不足,提供一种晶圆材料磁力研磨的多功能夹具,设计了利用第一V形夹片和第二V形夹片来加紧工件,并通过滑轨可调节夹具,晶圆底部通过酚醛塑料支撑,能够起到很好的绝缘性。能够使晶圆放置更加稳定。The purpose of the utility model is to provide a multifunctional fixture for magnetic grinding of wafer materials in view of the defects and shortcomings of the prior art, which is designed to use a first V-shaped clamp and a second V-shaped clamp to tighten the workpiece, and the fixture can be adjusted by a slide rail, and the bottom of the wafer is supported by phenolic plastic, which can play a good insulation role, and can make the wafer placement more stable.
为实现上述目的,本实用新型采用以下技术方案是:一种晶圆材料磁力研磨的多功能夹具,它包括底座1、固定铝块2、滑轨3、第一V形夹片4和第二V形夹片5,底座1顶部四周均设置有一个固定铝块2,固定铝块2内部贯穿设置有滑轨3,滑轨3顶部左侧设置有第一V形夹片4,滑轨3顶部右侧设置有第二V形夹片5;所述底座上方设置有多个支撑柱6,支撑柱6顶部设置有酚醛塑料7。To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a multifunctional fixture for magnetic grinding of wafer materials, which includes a base 1, a fixed aluminum block 2, a slide rail 3, a first V-shaped clamp 4 and a second V-shaped clamp 5. A fixed aluminum block 2 is arranged on all sides of the top of the base 1, and a slide rail 3 is arranged through the inside of the fixed aluminum block 2. The first V-shaped clamp 4 is arranged on the left side of the top of the slide rail 3, and the second V-shaped clamp 5 is arranged on the right side of the top of the slide rail 3; a plurality of support columns 6 are arranged above the base, and phenolic plastic 7 is arranged on the top of the support columns 6.
所述滑轨3包括滑块31、第一滑杆32和第二滑杆33,第一V形夹片4和第二V形夹片5底部均设置有一个滑块31,两个滑块31上方贯穿设置第一滑杆32,两个滑块31下方设置有第二滑杆33。将晶圆放置在酚醛塑料顶部,能够起到支撑作用;调整两个滑块31,能够将第一V形夹片4和第二V形夹片5之间的距离,从而对晶圆进行夹紧固定。The slide rail 3 includes a slider 31, a first slide bar 32, and a second slide bar 33. A slider 31 is disposed at the bottom of each of the first V-shaped clamp 4 and the second V-shaped clamp 5. The first slide bar 32 is disposed above the two sliders 31, and the second slide bar 33 is disposed below the two sliders 31. Placing the wafer on the top of the phenolic plastic can play a supporting role; adjusting the two sliders 31 can adjust the distance between the first V-shaped clamp 4 and the second V-shaped clamp 5, thereby clamping and fixing the wafer.
所述底座1的顶部和固定块2的底部通过螺栓组11固定。固定块3内部贯穿第一滑杆32和第二滑杆33,目的是为了使滑轨3在使用时更加稳定。The top of the base 1 and the bottom of the fixing block 2 are fixed by a bolt group 11. The first slide bar 32 and the second slide bar 33 are passed through the fixing block 3 to make the slide rail 3 more stable when in use.
所述第一V形夹片4和第二V形夹片5与滑块31连接,并通过多个第一螺栓41穿插固定。第一螺栓41贯穿第一V形夹片4和第二V形夹片5,并与滑块31固定连接,保证使用时不会产生松动。The first V-shaped clip 4 and the second V-shaped clip 5 are connected to the slider 31 and fixed by a plurality of first bolts 41. The first bolts 41 penetrate the first V-shaped clip 4 and the second V-shaped clip 5 and are fixedly connected to the slider 31 to ensure that they will not loosen during use.
所述底座1上方设置有多个第二螺栓12。第二螺栓12能够将底座1与安装在其它设备上,从而实现精细化加工。A plurality of second bolts 12 are arranged above the base 1. The second bolts 12 can mount the base 1 on other equipment, thereby achieving refined processing.
所述第一滑杆32和第二滑杆33左侧贯穿固定铝块2,并通过螺母321固定连接。螺母321套接在滑轨3左侧,并旋转拧紧。The left sides of the first slide bar 32 and the second slide bar 33 penetrate the fixed aluminum block 2 and are fixedly connected by a nut 321. The nut 321 is sleeved on the left side of the slide rail 3 and is rotated and tightened.
本实用新型的工作原理:使用时,将第一滑杆和第二滑杆右侧的螺母旋转拧紧,使第一滑杆和第二滑杆与左侧滑块进行固定连接。螺栓组从上往下插接于滑块,能够将滑块牢牢的固定在底座的顶端。将底座固定在晶圆打磨设备上,并通过第二螺栓固定。将晶圆放置在酚醛塑料的顶部,调整两个滑块之间的距离,通过滑杆进行移位。第一V形夹片和第二V形夹片通过第一螺栓贯穿插固定,第一螺栓底部与滑块连接。调整两个滑块移动第一V形夹片和第二V形夹片,使第一V形夹片和第二V形夹片与晶圆保持贴合,利用第一V形夹片和第二V形夹片来加紧工件,根据工件调节夹具,进行加工。The working principle of the utility model: when in use, the nuts on the right side of the first slide bar and the second slide bar are rotated and tightened to fix the first slide bar and the second slide bar with the left slide bar. The bolt group is inserted into the slide bar from top to bottom, and the slide bar can be firmly fixed on the top of the base. The base is fixed on the wafer grinding equipment and fixed by the second bolt. The wafer is placed on the top of the phenolic plastic, the distance between the two slide bars is adjusted, and the displacement is performed by the slide bar. The first V-shaped clip and the second V-shaped clip are inserted and fixed by the first bolt, and the bottom of the first bolt is connected to the slide bar. The two slide bars are adjusted to move the first V-shaped clip and the second V-shaped clip, so that the first V-shaped clip and the second V-shaped clip are kept in contact with the wafer, and the first V-shaped clip and the second V-shaped clip are used to tighten the workpiece, and the fixture is adjusted according to the workpiece for processing.
采用上述技术方案后,本实用新型有益效果为:第一V形夹片和第二V形夹片底部均设置有一个滑块,滑块上方贯穿第一滑杆,滑块下方贯穿第二滑杆,利用第一V形夹片和第二V形夹片对晶圆工件加紧;酚醛塑料,有着较高的机械强度、优良的绝缘性,可以在高温潮湿、腐蚀的环境中保持着稳定性能。After adopting the above technical scheme, the beneficial effects of the utility model are as follows: a slider is arranged at the bottom of the first V-shaped clamp and the second V-shaped clamp, the first slide bar passes through the top of the slider, and the second slide bar passes through the bottom of the slider, and the first V-shaped clamp and the second V-shaped clamp are used to tighten the wafer workpiece; phenolic plastic has high mechanical strength and excellent insulation, and can maintain stable performance in high temperature, humid and corrosive environment.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
为了更清楚地说明本实用新型实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本实用新型的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动性的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.
图1是本实用新型的主视图;Fig. 1 is a front view of the utility model;
图2是图1的俯视图;FIG2 is a top view of FIG1;
图3是图1的左视图。FIG. 3 is a left side view of FIG. 1 .
附图标记说明:1、底座;2、固定铝块;3、滑轨;4、第一V形夹片;5、第二V形夹片;6、支撑柱;7、酚醛塑料;11、螺栓组;12、第二螺栓;31、滑块;32、第一滑杆;33、第二滑杆;41、第一螺栓;321、螺母。Explanation of the reference numerals: 1. base; 2. fixed aluminum block; 3. slide rail; 4. first V-shaped clip; 5. second V-shaped clip; 6. support column; 7. phenolic plastic; 11. bolt group; 12. second bolt; 31. slider; 32. first slide rod; 33. second slide rod; 41. first bolt; 321. nut.
具体实施方式Detailed ways
参看图1-3所示,本具体实施方式采用的技术方案是:一种晶圆材料磁力研磨的多功能夹具,它包括底座1,底座1顶部四周均设置有一个固定铝块2,固定铝块2顶部贯穿设置有螺栓组11,是固定铝块2与底座1固定连接。固定铝块2内部贯穿设置有第一滑杆32和第二滑杆33,第一滑杆32和第二滑杆33右侧均设置有一个螺母321,使第一滑杆32和第二滑杆33在与固定铝块2连接时更加牢固。第一滑杆32贯穿两个滑块31的的上方,第二滑杆33贯穿两个的滑块31的下方,左侧滑块31顶部设置有第一V形夹片4,右侧滑块31顶部设置有第二V形夹片5。两个滑块31能够在第一滑杆滑杆32和第二滑杆33左右滑动,通过调整滑块31的位置,能够同时调整第一V形夹片4和第二V形夹片5之间的距离。底座1顶部设置有多个支撑柱6,支撑柱6的顶部设置有酚醛塑料7,酚醛塑料7机械强度高,具有良好的绝缘效果,具有耐高温、防潮、防腐蚀的特点。底座1顶部贯穿设置有多个第二螺栓12。Referring to FIGS. 1-3 , the technical solution adopted in this specific embodiment is: a multifunctional fixture for magnetic grinding of wafer materials, which includes a base 1, a fixed aluminum block 2 is arranged around the top of the base 1, and a bolt group 11 is arranged on the top of the fixed aluminum block 2 to fix the fixed aluminum block 2 to the base 1. A first slide bar 32 and a second slide bar 33 are arranged inside the fixed aluminum block 2, and a nut 321 is arranged on the right side of the first slide bar 32 and the second slide bar 33, so that the first slide bar 32 and the second slide bar 33 are more firmly connected to the fixed aluminum block 2. The first slide bar 32 passes through the top of the two sliders 31, and the second slide bar 33 passes through the bottom of the two sliders 31. A first V-shaped clip 4 is arranged on the top of the left slider 31, and a second V-shaped clip 5 is arranged on the top of the right slider 31. The two sliders 31 can slide left and right on the first slide bar 32 and the second slide bar 33. By adjusting the position of the slider 31, the distance between the first V-shaped clip 4 and the second V-shaped clip 5 can be adjusted at the same time. The top of the base 1 is provided with a plurality of support columns 6, and the top of the support columns 6 is provided with phenolic plastic 7, which has high mechanical strength, good insulation effect, and is resistant to high temperature, moisture and corrosion. The top of the base 1 is provided with a plurality of second bolts 12.
使用时,首先通过第二螺栓12将底座1固定在研磨设备上,调整第一滑杆32和第二滑杆33左侧的螺母321,使螺母321与固定铝块2保持拧紧状态。将晶圆放置在酚醛塑料7的顶部,通过第一滑杆32和第二滑杆33顶部设置的两个滑块31,调整第一V形夹片4和第二V形夹片5之间的距离,并与晶圆工件保持贴合固定,根据放置晶圆工件的大小随时调整第一V形夹片4和第二V形夹片5。酚醛塑料7对晶圆工件起到支撑的作用。When in use, first fix the base 1 on the grinding device by the second bolt 12, adjust the nut 321 on the left side of the first slide bar 32 and the second slide bar 33, so that the nut 321 and the fixed aluminum block 2 remain in a tightened state. Place the wafer on the top of the phenolic plastic 7, adjust the distance between the first V-shaped clamp 4 and the second V-shaped clamp 5 by the two sliders 31 set on the top of the first slide bar 32 and the second slide bar 33, and keep them in close contact with the wafer workpiece, and adjust the first V-shaped clamp 4 and the second V-shaped clamp 5 at any time according to the size of the wafer workpiece. The phenolic plastic 7 supports the wafer workpiece.
夹具所使用的材料大部分为303不锈钢与铝块。第一V形夹片4、第二V形夹片5、第一滑杆32和第二滑杆33采用303不锈钢,有着较好的硬度同时具有不易生锈的特点。The materials used for the clamp are mostly 303 stainless steel and aluminum blocks. The first V-shaped clamp 4, the second V-shaped clamp 5, the first slide bar 32 and the second slide bar 33 are made of 303 stainless steel, which has good hardness and is not easy to rust.
以上所述,仅用以说明本实用新型的技术方案而非限制,本领域普通技术人员对本实用新型的技术方案所做的其它修改或者等同替换,只要不脱离本实用新型技术方案的精神和范围,均应涵盖在本实用新型的权利要求范围当中。The above description is only used to illustrate the technical solution of the utility model rather than to limit it. Other modifications or equivalent substitutions made to the technical solution of the utility model by ordinary technicians in this field should be included in the scope of the claims of the utility model as long as they do not depart from the spirit and scope of the technical solution of the utility model.
Claims (6)
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